CN109407192A - A kind of method of adjustment and its system of optical grating graduating machine scribe line position optical path - Google Patents
A kind of method of adjustment and its system of optical grating graduating machine scribe line position optical path Download PDFInfo
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- CN109407192A CN109407192A CN201811414449.7A CN201811414449A CN109407192A CN 109407192 A CN109407192 A CN 109407192A CN 201811414449 A CN201811414449 A CN 201811414449A CN 109407192 A CN109407192 A CN 109407192A
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- laser
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- laser interferometer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
Abstract
The present invention relates to diffraction grating manufacture technology field, in particular to a kind of the method for adjustment and its system of optical grating graduating machine scribe line position optical path；Cross target is first mounted on the workbench of optical grating graduating machine by the present invention；Laser is installed again, and laser transmitting light beam is penetrated on cross target and carries out pose adjustment to laser；Then it installs measurement mirror and pose adjustment is carried out to measurement mirror；Beam splitter is subsequently installed between laser and measurement mirror, the light beam of laser transmitting is radiated on measurement mirror through beam splitter and is adjusted to the posture of beam splitter；Mirror of turning back subsequently is installed on the parallel position of beam splitter, the light beam of laser transmitting is radiated on measurement mirror through mirror of turning back and the posture of doubling tilting mirror is adjusted；Laser interferometer A finally is installed between beam splitter and measurement mirror, laser interferometer B is installed between mirror and measurement mirror turning back, pose adjustment is carried out to laser interferometer A and laser interferometer B.
Description
Technical field
The present invention relates to diffraction grating manufacture technology field, in particular to a kind of optical grating graduating machine scribe line position optical path
Method of adjustment and its system.
Background technique
Diffraction grating is a kind of dispersivity, beam splitting, polarization and the phase matched of integrating as the optical element of the whole body, is widely used in
The fields such as spectrum analysis, accurate measurement, optical communication and information processing.
Optical grating graduating machine is the machine tool for making ruled grating motherboard, and the positioning accuracy of optical grating graduating machine will directly determine to delineate
The quality of grating.Before nineteen forty-seven, optical grating graduating machine is nearly all in purely mechanic delineation mode, and the position of grating cutting is main
It is to be positioned by the transmission system that lead screw is core, the precision of grating depends on processing and the dress of mechanical system each components
Precision is adjusted, but for the diffraction grating that nano-precision requires, mechanical means is limited the raising of grating quality.
With the measurement of nano-precision and the development of control technology, optical grating graduating machine has marched toward a brand-new epoch i.e. light
Electric control epoch, the precision of optical grating graduating machine and the quality of ruled grating have obtained great promotion.It is wide for grating ruling
For large area ruled grating of the degree greater than 300mm, since the linear machining accuracy of indexing guide rail is not able to satisfy finger
Mark requires, and is loaded with the workbench of grating blank when indexing guide rail operation, it will so that grating wavefront generates fan-shaped error, thus
The performance of grating is influenced, in order to eliminate the linearity bring sector error of indexing guide rail, is generally adopted by bifocal path structure,
But double-optical path structural adjustment step is more complicated, adjustment is improper will to generate cosine error, lead to grating line density
Variation or generate new fan-shaped error.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of adjustment sides of optical grating graduating machine scribe line position optical path
Method is disappeared by adjusting separately the posture of laser, measurement mirror, beam splitter, mirror of turning back, laser interferometer A and laser interferometer B
Influence of the cosine error to grating quality is minimized while except the linearity bring sector error for indexing guide rail；Also provide one
The adjustment system of kind optical grating graduating machine scribe line position optical path.
In order to solve the above technical problems, one technical scheme adopted by the invention is that:
A kind of method of adjustment of optical grating graduating machine scribe line position optical path, wherein include the following steps:
Step S1, cross target is mounted on the workbench of optical grating graduating machine；
Step S2, laser is installed on the first predeterminated position, the posture for adjusting the laser sends out the laser
Irradiating light beam is penetrated on the cross target；
Step S3, measurement mirror is installed on the second predeterminated position, the posture of the measurement mirror is adjusted, until the measurement mirror
The reflected beams and incident beam be overlapped；
Step S4, beam splitter is placed in third predeterminated position, adjusts the posture of the beam splitter, send out the laser
The light beam penetrated is radiated on the measurement mirror through the beam splitter；
Step S5, mirror of turning back is installed on the parallel position of beam splitter, the light beam of laser transmitting is through mirror irradiation of turning back
Measurement mirror on and the posture of doubling tilting mirror is adjusted；
Step S6, between the beam splitter and the measurement mirror install laser interferometer A, it is described turn back mirror with it is described
Installation laser interferometer B, the laser interferometer A and laser interferometer B are mounted on receiver, the laser between measurement mirror
Interferometer A and laser interferometer B can issue two hot spots at the receiver respectively connected, dry to laser interferometer A and laser
Interferometer B carries out pose adjustment, until two hot spots at two receivers are in coincidence status position.
Further, step S1 includes step S11 and step S12；
Step S11, on the table by the pedestal connection of cross target；
Step S12, the adjustment bracket that knob reconciles cross target is reconciled by height, makes the horizontal line tune of the target of cross target
In the whole measurement plane to setting.
Further, step S2 includes step S21 and step S22；
Step S21, workbench is slidably connected on the indexing guide rail of optical grating graduating machine, workbench is slided into indexing and is led
One end of rail, the light beam that the posture for adjusting laser emits laser are penetrated at the center of target；
Step S22, the other end that workbench is slided into indexing guide rail, observes position of the hot spot of light beam on target,
When so that workbench running on the both ends of indexing guide rail back and forth, by adjusting the posture of laser, the hot spot of light beam is on target
Position it is constant, then the pose adjustment of laser finishes, and cross target is removed from workbench.
Further, in step s3, when workbench being made to run on the both ends of indexing guide rail back and forth, the appearance of adjustment measurement mirror
State is overlapped the reflected beams for measuring mirror and incident beam, then the pose adjustment for measuring mirror finishes.
Further in step s 4, beam splitter is between laser and measurement mirror, and laser emits light beam, adjustment point
The posture of Shu Jing, when the state that beam splitter does not influence to measure the reflected beams of mirror and incident beam is overlapped, then the appearance of beam splitter
State adjustment finishes.
Further in step s 5, laser is blocked by the light beam that beam splitter is incident on measurement mirror, light
Beam is refracted to by beam splitter and is turned back on mirror, is incident on measurement mirror by mirror of turning back, and adjustment is turned back the posture of mirror, when making to survey
When the reflected beams and incident beam for measuring mirror are overlapped, then the pose adjustment for mirror of turning back finishes.
Further in step s 6, laser interferometer A and laser interferometer B are arranged in parallel, laser interferometer A and laser
Interferometer B is mounted on receiver, adjusts separately the posture of laser interferometer A and laser interferometer B, as laser interferometer A and
When two hot spots at the receiver of laser interferometer B are in coincidence status position, then laser interferometer A and laser interferometer B
Pose adjustment finish.
A kind of adjustment system of optical grating graduating machine scribe line position optical path, is connected on optical grating graduating machine, wherein packet
Include cross target, laser, measurement mirror, beam splitter, mirror of turning back, laser interferometer A and laser interferometer B；Cross target is connected to light
On the workbench of grid rose engine, beam splitter is between laser and measurement mirror, and mirror of turning back is parallel with beam splitter, laser interferometer
A is between beam splitter and measurement mirror, and laser interferometer B, which is in, to turn back between mirror and measurement mirror；Laser uses double-frequency laser
Device.
Further, measurement mirror is coated with 200nm aluminium film using one piece of surface and surface precision PV value is less than or equal to λ/8
Plane mirror.
Further, cross target includes for connecting pedestal, adjustment bracket and target on the table, the adjustment branch
Frame connects on the base, and the target is connected to the top of the adjustment bracket, is provided with height on the adjustment bracket
Reconcile knob.
The beneficial effects of the present invention are: compared with prior art, the present invention measures two-way position by measurement mirror simultaneously
Measurement, the variation for being conducive to incisure density caused by reducing the cosine error of the respective optical path of bifocal path structure or new sector are accidentally
Difference can be minimized influence of the cosine error to grating quality, and the present invention is easily achieved, and effectively improve the positioning of rose engine
Precision, and then improve the performance indicator of ruled grating.
Detailed description of the invention
Fig. 1 is step block diagram of the invention；
Fig. 2 is the internal step block diagram of step S1 of the invention；
Fig. 3 is the internal step block diagram of step S2 of the invention；
Fig. 4 is the attachment structure schematic diagram of the adjustment system of optical grating graduating machine scribe line position optical path of the invention；
Fig. 5 is the structural schematic diagram of cross target of the invention；
Appended drawing reference: 1- laser, 2- beam splitter, 3- turn back mirror, 4- laser interferometer A, 5- laser interferometer B, and 6- connects
Device is received, 7- measures mirror, 8- workbench, 9- grating blank, 10- cross target, 10-1- target, 10-2- adjustment bracket, the bottom 10-3-
Seat, 10-4- height reconcile knob.
Specific embodiment
In the prior art, double-optical path structural adjustment step is more complicated, and adjustment is improper will to generate cosine error, leads
It causes the variation of grating line density or generates new fan-shaped error.
As shown in Figure 1 to Figure 3, the present invention provides a kind of method of adjustment of optical grating graduating machine scribe line position optical path, packet
Include following steps:
Step S1, cross target 10 is mounted on the workbench 8 of optical grating graduating machine；
Step S2, laser 1 is installed on the first predeterminated position, the posture of adjustment laser 1 makes laser emit light beam
It penetrates on cross target 10；
Step S3, measurement mirror 7 is installed on the second predeterminated position, the posture of adjustment measurement mirror 7, until measurement mirror 7 is anti-
Irradiating light beam and incident beam are overlapped；
Step S4, beam splitter 2 is placed in third predeterminated position, adjusts the posture of beam splitter 2, emit laser 1
Light beam is radiated on measurement mirror 7 through beam splitter 2；
Step S5, mirror 3 of turning back is installed on the parallel position of beam splitter 2, the light beam that laser 1 emits is through mirror 3 of turning back
It is radiated at and measures on mirror 7 and the posture of doubling tilting mirror 3 is adjusted；
Step S6, beam splitter 2 and measurement mirror 7 between install laser interferometer A (4), turn back mirror 3 and measurement mirror 7 it
Between install laser interferometer B (5), laser interferometer A (4) and laser interferometer B (5) are mounted on receiver 6, laser interferometer
A (4) and laser interferometer B (5) can issue two hot spots at the receiver 6 respectively connected, to laser interferometer A (4) and swash
Optical interferometer B (5) carries out pose adjustment, until two hot spots at two receivers 6 are in coincidence status position.
Third predeterminated position is between the first predeterminated position and the second predeterminated position.
The beneficial effects of the present invention are: compared with prior art, the present invention measures two-way position by measurement mirror 7 simultaneously
Measurement, the variation for being conducive to incisure density caused by reducing the cosine error of the respective optical path of bifocal path structure or new sector are accidentally
Difference, the present invention are easily achieved, and effectively improve the positioning accuracy of rose engine, and then improve the performance indicator of ruled grating.
Wherein, step S1 includes step S11 and step S12；
Step S11, the pedestal 10-3 of cross target 10 is connected on workbench 8；
Step S12, the adjustment bracket 10-2 that knob 10-4 reconciles cross target 10 is reconciled by height, makes the target of cross target 10
The horizontal line of mark 10-1 is adjusted in the measurement plane of setting.
Further, step S2 includes step S21 and step S22；
Step S21, workbench 8 is slidably connected on the indexing guide rail of optical grating graduating machine, workbench is slided into indexing
One end of guide rail, the light beam that the posture of adjustment laser 1 emits laser penetrate the center in target 10-1；
Step S22, the other end that workbench 8 is slided into indexing guide rail, observes position of the hot spot of light beam on target,
When so that workbench 8 running on the both ends of indexing guide rail back and forth, by adjusting the posture of laser 1, the hot spot of light beam is in target
On position it is constant, then the pose adjustment of laser 1 finishes, and cross target is removed from workbench.
In the present invention, in step s3, when workbench 8 being made to run on the both ends of indexing guide rail back and forth, adjustment measurement mirror 7
Posture the reflected beams for measuring mirror 7 and incident beam are overlapped, then the pose adjustment for measuring mirror finishes.
In the present invention, in step s 4, beam splitter 2 is between laser 1 and measurement mirror 7, and laser 1 emits light
Beam adjusts the posture of beam splitter 2, when the state that beam splitter 2 does not influence the reflected beams of measurement mirror 7 and incident beam is overlapped,
Then the pose adjustment of beam splitter 2 finishes.
In the present invention, in step s 5, laser 1 is hidden by the light beam that beam splitter 2 is incident on measurement mirror 7
Gear, light beam are refracted to by beam splitter 1 and are turned back on mirror 3, are incident on measurement mirror 7 by mirror 3 of turning back, are adjusted the appearance for mirror 3 of turning back
State, when being overlapped the reflected beams for measuring mirror 7 and incident beam, then the pose adjustment for mirror 3 of turning back finishes.
In the present invention, in step s 6, laser interferometer A (4) and laser interferometer B (5) are arranged in parallel, laser interference
Instrument A (4) and laser interferometer B (5) are mounted on receiver 6, adjust separately laser interferometer A (4) and laser interferometer B (5)
Posture, two hot spots at the receiver 6 of laser interferometer A (4) and laser interferometer B (5) are in coincidence status position
When, then the pose adjustment of laser interferometer A (4) and laser interferometer B (5) finish.
As shown in Figure 4 and Figure 5, the present invention also provides a kind of adjustment system of optical grating graduating machine scribe line position optical path,
It is connected on optical grating graduating machine, including cross target 10, laser 1, measurement mirror 7, beam splitter 2, mirror 3 of turning back, laser interferometer A
(4) and laser interferometer B (5)；Cross target 10 is connected on the workbench 8 of optical grating graduating machine, and beam splitter 2 is in 1 He of laser
It measures between mirror 7, mirror 3 of turning back is parallel with beam splitter 2, and laser interferometer A (4) is between beam splitter 2 and measurement mirror 7, laser
Interferometer B (5), which is in, to turn back between mirror 3 and measurement mirror 7；Laser 1 uses two-frequency laser.
Further, measurement mirror 7 is coated with 200nm aluminium film using one piece of surface and surface precision PV value is less than or equal to λ/8
Plane mirror；Measurement mirror 7 is coated with 200nm aluminium film only with one piece of surface herein and surface precision PV value is less than or equal to the flat of λ/8
Face mirror, if different cosine errors is easy to appear because of the plane mirror using two pieces or both or more, therefore, only with one
Block plane mirror can be minimized influence of the cosine error to grating quality.
As shown in figure 4, in the present invention, laser interferometer A (4) and laser interferometer B (5) are mounted on receiver 6.
As shown in figure 5, cross target 10 includes pedestal 10-3, adjustment bracket 10-2 and the target for being connected on workbench 8
10-1 is marked, adjustment bracket 10-2 is connected on pedestal 10-3, and target 10-1 is connected to the top of adjustment bracket 10-2, adjusts bracket
It is provided with height on 10-2 and reconciles knob 10-4.
The present invention provides one embodiment, which includes the following steps:
One, the adjustment of 1 posture of laser.
1., cross target 10 is placed at optical grating graduating machine table design position, knob 10- is then reconciled by height
The adjustment bracket 10-2 of 4 adjustment cross targets 10, so that the horizontal line in target 10-1 is located in the measurement plane of design；
2., laser 1 is installed at design position, workbench 8 is placed in one end of indexing guide rail, adjusts laser 1
Posture so that workbench 8 is run to the other end of indexing guide rail so that laser beam is incident on the center of cross target 10,
Position of the laser facula on cross target 10 is observed, by adjusting the posture of laser 1, so that workbench 8 is run on point back and forth
When spending the both ends of guide rail range, position of the laser facula on cross target 10 is constant, then 1 pose adjustment of laser finishes.
Two, the adjustment of 7 posture of mirror is measured.Measurement mirror 7 is placed at design position, runs on workbench 8 back and forth point
When spending the both ends of guide rail range, the posture of adjustment measurement mirror 7 is overlapped the light beam for measuring the reflection of mirror 7 and incident beam.
Three, the adjustment of 2 posture of beam splitter.Beam splitter 2 is placed in laser 1 and measures the design position between mirror 7, adjustment
The posture of beam splitter 2, making it not influences to measure 7 the reflected beams of mirror and incident beam.
Four, the adjustment for 3 posture of mirror of turning back.Beam splitter 2 is placed at design position, laser 1 is incident by beam splitter 2
Laser beam B1 on to measurement is blocked, and another beam laser beam B2 will be incident on measurement mirror 7 by mirror 3 of turning back, and is adjusted
The whole posture for turning back mirror 3 to measure 7 the reflected beams of mirror and incident beam is overlapped.
Five, the adjustment of laser interferometer A (4) and laser interferometer B (5) posture.Laser interferometer A (4) and laser is dry
Interferometer B (5) is respectively placed in light path design position, adjusts its posture, until laser interferometer A (4) and laser interferometer B (5)
Two hot spots at the receiver of installation are in best coincidence status position, then two laser interferometer adjustment finish.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field is included within the scope of the present invention.
Claims (10)
1. a kind of method of adjustment of optical grating graduating machine scribe line position optical path characterized by comprising
Step S1, cross target is mounted on the workbench of optical grating graduating machine；
Step S2, laser is installed on the first predeterminated position, the posture for adjusting the laser makes the laser transmitting light
Beam is on the cross target；
Step S3, measurement mirror is installed on the second predeterminated position, adjusts the posture of the measurement mirror, until the measurement mirror is anti-
Irradiating light beam and incident beam are overlapped；
Step S4, beam splitter is placed in third predeterminated position, adjusts the posture of the beam splitter, make the laser transmitting
Light beam is radiated on the measurement mirror through the beam splitter；
Step S5, mirror of turning back is installed on the parallel position of beam splitter, the light beam of laser transmitting is radiated at survey through mirror of turning back
Measure mirror on and the posture of doubling tilting mirror is adjusted；
Step S6, laser interferometer A is installed between the beam splitter and the measurement mirror, in turn back mirror and the measurement
Laser interferometer B, the laser interferometer A and laser interferometer B are installed between mirror and are mounted on receiver, the laser interference
Instrument A and laser interferometer B can issue two hot spots at the receiver respectively connected, to laser interferometer A and laser interferometer B
Pose adjustment is carried out, until two hot spots at two receivers are in coincidence status position.
2. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 1, which is characterized in that
Step S1 includes step S11 and step S12；
Step S11, on the workbench by the pedestal connection of the cross target；
Step S12, the adjustment bracket that knob reconciles the cross target is reconciled by height, makes the level of the target of the cross target
Line is adjusted in the measurement plane of setting.
3. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 2, which is characterized in that
Step S2 includes step S21 and step S22；
Step S21, the workbench is slidably connected on the indexing guide rail of the optical grating graduating machine, the workbench is slided
To one end of the indexing guide rail, the posture for adjusting the laser penetrates the light beam of the laser transmitting in target
The heart；
Step S22, the other end that the workbench is slided into the indexing guide rail, observes the hot spot of light beam on the target
Position, when so that the workbench running on the both ends of the indexing guide rail back and forth, by adjusting the posture of the laser,
Position of the hot spot of light beam on the target is constant, then the pose adjustment of the laser finishes, by cross target from workbench
On remove.
4. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 3, which is characterized in that
In step s3, when the workbench being made to run on the both ends of the indexing guide rail back and forth, the posture for adjusting the measurement mirror makes
The reflected beams and incident beam for obtaining the measurement mirror are overlapped, then the pose adjustment of the measurement mirror finishes.
5. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 4, which is characterized in that
In step s 4, the beam splitter is between the laser and the measurement mirror, and the laser emits light beam, adjusts institute
The posture for stating beam splitter, when the state that the beam splitter does not influence the reflected beams of the measurement mirror and incident beam is overlapped,
Then the pose adjustment of the beam splitter finishes.
6. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 5, which is characterized in that
In step s 5, the laser is blocked by the light beam that the beam splitter is incident on the measurement mirror, light beam is logical
Cross the beam splitter be refracted to it is described turn back on mirror, be incident on the measurement mirror by the mirror of turning back, turned back described in adjustment
The posture of mirror, when the reflected beams and incident beam that make the measurement mirror are overlapped, then the pose adjustment of the mirror of turning back is complete
Finish.
7. a kind of method of adjustment of optical grating graduating machine scribe line position optical path according to claim 6, which is characterized in that
In step s 6, the laser interferometer A and laser interferometer B are arranged in parallel, the laser interferometer A and laser interferometer B
It is mounted on the receiver, the posture of the laser interferometer A and laser interferometer B are adjusted separately, when the laser interference
When two hot spots at the receiver of instrument A and laser interferometer B are in coincidence status position, then laser interferometer A and laser are dry
The pose adjustment of interferometer B finishes.
8. a kind of adjustment system of optical grating graduating machine scribe line position optical path, is connected on optical grating graduating machine, feature exists
In, including cross target, laser, measurement mirror, beam splitter, mirror of turning back, laser interferometer A and laser interferometer B；The cross target
It is connected on the workbench of the optical grating graduating machine, the beam splitter is between the laser and the measurement mirror, described
Mirror of turning back is parallel with the beam splitter, and the laser interferometer A is between the beam splitter and the measurement mirror, the laser
Interferometer B is in described and turns back between mirror and the measurement mirror；The laser uses two-frequency laser.
9. a kind of adjustment system of optical grating graduating machine scribe line position optical path according to claim 8, which is characterized in that
The measurement mirror is coated with 200nm aluminium film using one piece of surface and surface precision PV value is less than or equal to the plane mirror of λ/8.
10. a kind of adjustment system of optical grating graduating machine scribe line position optical path according to claim 8, feature exist
In the cross target includes for connecting pedestal, adjustment bracket and target on the workbench, the adjustment bracket connection
On the base, the target is connected to the top of the adjustment bracket, is provided with height on the adjustment bracket and reconciles rotation
Button.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811414449.7A CN109407192A (en) | 2018-11-26 | 2018-11-26 | A kind of method of adjustment and its system of optical grating graduating machine scribe line position optical path |
| PCT/CN2019/120450 WO2020108417A1 (en) | 2018-11-26 | 2019-11-23 | Method for adjusting measurement light path of scribe line position of grating ruling engine, and system for same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811414449.7A CN109407192A (en) | 2018-11-26 | 2018-11-26 | A kind of method of adjustment and its system of optical grating graduating machine scribe line position optical path |
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| CN109407192A true CN109407192A (en) | 2019-03-01 |
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| WO (1) | WO2020108417A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2020108417A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting measurement light path of scribe line position of grating ruling engine, and system for same |
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| CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
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| JP5864920B2 (en) * | 2010-12-20 | 2016-02-17 | キヤノン株式会社 | Manufacturing method of diffraction grating |
| CN102540783B (en) * | 2010-12-31 | 2014-11-12 | 上海微电子装备有限公司 | Automatic calibration device and method for abbe cosine error of interferometer |
| CN109407192A (en) * | 2018-11-26 | 2019-03-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of method of adjustment and its system of optical grating graduating machine scribe line position optical path |
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- 2018-11-26 CN CN201811414449.7A patent/CN109407192A/en active Pending
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- 2019-11-23 WO PCT/CN2019/120450 patent/WO2020108417A1/en active Application Filing
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| CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020108417A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting measurement light path of scribe line position of grating ruling engine, and system for same |
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| WO2020108417A1 (en) | 2020-06-04 |
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