CN104157735A - 一种太阳能电池制绒工艺 - Google Patents

一种太阳能电池制绒工艺 Download PDF

Info

Publication number
CN104157735A
CN104157735A CN201410399144.9A CN201410399144A CN104157735A CN 104157735 A CN104157735 A CN 104157735A CN 201410399144 A CN201410399144 A CN 201410399144A CN 104157735 A CN104157735 A CN 104157735A
Authority
CN
China
Prior art keywords
solar cell
cleaning
etching
cell process
texturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410399144.9A
Other languages
English (en)
Inventor
刘进
周水生
董建明
贾彦科
苑虎
赵科巍
申开瑜
张之栋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanxi Luan Solar Energy Technology Co Ltd
Original Assignee
Shanxi Luan Solar Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanxi Luan Solar Energy Technology Co Ltd filed Critical Shanxi Luan Solar Energy Technology Co Ltd
Priority to CN201410399144.9A priority Critical patent/CN104157735A/zh
Publication of CN104157735A publication Critical patent/CN104157735A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Hybrid Cells (AREA)
  • Photovoltaic Devices (AREA)

Abstract

本发明涉及太阳能电池制绒领域,特别是涉及一种单晶硅制绒工艺。一种太阳能电池制绒工艺,在现有的太阳能电池制绒工艺前增加预清洗和喷淋水洗步骤。本发明在初始对脏污单晶片进行有效清洗,从源头上制止不合格片的产生,降低脏污不合格片比例,提高产品品质,降低生产成本;本发明预清洗过程中采用清洗槽中的清洗液对硅片更加彻底清洗,阻止了污垢对主要工艺槽(刻蚀槽)的影响,增加了工艺稳定性;本发明预清洗过程中在硅片表面形成新的制绒结构,提高了电池片光电转换效率。

Description

一种太阳能电池制绒工艺
技术领域
本发明涉及太阳能电池制绒领域,特别是涉及一种单晶硅制绒工艺。
背景技术
目前太阳能电池所采用的单晶制绒工艺流程为:碱制绒—喷淋水洗—流动水洗—酸洗—喷淋水洗—流动水洗—热水洗—热风干。本工艺流程将未经过预清洗的单晶硅片通过机械手直接放入碱洗工艺槽,而碱洗工艺只针对硅片表面进行刻蚀和简单清洗,不能清洗手指印、油脂等大分子有机物,达不到清洗的目的。产生的不合格片较多,并影响电池片的转换效率。
发明内容
    本发明所要解决的技术问题是:如何解决当前碱洗工艺只针对硅片表面进行刻蚀和简单清洗,不能清洗手指印、油脂等大分子有机物,达不到清洗的目的的问题。
    本发明所采用的技术方案是:一种太阳能电池制绒工艺,其特征在于:在现有的太阳能电池制绒工艺前增加预清洗和喷淋水洗步骤。也就是按照预清洗—喷淋水洗—碱制绒—喷淋水洗—流动水洗—酸洗—喷淋水洗—流动水洗—热水洗—热风干的步骤进行,其中喷淋水洗与现有的喷淋水洗过程完全相同。
作为一种优选方式:预清洗在预清洗槽中进行,清洗槽中的清洗液初始按照体积比,去离子水:25%浓度双氧水:45%浓度氢氧化钾=200:25:2配置。
作为一种优选方式:硅片在清洗槽中清洗时,保持清洗槽中的清洗液温度为60摄氏度,清洗时间为6分钟。
作为一种优选方式:清洗槽中的清洗液需要补充,补液时每400片硅片补充0.6升25%浓度双氧水。
本发明的有益效果是:本发明在初始对脏污单晶片进行有效清洗,从源头上制止不合格片的产生,降低脏污不合格片比例,提高产品品质,降低生产成本;本发明预清洗过程中采用清洗槽中的清洗液对硅片更加彻底清洗,阻止了污垢对主要工艺槽(刻蚀槽)的影响,增加了工艺稳定性;本发明预清洗过程中在硅片表面形成新的制绒结构,提高了电池片光电转换效率。
具体实施方式
本发明是在现有太阳能单晶硅片制绒工艺流程上的改进,具体实施过程如下:
在现有清洗制绒步骤前添加一步双氧水预清洗工艺,使用槽式设备(与现有的碱制绒槽类似),预清洗槽槽体容量为279L(长宽高参数为100cm×62cm×45cm)。槽体下铺设去离子热水自动补给管、自动排水管、自动控制电动加热棒(恒温60度)、25%双氧水自动补给管、45%KOH溶液自动补给管。该槽体内管道液体供应量与供应时机均由设备内PLC控制系统控制,设定首次补液量与批次补液量,设定槽内液体清洗批次为20批,达到使用次数后自动更换液体。自动控制系统控制设备自动运行,遇突发状况切换手动模式进行人为操作。
在预清洗槽中初始加入200L去离子水(热水),25%浓度双氧水25L,45%浓度氢氧化钾2L,工艺温度保持在60摄氏底,清洗时间为6分钟,补液为每400片补充0.6L双氧水。
实验参考数据:(以1000片为单位进行多次对比试验)
为改进前: 
改进后:
通过改造前后大量实验数据分析表明,本专利能够整体提高电池片合格率6%左右,提高电池产品光电转换效率0.1%左右。

Claims (4)

1.一种太阳能电池制绒工艺,其特征在于:在现有的太阳能电池制绒工艺前增加预清洗和喷淋水洗步骤。
2.根据权利要求1所述的一种太阳能电池制绒工艺,其特征在于:预清洗在预清洗槽中进行,清洗槽中的清洗液初始按照体积比,去离子水:25%浓度双氧水:45%浓度氢氧化钾=200:25:2配置。
3.根据权利要求2所述的一种太阳能电池制绒工艺,其特征在于:硅片在清洗槽中清洗时,保持清洗槽中的清洗液温度为60摄氏度,清洗时间为6分钟。
4.根据权利要求3所述的一种太阳能电池制绒工艺,其特征在于:清洗槽中的清洗液需要补充,补液时每400片硅片补充0.6升25%浓度双氧水。
CN201410399144.9A 2014-08-14 2014-08-14 一种太阳能电池制绒工艺 Pending CN104157735A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410399144.9A CN104157735A (zh) 2014-08-14 2014-08-14 一种太阳能电池制绒工艺

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410399144.9A CN104157735A (zh) 2014-08-14 2014-08-14 一种太阳能电池制绒工艺

Publications (1)

Publication Number Publication Date
CN104157735A true CN104157735A (zh) 2014-11-19

Family

ID=51883190

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410399144.9A Pending CN104157735A (zh) 2014-08-14 2014-08-14 一种太阳能电池制绒工艺

Country Status (1)

Country Link
CN (1) CN104157735A (zh)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105914259A (zh) * 2016-05-31 2016-08-31 宁夏银星能源光伏发电设备制造有限公司 金刚线切割单晶硅片快速清洗制绒工艺
CN107180894A (zh) * 2017-05-19 2017-09-19 常州亿晶光电科技有限公司 改善perc高效电池片外观的洗磷工艺
CN107968130A (zh) * 2017-11-27 2018-04-27 乐山新天源太阳能科技有限公司 硅片清洗制绒工艺
CN107968062A (zh) * 2017-11-27 2018-04-27 乐山新天源太阳能科技有限公司 硅片清洗制绒装置
CN109326660A (zh) * 2018-09-16 2019-02-12 苏州润阳光伏科技有限公司 太阳电池单晶硅基绒面生成工艺
CN110387584A (zh) * 2019-08-15 2019-10-29 东方环晟光伏(江苏)有限公司 一种大尺寸叠瓦电池制绒装置及其控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102154711A (zh) * 2010-12-31 2011-08-17 百力达太阳能股份有限公司 一种单晶硅清洗液及预清洗工艺
CN102938431A (zh) * 2012-10-19 2013-02-20 上海中智光纤通讯有限公司 一种太阳电池的硅片清洗制绒方法
CN103426972A (zh) * 2013-08-28 2013-12-04 中电投西安太阳能电力有限公司 一种硅片制绒的清洗方法
JP2014096459A (ja) * 2012-11-08 2014-05-22 Mitsubishi Electric Corp 太陽電池用半導体基板の表面処理方法、太陽電池用半導体基板の製造方法、太陽電池の製造方法及び太陽電池製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102154711A (zh) * 2010-12-31 2011-08-17 百力达太阳能股份有限公司 一种单晶硅清洗液及预清洗工艺
CN102938431A (zh) * 2012-10-19 2013-02-20 上海中智光纤通讯有限公司 一种太阳电池的硅片清洗制绒方法
JP2014096459A (ja) * 2012-11-08 2014-05-22 Mitsubishi Electric Corp 太陽電池用半導体基板の表面処理方法、太陽電池用半導体基板の製造方法、太陽電池の製造方法及び太陽電池製造装置
CN103426972A (zh) * 2013-08-28 2013-12-04 中电投西安太阳能电力有限公司 一种硅片制绒的清洗方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105914259A (zh) * 2016-05-31 2016-08-31 宁夏银星能源光伏发电设备制造有限公司 金刚线切割单晶硅片快速清洗制绒工艺
CN105914259B (zh) * 2016-05-31 2017-12-15 宁夏银星能源光伏发电设备制造有限公司 金刚线切割单晶硅片快速清洗制绒工艺
CN107180894A (zh) * 2017-05-19 2017-09-19 常州亿晶光电科技有限公司 改善perc高效电池片外观的洗磷工艺
CN107968130A (zh) * 2017-11-27 2018-04-27 乐山新天源太阳能科技有限公司 硅片清洗制绒工艺
CN107968062A (zh) * 2017-11-27 2018-04-27 乐山新天源太阳能科技有限公司 硅片清洗制绒装置
CN107968062B (zh) * 2017-11-27 2019-09-13 乐山新天源太阳能科技有限公司 硅片清洗制绒装置
CN109326660A (zh) * 2018-09-16 2019-02-12 苏州润阳光伏科技有限公司 太阳电池单晶硅基绒面生成工艺
CN110387584A (zh) * 2019-08-15 2019-10-29 东方环晟光伏(江苏)有限公司 一种大尺寸叠瓦电池制绒装置及其控制方法

Similar Documents

Publication Publication Date Title
CN104157735A (zh) 一种太阳能电池制绒工艺
CN103372548A (zh) 一种大型铝制翅片自动清洗装置及方法
CN202830502U (zh) 一种高硅氧玻璃纤维布洗布槽
CN203002693U (zh) 金刚线切割单晶硅片脱胶预清洗装置
CN105133039A (zh) 一种单多晶制绒设备
CN102315318B (zh) 太阳能电池硅片节水清洗装置
CN110344122A (zh) 低制绒添加剂耗量的单晶硅制绒方法
CN203265136U (zh) 节能清洗机
CN107639070A (zh) 一种硅片清洗设备及清洗工艺
CN101345185A (zh) 一种二极管的酸洗工艺
CN205146761U (zh) 一种硅片清洗系统
CN102242402A (zh) 太阳能电池硅片的制绒装置
CN203648908U (zh) 一种基于外循环式水加热系统的多晶硅脱胶清洗水槽
CN104624552A (zh) 硅片清洗机溢流纯水循环系统
CN102294331A (zh) 一种单晶硅原料的清洗方法
CN205152401U (zh) 一种蓝宝石粗磨后清洗装置
CN202151623U (zh) 太阳能电池硅片节水清洗装置
CN202105819U (zh) 菜花状及表面附氧化物的多晶硅原料的清洗装置
CN206103941U (zh) 一种活性炭酸洗水循环装置
CN102873042A (zh) 一种用于去除硅片表面硅酸钠残留的喷淋装置
CN211679035U (zh) 一种清洗超大尺寸单晶硅片的清洗溢流系统
CN204138820U (zh) 去除多晶硅片制绒后表面多孔硅的装置
CN203343111U (zh) 一种硅片清洗机的节水系统
CN203076283U (zh) 一种管材清洗系统
CN205035469U (zh) 一种电解锰补液系统

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20141119