CN109326660A - 太阳电池单晶硅基绒面生成工艺 - Google Patents

太阳电池单晶硅基绒面生成工艺 Download PDF

Info

Publication number
CN109326660A
CN109326660A CN201811077767.9A CN201811077767A CN109326660A CN 109326660 A CN109326660 A CN 109326660A CN 201811077767 A CN201811077767 A CN 201811077767A CN 109326660 A CN109326660 A CN 109326660A
Authority
CN
China
Prior art keywords
silicon substrate
potassium hydroxide
solar cell
flannelette
monocrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201811077767.9A
Other languages
English (en)
Other versions
CN109326660B (zh
Inventor
韩超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Runyang New Energy Technology Co ltd
Jiangsu Runyang Century Photovoltaic Technology Co Ltd
Original Assignee
SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co Ltd filed Critical SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co Ltd
Priority to CN202010997821.2A priority Critical patent/CN112909107B/zh
Priority to CN201811077767.9A priority patent/CN109326660B/zh
Publication of CN109326660A publication Critical patent/CN109326660A/zh
Application granted granted Critical
Publication of CN109326660B publication Critical patent/CN109326660B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02366Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/02Etching, surface-brightening or pickling compositions containing an alkali metal hydroxide
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Weting (AREA)

Abstract

本发明涉及太阳电池制造工艺,公开一种太阳电池单晶硅基绒面生成工艺,该工艺采用以下步骤:首先,单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;其次,使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;最后,使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构。

Description

太阳电池单晶硅基绒面生成工艺
技术领域
本发明涉及一种太阳电池制造工艺,尤其是涉及一种太阳电池单晶硅基绒面生成工艺。
背景技术
在太阳电池生产流程中,源硅片需要经过清洗制绒去除在切割过程中的表面损伤层,并且形成陷光结构的绒面,增加光在太阳能电池片表面的折射反射次数,增加光的吸收。目前常用的制绒方法为化学腐蚀法。
目前行业内主要使用的是氢氧化钠、抗坏血酸、苯甲酸钠、消泡剂、表面活性剂的疏水性混合溶液进行单晶硅基绒面的生成。使用此类溶液生成的“金字塔”型绒面的塔基大小在4~6微米,且绒面成型率较低。
发明内容
有鉴于此,本发明的目的是解决上述现有技术的不足,提供一种使用新型的混合溶液,改善单晶硅基绒面生成的工艺。
本发明解决上述现有技术的不足所采用的技术方案是:该工艺采用以下步骤:
步骤(1):单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构。
特别地,该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s。
特别地,该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s。
特别地,该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
相较于现有技术,本发明的太阳电池单晶硅基绒面生成工艺,在生成绒面前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面更加平整,利于绒面的生成;利用氢氧化钾与双氧水混合溶液,在光滑平整的硅基上形成二氧化硅氧化层,为之后清水性溶液制造绒面创造吸附条件,使得单晶硅基上能够迅速高效的生成致密的“金字塔”型绒面结构;使用氢氧化钾与山梨酸钾、乙酸钠、消泡剂、表面活性剂的混合溶液生成的绒面,“金字塔”塔基大小在2~4微米,且成型率高,增加了光的吸收。
具体实施方式
以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例,本领域技术人员可以想到其他显而易见的变型。在以下描述中界定的本发明的基本原理可以应用于其他实施方案、变形方案、改进方案、等同方案以及没有背离本发明的精神和范围的其他技术方案。
本发明提供一种太阳单晶硅基绒面生成工艺,该工艺包括如下步骤:
步骤(1):粗抛工序,单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):预清洗工序,使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):制绒工序,使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的“金字塔”型绒面结构。
于上述粗抛工序中,该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s,预清洗工序中,该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s,制绒工序中,该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
下面表格所示,分别为较佳实施例中各个工序的配方表:
按照上述配比制得的太阳能电池的电性能如下:
本领域的技术人员应理解,上述描述的本发明的实施例只作为举例而并不限制本发明。本发明的目的已经完整并有效地实现。本发明的功能及结构原理已在实施例中展示和说明,在没有背离所述原理下,本发明的实施方式可以有任何变形或修改。

Claims (4)

1.一种太阳电池单晶硅基绒面生成工艺,其特征在于,该工艺采用以下步骤:
步骤(1):单晶硅太阳电池片在生成绒面之前,使用氢氧化钾溶液,去除硅基表面切割损伤层,使硅基表面平整;
步骤(2):使用氢氧化钾与双氧水混合溶液,在光滑平整的该硅基上形成二氧化硅氧化层;
步骤(3):使用氢氧化钾、山梨酸钾、乙酸钠、消泡剂、表面活性剂混合溶液,在形成氧化层的该硅基上生成致密、均匀的绒面结构。
2.根据权利要求1所述的太阳电池单晶硅基绒面生成工艺,其特征在于,步骤(1)中该氢氧化钾溶液的氢氧化钾与纯水的体积比为100:1~1:100,处理时温度为40-90℃,处理时间为10-300s。
3.根据权利要求2所述的太阳电池单晶硅基绒面生成工艺,其特征在于,步骤(2)中该氢氧化钾与该双氧水的体积比为100:1~1:100,处理温度为40-90℃,处理时间为10-300s。
4.根据权利要求3所述的太阳电池单晶硅基绒面生成工艺,其特征在于,步骤(3)中该氢氧化钾与该山梨酸钾、该乙酸钠、该消泡剂、该表面活性剂的体积比为100:1:1:1:1~1:100:1:1:1~1:1:100:1:1~1:1:1:100:1~1:1:1:1:100,处理温度为40-180℃,处理时间为100-900s。
CN201811077767.9A 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺 Active CN109326660B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202010997821.2A CN112909107B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺
CN201811077767.9A CN109326660B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811077767.9A CN109326660B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202010997821.2A Division CN112909107B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺

Publications (2)

Publication Number Publication Date
CN109326660A true CN109326660A (zh) 2019-02-12
CN109326660B CN109326660B (zh) 2020-10-20

Family

ID=65265454

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201811077767.9A Active CN109326660B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺
CN202010997821.2A Active CN112909107B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202010997821.2A Active CN112909107B (zh) 2018-09-16 2018-09-16 太阳电池单晶硅基绒面生成工艺

Country Status (1)

Country Link
CN (2) CN109326660B (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111139531A (zh) * 2020-03-18 2020-05-12 常州时创能源股份有限公司 单晶硅片的制绒添加剂及其应用
CN112812776A (zh) * 2019-11-15 2021-05-18 苏州阿特斯阳光电力科技有限公司 一种腐蚀液及其制备方法和应用
CN112853496A (zh) * 2019-11-12 2021-05-28 洛阳阿特斯光伏科技有限公司 一种硅棒的表面处理方法及金刚线硅片切割方法
CN117673206A (zh) * 2024-01-31 2024-03-08 正泰新能科技股份有限公司 一种bc电池的制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102005504A (zh) * 2010-10-15 2011-04-06 锦州华昌光伏科技有限公司 可提高太阳电池转化效率的硅片制绒方法
CN104157735A (zh) * 2014-08-14 2014-11-19 山西潞安太阳能科技有限责任公司 一种太阳能电池制绒工艺
CN106601862A (zh) * 2015-10-15 2017-04-26 钧石(中国)能源有限公司 一种降低单晶硅异质结太阳能电池片反射率的制绒方法
US20170236954A1 (en) * 2011-08-05 2017-08-17 Beamreach High efficiency solar cell structures and manufacturing methods
CN108054236A (zh) * 2017-12-06 2018-05-18 苏州润阳光伏科技有限公司 单晶硅片清洗制绒方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102115915B (zh) * 2010-12-31 2012-08-22 百力达太阳能股份有限公司 一种单晶硅制绒添加剂以及单晶硅制绒工艺

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102005504A (zh) * 2010-10-15 2011-04-06 锦州华昌光伏科技有限公司 可提高太阳电池转化效率的硅片制绒方法
US20170236954A1 (en) * 2011-08-05 2017-08-17 Beamreach High efficiency solar cell structures and manufacturing methods
CN104157735A (zh) * 2014-08-14 2014-11-19 山西潞安太阳能科技有限责任公司 一种太阳能电池制绒工艺
CN106601862A (zh) * 2015-10-15 2017-04-26 钧石(中国)能源有限公司 一种降低单晶硅异质结太阳能电池片反射率的制绒方法
CN108054236A (zh) * 2017-12-06 2018-05-18 苏州润阳光伏科技有限公司 单晶硅片清洗制绒方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112853496A (zh) * 2019-11-12 2021-05-28 洛阳阿特斯光伏科技有限公司 一种硅棒的表面处理方法及金刚线硅片切割方法
CN112853496B (zh) * 2019-11-12 2022-11-11 洛阳阿特斯光伏科技有限公司 一种硅棒的表面处理方法及金刚线硅片切割方法
CN112812776A (zh) * 2019-11-15 2021-05-18 苏州阿特斯阳光电力科技有限公司 一种腐蚀液及其制备方法和应用
CN111139531A (zh) * 2020-03-18 2020-05-12 常州时创能源股份有限公司 单晶硅片的制绒添加剂及其应用
CN117673206A (zh) * 2024-01-31 2024-03-08 正泰新能科技股份有限公司 一种bc电池的制备方法

Also Published As

Publication number Publication date
CN112909107A (zh) 2021-06-04
CN109326660B (zh) 2020-10-20
CN112909107B (zh) 2024-01-02

Similar Documents

Publication Publication Date Title
CN109326660A (zh) 太阳电池单晶硅基绒面生成工艺
TWI511196B (zh) Method of Polishing Silica Flocking Cleaning Process
CN108054224B (zh) 一种晶体硅太阳能电池的绒面结构及其制备方法
CN104576831B (zh) 一种单晶硅片无醇制绒工艺及其制绒添加剂
CN103614778A (zh) 用于单晶硅片的无醇碱性制绒液、制绒方法、太阳能电池片及其制作方法
CN102154711A (zh) 一种单晶硅清洗液及预清洗工艺
JP6553731B2 (ja) N型両面電池のウェットエッチング方法
CN103087850B (zh) 一种单晶硅片预清洗液及其清洗方法
AU2017204336A1 (en) A method for producing a textured structure of a crystalline silicon solar cell
CN102181935B (zh) 一种制作单晶硅绒面的方法及腐蚀液
CN101540351A (zh) 一种在单晶硅太阳能电池表面上蚀刻绒面的方法
CN102779907B (zh) 高效异质结电池的制备方法
CN107675263A (zh) 单晶硅金字塔结构绒面的优化方法
CN102270702A (zh) 一种制绒白斑单晶硅片的返工工艺
CN103981575B (zh) 一种单晶硅片的退火制绒方法
CN107924836A (zh) 一种单晶硅片表面织构化的方法
CN111584343A (zh) 一种可同时实现抛光和制绒的单晶硅片的制备方法
CN111105995B (zh) 一种单晶硅片的清洗及制绒方法
CN108922941A (zh) 一种太阳能perc电池的制备方法
CN107904663A (zh) 一种晶体硅抛光添加剂及其用于晶体硅抛光的使用方法
CN103904157A (zh) 一种硅片制绒方法
CN109935645A (zh) 一种干法黑硅片的高效量产制备方法
CN109980043A (zh) 一种湿法黑硅片的高效量产制备方法
CN112436074A (zh) 一种适用于双面硅太阳能电池的制绒清洗工艺
CN103643289A (zh) 基于化学刻蚀的单晶硅表面结构及其制备及应用

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee after: Jiangsu Runyang New Energy Technology Co.,Ltd.

Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee before: SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co.,Ltd.

Address after: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee after: Jiangsu Runyang New Energy Technology Co.,Ltd.

Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee before: Jiangsu Runyang New Energy Technology Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20201231

Address after: Room 201, building 1, 58 Xiangjiang Road, Yancheng Economic and Technological Development Zone, Yancheng City, Jiangsu Province 224000

Patentee after: Jiangsu Runyang century Photovoltaic Technology Co.,Ltd.

Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province

Patentee before: Jiangsu Runyang New Energy Technology Co.,Ltd.

CB03 Change of inventor or designer information
CB03 Change of inventor or designer information

Inventor after: Han Chao

Inventor after: Li Haibo

Inventor before: Han Chao