CN108406123A - 3 d part calibration system and method in a kind of laser processing - Google Patents
3 d part calibration system and method in a kind of laser processing Download PDFInfo
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- CN108406123A CN108406123A CN201810252063.4A CN201810252063A CN108406123A CN 108406123 A CN108406123 A CN 108406123A CN 201810252063 A CN201810252063 A CN 201810252063A CN 108406123 A CN108406123 A CN 108406123A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses 3 d part calibration system and method in a kind of laser processing, system includes that target is carved in manipulator, arm end flange, galvanometer system, paraxonic mounting plate, industrial camera, parts to be processed and examination；Galvanometer system is installed on a robotic arm by arm end flange；Galvanometer system is installed together with industrial camera by paraxonic mode by paraxonic mounting plate；Parts to be processed, examination are carved target and are respectively fixed on work top, and industrial camera lower part is located at.Using the calibration system and method in the present invention, stringent mechanical Set and Positioning is not necessarily to the installation of industrial camera and galvanometer；Solve the problems, such as that part looks for position difficult in the processing of laser three-D part；3 d part reference plane need to only be overlapped to placement with work top, manipulator guiding industrial camera realizes that part looks for position automatically, and efficient, precision is secure.
Description
Technical field
The invention belongs to technical field of laser processing, be related to a kind of 3 d part calibration system and method, more particularly to one
Kind realizes the system that 3 d part positioning is processed by vision positioning, guiding clamping in the laser galvanometer system of arm end
Method.
Background technology
In field of laser processing, the multiple degrees of freedom characteristic of manipulator is usually utilized, laser galvanometer system of processing is mounted on
Arm end such as performs etching part, cuts at the processing.
The laser processing of 3 d part the processing such as performs etching mainly for the surface of 3 d part.It is controlled using galvanometer and is
System realizes the surface processing of 3 d part, needs by the motion control apparatus tune such as six degree of freedom manipulator and multi-shaft interlocked lathe
The position and posture of whole part or galvanometer system.The key of position and pose adjustment is to calculate part and galvanometer system of processing
Between position and posture relationship.The coordinate of part is converted to the coordinate in galvanometer system of processing coordinate system.3 d part
The processing on surface, it is necessary first to which Set and Positioning is carried out to part.Currently, the positioning majority of case of part is fixed by mechanical clamp
Position.Manipulator adjusts position and the posture of galvanometer system of processing by teaching machine, and carrying out examination to the anchor point in part by hand adds
Work looks for position, such as feux rouges simulating cutting etc..After position success is looked in range estimation, position and the posture of Current mechanical hand are preserved in teaching machine
Information.According to the relationship between the anchor point in arbitrary point and part on piece surface, can by the coordinate of part arbitrary point with
Posture information is converted to the ending coordinates and posture information of manipulator, and driving manipulator controls position and the posture of galvanometer system,
Keep it consistent with the posture of position to be processed, the processing of part thus may be implemented.When next part processing, by machinery dress
The position and posture relationship of folder position assurance part and manipulator remain unchanged, to maintain the machining accuracy of part.
But if part does not have mechanical clamping condition, for example larger clamping active force (such as plastics zero can not be born
Part) or part it is larger, heavier, it is difficult to carry out position adjustment when it being made to be just met for machinery positioning condition, it will be difficult to or can not be real
Existing Set and Positioning；Secondly, when processing is carved in examination, realize that part looks for position mainly by range estimation, there are larger uncertainty with it is consistent
Property, this will have a direct impact on the positioning accuracy of part, to influence machining accuracy.
Invention content
In order to solve the above technical problem, the present invention provides a kind of 3 d part calibration systems and method, this method to adopt
Part is positioned with vision system, is positioned and is calculated by a series of automatic vision, realizes the non-contact automatic of part
The three-dimensional coordinate of part and posture information are transformed into robot coordinate system, to realize the three-dimensional zero of galvanometer system by positioning
Part surface processes.
Technical solution is used by the system of the present invention：3 d part calibration system in a kind of laser processing, feature
It is：It is carved including manipulator, arm end flange, galvanometer system, paraxonic mounting plate, industrial camera, parts to be processed and examination
Target；
The galvanometer system is mounted on by the arm end flange on the manipulator；The galvanometer system passes through
The paraxonic mounting plate is installed together with the industrial camera by paraxonic mode；The parts to be processed, examination are carved target and are divided equally
It is not fixed on work top, is located at the industrial camera lower part.
Technical solution is used by the method for the present invention：3 d part scaling method in a kind of laser processing, feature
It is, includes the following steps：
Step 1：Industrial camera (5) is demarcated, the focal length, distortion coefficients of camera lens and principal point coordinate of camera are obtained；
Step 2：Establish the camera coordinates system O of industrial camera (5)c-XcYcZc, establish the galvanometer coordinate system of galvanometer system (3)
OL-XLYLZL；Wherein, OcIndicate camera photocentre, OcZcIt is overlapped with camera optical axis, OcXcIt is parallel to camera pixel horizontal direction, OcYc
It is parallel to camera pixel vertical direction；OLIndicate galvanometer optical center, OLZLWith galvanometer optical axis coincidence, OLXLAlong the X-direction of galvanometer system,
OLYLAlong the Y-direction of galvanometer system；
Step 3：Examination is placed below galvanometer and carves target, so that examination is carved target and is located at galvanometer within sweep of the eye, adjusts manipulator
(1) position so that examination is carved target and is located on the focal plane of galvanometer；
Step 4：The material property that target is carved according to examination, adjustment laser processing power, speed in laser galvanometer system of processing
The laser processing technologies parameter such as degree, frequency so that laser can be carved in examination and clearly etch circular pattern on target, and
It being capable of blur-free imaging in industrial camera；Start galvanometer system (3), is carved in examination and etch circular array pattern, the row of circular array on target
Columns value is as big as possible, but cannot exceed the breadth of industrial camera (5), writes down the center of circle of each circle in circular array in galvanometer coordinate
It is OL-XLYLZLUnder coordinate, with sequence { (XLi,YLi, 0) } it indicates；
Step 5：Write down the position of manipulator (1) and posture information PS at this time1；
Step 6：Mobile manipulator (1) makes the circular array that examination is carved on target be entirely located in the visual field of industrial camera (5),
And positioned at the focal plane of camera；
Step 7：Write down the posture information PS of manipulator (1) at this time2；
Step 8：Industrial camera (5) to examination carve target on circular array take pictures obtain image, obtain the center of circle in circular array
Pixel coordinate obtains coordinate of the center of circle of circular array under camera coordinates system, is denoted as coordinate sequence { (XCi,YCi,0)}；
Step 9：Using matrix-vector MCLIndicate the position relationship between galvanometer coordinate system and camera coordinates system, i.e.,Paraxial vision guiding and the galvanometer system scaling method utilized, obtains matrix-vector MCL；
Step 10：New examination is placed below galvanometer and carves target, and adjustment manipulator (1) makes arm end Flange Plane
Coordinate system is parallel with examination quarter target plane, makes the central shaft of galvanometer vertical with examination quarter target；
Step 11：Start galvanometer system (3), new examination carve etching on target in step 4 circular array figure
Case, and one same size of quarter is mended with same array pitch on the extended line in sideline where minimum a line in circular array
Circle, array size should ensure that the circle that all circles and benefit are carved can be included by camera fields of view.If the center of circle for mending the circle carved is B, institute
Row other end of circle the center of circle be OL, OLThe center of circle of the other end of circle of column is A；Galvanometer optical axis and machinery
Hand end flange (2) center is simultaneously misaligned, and there are bias, are denoted as (Tx, Ty)；X, Y-axis and the arm end flange of galvanometer are flat
The X of areal coordinate system, Y-axis and not parallel, there are angle thetas；
Step 12：Ensure that new examination quarter target position is constant, adjustment manipulator (1) makes arm end flange (2) rotate
180 degree is carved pattern of the etching as step 11 on target in new examination again, obtains being sat based on arm end Flange Plane
The circular array of mark system origin symmetry；
Step 13：Manipulator (1) is adjusted, the camera lens of translation industrial camera (5) makes examination carve the circular array etched on target
Within the scope of camera fields of view, coordinate { (x of all centers of circle under camera coordinates system is obtainedli,yli) and { (x 'li,y′li), and
The mean value for seeking all coordinates obtains coordinate of the arm end flange origin under camera coordinates system (T ' x, T ' y), by MCLSquare
Battle array, is converted to the coordinate under galvanometer coordinate system；
Step 14：The center of circle A, B, the O defined by step 11L3 points of coordinates under camera coordinates system acquire rotation angle θ,
Find out the relational matrix between galvanometer coordinate system and arm end Flange Plane coordinate system；
Step 15：Parts to be processed is placed on work top, allows the datum plane of parts to be processed and the work of system
Make table top coincidence；
Step 16：There are several location feature holes, positioning special in certain one side for the datum plane for being parallel to parts to be processed
The end face in sign hole is generally aligned in the same plane, and parallel with processing datum；If these location feature holes are in parts to be processed coordinate system
Under coordinate be P1、P2、…、PN；
Step 17：Mobile manipulator (1) makes location feature hole be located at industrial camera within sweep of the eye one by one, takes pictures and obtain
Feature holes image is taken, its central coordinate of circle is obtained, and coordinate of the feature holes under camera coordinates system in parts to be processed is calculated
Sequence, according to the relational matrix M of camera coordinates system and arm end Flange Plane coordinate systemCL, obtain parts to be processed feature
Coordinate { (X of the hole under arm end Flange Plane coordinate systemRi,YRi,ZRi)}；
Step 18：Using matrix-vector MPRIt indicates between parts to be processed coordinate system and arm end Flange Plane coordinate system
Position relationship, i.e.,Due to coordinate of the known features hole under parts to be processed coordinate system, it is denoted as
{(XPi,YPi,ZPi), coordinate { (X of the feature holes under arm end Flange Plane coordinate system has been calculatedRi,YRi,
ZRi), M is obtained by LM optimization algorithmsPR；
Step 19：For any point P on part0, by relational matrix MPRIt is calculated in arm end flange
Coordinate under plane coordinate system, to realize the laser processing of 3 d part.
Compared with the existing technology, the beneficial effects of the invention are as follows：
The present invention is positioned and is calculated using contactless automatic vision, and the three-dimensional coordinate of part is transformed into posture information
In arm end Flange Plane coordinate system, to guide galvanometer system to realize the processing of 3 d part surface.Using in the present invention
System calibrating method, before processing, it is only necessary to which primary calibration is all suitable for all parts；When processing, it is only necessary to on part
Feature holes or other characteristic points carry out vision positioning, by the automatic calculating of some row, directly calculate part in galvanometer coordinate
System and the position in arm end Flange Plane coordinate system and posture.Previous 3 d part processing is solved by machinery dress
Position is clamped, by examination to knife, examination is carved, and the range estimations positioning such as feux rouges simulation is inaccurate, and positioning accuracy is not high, and consistency is not high, and efficiency is low
The problems such as.
Description of the drawings
Fig. 1 is the system construction drawing of the embodiment of the present invention；
Fig. 2 is the circular array pattern schematic diagram of the embodiment of the present invention；
Fig. 3 position relationship marks between the arm end Flange Plane coordinate system and galvanometer coordinate system of the embodiment of the present invention
Determine model schematic；
Fig. 4 is the parts to be processed and location feature point schematic diagram of the embodiment of the present invention.
Specific implementation mode
Understand for the ease of those of ordinary skill in the art and implement the present invention, with reference to the accompanying drawings and embodiments to this hair
It is bright to be described in further detail, it should be understood that implementation example described herein is merely to illustrate and explain the present invention, not
For limiting the present invention.
Referring to Fig.1,3 d part calibration system in a kind of laser processing provided by the invention, including manipulator 1, manipulator
Target is carved in end flange 2, galvanometer system 3, paraxonic mounting plate 4, industrial camera 5, parts to be processed 6 and examination；
Galvanometer system 3 is mounted on by arm end flange 2 on manipulator 1；Galvanometer system 3 passes through paraxonic mounting plate 4
It is installed together by paraxonic mode with industrial camera 5；Parts to be processed 6, examination are carved target and are respectively fixed on work top, position
In 5 lower part of industrial camera.
The present invention first demarcates industrial camera, obtains inner parameter；Then, laser examination is placed on work top
Target is carved (or, it is smooth and be fixed on work top to require examination to carve target；Secondly, laser processing technology parameter is adjusted, starts and swashs
Light system of processing carves in examination and etches circular array pattern on target, records the posture information of Current mechanical hand；Mobile manipulator,
So that the circular array pattern that examination is carved on target is placed in the industrial camera visual field, and at clearly image, camera is taken pictures, obtains circular array
Image records the posture information of Current mechanical hand；Then, coordinate of the center of circle of current circular array under camera coordinates system is calculated,
Posture information when according to posture information of the manipulator when taking pictures and etching circular array, the center of circle for calculating current circular array exists
Coordinate in galvanometer coordinate system；In this way, the coordinate sequence using same characteristic point sequence under different coordinates, calculates camera
Relationship between coordinate system and galvanometer coordinate system；Meanwhile the characteristics of being processed using manipulator, by the original of the focal plane of galvanometer system
Point (intersection point of optical axis and focal plane) is set as the virtual manufacture origin of manipulator, in this way, camera coordinates system and machine can be obtained
Relationship between tool hand coordinate system；Finally, mobile manipulator makes the series of features point on part, is respectively placed in camera fields of view
In, and take pictures, it handles, obtains coordinate of the characteristic point under camera coordinates system on part, and according to camera coordinates system and machinery
The relationship of hand coordinate system, coordinate coordinate of the characteristic point on part under camera coordinates system being transformed under robot coordinate system；
In this way, having obtained coordinate of the characteristic point under robot coordinate system on part；In fact, the characteristic point on part is sat in part
Coordinate under mark system is known, so, the relationship between part coordinate system and robot coordinate system can be calculated；In this way,
For any point on part, only it is to be understood that its coordinate (can generally be obtained by CAD mathematical models) in part coordinate system,
Its coordinate under robot coordinate system can be calculated, can also realize processing of the manipulator to 3 d part.
See Fig. 2, Fig. 3 and Fig. 4,3 d part scaling method in a kind of laser processing provided by the invention, including it is following
Step：
Step 1：Industrial camera (5) is demarcated, the focal length, distortion coefficients of camera lens and principal point coordinate of camera are obtained；
Step 2：Establish the camera coordinates system O of industrial camera (5)c-XcYcZc, establish the galvanometer coordinate system of galvanometer system (3)
OL-XLYLZL；Wherein, OcIndicate camera photocentre, OcZcIt is overlapped with camera optical axis, OcXcIt is parallel to camera pixel horizontal direction, OcYc
It is parallel to camera pixel vertical direction；OLIndicate galvanometer optical center, OLZLWith galvanometer optical axis coincidence, OLXLAlong the X-direction of galvanometer system,
OLYLAlong the Y-direction of galvanometer system；
Step 3：Examination is placed below galvanometer and carves target, so that examination is carved target and is located at galvanometer within sweep of the eye, adjusts manipulator
(1) position so that examination is carved target and is located on the focal plane of galvanometer；
Step 4：The material property that target is carved according to examination, adjustment laser processing power, speed in laser galvanometer system of processing
The laser processing technologies parameter such as degree, frequency so that laser can be carved in examination and clearly etch circular pattern on target, and
It being capable of blur-free imaging in industrial camera；Start galvanometer system (3), is carved in examination and etch circular array pattern, the row of circular array on target
Columns value is as big as possible, but cannot exceed the breadth of industrial camera (5), writes down the center of circle of each circle in circular array in galvanometer coordinate
It is OL-XLYLZLUnder coordinate, with sequence { (XLi,YLi, 0) } it indicates；
Step 5：Write down the position of manipulator (1) and posture information PS at this time1；
Step 6：Mobile manipulator (1) makes the circular array that examination is carved on target be entirely located in the visual field of industrial camera (5),
And positioned at the focal plane of camera；
Step 7：Write down the posture information PS of manipulator (1) at this time2；
Step 8：Industrial camera (5) to examination carve target on circular array take pictures obtain image, obtain the center of circle in circular array
Pixel coordinate obtains coordinate of the center of circle of circular array under camera coordinates system, is denoted as coordinate sequence { (XCi,YCi,0)}；
Step 9：Using matrix-vector MCLIndicate the position relationship between galvanometer coordinate system and camera coordinates system, i.e.,Paraxial vision guiding and the galvanometer system scaling method utilized, obtains matrix-vector MCL；
Step 10：New examination is placed below galvanometer and carves target, and adjustment manipulator (1) makes arm end Flange Plane
Coordinate system is parallel with examination quarter target plane, makes the central shaft of galvanometer vertical with examination quarter target；
Step 11：Start galvanometer system (3), new examination carve etching on target in step 4 circular array figure
Case, and one same size of quarter is mended with same array pitch on the extended line in sideline where minimum a line in circular array
Circle, array size should ensure that the circle that all circles and benefit are carved can be included by camera fields of view.If the center of circle for mending the circle carved is B, institute
Row other end of circle the center of circle be OL,OLThe center of circle of the other end of circle of column is A；Galvanometer optical axis and machinery
Hand end flange (2) center is simultaneously misaligned, and there are bias, are denoted as (Tx, Ty)；X, Y-axis and the arm end flange of galvanometer are flat
The X of areal coordinate system, Y-axis and not parallel, there are angle thetas；
Step 12：Ensure that new examination quarter target position is constant, adjustment manipulator (1) makes arm end flange (2) rotate
180 degree is carved pattern of the etching as step 11 on target in new examination again, obtains being sat based on arm end Flange Plane
The circular array of mark system origin symmetry；
Step 13：Manipulator (1) is adjusted, the camera lens of translation industrial camera (5) makes examination carve the circular array etched on target
Within the scope of camera fields of view, coordinate { (x of all centers of circle under camera coordinates system is obtainedli,yli) and { (x 'li,y′li), and
The mean value for seeking all coordinates obtains coordinate of the arm end flange origin under camera coordinates system (T ' x, T ' y), by MCLSquare
Battle array, is converted to the coordinate under galvanometer coordinate system；
Step 14：The center of circle A, B, the O defined by step 11L3 points of coordinates under camera coordinates system acquire rotation angle θ,
Find out the relational matrix between galvanometer coordinate system and arm end Flange Plane coordinate system；
Using eccentric and rotation angle as system compensation value directly in manipulator control system, by current location and posture
In addition eccentric and angle offset, i.e., using the focus of galvanometer processing as the virtual origin of arm end Flange Plane coordinate system,
Matrix-vector M in this wayCLIt can be as the coordinate transformation relation matrix between industrial camera (5) and manipulator (1).
Step 15：Parts to be processed is placed on work top, allows the datum plane of parts to be processed and the work of system
Make table top coincidence；
Step 16：The datum plane for being parallel to parts to be processed certain one side (there may be multiple faces, simply by the presence of one
A face) on there are several location feature holes, the end face in location feature hole to be generally aligned in the same plane, and it is parallel with processing datum；
If these coordinates of location feature hole under parts to be processed coordinate system are P1、P2、…、PN, N >=3；
Step 17：Mobile manipulator (1) makes location feature hole be located at industrial camera within sweep of the eye one by one, takes pictures and obtain
Feature holes image is taken, its central coordinate of circle is obtained, and coordinate of the feature holes under camera coordinates system in parts to be processed is calculated
Sequence, according to the relational matrix M of camera coordinates system and arm end Flange Plane coordinate systemCL, obtain parts to be processed feature
Coordinate { (X of the hole under arm end Flange Plane coordinate systemRi,YRi,ZRi)}；
Step 18：Using matrix-vector MPRIndicate the position between parts to be processed coordinate system and arm end Flange Plane
Relationship, i.e.,Due to coordinate of the known features hole under parts to be processed coordinate system, it is denoted as { (XPi,YPi,
ZPi), coordinate { (X of the feature holes under arm end Flange Plane coordinate system has been calculatedRi,YRi,ZRi), optimized by LM
Algorithm obtains MPR；
Step 19：For any point P on part0, by relational matrix MPRIt is calculated in arm end flange
Coordinate under plane coordinate system, to realize the laser processing of 3 d part.
It should be understood that the part that this specification does not elaborate belongs to the prior art.
It should be understood that the above-mentioned description for preferred embodiment is more detailed, can not therefore be considered to this
The limitation of invention patent protection range, those skilled in the art under the inspiration of the present invention, are not departing from power of the present invention
Profit requires under protected ambit, can also make replacement or deformation, each fall within protection scope of the present invention, this hair
It is bright range is claimed to be determined by the appended claims.
Claims (4)
1. 3 d part calibration system in a kind of laser processing, it is characterised in that：Including manipulator (1), arm end flange
(2), target is carved in galvanometer system (3), paraxonic mounting plate (4), industrial camera (5), parts to be processed (6) and examination；
The galvanometer system (3) is mounted on by the arm end flange (2) on the manipulator (1)；The galvanometer system
System (3) is installed together with the industrial camera (5) by paraxonic mode by the paraxonic mounting plate (4)；Described to be processed zero
Part (6), examination are carved target and are respectively fixed on work top, and the industrial camera (5) lower part is located at.
2. 3 d part scaling method in a kind of laser processing, which is characterized in that include the following steps：
Step 1：Industrial camera (5) is demarcated, the focal length, distortion coefficients of camera lens and principal point coordinate of camera are obtained；
Step 2：Establish the camera coordinates system O of industrial camera (5)c-XcYcZc, establish the galvanometer coordinate system O of galvanometer system (3)L-
XLYLZL；Wherein, OcIndicate camera photocentre, OcZcIt is overlapped with camera optical axis, OcXcIt is parallel to camera pixel horizontal direction, OcYcIt is flat
Row is in camera pixel vertical direction；OLIndicate galvanometer optical center, OLZLWith galvanometer optical axis coincidence, OLXLAlong the X-direction of galvanometer system,
OLYLAlong the Y-direction of galvanometer system；
Step 3：Examination is placed below galvanometer and carves target, so that examination is carved target and is located at galvanometer within sweep of the eye, adjustment manipulator (1)
Position so that examination is carved target and is located on the focal plane of galvanometer；
Step 4：Adjusting laser processing technology parameter so that laser can be carved in examination and clearly etch circular pattern on target,
And it being capable of blur-free imaging in industrial camera；Start galvanometer system (3), is carved in examination and etch circular array pattern on target, circle battle array
The ranks numerical value of row is as big as possible, but cannot exceed the breadth of industrial camera (5), and the center of circle for writing down each circle in circular array is shaking
Mirror coordinate system OL-XLYLZLUnder coordinate, with sequence { (XLi,YLi, 0) } it indicates；
Step 5：Write down the position of manipulator (1) and posture information PS at this time1；
Step 6：Mobile manipulator (1) makes the circular array that examination is carved on target be entirely located in the visual field of industrial camera (5), and position
In the focal plane of camera；
Step 7：Write down the posture information PS of manipulator (1) at this time2；
Step 8：Industrial camera (5) to examination carve target on circular array take pictures obtain image, obtain the center pixel in circular array
Coordinate obtains coordinate of the center of circle of circular array under camera coordinates system, is denoted as coordinate sequence { (XCi,YCi,0)}；
Step 9：Using matrix-vector MCLIndicate the position relationship between galvanometer coordinate system and camera coordinates system, i.e.,Paraxial vision guiding and the galvanometer system scaling method utilized, obtains matrix-vector MCL；
Step 10：New examination is placed below galvanometer and carves target, and adjustment manipulator (1) makes arm end Flange Plane coordinate
System is parallel with examination quarter target plane, makes the central shaft of galvanometer vertical with examination quarter target；
Step 11：Start galvanometer system (3), new examination carve etching on target in step 4 circular array pattern, and
Mend the circle for carving a same size, array where minimum a line in circular array on the extended line in sideline with same array pitch
Size should ensure that the circle that all circles and benefit are carved can be included by camera fields of view；If the center of circle for mending the circle carved is B, the row at place
The center of circle of other end of circle is OL, OLThe center of circle of the other end of circle of column is A；Galvanometer optical axis and arm end method
Blue (2) center is simultaneously misaligned, and there are bias, are denoted as (Tx, Ty)；X, Y-axis and the arm end Flange Plane coordinate system of galvanometer
X, Y-axis and not parallel, there are angle thetas；
Step 12：Ensure that new examination quarter target position is constant, adjustment manipulator (1) makes arm end flange (2) rotate 180
Degree carves pattern of the etching as step 11 on target in new examination again, obtains being based on arm end Flange Plane coordinate
It is the circular array of origin symmetry；
Step 13：Manipulator (1) is adjusted, the camera lens of translation industrial camera (5) makes examination carve the circular array etched on target and exists
Within the scope of camera fields of view, coordinate { (x of all centers of circle under camera coordinates system is obtainedli,yli) and { (x 'li,y′li), and ask institute
The mean value for having coordinate obtains coordinate of the arm end flange origin under camera coordinates system (T ' x, T ' y), by MCLMatrix turns
The coordinate being changed under galvanometer coordinate system；
Step 14：By the center of circle A, B, O defined in step 11L3 points of coordinates under camera coordinates system acquire rotation angle θ, find out
Relational matrix between galvanometer coordinate system and arm end Flange Plane coordinate system；
Step 15：Parts to be processed is placed on work top, allows the datum plane of parts to be processed and the workbench of system
Face overlaps；
Step 16：There are several location feature holes, location feature hole in certain one side for the datum plane for being parallel to parts to be processed
End face be generally aligned in the same plane, and it is parallel with processing datum；If these location feature holes are under parts to be processed coordinate system
Coordinate is P1、P2、…、PN；
Step 17：Mobile manipulator (1) makes location feature hole be located at industrial camera within sweep of the eye one by one, and acquisition of taking pictures is special
Hole image is levied, obtains its central coordinate of circle, and coordinate sequence of the feature holes under camera coordinates system in parts to be processed is calculated,
According to the relational matrix M of camera coordinates system and arm end Flange Plane coordinate systemCL, parts to be processed feature holes are obtained in machine
Coordinate { (X under tool hand end flange plane coordinate systemRi,YRi,ZRi)}；
Step 18：Using matrix-vector MPRIndicate the position between parts to be processed coordinate system and arm end Flange Plane coordinate system
Relationship is set, i.e.,Due to coordinate of the known features hole under parts to be processed coordinate system, it is denoted as { (XPi,
YPi,ZPi), coordinate { (X of the feature holes under arm end Flange Plane coordinate system has been calculatedRi,YRi,ZRi), by LM
Optimization algorithm obtains MPR；
Step 19：For any point P on part0, by relational matrix MPRIt is calculated in arm end Flange Plane
Coordinate under coordinate system, to realize the laser processing of 3 d part.
3. 3 d part scaling method in laser processing according to claim 2, it is characterised in that：In step 14, directly
Using eccentric and rotation angle as system compensation value in manipulator control system, by current location and posture plus eccentric and angle
Degree offset, i.e., using the focus of galvanometer processing as the virtual origin of arm end Flange Plane coordinate system, such matrix-vector
MCLIt can be as the coordinate transformation relation matrix between industrial camera (5) and manipulator (1).
4. 3 d part scaling method in the laser processing according to claim 2-3 any one, it is characterised in that：Step
In 16, N >=3.
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