CN109277695A - A kind of laser coaxial vision system suitable for stereochemical structure workpiece - Google Patents
A kind of laser coaxial vision system suitable for stereochemical structure workpiece Download PDFInfo
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- CN109277695A CN109277695A CN201810866181.4A CN201810866181A CN109277695A CN 109277695 A CN109277695 A CN 109277695A CN 201810866181 A CN201810866181 A CN 201810866181A CN 109277695 A CN109277695 A CN 109277695A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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Abstract
The invention discloses a kind of laser coaxial vision systems suitable for stereochemical structure workpiece, including camera, light combination mirror, laser scanning galvanometer, field lens, flat illumination sources, laser beam, computer, imaging sensor is provided on camera, camera object lens, the optical axis of light combination mirror and camera is arranged in 45° angle, field lens is the confocal plane field lens for laser beam wavelength and flat illumination sources wavelength, the color difference of illumination light wavelength and optical maser wavelength is eliminated using visual-alignment software, the light-emitting surface of flat illumination sources is towards the laser emitting direction of laser scanning galvanometer, and the optical axis of field lens is perpendicular through its central point.The present invention has the advantages that error caused by avoiding working principle to increase accuracy, the low cost of positioning, is mainly used for the radiographic measurement with the workpiece of stereochemical structure.
Description
Technical field
The present invention relates to optical image field of measuring technique, and in particular to a kind of suitable for the workpiece for having stereochemical structure
Coaxial vision alignment system when being laser machined.
Background technique
When doing Precision Machining to workpiece using laser, usually workpiece is positioned using NI Vision Builder for Automated Inspection, can be exempted from
It is advantageous in many applications except the demand to precision positioning jig.And have more with the coaxial vision system of laser same light path
Add prominent advantage.
Referring to Fig. 1, being applied to the conventional coaxial vision system of laser processing generally by camera, camera object lens, camera
Lighting source, light combination mirror, laser scanning galvanometer and achromatism flat field microscope group at.Wherein, the optical axis of light combination mirror and camera at
45 ° of arrangements, through special coating film treatment, make the laser beam (wavelength λ 1) of glancing incidence that can penetrate light combination mirror, through laser scanning
The entrance pupil that achromatism plane field lens is injected after vibration mirror reflected, focuses on focal plane through achromatism field lens；Vision is used on workpiece
The feature of positioning, by achromatism field lens and camera object lens, images in the image of camera under lighting source (wavelength X 2) illumination
Sensor.The Galilean telescope system of camera object lens and achromatism field lens composition, can greatly reduce camera fields of view, mention
High-resolution, and then aligning accuracy is improved, meanwhile, by the swing of laser scanning galvanometer, vision can and entirely be laser machined
Range, without using high-precision motion platform that the feature for being used for vision positioning on workpiece is moved to the field range of camera
Within.
So-called achromatism field lens is more lens sets using production of the different refractivity material Jing Guo special designing, makes it
It eliminates to specific two wavelength (i.e. laser wavelength lambda 1 and illumination light wavelength X 2) color difference, thus in entire laser operating range
Inside it is overlapped vision system coordinate system and laser system coordinate system.But the shortcomings that achromatism field lens be it is expensive,
And often bore is too big for achromatism field lens, can not work under planar light source or arched roof light source, thus unsuitable pair
There is the workpiece of stereochemical structure to measure.
Since conventional coaxial vision system is under strip light or circular lamp illumination using achromatism field lens, if workpiece
Upper feature used for positioning has stereochemical structure, and the difference of workpiece location will lead to the shadow for the location feature that cameras capture arrives
As also different, so as to cause position error, referring to Fig. 2, the position for placing workpiece twice differs Δ x, bright spot is reflected in workpiece
On position differ Δ x '.
The workpiece image that camera measurement goes out in camera coordinates system and predeterminated position and angle there are certain deviations, need
Position and angle compensation are carried out to the graphics processing in laser controlling software, carry out correct position of the laser on workpiece
Processing.The contour line of cameras capture workpiece is illuminated as location feature in the strip light or circular lamp of conventional coaxial vision system
Under, contour line is actually the imaging of lighting source after workpiece surface reflects in the camera, the sharp corners of the edge of work
On cambered surface have the angle for meeting reflection law, therefore edge can be illuminated, and be captured by a camera as profile.But it is vertical
The position of reflection point, that is to say image feature profile, has with the placement location of workpiece in its edge arc angle of the workpiece of body structure
It closes, the difference of upper discharge position can cause reflection point position to differ twice, which is the workpiece of stereochemical structure in light
Source, strip source or the lower main source for generating vision positioning error of annular light source illumination.
Summary of the invention
Aiming at the defects existing in the prior art, it is an object of the present invention to provide one kind, and working principle to be avoided to make
At error to increase the coaxial vision system for being suitable for the processing of stereochemical structure workpiece laser of the accuracy of positioning, low cost.
Present invention technical solution used for the above purpose is: a kind of laser suitable for stereochemical structure workpiece
Coaxial vision system, including camera, light combination mirror, laser scanning galvanometer, field lens, flat illumination sources, laser beam, computer,
It is provided with imaging sensor, camera object lens on the camera, described image sensor is towards the light combination mirror and its light
For axis by the light combination mirror towards the center of camera one side, the camera object lens are connected to camera and its optical axis and institute
Camera optical axis coincidence is stated, the focusing ring of the camera object lens is set to infinite distant positions, is in the imaging sensor
The position of one times of focal length of camera object lens；The optical axis of the light combination mirror and camera in 45° angle be arranged, the light combination mirror it is two-sided
It is coated with for 45 ° of incident anti-reflection films of laser beam wavelength, the laser beam is radiated at light combination Jing Xiangduizhaomingguangyuan reflection
The another side in face；Illumination reflecting surface of the laser light incident end of the laser scanning galvanometer towards the light combination mirror, laser entrance pupil
Optical axis and the optical axis of the camera be vertically intersected on the illumination light reflection surface of the light combination mirror, laser emitting end with it is described
Field lens is fixedly connected；The optical axis coincidence and the field lens of the optical axis of the field lens and the laser scanning galvanometer exit end are adopted
With small-bore confocal plane field lens；The laser of the light-emitting surface of the flat illumination sources towards the laser scanning galvanometer goes out
Direction is penetrated, and the optical axis of the field lens, perpendicular through its central point, central point is arranged diameter and is slightly larger than the field lens outer diameter
Circular through hole, so that the field lens is embedded in the circular through hole；Laser processing software and visual-alignment are installed on the computer
Software, the laser processing software are used to control the movement of the reflector plate of the laser scanning galvanometer, and control laser
Emit and close in due course the laser beam；The computer is connected with the camera, for receiving described image sensor
Acquired image；
When using equivalent optical path processing, the light combination mirror is coated on one side for 45 ° of incident reflections of optical maser wavelength
Film；When using equivalent light path, light combination mirror described in the optical axis angular alignment at 45 ° at the laser light incident end of the laser scanning galvanometer
Laser reflection face center, the camera and camera object lens are set to the another side of the light combination mirror laser reflection face；The photograph
The optical axis coincidence of camera and camera object lens passes through the conjunction along the light beam that the wavelength for being overlapped optical axis incidence is lighting source wavelength
After light microscopic with the optical axis coincidence at the laser light incident end of the laser scanning galvanometer；
The side length or diameter of the flat illumination sources need to be not less than 2 times of square laser range of work side length, the circle
Shape through-hole diameter need to be no more than the flat illumination sources light-emitting surface to the 1/3 of the confocal plane distance.
When using equivalent light path, if also needed to use with the visible light beam of the laser beam same light path as indicating light,
And the wavelength of the instruction light is just the wavelength of the flat illumination sources, then the laser reflection face of the light combination mirror must plate
There is a semi-reflective film for the flat illumination sources wavelength 45° angle incidence, and the another side opposite with the laser reflection face
The anti-reflection film for the flat illumination sources wavelength 45° angle incidence must be coated with.
The field lens is the confocal plane field lens for laser beam wavelength and the flat illumination sources wavelength, i.e., along
The wavelength collimated light beam identical with flat illumination sources wavelength of the optical axis incidence at the laser light incident end of the laser scanning galvanometer
With laser beam focus on same confocal plane after field lens.
The flat illumination sources overall structure is square or the light-emitting surface size of the round and described flat illumination sources
It is as big as possible, and setting is aligned with the lower edge of the field lens.
The spectrum of the flat illumination sources is narrow-band, and central wavelength is the lighting source that the field lens requires
Confocal wavelength, and its illumination light issued is diffused light, is shone in the region close to circular through hole to flat illumination sources
The light intensity of unit does appropriate reinforcement, to make up light intensity loss caused by central openings, makes on confocal plane in laser operating range
Illumination it is substantially uniform.
The visual-alignment software includes vision correcting function, for the camera coordinates under flat illumination sources illumination
System is corrected, and camera coordinates system and galvanometer coordinate system part superposition are made；
Its antidote is: step 1, with the laser processing software control laser and the laser scanning galvanometer,
The coordinate value of the grid for being used on vision correcting material get setting on the confocal plane, each lattice point is sat in galvanometer
It is known in mark system；Step 2, the laser scanning galvanometer is swung to selected position angle, with the captured by camera
Coordinate value of each lattice point image within the vision in camera coordinates system；Step 3, by each lattice point in galvanometer coordinate system
Coordinate value and coordinate value of its image in camera coordinates system arrange into the one-to-one table of comparisons, swash as camera described
Vision correcting file on the selected galvanometer position angle of optical scanning galvanometer；Step 4, the vision correcting function includes high-order
Fitting algorithm, to the neighbouring corresponding lattice point of lattice point image of the point on above-mentioned lattice point image does not exist in camera coordinates system
Coordinate value in galvanometer coordinate system does Interpolation calculating, extrapolates the coordinate value in the corresponding galvanometer coordinate system of the point.
Described when making the vision correcting file it can only be swashed with the vision correcting file of the visual-alignment software development
Position that the vibration lens of optical scanning galvanometer is taken and carried out under angle using.
When to workpiece calibration contraposition, potential reference point is added with laser is needed if selected vision is fixed on the surface of the workpiece
When the position of work is closer apart, visual distortion correction is done without using the visual-alignment software；When selected visual-alignment is joined
Examination point and need to do the position that laser machines it is apart from each other when, need to do visual distortion correction in visual-alignment reference point locations.
Beneficial effects of the present invention: 1, due to using the lesser confocal plane field lens of bore, so that flat illumination sources obtain
Be applied to coaxial vision system, and then make coaxial vision system can be applied to stereochemical structure workpiece visual-alignment
Processing；2, field lens can pass through for bit errors caused by laser beam wavelength and the color difference of flat illumination sources optical wavelength
Computer software carries out local visual correction and is eliminated；3, the price of confocal plane field lens is far below achromatism field lens, has
Conducive to save the cost.In conclusion the present invention, which has, avoids error caused by working principle to increase the accuracy of positioning, make
The low advantage of valence.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of conventional coaxial vision system；
Fig. 2 is that conventional coaxial vision system the schematic illustration of position error occurs when handling stereochemical structure workpiece；
A kind of Fig. 3 system structure diagram used by principle to illustrate the invention；
Fig. 4 is the connection relationship diagram of the computer and relevant device, software；
Fig. 5 is to have brightness of the stereochemical structure workpiece under the irradiation of infinity plane lighting source on feature contour in workpiece
On distribution curve schematic diagram；
Fig. 6 is another system structure diagram equivalent with Fig. 3, is equally applicable to the present invention.
In figure: 1 camera, 2 light combination mirrors, 3 laser scanning galvanometers, 4 field lenses, 5 flat illumination sources, 6 laser beams, 7 calculate
Machine, 8 imaging sensors, 9 camera object lens, 10 laser light incident ends, 11 laser emitting ends, 12 confocal planes, 13 circular through holes, 14
Laser machine software, 15 visual-alignment softwares.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
Embodiment 1:
Please refer to Fig. 3, Fig. 4, Fig. 6, a kind of laser coaxial vision system suitable for stereochemical structure workpiece, including photograph
Machine 1, light combination mirror 2, laser scanning galvanometer 3, field lens 4, flat illumination sources 5, laser beam 6, computer 7, it is characterised in that: shine
Imaging sensor 8, camera object lens 9 are provided on camera 1, imaging sensor 8 is towards light combination mirror 2 and its optical axis passes through light combination
For mirror 2 towards the center of 1 one side of camera, camera object lens 9 are connected to camera 1 and its optical axis and 1 optical axis coincidence of camera,
The focusing ring of camera object lens 9 is set to infinite distant positions, and imaging sensor 8 is made to be in the position of 9 one times of focal lengths of camera object lens；
The optical axis of light combination mirror 2 and camera 1 is arranged in 45° angle, and the two-sided of light combination mirror 2 is coated with for laser beam 6 wavelength, 45 ° of incidences
Anti-reflection film, laser beam 6 is radiated at the another side of 2 relative illumination source reflecting surface of light combination mirror；The laser of laser scanning galvanometer 3
For incidence end 10 towards the illumination reflecting surface of light combination mirror 2, the optical axis of laser entrance pupil and the optical axis of camera are vertically intersected on light combination mirror
Illumination light reflection surface, laser emitting end 11 is fixedly connected with field lens 4；The optical axis and laser scanning galvanometer of field lens 4 are emitted
The optical axis coincidence and field lens 4 at end 11 use small-bore confocal plane field lens；The light-emitting surface direction of flat illumination sources 5 swashs
The laser emitting direction of optical scanning galvanometer 3, and the optical axis of field lens 4, perpendicular through its central point, central point is arranged diameter and omits
Greater than the circular through hole 13 of 4 outer diameter of field lens, field lens 4 is made to be embedded in the circular through hole 13；Laser processing is installed soft on computer 7
Part 14 and visual-alignment software 15, laser processing software 14 are used to control the movement of the reflector plate of laser scanning galvanometer 3, and
Control laser emits in due course and closes laser beam 6；Computer 7 is connected with camera 1, adopts for receiving imaging sensor 8
The image collected；
When using equivalent optical path processing, light combination mirror 2 is coated on one side for 45 ° of incident reflectance coatings of optical maser wavelength；It adopts
When with equivalent light path, the laser reflection face of the optical axis at the laser light incident end 10 of laser scanning galvanometer 3 angular alignment light combination mirror 2 at 45 °
Center, camera 1 and camera object lens 9 are set to the another side of 2 laser reflection face of light combination mirror；Camera 1 and camera object lens 9
Optical axis coincidence shakes after light combination mirror 2 with laser scanning along the light beam that the wavelength for being overlapped optical axis incidence is 5 wavelength of lighting source
The optical axis coincidence at the laser light incident end 10 of mirror 3；
The side length or diameter of flat illumination sources 5 need to be not less than 2 times of square laser range of work side length, circular through hole
13 diameters need to be no more than 5 light-emitting surface of flat illumination sources to the 1/3 of 12 distance of confocal plane.
In the present invention, when using equivalent light path, if also need to use with the visible light beam of 6 same light path of laser beam as
It indicates light, and indicates that the wavelength of light is just the wavelength of flat illumination sources 5, then the laser reflection face of light combination mirror 2 must be coated with needle
To the semi-reflective film of 5 wavelength 45° angle incidence of flat illumination sources, and the another side opposite with laser reflection face must be coated with and be directed to
The anti-reflection film of 5 wavelength 45° angle incidence of flat illumination sources；
Field lens 4 is the confocal plane field lens for 5 wavelength of 6 wavelength of laser beam and flat illumination sources, i.e., sweeps along laser
The wavelength collimated light beam identical with 5 wavelength of flat illumination sources for retouching the optical axis incidence at the laser light incident end 10 of galvanometer 3 passes through field
It is focused on same confocal plane 12 after mirror 4 with laser beam 6；
5 overall structure of flat illumination sources be square or round and flat illumination sources 5 light-emitting surface sizes as far as possible
Greatly, and with the lower edge of field lens 4 it is aligned setting；
The spectrum of flat illumination sources 5 is narrow-band, and central wavelength is the confocal wave for the lighting source that field lens 4 requires
It is long, and its illumination light issued is diffused light, in the region close to circular through hole 13 to the luminous list of flat illumination sources 5
The light intensity of member does appropriate reinforcement, to make up light intensity loss caused by central openings, makes on confocal plane 12 in laser operating range
Illumination it is substantially uniform；
Visual-alignment software 15 includes vision correcting function, for the camera coordinates system under illuminating to flat illumination sources 5
It is corrected, makes camera coordinates system and galvanometer coordinate system part superposition；Its antidote is: step 1, with laser processing software
14 control lasers and laser scanning galvanometer 3, the net for being used on vision correcting material get setting on confocal plane 12
Lattice, the coordinate value of each lattice point be in galvanometer coordinate system it is known, step 2, laser scanning galvanometer 3 is swung to selected
Position angle, capture coordinate value of each lattice point image within the vision in camera coordinates system with camera 1, step 3,
It is one-to-one right that coordinate value of each lattice point in galvanometer coordinate system and coordinate value of its image in camera coordinates system are arranged into
According to table, as vision correcting file of the camera 1 on the galvanometer position angle that laser scanning galvanometer 3 is selected, step 4, depending on
Feel that correcting function includes high order fitting algorithm, to not neighbouring lattice of the point on above-mentioned lattice point image in camera coordinates system
Coordinate value of the corresponding lattice point of point image in galvanometer coordinate system does Interpolation calculating, extrapolates the corresponding galvanometer of the point
Coordinate value in coordinate system；
It can only the laser scanning when making the vision correcting file with the vision correcting file that visual-alignment software 15 makes
It position that the vibration lens of galvanometer 3 is taken and is carried out under angle using since field lens 4 shines only for 6 wavelength of laser beam and plane
5 optical wavelength of Mingguang City source is confocal plane 12, and there is no the color difference for being directed to the two wavelength is eliminated, vision correcting file is only right
It is effective to make selected galvanometer position angle when it, the scope of application is only limitted to camera under the selected galvanometer position angle
In one's power, therefore the correcting process only makes camera coordinates system and galvanometer coordinate system part superposition in 1 visual field；
When to workpiece calibration contraposition, potential reference point is added with laser is needed if selected vision is fixed on the surface of the workpiece
When the position of work is closer apart, visual distortion correction is done without using visual-alignment software 15；When selected visual-alignment refers to
Point and needs do the position that laser machines it is apart from each other when, need to do visual distortion correction in visual-alignment reference point locations, with
So that camera 1 is obtained accurate coordinate value of the loci in galvanometer coordinate system, guarantees laser processing in correct position
On；
The internal or external galvanometer control card of computer 7 is connect with the driving circuit signal of laser scanning galvanometer 3, makes to swash
Light machining software 14 can control the movement of the reflector plate of laser scanning galvanometer 3.
The side length or diameter of flat illumination sources 5 need to be not less than 2 times of square laser range of work side length, please refer to figure
5, in the case where infinitely great flat illumination sources 5 illuminate, the bright spot or bright line for having its contour feature of the workpiece of stereochemical structure are in workpiece
On position it is no longer related relative to the position of light source to workpiece, and the only relative position phase with observer's (i.e. camera 1)
It closes, and observer and flat illumination sources 5 are compared away from far many at a distance from workpiece, workpiece placement position is micro- relative to observer
The position deviation of bright spot caused by little deviation or bright line on workpiece and the common position precision tolerance phase of laser processing
Smaller to can be ignored than often, this principle shows the size (side length or circle of square light source of flat illumination sources 5
The diameter of shape light source) it is the bigger the better, therefore generally it is greater than 2 times of laser processing range；The centre bit of flat illumination sources 5
It sets and must be provided with circular through hole 13, so that laser beam 6 is processed through circular through hole 13 to workpiece, while camera 1
It needs to measure the location of workpiece through circular through hole 13；Circular through hole 13 is brought for the workpiece on confocal plane 12
New illumination boundary condition certainly will cause the sensitivity of feature bright spot or bright line position relative to lighting source position on workpiece,
Therefore, circular through hole 13 is the smaller the better, and the remoter circular through hole 13 the better at a distance of workpiece, and 13 diameter of circular through hole is generally required to need
No more than 5 light-emitting surface of flat illumination sources to the 1/3 of 12 distance of confocal plane.
The working principle of the invention is: before laser machining, production is directed to the laser beam machining program of specific workpiece,
Geometric figure including needing to be processed on workpiece with laser beam 6, laser parameter used in each pel in geometric figure
(power, pulse frequency, movement speed of focal beam spot etc.) and the geometric figure relative on workpiece for doing vision pair
The distance and angle orientation of the signature identification of position, it is necessary to including for comparing the contraposition for being used as alignment features mark on workpiece
Template；Contraposition template is adopted when including the profile for the alignment features image that camera 1 extracts, the shooting alignment features of camera 1
Galvanometer position angle (coordinate value i.e. under the corresponding galvanometer coordinate system of camera fields of view central point), and in the galvanometer position
The vision correcting file of camera coordinates system under angle setting degree.The laser beam machining program to complete is saved as laser processing file
In computer 7, for being called when production and processing.
When production and processing, laser processing software 14 is loaded into the laser processing file for being suitable for workpiece to be processed, it is artificial or on
Expect that workpiece is put predeterminated position by mechanism, makes that the position laser machined is needed to be on confocal plane 12.Starting laser processing
Program, laser scanning galvanometer 3 swing to the galvanometer position angle taken when production visual-alignment template, and camera 1 shoots workpiece
It is above used for the signature identification of visual-alignment, the image processing module in visual-alignment software 15 to extract in signature identification image
The feature contour that prestores compares analysis in feature contour, with contraposition template, calculates alignment features image in camera coordinates system
In practical placement position and angle, by vision correcting file converse placement position of the workpiece in galvanometer coordinate system and
Angle, laser processing software 14 command the correct position on workpiece of laser beam 6 to carry out processing operation.
Embodiment 2:
Peel diameter is the overlay film on one group of pad of 1mm on the flexible circuit board having a size of 160x80mm, by pad
It exposes.The quadrangle of flexible circuit board is respectively provided with " ten " word mark for positioning reference.
Laser beam 6 selects the laser of 1064nm wavelength, and flat illumination sources 5 select 650nm wavelength light, flat illumination light
The size in source 5 is 360 × 360mm, and the bore of circular through hole 13 and field lens 4 is 90mm, field lens 4 select 254mm focal length,
1064/650 confocal plane field lens, 4 operating distance of field lens be 278mm, the range of work of the laser beam 6 on workpiece be 175 ×
175mm。
The laser beam machining program of the workpiece is made first: 1, placing a workpiece in laser work zone；2, driving laser is swept
Contraposition " ten " word in 3 alignment pieces of galvanometer on an angle is retouched, it is made clearly to image in the central location of camera sensor 8,
Shoot photo, the image processing module in visual-alignment software 15 extracts the profile of contraposition " ten " word image, storage profile and
Galvanometer position angle this moment puts a ferrous metal business card in contraposition " ten " word location, laser and galvanometer is driven to beat
It is used for the standard grid of vision correcting out, laser scanning galvanometer 3 to return to position angle when shooting contraposition " ten " word, and shooting should
Grid, visual-alignment software captures coordinate value of each lattice point image in camera coordinates system, with each lattice point in galvanometer coordinate system
Coordinate value list one-to-one list together, as the vision correcting file under the galvanometer position angle；3, by above-mentioned
Method successively makes the contraposition template of other three contraposition " ten " words；4, the CAD diagram files of the workpiece laser is imported into add
In work software 14, the selected pel for needing to remove overlay film is arranged laser processing parameter (power, frequency, speed etc.)；It selectes again
" ten " word pel is respectively aligned on quadrangle, is calculated its geometric center (contraposition center), is calculated each pel for needing to laser machine
Relative to centrical distance and angle orientation；5, all data of aforesaid operations are saved backup as laser processing file.
Driving galvanometer during above-mentioned production laser beam machining program, the operations such as print grid, take pictures, calculate all are logical
What the button crossed on software through pictures interface was completed.
The process of production and processing is as follows: 1, laser machining the laser processing file that software 14 is loaded into the workpiece；2, in laser
Put a product in processing district；3, laser scanning galvanometer 3 is successively put by the template prestored in visual-alignment program after triggering processing
It moves, take pictures, extracting four contraposition " ten " character wheels exterior features, comparing with template contours, calculate the center of each contraposition " ten " word image
Coordinate value of the point in camera coordinates system calculates it in galvanometer coordinate system according to the vision correcting file at each contraposition " ten " word
In coordinate value, and then extrapolate position coordinates of the geometric center of workpiece in galvanometer coordinate system and the angle put；4, swash
Light machining software 14 is sat according to the pel that the adjustment of the location of workpiece and angle of above-mentioned actual measurement needs to do laser lift-off overlay film in galvanometer
Actual coordinate and angle in mark system；5, transmitting laser beam 6 is processed.
Not yet the flexible circuit board of patch can be considered as plane.The embodiment shows can fitting completely for this case invention
The coaxial vision of workpiece for not stereochemical structure aligns processing.
Embodiment 3:
The keycap of computor-keyboard carries out character engraving, and keycap is mounted on spray finishing jig, and spray finishing jig precision is very low, because
This needs does vision positioning to every keycap.
Keycap size is about 15x15mm, and edge corner angle are the chamfering that radius is 0.3mm, and the position precision tolerance of engraving is wanted
Seek ± 0.2mm.
The present embodiment uses 1/2 target surface 7.11x5.33mm camera image sensor 8, pixel 1600x1200, camera object
The focal length 55mm of mirror 9,4 focal length 254mm of field lens.The visual field of camera 1 is about 32x24mm, and a keycap can be completely covered, depending on
The resolution ratio of feel system is every pixel 0.02mm.
Use the edge contour of complete keycap as positioning identifier, geometric center is anchor point, and the character carved is often
Also it requires in keycap immediate vicinity, this is the typical case for not needing to be corrected with visual distortion.
Laser beam machining program manufacturing process is as follows: 1, place a workpiece in laser processing zone, keycap upper surface with it is confocal
Plane 12 flushes；2 driving galvanometers are directed at a keycap, shoot photo, extract the edge contour of keycap image, store the profile
Galvanometer position angle this moment is as contraposition template；3, the CAD diagram shelves of spraying keyboard jig are imported into laser processing software
14, set engraving character and its relative position relative to the keycap geometric center of the keycap；4, to remaining keycap weight
The operation of multiple above-mentioned steps 2,3；5,10 keyboards are processed with the laser beam machining program made above, is surveyed using image measurer
The average deviation and angle average deviation on the direction character position X, Y on each keycap are measured, to in above-mentioned steps 3
The character position and angle of setting do compensating approach.
The present embodiment is that this case invention is applied to the typical case for having stereochemical structure workpiece and not needing visual distortion correction situation
Using.Bit errors caused by distorting are less than 0.015mm, are less than vision addressability, also much smaller than position precision tolerance.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, nothing
By from the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by institute
Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent elements of the claims
All changes be included within the present invention.It should not treat any reference in the claims as limiting related right
It is required that.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only
It contains an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art answer
When considering the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments that member is understood that.
Claims (8)
1. a kind of laser coaxial vision system suitable for stereochemical structure workpiece, including camera (1), light combination mirror (2), laser are swept
Retouch galvanometer (3), field lens (4), flat illumination sources (5), laser beam (6), computer (7), it is characterised in that: the camera
(1) be provided with imaging sensor (8), camera object lens (9) on, described image sensor (8) towards the light combination mirror (2) and
For its optical axis by the light combination mirror (2) towards the center of camera (1) one side, the camera object lens (9) are connected to camera (1)
And its optical axis and the camera (1) optical axis coincidence, the focusing ring of the camera object lens (9) are set to infinite distant positions, make
The imaging sensor (8) is in the position of (9) one times of focal lengths of camera object lens；The light of the light combination mirror (2) and camera (1)
Axis is arranged in 45° angle, and the two-sided anti-reflection film being coated with for laser beam (6) wavelength 45o incidence of the light combination mirror (2) is described
Laser beam (6) is radiated at the another side of light combination mirror (2) relative illumination source reflecting surface；The laser of the laser scanning galvanometer (3)
For incidence end (10) towards the illumination reflecting surface of the light combination mirror (2), the optical axis of laser entrance pupil is vertical with the optical axis of the camera
The illumination light reflection surface of the light combination mirror is intersected at, laser emitting end (11) are fixedly connected with the field lens (4)；The field lens
(4) optical axis and the optical axis coincidence and the field lens (4) of the laser scanning galvanometer exit end (11) use small-bore total
Focal plane field lens；The light-emitting surface of the flat illumination sources (5) towards the laser emitting direction of the laser scanning galvanometer (3),
And the optical axis of the field lens (4), perpendicular through its central point, diameter is arranged slightly larger than the field lens (4) outer diameter in central point
Circular through hole (13) makes the field lens (4) be embedded in the circular through hole (13)；Laser processing is installed soft on the computer (7)
Part (14) and visual-alignment software (15), laser processing software (14) is for controlling the anti-of the laser scanning galvanometer (3)
The movement of piece is penetrated, and controls laser and emits and close the laser beam (6) in due course；The computer (7) and the photograph
Machine (1) is connected, for receiving described image sensor (8) acquired image；
When using equivalent optical path processing, the light combination mirror (2) is coated on one side for 45 ° of incident reflectance coatings of optical maser wavelength；
When using equivalent light path, light combination mirror described in the optical axis angular alignment at 45 ° at the laser light incident end (10) of the laser scanning galvanometer (3)
(2) laser reflection face center, the camera (1) and camera object lens (9) are set to light combination mirror (2) laser reflection face
Another side；The optical axis coincidence of the camera (1) and camera object lens (9) is lighting source (5) along the wavelength for being overlapped optical axis incidence
The light beam of wavelength passes through the light combination mirror (2) optical axis coincidence with the laser light incident end (10) of the laser scanning galvanometer (3) afterwards；
The side length or diameter of the flat illumination sources (5) need to be not less than 2 times of square laser range of work side length, the circle
Through-hole (13) diameter need to be no more than the flat illumination sources (5) light-emitting surface to the 1/3 of the confocal plane (12) distance.
2. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
When using equivalent light path, if also needing to use with the visible light beam of the laser beam (6) same light path as indicating light, and it is described
The wavelength for indicating light is just the wavelength of the flat illumination sources (5) again, then the laser reflection face of the light combination mirror (2) must be coated with
For the semi-reflective film of the flat illumination sources (5) wavelength 45° angle incidence, and the another side opposite with the laser reflection face
The anti-reflection film for the flat illumination sources (5) wavelength 45° angle incidence must be coated with.
3. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
The field lens (4) is the confocal plane field lens for laser beam (6) wavelength and the flat illumination sources (5) wavelength, i.e., along
The wavelength of the optical axis incidence at the laser light incident end (10) of the laser scanning galvanometer (3) is identical as flat illumination sources (5) wavelength
Collimated light beam pass through field lens (4) focused on same confocal plane (12) with laser beam (6) afterwards.
4. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
Flat illumination sources (5) overall structure is square or the light-emitting surface size of the round and described flat illumination sources (5) is most
May be big, and setting is aligned with the lower edge of the field lens (4).
5. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
The spectrum of the flat illumination sources (5) is narrow-band, and central wavelength is the confocal of the lighting source that the field lens (4) require
Wavelength, and its illumination light issued is diffused light, in the region close to circular through hole (13) to the hair of flat illumination sources (5)
The light intensity of light unit does appropriate reinforcement, to make up light intensity loss caused by central openings, makes laser work on confocal plane (12)
Illumination in range is substantially uniform.
6. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
The visual-alignment software (15) includes vision correcting function, for the camera coordinates system under flat illumination sources (5) illumination
It is corrected, makes camera coordinates system and galvanometer coordinate system part superposition；
Its antidote is: step 1, laser and the laser scanning galvanometer (3) are controlled with the laser processing software (14),
The grid for being used on vision correcting material get setting on the confocal plane (12), the coordinate value of each lattice point are shaking
It is known in mirror coordinate system；Step 2, the laser scanning galvanometer (3) is swung into selected position angle, with the photograph
Machine (1) captures coordinate value of each lattice point image within the vision in camera coordinates system；Step 3, each lattice point is sat in galvanometer
Coordinate value and coordinate value of its image in camera coordinates system in mark system arrange into the one-to-one table of comparisons, as camera
(1) the vision correcting file on the galvanometer position angle that the laser scanning galvanometer (3) are selected；Step 4, the vision correcting
Function includes high order fitting algorithm, to the not neighbouring lattice point image pair of the point on above-mentioned lattice point image in camera coordinates system
Coordinate value of the lattice point answered in galvanometer coordinate system does Interpolation calculating, extrapolates in the corresponding galvanometer coordinate system of the point
Coordinate value.
7. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 6, it is characterised in that:
It can only be swept the laser when making the vision correcting file with the vision correcting file that the visual-alignment software (15) makes
Retouch carried out under the position and angle that the vibration lens of galvanometer (3) is taken using.
8. a kind of laser coaxial vision system suitable for stereochemical structure workpiece according to claim 1, it is characterised in that:
When to workpiece calibration contraposition, if the fixed position phase laser machined to potential reference point with needs of selected vision on the surface of the workpiece
Away from it is closer when, do visual distortion correction without using the visual-alignment software (15)；When selected visual-alignment reference point with
Need to do the position laser machined it is apart from each other when, need to do visual distortion correction in visual-alignment reference point locations.
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