CN109326660B - 太阳电池单晶硅基绒面生成工艺 - Google Patents
太阳电池单晶硅基绒面生成工艺 Download PDFInfo
- Publication number
- CN109326660B CN109326660B CN201811077767.9A CN201811077767A CN109326660B CN 109326660 B CN109326660 B CN 109326660B CN 201811077767 A CN201811077767 A CN 201811077767A CN 109326660 B CN109326660 B CN 109326660B
- Authority
- CN
- China
- Prior art keywords
- potassium hydroxide
- silicon substrate
- solar cell
- mixed solution
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 14
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 239000010703 silicon Substances 0.000 claims abstract description 20
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011259 mixed solution Substances 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000004094 surface-active agent Substances 0.000 claims abstract description 9
- CHHHXKFHOYLYRE-UHFFFAOYSA-M 2,4-Hexadienoic acid, potassium salt (1:1), (2E,4E)- Chemical compound [K+].CC=CC=CC([O-])=O CHHHXKFHOYLYRE-UHFFFAOYSA-M 0.000 claims abstract description 8
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 claims abstract description 8
- 235000010241 potassium sorbate Nutrition 0.000 claims abstract description 8
- 239000004302 potassium sorbate Substances 0.000 claims abstract description 8
- 229940069338 potassium sorbate Drugs 0.000 claims abstract description 8
- 239000001632 sodium acetate Substances 0.000 claims abstract description 8
- 235000017281 sodium acetate Nutrition 0.000 claims abstract description 8
- 239000002518 antifoaming agent Substances 0.000 claims abstract description 6
- 238000005520 cutting process Methods 0.000 claims abstract description 6
- 235000011118 potassium hydroxide Nutrition 0.000 claims abstract description 5
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 5
- 239000013530 defoamer Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- WXMKPNITSTVMEF-UHFFFAOYSA-M sodium benzoate Chemical compound [Na+].[O-]C(=O)C1=CC=CC=C1 WXMKPNITSTVMEF-UHFFFAOYSA-M 0.000 description 1
- 239000004299 sodium benzoate Substances 0.000 description 1
- 235000010234 sodium benzoate Nutrition 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/02—Etching, surface-brightening or pickling compositions containing an alkali metal hydroxide
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/10—Etching in solutions or melts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Photovoltaic Devices (AREA)
- Weting (AREA)
Abstract
Description
Claims (1)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811077767.9A CN109326660B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
CN202010997821.2A CN112909107B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
Applications Claiming Priority (1)
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CN201811077767.9A CN109326660B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
Related Child Applications (1)
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CN202010997821.2A Division CN112909107B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
Publications (2)
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CN109326660A CN109326660A (zh) | 2019-02-12 |
CN109326660B true CN109326660B (zh) | 2020-10-20 |
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CN201811077767.9A Active CN109326660B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
CN202010997821.2A Active CN112909107B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
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CN202010997821.2A Active CN112909107B (zh) | 2018-09-16 | 2018-09-16 | 太阳电池单晶硅基绒面生成工艺 |
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CN (2) | CN109326660B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112853496B (zh) * | 2019-11-12 | 2022-11-11 | 洛阳阿特斯光伏科技有限公司 | 一种硅棒的表面处理方法及金刚线硅片切割方法 |
CN112812776A (zh) * | 2019-11-15 | 2021-05-18 | 苏州阿特斯阳光电力科技有限公司 | 一种腐蚀液及其制备方法和应用 |
CN111139531A (zh) * | 2020-03-18 | 2020-05-12 | 常州时创能源股份有限公司 | 单晶硅片的制绒添加剂及其应用 |
CN117673206A (zh) * | 2024-01-31 | 2024-03-08 | 正泰新能科技股份有限公司 | 一种bc电池的制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102005504A (zh) * | 2010-10-15 | 2011-04-06 | 锦州华昌光伏科技有限公司 | 可提高太阳电池转化效率的硅片制绒方法 |
CN102115915B (zh) * | 2010-12-31 | 2012-08-22 | 百力达太阳能股份有限公司 | 一种单晶硅制绒添加剂以及单晶硅制绒工艺 |
US20170236954A1 (en) * | 2011-08-05 | 2017-08-17 | Beamreach | High efficiency solar cell structures and manufacturing methods |
CN104157735A (zh) * | 2014-08-14 | 2014-11-19 | 山西潞安太阳能科技有限责任公司 | 一种太阳能电池制绒工艺 |
CN106601862A (zh) * | 2015-10-15 | 2017-04-26 | 钧石(中国)能源有限公司 | 一种降低单晶硅异质结太阳能电池片反射率的制绒方法 |
CN108054236A (zh) * | 2017-12-06 | 2018-05-18 | 苏州润阳光伏科技有限公司 | 单晶硅片清洗制绒方法 |
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2018
- 2018-09-16 CN CN201811077767.9A patent/CN109326660B/zh active Active
- 2018-09-16 CN CN202010997821.2A patent/CN112909107B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN112909107A (zh) | 2021-06-04 |
CN109326660A (zh) | 2019-02-12 |
CN112909107B (zh) | 2024-01-02 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee after: Jiangsu Runyang New Energy Technology Co.,Ltd. Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before: SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address after: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee after: Jiangsu Runyang New Energy Technology Co.,Ltd. Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before: Jiangsu Runyang New Energy Technology Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201231 Address after: Room 201, building 1, 58 Xiangjiang Road, Yancheng Economic and Technological Development Zone, Yancheng City, Jiangsu Province 224000 Patentee after: Jiangsu Runyang century Photovoltaic Technology Co.,Ltd. Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before: Jiangsu Runyang New Energy Technology Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CB03 | Change of inventor or designer information |
Inventor after: Han Chao Inventor after: Li Haibo Inventor before: Han Chao |
|
CB03 | Change of inventor or designer information |