CN117644294B - Laser processing method and control device based on visual preview guidance - Google Patents
Laser processing method and control device based on visual preview guidance Download PDFInfo
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Abstract
The invention discloses a laser processing method and a control device based on visual preview guidance. Loading a processing graph and carrying out parameter configuration on a camera; correcting the vibrating mirror and calibrating a processing coordinate system; marking out an array mark point based on the vibrating mirror, and correcting and calibrating the camera based on the array mark point; displaying an imaging picture of a camera in a processing working space to display a to-be-processed area of a workpiece placed in a processing range of a vibrating mirror, and carrying out preview guide processing on a processing figure based on the imaging picture of the camera, so that the processing figure after the preview guide processing is attached to the to-be-processed area of the workpiece, focal length change information of the camera is obtained, then the focal length change information of the camera is used as focal length change information of the vibrating mirror, and a processing track is generated according to the processing figure after the preview guide processing and the focal length change information of the vibrating mirror; and executing laser marking according to the processing track. The invention can greatly improve the precision and efficiency of the laser machine.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a laser processing method and a control device based on visual preview guidance.
Background
In the laser processing process, the workpiece is required to be processed at the designated position, the traditional mode is to adopt a red light preview mode to indicate the laser processing position, namely, before laser processing, the red light is controlled to indicate the laser to emit light, the vibrating mirror swings at a certain speed according to the contour of the processing content, the red light contour of the processing position is displayed on the workpiece, and an operator places the workpiece at a proper position according to the position indicated by the red light, so that the laser is processed at the designated position of the workpiece. There are two disadvantages to this red preview approach; firstly, the accuracy of red light preview is lower, the red light indication outline has a certain line width, the centers of red light and laser possibly have non-concentricity, and the position indicated by the red light is not coincident with the position of laser processing, so that the position accuracy of the laser processing is not high, and the high-accuracy laser processing cannot be met. Secondly, for some poisonous and harmful processing environments with high temperature and high humidity, operators cannot enter a processing area, so that red light preview indication processing cannot be finished.
In addition, in some special processing scenes, such as the field of military industry and aerospace, the design specification and the manufactured specification of the large-scale workpiece are limited by the manufacturing process, certain differences exist between the workpieces, large differences exist or certain three-dimensional deformation exists, no obvious characteristic target point exists on the workpieces, and the requirement of visual positioning is not met; the position and the size of the laser processing are required to be adjusted along with the shape according to the current size and the deformation of the workpiece, and certain precision requirements are required to be met, and at the moment, the processing requirements cannot be met by adopting the traditional red light indication and visual target grabbing positioning modes.
Disclosure of Invention
The invention aims to provide a laser processing method and a control device based on visual preview guidance aiming at the defects in the prior art.
To achieve the above object, in a first aspect, the present invention provides a laser processing method based on visual preview guidance, including the steps of:
Step 1, loading a processing pattern, and carrying out parameter configuration on a camera arranged on one side of a vibrating mirror;
Step 2, correcting the vibrating mirror, obtaining a mapping relation between a processing coordinate system of the vibrating mirror and a processing working space coordinate system by calculating distortion of the vibrating mirror, and calibrating the processing coordinate system of the vibrating mirror;
Step 3, marking out an array mark point based on the vibrating mirror, and correcting and calibrating a camera based on the array mark point;
Displaying an imaging picture of a camera in a processing working space to display a to-be-processed area of a workpiece placed in a processing range of the vibrating mirror, and carrying out preview guide processing on a processing figure based on the imaging picture of the camera to enable the processing figure after the preview guide processing to be attached to the to-be-processed area of the workpiece, obtaining focal length change information of the camera, taking the focal length change information of the camera as focal length change information of the vibrating mirror, and generating a processing track according to the processing figure after the preview guide processing and the focal length change information of the vibrating mirror;
and 5, executing laser marking according to the generated processing track.
Further, the preview guiding process for the processing graph includes the following steps:
Step 4.1, dragging a cursor of a camera in the processing working space to move to a certain node of a to-be-processed area of a workpiece, enabling the camera to focus the node, displaying the node in the processing working space, and recording the current focal length of the camera;
step 4.2, performing node editing on the processing graph to drag a corresponding node of the processing graph to a node where a cursor of a camera is located;
And 4.3, sequentially processing the rest nodes of the processing graph according to the mode, finally enabling the processing graph after the preview guide processing to be attached to the area to be processed, and obtaining focal length change information of the camera.
Further, the parameter configuration includes configuring XY mirror, exposure, contrast, and brightness of the camera.
Further, the galvanometer is corrected by a multipoint correction method.
Furthermore, the array mark points are points with odd rows, odd columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of the processing coordinate system of the vibrating mirror, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying the mark point data, so that the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained.
In a second aspect, the present invention provides a laser processing control device based on visual preview guidance, comprising:
the parameter configuration module is used for carrying out parameter configuration on the camera arranged at one side of the vibrating mirror;
The data processing module is used for correcting the vibrating mirror, obtaining the mapping relation between the processing coordinate system of the vibrating mirror and the processing working space coordinate system by calculating the distortion of the vibrating mirror, and calibrating the processing coordinate system of the vibrating mirror and the processing working space coordinate system; and identifying the vibrating mirror to mark an array mark point, and correcting and calibrating the camera based on the array mark point;
And the control unit is used for controlling the imaging picture of the camera to be displayed in the processing working space so as to display the to-be-processed area of the workpiece placed in the processing range of the vibrating mirror, and carrying out preview guide processing on the processing graph based on the imaging picture of the camera, so that the processing graph after the preview guide processing is attached to the to-be-processed area of the workpiece, focal length change information of the camera is obtained, then the focal length change information of the camera is used as the focal length change information of the vibrating mirror, a processing track is generated according to the processing graph after the preview guide processing and the focal length change information of the vibrating mirror, and laser marking is carried out according to the generated processing track.
Further, the method for performing the preview guide processing on the processing graph specifically includes the following steps:
Dragging a cursor of a camera in the processing working space to move to a certain node of a to-be-processed area of a workpiece, enabling the camera to focus the node, displaying the node in the processing working space, and simultaneously recording the current focal length of the camera;
Node editing is carried out on the processing graph so as to drag the corresponding node of the processing graph to the node where the cursor of the camera is located;
And processing the rest nodes of the processing graph in sequence according to the mode, finally enabling the processing graph after the preview guide processing to be attached to the area to be processed, and obtaining the focal length change information of the camera.
Further, the parameter configuration includes configuring XY mirror, exposure, contrast, and brightness of the camera.
Further, the galvanometer is corrected by a multipoint correction method.
Furthermore, the array mark points are points with odd rows, odd columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of the processing coordinate system of the vibrating mirror, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying the mark point data, so that the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained.
The beneficial effects are that: according to the invention, the processing coordinate system of the vibrating mirror is calibrated, the array marking points are marked by utilizing the vibrating mirror, the camera is calibrated according to the array marking points marked by the vibrating mirror, so that the coordinate system of the camera, the processing coordinate system of the vibrating mirror and the coordinate system of the processing working space are all combined, the processing graph is previewed and guided according to the imaging of the area to be processed by the camera, and meanwhile, the focal length change information of the camera is obtained and is used as the focal length change information of the vibrating mirror, so that the processing track attached to the area to be processed is generated, the corresponding processing graph is processed in the area to be processed which is not horizontal, and the precision and the efficiency of the laser machine are greatly improved.
Drawings
FIG. 1 is a flow chart of a laser processing method based on visual preview guidance according to an embodiment of the present invention;
FIG. 2 is a schematic view of imaging of an array marker point prior to camera calibration;
FIG. 3 is a schematic view of imaging an array marker point after camera calibration;
FIG. 4 is a schematic view of the structure of a workpiece according to an embodiment of the invention;
Fig. 5 is a schematic diagram of a laser processing control device based on visual preview guidance according to an embodiment of the present invention.
Detailed Description
The invention will be further illustrated by the following drawings and specific examples, which are carried out on the basis of the technical solutions of the invention, it being understood that these examples are only intended to illustrate the invention and are not intended to limit the scope of the invention.
As shown in fig. 1 to 4, an embodiment of the present invention provides a laser processing method based on visual preview guidance, including the following steps:
And step 1, loading a processing pattern, and carrying out parameter configuration on a camera arranged on one side of the vibrating mirror. The parameter configuration includes the parameters of XY mirror image, exposure, contrast, brightness, and the like of the configuration camera.
And 2, correcting the vibrating mirror, obtaining the mapping relation between the machining coordinate system of the vibrating mirror and the machining working space coordinate system by calculating the distortion of the vibrating mirror, and calibrating the machining coordinate system of the vibrating mirror and the machining working space coordinate system. The prior art multi-point correction method is preferably used to correct the galvanometer. The distortion and calibration of the vibrating mirror are calculated in the prior art, specifically, firstly, array marking points are drawn in a coordinate system of a working space, the marking points are marked under a processing coordinate system of the vibrating mirror by using the vibrating mirror, then, the actual coordinates of the marking points are measured through external measuring equipment, after the actual coordinates and the theoretical coordinates are compared and calculated, the relation between the coordinate system of the working space and the processing coordinate system of the vibrating mirror is known, namely, the distortion of the vibrating mirror is known, then, the calibration of the processing coordinate system of the vibrating mirror can be completed based on the distortion of the vibrating mirror, and the processing coordinate system of the vibrating mirror after calibration coincides with the coordinate system of the processing working space.
And 3, marking out an array mark point based on the galvanometer, and correcting and calibrating the camera based on the array mark point. Specifically, the array mark points are points with odd rows, odd columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of the processing coordinate system of the vibrating mirror, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying mark point data, so that the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained. The array mark points occupy the imaging space of the camera as much as possible, after the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained, software can adjust the center and the angle displayed by the camera according to the relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror, and then translate and rotate the coordinate system of the camera according to the center and the angle displayed by the camera, so that the coordinate system of the camera and the processing coordinate system of the vibrating mirror are overlapped, and further the coordinate system of the processing working space is also overlapped. Referring specifically to fig. 2 and 3, fig. 2 illustrates an image of an array mark point displayed by a camera before calibration, and fig. 3 illustrates an image of an array mark point displayed by a camera after calibration.
And 4, displaying an imaging picture of a camera in a processing working space to display a to-be-processed area of a workpiece placed in a processing range of the vibrating mirror, and carrying out preview guide processing on a processing figure based on the imaging picture of the camera, so that the processing figure after the preview guide processing is attached to the to-be-processed area of the workpiece to obtain focal length change information of the camera, then taking the focal length change information of the camera as focal length change information of the vibrating mirror, and generating a processing track according to the processing figure after the preview guide processing and the focal length change information of the vibrating mirror. The processing working space is an operation space of laser processing control software, and information such as a coordinate system of a processing pattern is displayed. Since the coordinate system of the camera is overlapped with the processing coordinate system of the galvanometer, the focal length change information of the camera can be used as the focal length change information of the galvanometer when the processing track is generated. Specifically, the preview guiding process for the processing graph includes the following steps:
And 4.1, dragging a cursor of the camera in the processing working space to move to a certain node of a to-be-processed area of the workpiece, enabling the camera to focus the node, clearly displaying the node in the processing working space, and simultaneously recording the current focal length of the camera. The cursor of the camera is generally a cross cursor, and can be dragged after being selected by clicking a mouse, after the cursor is dragged to the position of the node, the camera can automatically focus the node, and then the node can be clearly displayed in the processing working space.
And 4.2, performing node editing on the processing graph to drag the corresponding node of the processing graph to the node where the cursor of the camera is located.
And 4.3, sequentially processing the rest nodes of the processing graph according to the mode, finally enabling the processing graph after the preview guide processing to be attached to the area to be processed, and obtaining focal length change information of the camera.
Referring to fig. 4, the workpiece to be machined is shown as an inclined plane, and the corresponding to-be-machined area has a total of a, b, c, d nodes. When the processing graph is subjected to preview guide processing, firstly, a cursor of a camera is moved to an a node, the camera can focus the a node, the focus is moved to the a node, at the moment, the focal length of the camera at the a node is recorded, and then the corresponding node of the processing graph is dragged to the a node. And then moving the cursor of the camera to the node b, focusing the node b by the camera, moving the focus to the node b, recording the focal length of the camera at the node b at the moment, and dragging another corresponding node of the processed image to the node b. According to the mode, the other two nodes of the processing image are correspondingly moved to the node c and the node D, so that the processed processing image is attached to the area to be processed, and the original 2D processing image is attached to the 3D workpiece and converted. After the focal length of each node is recorded, the focal length change process of the camera is regarded as linear change, and thus focal length change information of the camera is obtained. In addition, the area to be processed of the workpiece is not limited to an inclined plane, and may be a curved surface, etc., and a plurality of planes are required to be adopted to fit the curved surface, then corresponding intermediate nodes are inserted, and preview guiding processing is performed on the processing graph according to all the nodes.
It should be noted that, the generation of the processing track is in the prior art, that is, the corresponding contour track is generated according to the processing graph node, if the whole processing surface is to be covered with laser for processing, then the internal filling track is generated according to the newly generated contour track, which is not described again.
And 5, executing laser marking according to the generated processing track. The vibrating mirror is preferably a 3D vibrating mirror, and can automatically control the automatic zooming in the Z direction according to the focal length change information of the vibrating mirror, so that laser marking is performed on a non-horizontal area to be processed, the marked pattern is attached to the area to be processed, and the marked pattern is seen downwards from the right upper direction and is identical to the original processed pattern.
Referring to fig. 2 to 5, based on the above embodiments, it can be easily understood by those skilled in the art that the present invention further provides a laser processing control device based on visual preview guidance, where the control device includes a parameter configuration module 1, a data processing module 2, and a control unit 3.
The parameter configuration module 1 is used for performing parameter configuration on a camera arranged on one side of the galvanometer. The parameter configuration includes the parameters of XY mirror image, exposure, contrast, brightness, and the like of the configuration camera.
The data processing module 2 is used for correcting the vibrating mirror, obtaining the mapping relation between the processing coordinate system of the vibrating mirror and the processing working space coordinate system by calculating the distortion of the vibrating mirror, and calibrating the processing coordinate system of the vibrating mirror and the processing working space coordinate system. The prior art multi-point correction method is preferably used to correct the galvanometer. The distortion and calibration of the vibrating mirror are calculated in the prior art, specifically, firstly, array marking points are drawn in a coordinate system of a working space, the marking points are marked under a processing coordinate system of the vibrating mirror by using the vibrating mirror, then, the actual coordinates of the marking points are measured through external measuring equipment, after the actual coordinates and the theoretical coordinates are compared and calculated, the relation between the coordinate system of the working space and the processing coordinate system of the vibrating mirror is known, namely, the distortion of the vibrating mirror is known, then, the calibration of the processing coordinate system of the vibrating mirror can be completed based on the distortion of the vibrating mirror, and the processing coordinate system of the vibrating mirror after calibration coincides with the coordinate system of the processing working space.
The data processing module 2 is further used for identifying the marking points of the array marking points of the galvanometer, and correcting and calibrating the camera based on the marking points of the array. Specifically, the array mark points are points with odd rows, odd columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of the processing coordinate system of the vibrating mirror, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying mark point data, so that the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained. The array mark points occupy the imaging space of the camera as much as possible, after the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror is obtained, software can adjust the center and the angle displayed by the camera according to the relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror, and then translate and rotate the coordinate system of the camera according to the center and the angle displayed by the camera, so that the coordinate system of the camera and the processing coordinate system of the vibrating mirror are overlapped, and further the coordinate system of the processing working space is also overlapped. Referring specifically to fig. 2 and 3, fig. 2 illustrates an image of an array mark point displayed by a camera before calibration, and fig. 3 illustrates an image of an array mark point displayed by a camera after calibration.
The control unit 3 is configured to control an imaging screen of a camera to be displayed in a processing working space, to display a region to be processed of a workpiece placed in a processing range of the galvanometer, and to perform preview guiding processing on a processing pattern based on the imaging screen of the camera, so that the processing pattern after the preview guiding processing is attached to the region to be processed of the workpiece, and then to use focal length change information of the camera as focal length change information of the galvanometer, and to generate a processing track according to the processing pattern after the preview guiding processing and the focal length change information of the galvanometer. And finally, executing laser marking according to the generated processing track.
The processing working space is an operation space of laser processing control software, and information such as a coordinate system of a processing pattern is displayed. Since the coordinate system of the camera is overlapped with the processing coordinate system of the galvanometer, the focal length change information of the camera can be used as the focal length change information of the galvanometer when laser processing is performed. Specifically, the preview guide processing for the processing graphics includes:
And dragging a cursor of the camera in the processing working space to move to a certain node of the area to be processed of the workpiece, enabling the camera to focus the node, clearly displaying the node in the processing working space, and simultaneously recording the current focal length of the camera. The cursor of the camera is generally a cross cursor, and can be dragged after being selected by clicking a mouse, after the cursor is dragged to the position of the node, the camera can automatically focus the node, and then the node can be clearly displayed in the processing working space.
And editing the nodes of the processing graph to drag the corresponding nodes of the processing graph to the nodes where the cursors of the cameras are positioned.
And processing the rest nodes of the processing graph in sequence according to the mode, finally enabling the processing graph after the preview guide processing to be attached to the area to be processed, and obtaining the focal length change information of the camera.
Referring to fig. 4, the workpiece to be machined is shown as an inclined plane, and the corresponding to-be-machined area has a total of a, b, c, d nodes. When the processing graph is subjected to preview guide processing, firstly, a cursor of a camera is moved to an a node, the camera can focus the a node, the focus is moved to the a node, at the moment, the focal length of the camera at the a node is recorded, and then the corresponding node of the processing graph is dragged to the a node. And then moving the cursor of the camera to the node b, focusing the node b by the camera, moving the focus to the node b, recording the focal length of the camera at the node b at the moment, and dragging another corresponding node of the processed image to the node b. According to the mode, the other two nodes of the processing image are correspondingly moved to the node c and the node D, so that the processed processing image is attached to the area to be processed, and the original 2D processing image is attached to the 3D workpiece and converted. After the focal length of each node is recorded, the focal length change process of the camera is regarded as linear change, and thus focal length change information of the camera is obtained. In addition, the area to be processed of the workpiece is not limited to an inclined plane, and may be a curved surface, etc., and a plurality of planes are required to be adopted to fit the curved surface, then corresponding intermediate nodes are inserted, and preview guiding processing is performed on the processing graph according to all the nodes.
It should be noted that, the generation of the processing track is in the prior art, that is, the corresponding contour track is generated according to the processing graph node, if the whole processing surface is to be covered with laser for processing, then the internal filling track is generated according to the newly generated contour track, which is not described again.
The vibrating mirror is preferably a 3D vibrating mirror, and can automatically control the automatic zooming in the Z direction according to the focal length change information of the vibrating mirror, so that laser marking is performed on a non-horizontal area to be processed, the marked pattern is attached to the area to be processed, and the marked pattern is seen downwards from the right upper direction and is identical to the original processed pattern.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that other parts not specifically described are within the prior art or common general knowledge to a person of ordinary skill in the art. Modifications and alterations may be made without departing from the principles of this invention, and such modifications and alterations should also be considered as being within the scope of the invention.
Claims (8)
1. The laser processing method based on visual preview guidance is characterized by comprising the following steps of:
Step 1, loading a processing pattern, and carrying out parameter configuration on a camera arranged on one side of a vibrating mirror;
Step 2, correcting the vibrating mirror, obtaining a mapping relation between a processing coordinate system of the vibrating mirror and a processing working space coordinate system by calculating distortion of the vibrating mirror, and calibrating the processing coordinate system of the vibrating mirror;
Step 3, marking out an array mark point based on the vibrating mirror, and correcting and calibrating a camera based on the array mark point;
Displaying an imaging picture of a camera in a processing working space to display a to-be-processed area of a workpiece placed in a processing range of the vibrating mirror, and carrying out preview guide processing on a processing figure based on the imaging picture of the camera to enable the processing figure after the preview guide processing to be attached to the to-be-processed area of the workpiece, obtaining focal length change information of the camera, taking the focal length change information of the camera as focal length change information of the vibrating mirror, and generating a processing track according to the processing figure after the preview guide processing and the focal length change information of the vibrating mirror;
the preview guiding processing of the processing graph comprises the following steps:
Step 4.1, dragging a cursor of a camera in the processing working space to move to a certain node of a to-be-processed area of a workpiece, enabling the camera to focus the node, displaying the node in the processing working space, and recording the current focal length of the camera;
step 4.2, performing node editing on the processing graph to drag a corresponding node of the processing graph to a node where a cursor of a camera is located;
Step 4.3, sequentially processing other nodes of the processing graph in a mode of processing the nodes, finally enabling the processing graph after the preview guide processing to be attached to a region to be processed, and obtaining focal length change information of a camera;
and 5, executing laser marking according to the generated processing track.
2. The method of claim 1, wherein the parameter configuration includes configuring XY mirror, exposure, contrast, and brightness of the camera.
3. The laser processing method based on visual preview guidance according to claim 1, wherein the galvanometer is corrected by a multi-point correction method.
4. The laser processing method based on visual preview guidance according to claim 1, wherein the array mark points are points with odd number rows, odd number columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of a processing coordinate system of the galvanometer, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying mark point data, so that the mapping relation between the coordinate system of the camera and the processing coordinate system of the galvanometer is obtained.
5. A laser processing control device based on visual preview guidance, comprising:
the parameter configuration module is used for carrying out parameter configuration on the camera arranged at one side of the vibrating mirror;
The data processing module is used for correcting the vibrating mirror, obtaining the mapping relation between the processing coordinate system of the vibrating mirror and the processing working space coordinate system by calculating the distortion of the vibrating mirror, and calibrating the processing coordinate system of the vibrating mirror and the processing working space coordinate system; and identifying the vibrating mirror to mark an array mark point, and correcting and calibrating the camera based on the array mark point;
The control unit is used for controlling the imaging picture of the camera to be displayed in the processing working space so as to display a to-be-processed area of the workpiece placed in the processing range of the vibrating mirror, and carrying out preview guide processing on the processing graph based on the imaging picture of the camera, so that the processing graph after the preview guide processing is attached to the to-be-processed area of the workpiece, focal length change information of the camera is obtained, then the focal length change information of the camera is used as focal length change information of the vibrating mirror, a processing track is generated according to the processing graph after the preview guide processing and the focal length change information of the vibrating mirror, and laser marking is carried out according to the generated processing track;
The method for carrying out preview guide processing on the processing graph comprises the following specific steps:
Dragging a cursor of a camera in the processing working space to move to a certain node of a to-be-processed area of a workpiece, enabling the camera to focus the node, displaying the node in the processing working space, and simultaneously recording the current focal length of the camera;
Node editing is carried out on the processing graph so as to drag the corresponding node of the processing graph to the node where the cursor of the camera is located;
And processing the rest nodes of the processing graph in sequence according to the mode of processing the nodes, finally enabling the processing graph after the preview guide processing to be attached to the area to be processed, and obtaining the focal length change information of the camera.
6. A visual preview guide-based laser machining control device according to claim 5, wherein said parameter configuration includes configuring XY mirror, exposure, contrast and brightness of a camera.
7. The vision preview guide-based laser machining control device of claim 5, wherein the galvanometer is corrected using a multi-point correction method.
8. The laser processing control device based on visual preview guidance according to claim 5, wherein the array mark points are points with odd number rows, odd number columns, equal intervals and equal sizes, the centers of the array mark points are arranged at the centers of a processing coordinate system of the vibrating mirror, and the camera calculates imaging distortion of the camera according to the positions and the sizes of the mark points by identifying mark point data, so as to obtain the mapping relation between the coordinate system of the camera and the processing coordinate system of the vibrating mirror.
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