WO2020108417A1

WO2020108417A1 - Method for adjusting measurement light path of scribe line position of grating ruling engine, and system for same

Info

Publication number: WO2020108417A1
Application number: PCT/CN2019/120450
Authority: WO
Inventors: 唐玉国; 糜小涛; 齐向东; 于海利; 巴音贺希格; 张善文; 于宏柱
Original assignee: 中国科学院长春光学精密机械与物理研究所
Priority date: 2018-11-26
Filing date: 2019-11-23
Publication date: 2020-06-04
Also published as: CN109407192A

Abstract

A method for adjusting a measurement light path of a scribe line position of a grating ruling engine, and a system for the same, pertaining to the technical field of diffraction grating manufacturing. The method comprises: installing a crosshair target element (10) on a work platform (8) of the grating ruling engine; installing a laser (1), the laser (1) emitting a beam on the crosshair target element (10), and adjusting an orientation of the laser (1); installing a measurement mirror (7), and adjusting an orientation of the measurement mirror (7); installing a beam splitter (2) between the laser (1) and the measurement mirror (7), a light beam emitted by the laser (1) being transmitted through the beam splitter (2) and irradiating the measurement mirror (7), and adjusting an orientation of the beam splitter (2); installing a deflection mirror (3) at a position parallel to the beam splitter (2), a light beam emitted by the laser (1) irradiating the measurement mirror (7) via the deflection mirror (3), and adjusting an orientation of the deflection mirror (3); and installing a laser interferometer A (4) between the beam splitter (2) and the measurement mirror (7), installing a laser interferometer B (5) between the deflection mirror (3) and the measurement mirror (7), and adjusting orientations of the laser interferometer A (4) and the laser interferometer B (5).

Description

Method and system for adjusting optical path of grating line scribing machine position measurement

Technical field

The present application relates to the technical field of the production of diffraction gratings, and in particular, to a method and system for adjusting the optical path of the position of the grating scribing machine.

Background technique

Diffraction grating is an optical element that integrates dispersion, beam splitting, polarization and phase matching. It is widely used in the fields of spectrum analysis, precision measurement, optical communication and information processing.

The grating scoring machine is a master machine for manufacturing the grating master. The positioning accuracy of the grating scoring machine will directly determine the quality of the grating. Before 1947, grating scribing machines were almost in purely mechanical scribing. The position of the grating groove was mainly positioned by a transmission system with a screw as the core. The accuracy of the grating depends on the processing and assembly of various parts of the mechanical system To adjust the precision, but for the diffraction grating required by nanometer precision, the mechanical method is limited to improve the quality of the grating.

With the development of nano-precision measurement and control technology, the grating scribing machine has entered a new era, that is, the era of photoelectric control. The accuracy of the grating scribing machine and the quality of the grating are greatly improved. For a large-area scoring grating with a grating scoring width greater than 300mm, the linear machining accuracy of the indexing guide cannot meet the requirements of the index. When the table with the grating blank is running on the indexing guide, the grating will make the grating The wavefront generates a fan-shaped error, which affects the performance of the grating. In order to eliminate the fan-shaped error caused by the linearity of the indexing guide, a double-light path structure is generally used, but the adjustment steps of the double-light path measurement structure are more complicated. Errors, leading to changes in the grating line density or new sector errors.

Summary of the invention

The main technical problem solved by this application is to provide a method for adjusting the optical path of the reticle position of the grating scribing machine. By adjusting the laser, measuring mirror, beam splitter, folding mirror, laser interferometer A and laser interferometer B Attitude, it eliminates the sector error caused by the linearity of the indexing guide and minimizes the effect of the cosine error on the quality of the grating; it also provides an adjustment system for the position measurement optical path of the grating scribing machine.

In order to solve the above problems, this application provides the following technical solutions:

A method for adjusting the optical path of the position of the scribe line of a grating scoring machine, which includes the following steps:

Step S1: Install the cross target on the worktable of the grating scoring machine;

Step S2: Install the laser at the first preset position, adjust the posture of the laser so that the laser emits a light beam on the cross target;

Step S3: Install the measuring mirror at the second preset position, and adjust the posture of the measuring mirror until the reflected beam and the incident beam of the measuring mirror coincide;

Step S4: Place the beam splitter at a third preset position, adjust the posture of the beam splitter, so that the light beam emitted by the laser irradiates the measuring mirror through the beam splitter;

Step S5. Install a folding mirror at a position parallel to the beam splitter, and the light beam emitted by the laser irradiates the measuring mirror through the folding mirror to adjust the posture of the folding mirror;

Step S6: Install a laser interferometer A between the beam splitter and the measuring mirror, install a laser interferometer B between the folding mirror and the measuring mirror, the laser interferometer A interferes with the laser Both receivers are installed on the instrument B, and the laser interferometer A and the laser interferometer B both emit two light spots at the receivers connected to each other, and adjust the attitude of the laser interferometer A and the laser interferometer B until the two The two light spots at the receiver are in a coincident position.

The technical solution adopted in the embodiment of the present application further includes: Step S1 includes step S11 and step S12;

Step S11: Connect the base of the cross target to the workbench;

Step S12: Adjust the adjustment bracket of the cross target through the height adjustment knob, so that the horizontal line of the target of the cross target is adjusted to the set measurement plane.

The technical solution adopted in the embodiment of the present application further includes: Step S2 includes Step S21 and Step S22;

Step S21, slidingly connect the worktable to the indexing guide of the grating scoring machine, slide the worktable to one end of the indexing guide, adjust the attitude of the laser so that the beam emitted by the laser hits the center of the target;

Step S22: Slide the worktable to the other end of the indexing guide rail, and observe the position of the beam spot on the target, so that when the worktable runs back and forth at both ends of the indexing guide rail, by adjusting the laser posture, the beam spot is on the target If the position on is unchanged, the laser posture adjustment is completed, and the cross target is removed from the worktable.

The technical solution adopted in the embodiment of the present application further includes: in step S3, when the worktable is moved back and forth on both ends of the indexing guide rail, the posture of the measuring mirror is adjusted so that the reflected beam and the incident beam of the measuring mirror coincide, then the The posture adjustment is completed.

The technical solution adopted in the embodiment of the present application further includes: In step S4, the beam splitter is located between the laser and the measuring mirror, the laser emits a light beam, and the posture of the beam splitter is adjusted, when the beam splitter does not affect the reflected beam and incident of the measuring mirror When the beams are coincident, the attitude adjustment of the beam splitter is completed.

The technical solution adopted in the embodiment of the present application further includes: in step S5, the laser beam incident on the measuring mirror through the beam splitter is blocked, and the beam is refracted on the folding mirror through the beam splitter and incident on the folding mirror On the measuring mirror, adjust the posture of the folding mirror. When the reflected beam of the measuring mirror coincides with the incident beam, the posture adjustment of the folding mirror is completed.

The technical solution adopted in the embodiment of the present application further includes: In step S6, the laser interferometer A and the laser interferometer B are arranged in parallel, and both the laser interferometer A and the laser interferometer B are equipped with receivers, respectively adjusting the laser interferometer A and the In the posture of laser interferometer B, when the two spots at the receivers of laser interferometer A and laser interferometer B are in the coincident position, the posture adjustment of laser interferometer A and laser interferometer B is completed.

Another technical solution adopted by the embodiments of the present application is as follows: an adjustment system for measuring the optical path of the scribe line position of a grating scoring machine, which is connected to the grating scoring machine, and includes a cross target, a laser, a measuring mirror, a beam splitter Folding mirror, laser interferometer A and laser interferometer B; the cross target is connected to the workbench of the grating scoring machine, the beam splitter is between the laser and the measuring mirror, the folding mirror is parallel to the beam splitter, the laser interferometer A is between the beam splitter and the measuring mirror, and the laser interferometer B is between the folding mirror and the measuring mirror; the laser uses a dual-frequency laser.

The technical solution adopted in the embodiment of the present application further includes: the measuring mirror adopts a plane mirror plated with a 200 nm aluminum film on the surface, and the PV accuracy of the surface profile is less than or equal to λ/8.

The technical solution adopted in the embodiment of the present application further includes: a cross target includes a base for connecting to the workbench, an adjustment bracket and a target, the adjustment bracket is connected to the base, and the target is connected to the adjustment bracket At the top, the adjustment bracket is provided with a height adjustment knob.

The beneficial effect of the present application is: compared with the prior art, the measurement of two positions simultaneously measured by the measuring mirror in the present application is beneficial to reduce the change in the score density caused by the cosine error of the respective optical paths of the dual optical path structure or the new The sector error can minimize the influence of the cosine error on the quality of the grating. This application is easy to implement and effectively improves the positioning accuracy of the scoring machine, thereby improving the performance index of the scoring grating.

BRIEF DESCRIPTION

FIG. 1 is a block diagram of steps of an embodiment of the present application;

2 is a block diagram of the internal steps of step S1 of the embodiment of the present application;

3 is a block diagram of the internal steps of step S2 of the embodiment of the present application;

FIG. 4 is a schematic diagram of a connection structure of an adjustment system of a scribe line position measuring optical path of a grating scoring machine of the present application;

5 is a schematic structural diagram of a cross target of the present application.

Reference signs: 1-laser, 2-beam splitter, 3-fold mirror, 4-laser interferometer A, 5-laser interferometer B, 6-receiver, 7-measuring mirror, 8-workbench, 9 -Grating blank, 10-cross target, 10-1-target, 10-2-adjustment bracket, 10-3-base, 10-4-height adjustment knob.

detailed description

In the prior art, the adjustment steps of the dual-optical path measurement structure are relatively complicated. Improper adjustments will produce cosine errors, resulting in changes in grating line density or new sector errors.

As shown in FIG. 1 to FIG. 3, the present application provides a method for adjusting the optical path of the scribe line position of a grating scoring machine, which includes the following steps:

Step S1: Install the cross target 10 on the workbench 8 of the grating scoring machine;

Step S2: Install the laser 1 at the first preset position, adjust the attitude of the laser 1 so that the laser emits a beam of light on the cross target 10;

Step S3: Install the measuring mirror 7 at the second preset position, and adjust the posture of the measuring mirror 7 until the reflected beam of the measuring mirror 7 coincides with the incident beam;

Step S4: Place the beam splitter 2 at the third preset position, adjust the posture of the beam splitter 2, so that the light beam emitted by the laser 1 irradiates the measuring mirror 7 through the beam splitter 2;

Step S5. Install the folding mirror 3 at a position where the beam splitter 2 is parallel, and the light beam emitted by the laser 1 is irradiated on the measuring mirror 7 through the folding mirror 3 to adjust the posture of the folding mirror 3;

Step S6. Install a laser interferometer A (4) between the beam splitter 2 and the measuring mirror 7, and install a laser interferometer B (5) and a laser interferometer A (4) between the folding mirror 3 and the measuring mirror 7. Both the laser interferometer B (5) and the laser interferometer A (4) and the laser interferometer A (4) and the laser interferometer B (5) will emit two spots at the receiver 6 connected to the laser interferometer A ( 4) Perform attitude adjustment with the laser interferometer B (5) until the two light spots at the two receivers 6 are in the coincident position.

The third preset position is between the first preset position and the second preset position.

The beneficial effect of the present application is: compared with the prior art, the measurement of the two positions by the measuring mirror 7 at the same time in the present application is beneficial to reduce the change or newness of the score density caused by the cosine error of the respective optical paths of the dual optical path structure The fan shape error of this application is easy to implement, which effectively improves the positioning accuracy of the scoring machine, and thus improves the performance index of the scoring grating.

Wherein, step S1 includes step S11 and step S12;

Step S11: Connect the base 10-3 of the cross target 10 to the workbench 8;

Step S12: Adjust the adjustment bracket 10-2 of the cross target 10 by the height adjustment knob 10-4, so that the horizontal line of the target 10-1 of the cross target 10 is adjusted to the set measurement plane.

Further, step S2 includes step S21 and step S22;

Step S21: Slide the worktable 8 on the indexing guide of the grating scoring machine, slide the worktable to one end of the indexing guide, adjust the posture of the laser 1 so that the beam emitted by the laser hits the center of the target 10-1;

Step S22: Slide the worktable 8 to the other end of the indexing guide rail, and observe the position of the beam spot on the target, so that when the worktable 8 runs back and forth at both ends of the indexing guide rail, by adjusting the attitude of the laser 1, the beam If the position of the light spot on the target remains unchanged, the posture of the laser 1 is adjusted, and the cross target is removed from the worktable.

In the present application, in step S3, when the worktable 8 is moved back and forth on both ends of the indexing rail, the posture of the measuring mirror 7 is adjusted so that the reflected beam of the measuring mirror 7 coincides with the incident beam, then the posture adjustment of the measuring mirror is completed .

In the present application, in step S4, the beam splitter 2 is located between the laser 1 and the measuring mirror 7, the laser 1 emits a light beam, and adjusts the attitude of the beam splitter 2, when the beam splitter 2 does not affect the reflected beam of the measuring mirror 7 and When the incident light beams coincide, the attitude adjustment of the beam splitter 2 is completed.

In this application, in step S5, the laser beam incident on the measuring mirror 7 through the beam splitter 2 is blocked, and the beam is refracted on the folding mirror 3 through the beam splitter 1 and incident on the folding mirror 3 On the measuring mirror 7, the posture of the folding mirror 3 is adjusted, and when the reflected light beam and the incident light beam of the measuring mirror 7 coincide, the posture adjustment of the folding mirror 3 is completed.

In this application, in step S6, the laser interferometer A (4) and the laser interferometer B (5) are arranged in parallel, and both the laser interferometer A (4) and the laser interferometer B (5) are equipped with the receiver 6, Adjust the posture of laser interferometer A (4) and laser interferometer B (5) respectively, when the two spots at the receiver 6 of laser interferometer A (4) and laser interferometer B (5) are in the coincident position , The attitude adjustment of laser interferometer A (4) and laser interferometer B (5) is completed.

As shown in FIG. 4 and FIG. 5, the present application also provides an adjustment system for measuring the optical path of the position of the grating scriber, which is connected to the grating scriber and includes a cross target 10, a laser 1, a measuring mirror 7, and a beam splitter Mirror 2, folding mirror 3, laser interferometer A (4) and laser interferometer B (5); the cross target 10 is connected to the workbench 8 of the grating scribing machine, the beam splitter 2 is located in the laser 1 and the measuring mirror 7 Between the folding mirror 3 and the beam splitter 2, the laser interferometer A (4) is between the beam splitter 2 and the measuring mirror 7, and the laser interferometer B (5) is between the folding mirror 3 and the measuring mirror 7. Between; laser 1 uses a dual-frequency laser.

Further, the measuring mirror 7 uses a plane mirror coated with 200 nm aluminum film and the surface accuracy PV value is less than or equal to λ/8; here the measuring mirror 7 uses only one surface coated with 200 nm aluminum film and the surface accuracy PV value is less than For a plane mirror equal to λ/8, if two or more plane mirrors are used, different cosine errors are prone to occur. Therefore, using only one plane mirror can minimize the effect of the cosine error on the grating quality.

As shown in FIG. 4, in this application, the laser interferometer A (4) and the laser interferometer B (5) are each equipped with a receiver 6.

As shown in FIG. 5, the cross target 10 includes a base 10-3 for connection to the workbench 8, an adjustment bracket 10-2 and a target 10-1, and the adjustment bracket 10-2 is connected to the base 10-3 and the target 10 -1 is connected to the top of the adjustment bracket 10-2, and the adjustment bracket 10-2 is provided with a height adjustment knob 10-4.

This application provides an embodiment, which includes the following steps:

1. Adjustment of laser 1 attitude.

① Place the cross target 10 at the design position of the grating scribing machine table, and then adjust the adjustment bracket 10-2 of the cross target 10 by the height adjustment knob 10-4, so that the horizontal line in the target 10-1 is located in the designed measurement plane Inside;

② Install the laser 1 at the design position, place the table 8 at one end of the index rail, adjust the attitude of the laser 1 so that the laser beam is incident on the center of the cross target 10, and then run the table 8 to the index rail At the other end, observe the position of the laser spot on the cross target 10, and adjust the posture of the laser 1 so that when the table 8 runs back and forth at both ends of the maximum travel of the index rail, the position of the laser spot on the cross target 10 does not change , The attitude adjustment of laser 1 is completed.

2. Adjustment of the attitude of the measuring mirror 7. When the measuring mirror 7 is placed at the design position and the worktable 8 is moved back and forth at both ends of the maximum stroke of the indexing rail, the posture of the measuring mirror 7 is adjusted so that the light beam reflected by the measuring mirror 7 coincides with the incident light beam.

3. The posture adjustment of the beam splitter 2. Place the beam splitter 2 in the design position between the laser 1 and the measuring mirror 7 and adjust the posture of the beam splitter 2 so that it does not affect the reflected beam and the incident beam of the measuring mirror 7.

4. Adjustment of the attitude of the folding mirror 3. Place the beam splitter 2 at the design position, block the laser beam B1 incident on the measurement through the beam splitter 2 to block, and the other laser beam B2 will enter the measurement mirror 7 through the folding mirror 3, adjust The posture of the folding mirror 3 causes the reflected light beam of the measuring mirror 7 to coincide with the incident light beam.

5. The posture adjustment of laser interferometer A (4) and laser interferometer B (5). Place the laser interferometer A (4) and laser interferometer B (5) in the design position of the optical path, adjust their posture until the laser interferometer A (4) and laser interferometer B (5) are installed at the receiver When the light spot is in the best position, the two laser interferometers are adjusted.

The above are only the embodiments of the present application, and therefore do not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made by the description and drawings of this application, or directly or indirectly used in other related technologies In the field, the same reason is included in the scope of patent protection of this application.

Claims

A method for adjusting the optical path of the position of the scribe line of a grating scoring machine is characterized in that it includes:

Step S1: Install the cross target on the worktable of the grating scoring machine;

Step S2: Install the laser at the first preset position, adjust the posture of the laser so that the laser emits a light beam on the cross target;

Step S3: Install the measuring mirror at the second preset position, and adjust the posture of the measuring mirror until the reflected beam and the incident beam of the measuring mirror coincide;

Step S4: Place the beam splitter at a third preset position, adjust the posture of the beam splitter, so that the light beam emitted by the laser irradiates the measuring mirror through the beam splitter;

Step S5. Install a folding mirror at a position parallel to the beam splitter, and the light beam emitted by the laser irradiates the measuring mirror through the folding mirror to adjust the posture of the folding mirror;

Step S6: Install a laser interferometer A between the beam splitter and the measuring mirror, install a laser interferometer B between the folding mirror and the measuring mirror, the laser interferometer A interferes with the laser Both receivers are installed on the instrument B, and the laser interferometer A and the laser interferometer B both emit two light spots at the receivers connected to each other, and adjust the attitude of the laser interferometer A and the laser interferometer B until the two The two light spots at the receiver are in a coincident position.
The method for adjusting the optical path of the reticle position measurement of the grating scriber according to claim 1, wherein step S1 includes step S11 and step S12;

Step S11: Connect the base of the cross target to the workbench;

Step S12: Adjust the adjustment bracket of the cross target by using a height adjustment knob to adjust the horizontal line of the target of the cross target to the set measurement plane.
The method for adjusting the optical path of the reticle position measurement of the grating scriber according to claim 2, characterized in that step S2 includes step S21 and step S22;

Step S21: Slidingly connect the worktable to the indexing guide of the grating scoring machine, slide the worktable to one end of the indexing guide, adjust the posture of the laser so that the laser emits The beam hits the center of the target;

Step S22: Slide the worktable to the other end of the indexing guide rail, and observe the position of the beam spot on the target, so that when the worktable runs back and forth at both ends of the indexing guide rail, pass Adjust the posture of the laser, the position of the beam spot on the target remains unchanged, then the posture of the laser is adjusted, and the cross target is removed from the worktable.
The method for adjusting the position measurement optical path of the reticle of a grating scoring machine according to claim 3, characterized in that, in step S3, when the table is moved back and forth on both ends of the indexing guide rail, the adjustment is performed The posture of the measuring mirror is such that the reflected beam and the incident beam of the measuring mirror coincide, and the posture of the measuring mirror is adjusted.
The method for adjusting the optical path of the reticle position of the grating scriber according to claim 4, characterized in that, in step S4, the beam splitter is located between the laser and the measuring mirror, The laser emits a light beam and adjusts the posture of the beam splitter. When the beam splitter does not affect the state where the reflected beam and the incident beam of the measuring mirror coincide, the posture adjustment of the beam splitter is completed.
The method for adjusting the optical path of the reticle position of the grating scriber according to claim 5, characterized in that, in step S5, the light beam incident on the measuring mirror by the laser through the beam splitter When blocking, the light beam is refracted to the folding mirror through the beam splitter, and then enters the measuring mirror through the folding mirror, adjusts the posture of the folding mirror, when the reflection of the measuring mirror is caused When the light beam and the incident light beam coincide, the posture adjustment of the folding mirror is completed.
The method for adjusting the optical path of the reticle position of the grating scriber according to claim 6, characterized in that in step S6, the laser interferometer A and the laser interferometer B are arranged in parallel, and the laser interferometer Both A and laser interferometer B are equipped with the receiver, and the postures of the laser interferometer A and the laser interferometer B are adjusted respectively. When the receivers of the laser interferometer A and the laser interferometer B both have two spots When the position is in the coincident state, the posture adjustment of the laser interferometer A and the laser interferometer B is completed.
An adjusting system for measuring the optical path of the reticle position of a grating scoring machine, which is connected to the grating scoring machine and is characterized by including a cross target, a laser, a measuring mirror, a beam splitter, a folding mirror, a laser interferometer A and a laser Interferometer B; the cross target is connected to the worktable of the grating scoring machine, the beam splitter is located between the laser and the measuring mirror, the folding mirror is parallel to the beam splitter , The laser interferometer A is between the beam splitter and the measuring mirror, and the laser interferometer B is between the folding mirror and the measuring mirror; the laser is a dual-frequency laser.
An adjustment system for measuring the optical path of the reticle position of a grating scoring machine according to claim 8, characterized in that the measuring mirror adopts a surface coated with 200nm aluminum film and the surface accuracy PV value is less than or equal to λ/8 Plane mirror.
An adjustment system for a reticle position measurement optical path of a grating scoring machine according to claim 8, wherein the cross target includes a base, an adjustment bracket and a target for connecting to the worktable, the The adjustment bracket is connected to the base, the target is connected to the top of the adjustment bracket, and the adjustment bracket is provided with a height adjustment knob.