CN109412535A - A kind of efficient 170GHz frequency tripler - Google Patents
A kind of efficient 170GHz frequency tripler Download PDFInfo
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- CN109412535A CN109412535A CN201811511489.3A CN201811511489A CN109412535A CN 109412535 A CN109412535 A CN 109412535A CN 201811511489 A CN201811511489 A CN 201811511489A CN 109412535 A CN109412535 A CN 109412535A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B19/00—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source
- H03B19/05—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source using non-linear capacitance, e.g. varactor diodes
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B19/00—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source
- H03B19/16—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source using uncontrolled rectifying devices, e.g. rectifying diodes or Schottky diodes
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Abstract
The invention discloses a kind of efficient 170GHz frequency triplers, including direct current input and filter and sequentially connected input waveguide, local oscillator waveguide transition, local oscillator filter, diode input matching, Schottky variable capacitance diode, diode output matching, radio-frequency plumbing transition and output waveguide;Wherein, the direct current input and filter use Rogers5880 substrate, and remaining circuit uses quartz substrate, and the direct current input and filter are connected by gold wire bonding with quartz substrate, and on-position is between the local oscillator waveguide transition and local oscillator filter.The present invention realizes 170GHz Terahertz frequency tripler using capacitive diode, for the existing realization frequency multiplier using resistive diode, it is more efficient, power capacity is bigger, the terahertz signal that higher power can be exported under same driving power enables rear class Terahertz frequency mixer preferably to work.
Description
Technical field
The present invention relates to Terahertz Technology fields, and in particular to a kind of high-frequency 170GHz frequency tripler.
Background technique
Terahertz (THz) wave refers to electromagnetism of the frequency in 0.1THz~10THz (wavelength is 3 millimeters~30 microns) range
Wave.It is the important member in electromagnetic spectrum family, between infrared waves and microwave, long-wave band and millimeter wave submillimeter
Wave coincides, and short-wave band coincides with infrared ray, basic theory, biology barrier also with two microwave, light wave subjects
Field is mutually linked and is compatible with, and is last century end and the beginning of this century develops rapidly and the comprehensive branch of learning point that is formed
Branch.Terahertz Technology has very high knowledge-intensive property and technology-intensive property, is the development that modern high technology promotes it, it
Research achievement and technology be again the subjects such as modern physics, information science, microelectronics, material science, astronomy, medicine
New important research means are provided, promote the development of these subjects again in turn.
The application of Terahertz Technology is summarized as follows:
(1) there are abundant informations in Terahertz frequency range for cosmic background radiation, so that Terahertz spectrum technology becomes astronomy
One of the important means of research.Such as by studying the Terahertz frequency range spectral characteristic of cold molecular cloud, the origin in universe can be probed into;
The spectrum information for analyzing cosmic background can study the structure of matter composition apart from our far-out newborn galaxies, and its empty
Between distributed intelligence.
(2) for the typical pulse-widths of terahertz pulse in picosecond magnitude, typical case is that sampling technique and precise time offer an explanation skill
Art;In addition, because of the high several orders of magnitude of the distant infrared frequency pulse signal-to-noise ratio of terahertz pulse noise, therefore it is easily distinguishable, have
Effect inhibits the interference of far infrared ambient noise.
(3) vibration of large biological molecule and rotational energy level radiation, and most semiconductors, superconductor and Special Film material
Expect that its phonon vibration energy level radiation frequency is in terahertz wave band, therefore is based on time-domain spectroscopic technology, it can be fixed in Terahertz frequency range
Property identify material.
(4) Terahertz photon energy is low, it is not easy to radiation effect (for a few milli electron-volt orders of magnitude) is caused to detectable substance,
Therefore Terahertz detection, which compares the detection modes such as traditional X-ray, can realize human body nodestructive testing;In addition, Terahertz Technology can be made
Hiding article such as firearms, explosion are detected for the safety monitoring in the places such as airport, station for the supplement of traditional X-ray examination
Object and drugs etc..Compared with traditional mm-wave imaging technology, the resolution ratio of terahertz imaging is significantly increased.
(5) decaying is smaller when THz wave penetrating component is nonmetallic or non-polar material, in conjunction with the relevant technologies, it can be achieved that material
Expect internal terahertz imaging detection.
Since there are atmospheric transmission windows for THz frequency range, as shown in Fig. 2, therefore THz carrier frequency can be used in using higher bit
The communication system of rate transmission technology.
The Terahertz frequency source of high-quality is the key that Terahertz system and application;Room temperature solid-state THz continuous wave source is
Terahertz radar system, communication system, the important component of radiometer system at present;Its performance is largely fixed
The performance of system.Terahertz system generallys use sub-harmonic mixer, has bigger want to the output power of frequency source
It asks.
Traditional Terahertz Design of frequency multiplier often uses resistive diode, although the diode of this form can obtain it is larger
Bandwidth, but due to diode self character, higher shg efficiency can not be obtained;Simultaneously by diode function
The influence of rate capacity is subject to certain restrictions with the frequency multiplier driving power of resistive diode design, is had to prime driving power
Bigger requirement, and since output power is lower, also there are more requirements to the Terahertz mixer design of rear class.With change
Hold the Terahertz frequency multiplier of pipe design, it is defeated due to being mainly used as a times frequency source although relatively narrow compared to resistive tube bandwidth of operation
Out be simple signal, influence smaller, and the efficiency of varactor frequency multiplier can be promoted greatly, the driving function of one side prime
Rate can be smaller, and another aspect postscript Design of frequency multiplier can also be more calm.
Existing 170GHz frequency source has two kinds of implementations of two frequencys multiplication and frequency tripling.Two frequency multiplication schemes are using 85GHz frequency
Driving source of the rate source as frequency multiplier generates the output of two frequency-doubled signals, this scheme effect by resistive diode nonlinear effect
Rate is higher, but the driving source frequency of demand is also higher.Frequency tripling scheme uses driving of the V-band frequency member as frequency multiplier
Source, technology is more mature, but the characteristic of resistive diode limits its efficiency and output power.
Summary of the invention
In order to overcome limitation existing for existing 170GHz frequency source realization technology, the present invention provides a kind of high efficiency
170GHz frequency tripler.
The present invention is achieved through the following technical solutions:
A kind of efficient 170GHz frequency tripler, including direct current input and filter and sequentially connected incoming wave
It leads, local oscillator waveguide transition, local oscillator filter, diode input matching, Schottky variable capacitance diode, diode output matching, penetrate
Frequency waveguide transition and output waveguide;Wherein, the direct current input and filter use Rogers5880 substrate, sequentially connected
Local oscillator waveguide transition, local oscillator filter, diode input matching, Schottky variable capacitance diode, diode output matching, radio frequency
Waveguide transition circuit uses quartz substrate, and the direct current input and filter are connected with quartz substrate by gold wire bonding, are connect
Enter position between the local oscillator waveguide transition and local oscillator filter.
Preferably, V-band driving signal enters quartz substrate by input waveguide and local oscillator waveguide transition, successively passes through local oscillator
Filter and diode input matching circuit enter Schottky variable capacitance diode and generate higher hamonic wave, and local oscillator filter makes two
Secondary or more harmonic wave can not all return to the input waveguide of circuit, and output waveguide subtracts wide waveguide using subtracting height, for matching and
Cut-off second harmonic enters in output waveguide;Filter in the direct current input and filter is used to prevent the V-band of input
Driving signal enters Rogers5880 substrate from quartz substrate.
Preferably, the radio-frequency plumbing transition uses the form of probe transitions, which leads to microstrip probe
It crosses in the hole insertion output wave guide cavity at waveguide broadside center, plays the probe of coupling the signal in microstrip line by one section
Energy coupling is into waveguide.
Preferably, local oscillator duplexer, V are constituted by local oscillator waveguide transition, direct current input and filter and local oscillator filter
Wave band driving signal is coupled on quartz substrate by local oscillator waveguide transition, and the direct current input and filter provide DC bias, DC
Bias is inputted by sub-miniature A connector, enters quartz substrate by spun gold, during the filter in the direct current input and filter uses
Frequency low-pass filter, the local oscillator filter use local oscillator low-pass filter, and two filters are all made of high low-impedance line knot
Structure.
Preferably, the frequency tripler is placed in parallel in quartzy micro-strip using two panels Schottky variable capacitance diode tube core in the same direction
On line, tube core cathode side ground connection is adhesive on cavity by conduction, forms radiofrequency signal circuit, while also giving direct current biasing
Signal provides circuit.
Preferably, monolithic Schottky variable capacitance diode tube core includes three concatenated diodes.
Preferably, the direct current input and filter use the Rogers5880 substrate of 0.127mm, and the quartz substrate is
The quartz substrate of 50um, the input waveguide use waveguide WR15, and the output waveguide uses waveguide WR5.
It preferably, further include the metal cavity for placing circuit.
The present invention has the advantage that and the utility model has the advantages that
The present invention uses microstrip circuit structure, and easy to process and installation, being not easily susceptible to extraneous influence causes quartz substrate disconnected
It splits;The present invention realizes 170GHz Terahertz frequency tripler using capacitive diode, real using resistive diode compared to existing realization
For existing 170GHz Terahertz frequency multiplier, more efficient, power capacity is bigger, can export more under same driving power
High-power terahertz signal enables rear class Terahertz frequency mixer preferably to work.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes one of the application
Point, do not constitute the restriction to the embodiment of the present invention.In the accompanying drawings:
Fig. 1 is Terahertz frequency tripler integrated circuit structure chart of the invention.
Fig. 2 is radio-frequency plumbing transition circuit structure chart of the invention.
Fig. 3 is radio frequency transition simulation result diagram of the invention.
Fig. 4 is local oscillator duplexer circuit structure chart of the invention.
Fig. 5 is local oscillator duplexer simulation result diagram of the invention.
Fig. 6 is the Schottky variable capacitance diode package drawing that the present invention uses.
Fig. 7 is Schottky variable capacitance diode circuit structure diagram of the invention.
Fig. 8 is frequency multiplier simulation result diagram of the invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below with reference to embodiment and attached drawing, to this
Invention is described in further detail, and exemplary embodiment of the invention and its explanation for explaining only the invention, are not made
For limitation of the invention.
Embodiment
As shown in Figure 1, present embodiments providing a kind of efficient 170GHz frequency tripler, the quartzy base including 50um
Piece, the Rogers5880 substrate of 0.127mm and the metal cavity for placing circuit, structure is from left to right successively are as follows: input waveguide
1;Local oscillator waveguide transition 2;Direct current input and filter 3;Local oscillator filter 4;Diode input matching 5;Two pole of Schottky variable capacitance
Pipe 6;Diode output matching 7;Radio-frequency plumbing transition 8;Output waveguide 9;Wherein direct current input and filter 3 use 0.127mm
Rogers5880 substrate, remaining circuit use 50um quartz substrate, input waveguide 1 use waveguide WR15, output waveguide 9
Subtract wide waveguide WR5 using height is subtracted.Direct current input and filter 3 are connected into quartz substrate by the way of jumping spun gold.
V-band (40-75GHz) driving signal enters quartz substrate by input waveguide 1 and local oscillator waveguide transition 2, by this
Polarization filter 4 and input matching circuit 5 enter Schottky variable capacitance diode 6 and generate higher hamonic wave.Due to local oscillator filter 4
In the presence of, secondary or more harmonic wave can not all return to the left end of circuit, simultaneously because output subtracts the high presence for subtracting wide waveguide 9,
Second harmonic also cannot be introduced into output waveguide, cooperate both ends match circuit, and only triple-frequency harmonics can be exported from output waveguide.
Direct current input and filter 3 in DC filter main function be prevent input V-band driving signal from quartzy main circuit into
Enter Rogers5880 substrate.In order to which the processing is simple, two filters (local oscillator filter and DC filter) are all made of high Low ESR
Cable architecture.
Radio frequency transition uses the form of probe transitions, as shown in Figure 2.The radio-frequency plumbing transition 8 passes through microstrip probe defeated
Out in the paracentral hole insertion waveguide cavity of 9 width of waveguide, the probe of coupling is played the signal energy in microstrip line by one section
It is coupled in waveguide.The frequency tripling signal come out from diode is coupled in waveguide by probe, the shielding chamber size of microstrip line
By optimization, it is avoided that the appearance of waveguide mode.It is to match and enter by second harmonic that output waveguide 9, which subtracts height and subtracts width,
In waveguide.The simulation result of radio-frequency plumbing transition is as shown in figure 3, as seen from the figure in the frequency range of 160~180GHz
Interior, S11 is respectively less than -20dB, and second harmonic signal can not reach expected wave by microstrip coupled into output waveguide
Lead the effect of transition.
Local oscillator duplexer, such as Fig. 4 are constituted by local oscillator waveguide transition 2, direct current input and filter 3 and local oscillator filter 4
Shown, V-band driving signal is coupled on quartz substrate by local oscillator waveguide transition 2, and the direct current input and filter 3 are one
On the Rogers5880 substrate of piece 0.127mm, it is connected by gold wire bonding with quartz substrate, the direct current input and filter 3
In direct current input DC bias is provided, DC bias inputs by sub-miniature A connector, enters quartz substrate by spun gold, the direct current is defeated
Enter and filter 3 in DC filter using mid-frequency low-pass filter, local oscillation signal itself is difficult to enter Rogers5880 substrate,
By DC filter it is bigger increase its isolation.It is defeated that the effect of local oscillator filter 4 mainly prevents higher hamonic wave from returning to
Enter the waste that waveguide mouth causes energy.The local oscillator filter 4 uses local oscillator low-pass filter, and two filters are all made of height
The form of impedance line is easy to process.The simulation result of local oscillator duplexer is as shown in Figure 5, wherein in local oscillator 50-60GHz range
Interior, the clawback loss of local oscillator port is greater than -20dB;Local oscillator input waveguide (port 1) (is held to local oscillator first low pass filter output mouth
The Insertion Loss of mouth 2) is less than 0.3dB.Being isolated between local oscillator input waveguide (port 1) and medium frequency output end mouth (port 3) is greater than
40dB。
Very big shadow can be caused to its performance in the package dimension of Terahertz frequency range, the wavelength very little of electromagnetic wave, diode
It rings, therefore establish planar Schottky mixer tube 3D electromagnetic model to be necessary, according to common Terahertz diode skill
The three-dimensional diode package model that art is established is as shown in Figure 6.Two panels tube core is connected in parallel in the same direction on quartzy microstrip line, minus earth,
It is adhesive on cavity by conduction, the earth-return of direct current and radio frequency is provided.
Schottky variable capacitance diode utilizes the nonlinear characteristic of schottky junction capacitance-voltage, and varactor is carrying out again
What is played a major role when frequency is the capacitor with voltage change, so in frequency multiplication, its energy consumption is more compared to resistive diode
It is small.Shg efficiency in resistive diode theory is 1/n2, frequency multiplication frequency n is equal to 3 for frequency tripler, so theoretical
Maximum shg efficiency only has 11%, and the ideal maximum shg efficiency of varactor can achieve 100%.
Two panels tube core is placed in parallel in the same direction on quartzy microstrip line, monolithic die includes three concatenated diodes, such as
Shown in Fig. 7, six varactors are formed altogether, to obtain bigger power capacity.Tube core cathode side ground connection, by leading
Electricity is adhesive on cavity, forms radiofrequency signal circuit, while also providing circuit to DC bias signal.
By the simulation result of radio frequency transition, local oscillator duplexer, diode three-dimension packaging model in simulation software HFSS point
It SNP file and Dao Chu not import in simulation software ADS, construct S parameter in ADS by SNP file as appeal three
Multiport model, and be added diode simulation model and matching detail composition harmonic mixer whole simulation model, and
It is emulated using harmonic wave equilibrium method through row.The best match of impedance is realized by adjusting matching detail.Due to ADS simulation software
It is two-dimensional simulation software, is typically used in low frequency band.Simulation result in high-frequency band, in simulation result and HFSS
There is biggish error, therefore replaces original micro-strip detail using two two-port networks in the present invention.It will be set in HFSS
The matching detail simulation result counted exports NPN file as radio frequency transition and imports ADS, is in this way placed on matching detail
It is designed in HFSS, reduces simulation software bring design error, keep design result more accurate, simulation result such as Fig. 8 institute
Show, in 169GHz, shg efficiency has reached 18% it can be seen from simulation result, the shg efficiency in 166GHz-173GHz
Greater than 10%.
The efficiency for the frequency tripler realized compared to the prior art using resistive diode is lower, and power capacity is smaller, right
The requirement of prime driving power is larger, and is easy output and is not enough to drive rear class Terahertz harmonic mixer.The present embodiment uses
Capacitive diode design frequency multiplier reduces the demand of prime power, simultaneously to obtain higher shg efficiency and power capacity
Rear class frequency mixer can be made preferably to work.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not used to limit this hair the foregoing is merely a specific embodiment of the invention
Bright protection scope, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all
It is included within protection scope of the present invention.
Claims (8)
1. a kind of efficient 170GHz frequency tripler, which is characterized in that including direct current input and filter (3), and successively
The input waveguide (1) of connection, local oscillator waveguide transition (2), local oscillator filter (4), diode input matching (5), Schottky variable capacitance
Diode (6), diode output matching (7), radio-frequency plumbing transition (8) and output waveguide (9);Wherein, direct current input and
Filter (3) uses Rogers5880 substrate, and sequentially connected local oscillator waveguide transition (2), local oscillator filter (4), diode are defeated
Enter matching (5), Schottky variable capacitance diode (6), diode output matching (7), radio-frequency plumbing transition (8) circuit using quartzy base
Piece, the direct current input and filter (3) are connected by gold wire bonding with quartz substrate, and on-position is located at described vibration wave
It leads between transition (2) and local oscillator filter (4).
2. a kind of efficient 170GHz frequency tripler according to claim 1, which is characterized in that V-band driving signal
Quartz substrate is entered by input waveguide (1) and local oscillator waveguide transition (2), is successively inputted by local oscillator filter (4) and diode
Match circuit enters Schottky variable capacitance diode (6) and generates higher hamonic wave, and local oscillator filter (4) makes secondary or more harmonic wave
The input waveguide (1) of circuit can not be all returned to, output waveguide (9) use subtracts height and subtracts wide waveguide, secondary for matching and ending
Harmonic wave enters in output waveguide (9);Filter in the direct current input and filter (3) is used to prevent the V-band of input from driving
Dynamic signal enters Rogers5880 substrate from quartz substrate.
3. a kind of efficient 170GHz frequency tripler according to claim 1, which is characterized in that the radio-frequency plumbing
The form that (8) use probe transitions is crossed, which is inserted into microstrip probe by the hole at waveguide broadside center defeated
Out in waveguide (9) chamber, the probe for playing coupling by one section is coupled to the signal energy in microstrip line in waveguide.
4. a kind of efficient 170GHz frequency tripler according to claim 1, which is characterized in that by local oscillator waveguide transition
(2), direct current input and filter (3) and local oscillator filter (4) constitute local oscillator duplexer, and V-band driving signal is by this vibration wave
Transition (2) to be led to be coupled on quartz substrate, the direct current input and filter provide DC bias, and DC bias is inputted by sub-miniature A connector,
Entering quartz substrate by spun gold, the filter in the direct current input and filter uses mid-frequency low-pass filter, and described
Polarization filter uses local oscillator low-pass filter, and two filters are all made of high low-impedance line structure.
5. a kind of efficient 170GHz frequency tripler according to claim 1-4, which is characterized in that described three
Frequency multiplier is placed in parallel on quartzy microstrip line in the same direction using two panels Schottky variable capacitance diode tube core, and tube core cathode one flanks
Ground is adhesive on cavity by conduction, forms radiofrequency signal circuit, while also providing circuit to DC bias signal.
6. a kind of efficient 170GHz frequency tripler according to claim 5, which is characterized in that monolithic Schottky variable capacitance
Diode chip includes three concatenated diodes.
7. a kind of efficient 170GHz frequency tripler according to claim 5, which is characterized in that direct current input and
Filter (3) uses the Rogers5880 substrate of 0.127mm, and the quartz substrate is the quartz substrate of 50um, the incoming wave
(1) is led using waveguide WR15, the output waveguide (9) uses waveguide WR5.
8. a kind of efficient 170GHz frequency tripler according to claim 5, which is characterized in that further include placing circuit
Metal cavity.
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Cited By (6)
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CN109831169A (en) * | 2019-03-11 | 2019-05-31 | 电子科技大学 | Terahertz amplifier chip structure based on low-pass filter off-chip compensation |
CN109951158A (en) * | 2019-04-10 | 2019-06-28 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 6 pipe unbalanced Terahertz varactor doublers based on DC detecting |
CN110007206A (en) * | 2019-04-10 | 2019-07-12 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 4 pipe unbalanced Terahertz varactor doublers based on DC detecting |
CN110045261A (en) * | 2019-04-10 | 2019-07-23 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 6 pipe balanced type Terahertz frequency triplers based on DC detecting |
CN111154264A (en) * | 2020-01-06 | 2020-05-15 | 四川大学 | Flexible terahertz dynamic regulation and control material based on stress driving and preparation method thereof |
CN111384898A (en) * | 2020-04-07 | 2020-07-07 | 中国工程物理研究院电子工程研究所 | Multimode schottky frequency doubling structure |
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CN109831169A (en) * | 2019-03-11 | 2019-05-31 | 电子科技大学 | Terahertz amplifier chip structure based on low-pass filter off-chip compensation |
CN109831169B (en) * | 2019-03-11 | 2021-06-01 | 电子科技大学 | Terahertz amplifier chip structure based on low-pass filter off-chip compensation |
CN109951158A (en) * | 2019-04-10 | 2019-06-28 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 6 pipe unbalanced Terahertz varactor doublers based on DC detecting |
CN110007206A (en) * | 2019-04-10 | 2019-07-12 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 4 pipe unbalanced Terahertz varactor doublers based on DC detecting |
CN110045261A (en) * | 2019-04-10 | 2019-07-23 | 嘉兴腓特烈太赫科技有限公司 | The method for screening 6 pipe balanced type Terahertz frequency triplers based on DC detecting |
CN110007206B (en) * | 2019-04-10 | 2021-05-18 | 嘉兴腓特烈太赫科技有限公司 | Method for screening 4-tube unbalanced terahertz frequency doubler based on direct current detection |
CN110045261B (en) * | 2019-04-10 | 2021-08-03 | 嘉兴腓特烈太赫科技有限公司 | Method for screening 6-tube balanced terahertz frequency tripler based on direct current detection |
CN109951158B (en) * | 2019-04-10 | 2023-01-06 | 江苏心磁超导体有限公司 | Method for screening 6-tube unbalanced terahertz frequency doubler based on direct current detection |
CN111154264A (en) * | 2020-01-06 | 2020-05-15 | 四川大学 | Flexible terahertz dynamic regulation and control material based on stress driving and preparation method thereof |
CN111154264B (en) * | 2020-01-06 | 2021-03-19 | 四川大学 | Flexible terahertz dynamic regulation and control material based on stress driving and preparation method thereof |
CN111384898A (en) * | 2020-04-07 | 2020-07-07 | 中国工程物理研究院电子工程研究所 | Multimode schottky frequency doubling structure |
CN111384898B (en) * | 2020-04-07 | 2023-09-15 | 中国工程物理研究院电子工程研究所 | Multimode schottky frequency multiplication structure |
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