CN109326660B - 太阳电池单晶硅基绒面生成工艺 - Google Patents

太阳电池单晶硅基绒面生成工艺 Download PDF

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CN109326660B
CN109326660B CN201811077767.9A CN201811077767A CN109326660B CN 109326660 B CN109326660 B CN 109326660B CN 201811077767 A CN201811077767 A CN 201811077767A CN 109326660 B CN109326660 B CN 109326660B
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韩超
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Jiangsu Runyang Century Photovoltaic Technology Co Ltd
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Abstract

本发明涉及太阳电池制造工艺,公开一种太阳电池单晶硅基绒面生成工艺,该工艺采用以下步骤:首先,单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;其次,使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;最后,使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构。

Description

太阳电池单晶硅基绒面生成工艺
技术领域
本发明涉及一种太阳电池制造工艺,尤其是涉及一种太阳电池单晶硅基绒面生成工艺。
背景技术
在太阳电池生产流程中,源硅片需要经过清洗制绒去除在切割过程中的表面损伤层,并且形成陷光结构的绒面,增加光在太阳能电池片表面的折射反射次数,增加光的吸收。目前常用的制绒方法为化学腐蚀法。
目前行业内主要使用的是氢氧化钠、抗坏血酸、苯甲酸钠、消泡剂、表面活性剂的疏水性混合溶液进行单晶硅基绒面的生成。使用此类溶液生成的“金字塔”型绒面的塔基大小在4~6微米,且绒面成型率较低。
发明内容
有鉴于此,本发明的目的是解决上述现有技术的不足,提供一种使用新型的混合溶液,改善单晶硅基绒面生成的工艺。
本发明解决上述现有技术的不足所采用的技术方案是:该工艺采用以下步骤:
步骤(1):单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构。
特别地,该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s。
特别地,该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s。
特别地,该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
相较于现有技术,本发明的太阳电池单晶硅基绒面生成工艺,在生成绒面前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面更加平整,利于绒面的生成;利用氢氧化钾与双氧水混合溶液,在光滑平整的硅基上形成二氧化硅氧化层,为之后清水性溶液制造绒面创造吸附条件,使得单晶硅基上能够迅速高效的生成致密的“金字塔”型绒面结构;使用氢氧化钾与山梨酸钾、乙酸钠、消泡剂、表面活性剂的混合溶液生成的绒面,“金字塔”塔基大小在2~4微米,且成型率高,增加了光的吸收。
具体实施方式
以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例,本领域技术人员可以想到其他显而易见的变型。在以下描述中界定的本发明的基本原理可以应用于其他实施方案、变形方案、改进方案、等同方案以及没有背离本发明的精神和范围的其他技术方案。
本发明提供一种太阳单晶硅基绒面生成工艺,该工艺包括如下步骤:
步骤(1):粗抛工序,单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):预清洗工序,使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):制绒工序,使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的“金字塔”型绒面结构。
于上述粗抛工序中,该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s,预清洗工序中,该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s,制绒工序中,该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
下面表格所示,分别为较佳实施例中各个工序的配方表:
Figure DEST_PATH_IMAGE002
按照上述配比制得的太阳能电池的电性能如下:
Figure DEST_PATH_IMAGE004
本领域的技术人员应理解,上述描述的本发明的实施例只作为举例而并不限制本发明。本发明的目的已经完整并有效地实现。本发明的功能及结构原理已在实施例中展示和说明,在没有背离所述原理下,本发明的实施方式可以有任何变形或修改。

Claims (1)

1.一种太阳电池单晶硅基绒面生成工艺,其特征在于,该工艺采用以下步骤:
步骤(1):单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构;
步骤(1)中该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s;
步骤(2)中该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s;
步骤(3)中该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
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