CN109702319B - Online graph splicing method for large-breadth laser processing - Google Patents

Online graph splicing method for large-breadth laser processing Download PDF

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CN109702319B
CN109702319B CN201910068953.4A CN201910068953A CN109702319B CN 109702319 B CN109702319 B CN 109702319B CN 201910068953 A CN201910068953 A CN 201910068953A CN 109702319 B CN109702319 B CN 109702319B
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CN109702319A (en
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江浩
李明
郑飞敏
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention relates to an online graph splicing method for large-format laser processing, which is used for solving the problem that the splicing precision of the existing online splicing method is difficult to meet the processing requirement. The method comprises the following steps: 1) dividing a graph to be processed into N sub-block graphs, and acquiring the center point coordinate of each sub-block graph and a minimum rectangular area containing each sub-block graph; 2) starting an indicating light source to enable the light beam emitted by the indicating light source to reach the Xth area to be processed, and scanning the boundary of the Xth area to be processed; 3) the coaxial measuring unit observes the Xth area to be processed and acquires an image of the Xth area to be processed, and the control unit acquires an actual bounding box of the Xth area to be processed according to the acquired image; 4) comparing the theoretical bounding box with the actual bounding box; 5) adjusting the position of the Xth sub-block graph in the control unit; 6) completing the graphic scanning of the Xth processing area; 7) repeating the steps 2) to 6).

Description

Online graph splicing method for large-breadth laser processing
Technical Field
The invention relates to a laser precision machining technology, in particular to an online graph splicing method for large-format laser machining.
Background
With the wide application of laser processing technology, the advantages of laser processing are also reflected, the main advantages are non-contact processing, small thermal influence, wide processing materials and the like, and due to the unique advantages of the laser processing, the laser processing plays an increasingly important role in micro-nano processing. With the gradual expansion of the laser processing range, higher and higher requirements are put on the precision and stability of the laser micromachining technology.
The laser scanning galvanometer has become a main device for laser processing due to the advantages of high processing speed, high precision, strong environmental adaptability and the like, and is increasingly applied to the industries of laser marking, laser drilling, 3D printing, laser cutting and the like. Since the scanning range of the laser scanning galvanometer is limited, and the scanning precision of the laser scanning galvanometer is reduced along with the expansion of the scanning range. Therefore, in order to solve the problem of laser scanning of large-format parts, an on-line splicing technique of galvanometer machining is widely used.
The current online splicing technology mainly depends on the positioning of a motion platform to realize the splicing of large-breadth figures, and the principle is that the whole processed figure is divided into N areas according to the processing range of a scanning galvanometer by an algorithm, each area can be completely scanned at one time, and then a workpiece or the galvanometer is respectively moved to each area to be processed by matching with the motion platform to realize the processing of the whole figure. Therefore, the splicing method completely depends on the moving precision of the moving platform, and the splicing precision of the processing graph in high-quality micro-nano processing is difficult to meet the processing requirement.
Disclosure of Invention
The invention aims to solve the problem that the existing online splicing method completely depends on the moving precision of a moving platform, and the splicing precision of a processed graph in high-quality micro-nano processing is difficult to meet the processing requirement, and provides the graph online splicing method for large-breadth laser processing.
The technical scheme of the invention is as follows:
an online graph splicing method for large-format laser processing comprises the following steps:
1) the control unit loads a graph to be processed, divides the graph to be processed into N sub-block graphs according to the processing range of the scanning galvanometer, and obtains the center point coordinate of each sub-block graph and a minimum rectangular area containing each sub-block graph, wherein the minimum rectangular area is a theoretical bounding box;
2) according to the central point coordinates of the sub-block graphs, the motion platform positions the workpiece to be processed to the Xth area to be processed, the indication light source is started, so that the light beam emitted by the indication light source reaches the Xth area to be processed, and the boundary of the Xth area to be processed is scanned;
3) the coaxial measuring unit observes the Xth area to be processed, acquires an image of the Xth area to be processed, transmits the image to the control unit, and the control unit obtains an actual bounding box of the Xth area to be processed according to the acquired image;
4) comparing the theoretical bounding box with the actual bounding box to obtain splicing translation amounts △ X, delta Y and deflection angle theta of the Xth area to be processed;
5) adjusting the position of the Xth sub-block graph in the control unit according to the splicing translation quantity △ X, △ Y and the deflection angle theta obtained in the step 4) until the position meets the requirement;
6) starting a laser to enable a laser beam to act on the surface of the workpiece to be processed, so that the graphic scanning of the Xth processing area is completed;
7) and repeating the steps 2) to 6) until the workpieces to be processed are processed and spliced.
Further, the step 1) of obtaining the minimum rectangular region including each sub-block pattern specifically includes comparing coordinates of each vertex of the sub-block patterns, finding out a maximum value and a minimum value of an X coordinate and a Y coordinate in each vertex, and determining a rectangular region according to the four vertices, where the rectangular region is the minimum rectangular region surrounding the sub-block pattern.
Further, in step 2), the indication light source is turned on, so that the light beam emitted by the indication light source reaches the xth to-be-processed area through the first reflecting mirror, the scanning galvanometer, the focusing unit and the second reflecting mirror, and the boundary of the xth to-be-processed area is scanned.
Further, the coaxial measuring unit in the step 3) is a CCD camera.
Meanwhile, the invention also provides an online graph splicing system for large-format laser processing, which comprises an indicating light source, a first reflector, a second reflector, a scanning galvanometer, a focusing unit, a coaxial measuring unit and a control unit; light emitted by the indicating light source enters the scanning galvanometer after being reflected by the first reflecting mirror, and emergent light of the scanning galvanometer is focused by the focusing unit and reflected by the second reflecting mirror to scan the boundary of the area to be processed; the coaxial measuring unit is arranged above the second reflecting mirror, acquires an image of an area to be processed, and sends the acquired image to the control unit.
Further, the second reflecting mirror is a spectroscope, the front side of the spectroscope is plated with a medium reflecting film, and the back side of the spectroscope is plated with an antireflection film.
Further, the first reflecting mirror is a dichroic mirror.
Further, the laser adopts a near infrared wavelength light source, and the indicating light source adopts a red wavelength light source.
Further, the coaxial measuring unit is a CCD camera.
Further, the focusing unit is a field lens.
Compared with the prior art, the invention has the following technical effects:
1. the system and the method realize high-precision splicing of the large-amplitude laser scanning graph based on the block positioning of the motion platform, the online measurement and the real-time correction of the position of the block graph by the vision and control system, thereby being not limited by the positioning precision of the motion platform and ensuring the splicing precision of the large-amplitude graph laser scanning.
2. Compared with the existing method, the method does not depend on high-precision positioning of the platform, thereby reducing performance indexes of hardware such as a motion platform and the like and saving the splicing cost of large-format image laser scanning.
Drawings
FIG. 1 is a schematic diagram of an on-line graph splicing system for large-format laser processing according to the present invention;
FIG. 2 is a schematic diagram of a graph to be processed divided into N sub-block graphs according to the present invention;
FIG. 3 is a schematic diagram comparing a theoretical bounding box and an actual bounding box in the method of the present invention.
FIG. 4 is a first schematic diagram of a pattern to be processed according to the present invention;
FIG. 5 is a second schematic diagram of a pattern to be processed according to the present invention;
FIG. 6 is a third schematic diagram of a pattern to be processed according to the present invention;
FIG. 7 is a fourth schematic diagram of a pattern to be processed according to the present invention.
Description of the drawings: 1-laser, 2-coaxial measuring unit, 3-indicating light source, 4-first reflector, 5-scanning galvanometer, 6-diffuse reflection beam, 7-second reflector, 8-laser beam, 9-focusing unit, 10-workpiece to be processed, 11-moving platform and 12-control unit.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
the invention provides a graph online splicing method and system for large-format laser processing, which ensure the splicing precision of large-format laser scanning graphs and provide guarantee for high-precision and precise laser scanning.
As shown in FIG. 1, the graphic on-line splicing system for large-format laser processing comprises an indicating light source 3, a first reflecting mirror 4, a second reflecting mirror 7, a scanning galvanometer 5, a focusing unit 9, a coaxial measuring unit 2 and a control unit 12; the scanning galvanometer 5 realizes the deflection of the light beam at any angle through two built-in reflection lenses, so as to realize the scanning of the light beam at any position on the surface of the workpiece; the light beam emitted by the laser 1 is applied to the surface of the workpiece through the scanning galvanometer 5, the focusing unit 9 and the second reflecting mirror 7. The emergent light beam of the indicating light source 3 is combined with the laser beam through the first reflector 4 and then enters the scanning galvanometer 5, the emergent light of the scanning galvanometer 5 is focused through the focusing unit 9 and is reflected by the second reflector 7 to scan the boundary of the area to be processed, and the practical position demonstration of the boundary of the area to be processed is realized; the motion platform 11 is used for moving the workpiece to a region to be processed to realize the block scanning of the laser; the coaxial measuring unit 2 is arranged above the second reflecting mirror 7, acquires an image of an area to be processed, sends the acquired image to the control unit 12, and is used for measuring the actual bounding box, and in order to eliminate errors of coaxial measurement, the measuring coordinate system and the processing coordinate system need to be aligned to realize coincidence of the two coordinate systems (here, the position and the angle of the coaxial measuring unit 2 are adjusted based on the processing coordinate system to ensure coincidence of the measuring coordinate system and the processing coordinate system); the control unit 12 loads a processing graph, processes and corrects the deviation amount and the rotation amount of the actual bounding box and the theoretical bounding box, sends instructions to the modules such as the motion platform 11 and the scanning galvanometer 5, and the like, namely, the control unit 12 is connected with the indicating light source 3, the scanning galvanometer 5, the focusing unit 9, the coaxial measuring unit 2, the motion platform 11, and the like, the coaxial measuring unit 2 can specifically adopt a CCD camera, the indicating light source 3 can specifically adopt a laser pen, and the focusing unit 9 is specifically a field lens.
The wavelengths of the light source of the laser 1 and the indicating light source 3 should be different, for example, the laser 1 uses a near infrared wavelength light source, and the indicating light source 3 uses a red wavelength light source.
The second reflecting mirror 7 below the coaxial measuring unit 2 is a spectroscope which needs to split the indicating red light in the system, specifically, the front side of the spectroscope can be plated with a medium reflecting film, and the back side of the spectroscope is plated with an antireflection film. The first reflecting mirror 4 below the laser 1 is a dichroic mirror, and the mirror can achieve high transmittance of the laser infrared wavelength light source and high reflectance of the indicating red light.
The invention provides an online graph splicing method for large-format laser processing, which comprises the following steps of:
1) as shown in fig. 2, the control unit 12 loads a to-be-processed graph, divides the to-be-processed graph into N sub-block graphs according to a processing range of the scanning galvanometer 5, and obtains a minimum rectangular region including each sub-block graph, where the minimum rectangular region is a theoretical bounding box;
the specific process is as follows: a. the control unit 12 loads a vector graph to be processed; b. partitioning the graph to be processed according to the processing range of the scanning galvanometer 5; c. the control unit 12 stores each partitioned graph and calculates the geometric center coordinates of each region and the minimum rectangular region of each partitioned graph, wherein the minimum rectangular region is a theoretical bounding box; the pattern to be processed may be in any form, and the pattern to be processed and the splitting manner loaded in this embodiment are shown in fig. 4 to 7;
the obtaining of the minimum rectangular region including each of the sub-block patterns is specifically to compare coordinates of each vertex of the sub-block patterns and find out a maximum value and a minimum value (X) of an X coordinate and a Y coordinate in each vertex respectivelymin,xmaxAnd ymin,ymax) Determining a rectangular area according to the four vertexes, wherein the rectangular area is the minimum rectangular area surrounding the subblock graph;
2) according to the central point coordinates of the sub-block graphs, the motion platform 11 positions the workpiece 10 to be processed to the Xth region to be processed, the indication light source 3 is started, so that the light beam emitted by the indication light source reaches the Xth region to be processed, and the boundary of the Xth region to be processed is scanned;
turning on an indicating light source 3, enabling a light beam emitted by the indicating light source to reach an Xth area to be processed through a first reflecting mirror 4, a scanning vibrating mirror 5, a focusing unit 9 and a second reflecting mirror 7, and scanning the boundary of the Xth area to be processed;
3) the coaxial measuring unit 2 observes the diffuse reflection beam 6 of the Xth to-be-processed area, acquires an image of the Xth to-be-processed area, and transmits the image to the control unit 12, and the control unit 12 obtains an actual bounding box of the Xth to-be-processed area according to the acquired image;
specifically, the control unit 12 performs image gray scale recognition according to the acquired image, converts the recognized image pixels into a geometric size, and further acquires Xmax, Xmin and Ymax, Ymin of the image, thereby finally obtaining an actual bounding box of the processing area;
4) comparing the actual bounding box position of the Xth processing area in the step 2 with the theoretical bounding box position of the area by using a control unit 12, selecting the middle point of the frame of the bounding box as a comparison reference in the embodiment, and respectively calculating to obtain splicing translation quantity △ X, △ Y and deflection angle theta of the graph to be processed, as shown in FIG. 3;
5) adjusting the position of the Xth sub-block graph in the control unit 12 in the processing coordinate system according to the splicing translation amount △ X, delta Y and the deflection angle theta obtained in the step 4) until the position meets the requirements, wherein the adjustment range needs to be adjusted to be within 0.02mm according to the specific splicing precision requirement, and if the splicing precision is 0.02 mm;
6) starting the laser 1, enabling an emergent light beam to penetrate through the first reflecting mirror 4 plated with the transmission film, and enabling a laser beam 8 to act on the surface of a workpiece after deflection, focusing and reflection of the light beam are performed through the scanning vibrating mirror 5, the focusing unit 9 and the second reflecting mirror 7, so that the graphic scanning of the Xth processing area is completed;
7) and repeating the steps 2) to 6) until the workpieces to be processed are processed and spliced.

Claims (3)

1. An online graph splicing method for large-format laser processing is characterized by comprising the following steps:
1) the control unit loads a graph to be processed, divides the graph to be processed into N sub-block graphs according to the processing range of the scanning galvanometer, and obtains the center point coordinate of each sub-block graph and a minimum rectangular area containing each sub-block graph, wherein the minimum rectangular area is a theoretical bounding box;
the step 1) of obtaining the minimum rectangular area containing each sub-block graph specifically comprises the steps of comparing coordinates of each vertex of the sub-block graph, respectively finding out the maximum value and the minimum value of an X coordinate and a Y coordinate in each vertex, and determining a rectangular area according to the four vertices, wherein the rectangular area is the minimum rectangular area surrounding the sub-block graph;
2) according to the central point coordinates of the sub-block graphs, the motion platform positions the workpiece to be processed to the Xth area to be processed, the indication light source is started, so that the light beam emitted by the indication light source reaches the Xth area to be processed, and the boundary of the Xth area to be processed is scanned;
3) the coaxial measuring unit observes the Xth area to be processed, acquires an image of the Xth area to be processed, transmits the image to the control unit, and the control unit obtains an actual bounding box of the Xth area to be processed according to the acquired image;
4) comparing the theoretical bounding box with the actual bounding box to obtain splicing translation amounts △ X, delta Y and deflection angle theta of the Xth area to be processed;
5) adjusting the position of the Xth sub-block graph in the control unit according to the splicing translation quantity △ X, △ Y and the deflection angle theta obtained in the step 4) until the position meets the requirement;
6) starting a laser to enable a laser beam to act on the surface of the workpiece to be processed, so that the graphic scanning of the Xth processing area is completed;
7) and repeating the steps 2) to 6) until the workpieces to be processed are processed and spliced.
2. The method according to claim 1, wherein the method comprises the steps of: in step 2), the indicating light source is turned on, so that the light beam emitted by the indicating light source reaches the Xth area to be processed through the first reflecting mirror, the scanning galvanometer, the focusing unit and the second reflecting mirror, and the boundary of the Xth area to be processed is scanned.
3. The on-line pattern splicing method for large-format laser processing according to claim 1 or 2, characterized in that: the coaxial measuring unit in the step 3) is a CCD camera.
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