CN109202072B - Electronic gun device with coaxial powder feeding - Google Patents

Electronic gun device with coaxial powder feeding Download PDF

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Publication number
CN109202072B
CN109202072B CN201810235852.7A CN201810235852A CN109202072B CN 109202072 B CN109202072 B CN 109202072B CN 201810235852 A CN201810235852 A CN 201810235852A CN 109202072 B CN109202072 B CN 109202072B
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powder feeding
water
powder
head
electron gun
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CN109202072A (en
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许海鹰
左从进
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AVIC Beijing Aeronautical Manufacturing Technology Research Institute
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AVIC Beijing Aeronautical Manufacturing Technology Research Institute
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/20Cooling means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/25Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/50Means for feeding of material, e.g. heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Abstract

The invention relates to an electronic gun device for coaxially feeding powder. The device comprises a water-cooled cathode, an anode, a powder feeding barrel, a powder feeding head, an annular insulator, a focusing coil and a cladding guide head which are coaxially arranged. The water-cooled cathode is provided with a through hole and a concave spherical cavity along the central shaft; the powder feeding barrel is arranged at the upper end of the outer part of the water-cooled cathode and comprises a vibration adjusting mechanism for adjusting the powder feeding amount of the metal powder in the powder feeding barrel; the powder feeding head is arranged in a cavity of the electron gun, the upper end of the powder feeding head is arranged in a through hole of the water-cooled cathode, and the powder feeding head is communicated with the powder feeding barrel through a powder guide pipe; the anode is arranged at the lower end of the water-cooled cathode and is connected with the water-cooled cathode through an annular insulator at the periphery of the powder feeding head; the focusing coil is arranged in a middle gun body of the electron gun, and the middle gun body is connected with the lower end of the anode; the cladding guide head is arranged at the outlet position of the lower gun body of the electron gun and is provided with a through hole. The coaxiality of the metal powder and the electron beam is realized, and the application field of the electron gun is greatly improved.

Description

Electronic gun device with coaxial powder feeding
Technical Field
The invention relates to the technical field of additive manufacturing, in particular to an additive manufacturing device for melting metal powder by utilizing an annular electron beam spot, and specifically relates to an electron gun device for coaxially feeding powder.
Background
The additive manufacturing technology is a scientific and technical system for directly manufacturing parts by driving three-dimensional data of the parts based on a discrete-accumulation principle. The metal additive manufacturing technology can obviously shorten the equipment development period, improve the equipment manufacturing process, improve the adaptability of the equipment, realize the light, high-strength, low-cost and agile and rapid manufacturing of the complex equipment and bring qualitative leap for the equipment development.
At present, the metal additive manufacturing technology using high energy beam as heat source mainly includes: electron beam selective melting additive manufacturing technology, electron beam fuse additive manufacturing technology, laser selective melting additive manufacturing technology, laser direct deposition additive manufacturing technology, plasma arc additive manufacturing technology and the like. Compared with other technologies, the energy conversion efficiency is higher when the electron beam and metal act, and reaches more than 80%. The advantages of preparing titanium aluminum and other refractory metal parts are obvious.
In recent years, metal additive manufacturing is developing towards a large-size component manufacturing technology, and how to realize synchronous manufacturing of multiple laser beams, improve manufacturing efficiency, and ensure consistency between synchronous additive structures and quality of a manufacturing combination area is a development difficulty.
Because the conventional electron gun comprises a plurality of functional systems and is limited by the structure, the volume of the electron gun is difficult to miniaturize, and a cladding head structure for laser direct deposition coaxial powder feeding is difficult to obtain, so that the application development of an additive manufacturing technology taking electron beams as a heat source and metal powder as a raw material in the field of manufacturing large metal parts is limited. Accordingly, the inventors provide an electron gun apparatus for coaxial powder feeding. .
Disclosure of Invention
The embodiment of the invention provides an electron gun device for coaxially feeding powder, which realizes that metal powder is fed along the axis of an electron gun and melted at the focusing position of an annular beam spot to form molten drop transition forming, has reasonable and compact structure and expands the application field of electron beam additive manufacturing technology.
The embodiment of the invention provides an electronic gun device for coaxially feeding powder, which comprises: the device comprises a water-cooled cathode, an anode, a powder feeding barrel, a powder feeding head, an annular insulator, a focusing coil and a cladding guide head. The water-cooled cathode is arranged at the upper end of the electron gun and is provided with a through hole and a concave spherical cavity along a central shaft; the powder feeding barrel is arranged at the upper end of the outer part of the water-cooled cathode and comprises a vibration adjusting mechanism, and the vibration adjusting mechanism is used for adjusting the powder feeding amount of the metal powder in the powder feeding barrel; the powder feeding head is arranged in a cavity of the electron gun and is used for feeding metal powder into the cavity of the electron gun, the upper end of the powder feeding head is arranged in a through hole of the water-cooled cathode, and the powder feeding head is communicated with the powder feeding barrel through a powder guide pipe; the anode is arranged at the lower end of the water-cooled cathode and is arranged at the periphery of the powder feeding head, and the anode is connected with the water-cooled cathode through an annular insulator; the focusing coil is arranged in a middle-section gun body of the electron gun and is used for focusing the electron beam into an electron beam spot, and the middle-section gun body is connected with the lower end of the anode; the cladding guide head is arranged at the outlet position of the lower gun body of the electron gun, and is provided with a through hole for sending out a metal droplet bundle; and the water-cooled cathode, the anode, the powder feeding head, the powder guide pipe, the focusing coil and the cladding guide head are all coaxially arranged.
In a first possible implementation manner, the upper end face of the water-cooled cathode is provided with a fixing ring, the water-cooled cathode is provided with an insulating sealing snap ring between the fixing ring, the powder feeding head is installed on the insulating sealing snap ring, so that the lower end of the fixing ring is tightly pressed on the upper end face of the powder feeding head, and the powder guide pipe passes through the central through hole of the fixing ring and stretches into the powder feeding head cavity.
In combination with the above possible implementation manners, in a second possible implementation manner, the inside of the water-cooled cathode is provided with a cooling water circulation channel, a cathode water inlet pipe and a cathode water outlet pipe of the cooling water circulation channel are both installed on the water-cooled cathode, an air duct and a high-pressure lead end are further arranged on the water-cooled cathode, and the air duct is introduced into the cavity of the water-cooled cathode.
In combination with the above possible implementation manners, in a third possible implementation manner, metal powder is injected into the barrel cavity of the powder feeding barrel, the vibration adjusting mechanism of the powder feeding barrel comprises an ultrasonic generator and a powder feeding adjusting rod, the ultrasonic generator is connected with an external control power supply through a signal transmission line, the ultrasonic generator drives the powder feeding adjusting rod to vibrate, and the powder feeding adjusting rod extends into the powder feeding barrel to be in contact with the metal powder.
In combination with the above possible implementation manners, in a fourth possible implementation manner, a partition plate is arranged in a top barrel cavity of the powder feeding barrel, the ultrasonic generator is arranged on the partition plate, a powder injection port is arranged at the bottom of the powder feeding barrel, the metal powder is injected into the barrel cavity of the powder feeding barrel through the powder injection port, and a sealing plug is arranged on the powder injection port and used for plugging the powder injection port.
In combination with the above possible implementation manners, in a fifth possible implementation manner, a screw joint is arranged at the center of the bottom of the powder feeding barrel, the end of the powder feeding adjusting rod extends into the screw joint, and the screw joint is connected with the powder guide pipe.
In combination with the above possible implementation manners, in a sixth possible implementation manner, a pressure spring is arranged on the partition plate at one end of the ultrasonic generator, and the pressure spring is spirally arranged on the periphery of the ultrasonic generator and used for protecting the ultrasonic generator from being extruded.
In combination with the above possible implementation manners, in a seventh possible implementation manner, the powder feeding head is of a hollow long conical structure, the powder feeding head is installed in the cavity of the electron gun in a manner that the upper part is wide and the lower part is narrow, a first annular sealing ring is arranged in an installation gap between the powder feeding head and the water-cooled cathode, and a second annular sealing ring is arranged between the powder feeding head and the insulating sealing snap ring.
With reference to the foregoing possible implementation manners, in an eighth possible implementation manner, a powder feeding head water inlet pipe and a powder feeding head water outlet pipe are installed on a wide end surface of the powder feeding head, the powder feeding head water inlet pipe extends into a cavity of the powder feeding head through a central through hole of the fixing ring, and the powder guide pipe is coaxially installed in the powder feeding head.
With reference to the foregoing possible implementation manners, in a ninth possible implementation manner, an anode water inlet is disposed at a lower end of the anode, and an anode water outlet is disposed at an upper end of the anode and may be used for cooling the anode.
Combine above-mentioned possible implementation, in tenth possible implementation, be equipped with first molecular pump interface flange, water inlet A and delivery port A on the middle section rifle body, the internal first water-cooling air lock that is equipped with of middle section rifle, the direction of height surface of first water-cooling air lock with the internal surface of the middle section rifle body closely cooperates, the inside of first water-cooling air lock is equipped with water-cooling air lock inlet tube and water-cooling air lock outlet pipe, first molecular pump interface flange joint first molecular pump, water-cooling air lock inlet tube intercommunication water inlet A, water-cooling air lock outlet pipe intercommunication delivery port A.
In combination with the above possible implementation manners, in an eleventh possible implementation manner, the inner wall of the lower end of the middle gun body is provided with a circumferential horizontal boss, the bottom of the first water-cooling air resistor is connected with and coaxial with the focusing coil, and the focusing coil is installed on the circumferential horizontal boss.
In a twelfth possible implementation manner, in combination with the above possible implementation manners, the lower gun body is provided with a second molecular pump interface flange, the upper wide end of the cladding seeker is connected with the lower gun body, the cladding seeker is a conical structure provided with a through hole, and a cladding seeker water inlet pipe and a cladding seeker water outlet pipe are arranged on the surface of the cladding seeker.
With reference to the foregoing possible implementation manner, in a thirteenth possible implementation manner, an insulating shielding cover is installed outside the water-cooled cathode, and a wall thickness of the insulating shielding cover has a predetermined compressive strength and is higher than the water-cooled cathode in height, so as to ensure an insulating strength of an inner surface of the insulating shielding cover.
To sum up, the coaxial powder feeding electron gun device provided by the embodiment of the invention is used for an electron beam fuse direct deposition additive manufacturing technology, and the water-cooled cathode, the anode, the powder feeding head, the powder guide tube, the focusing coil and the cladding guide head are sequentially and coaxially arranged from top to bottom along the axis, so that the coaxiality of metal powder and an electron beam is realized, and the application field of the electron gun device in additive manufacturing is greatly improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an electron gun apparatus for coaxial powder feeding according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of a powder feeding barrel in the electron gun apparatus according to the embodiment of the present invention.
In the figure:
1-water-cooling the cathode; 101-cathode water inlet pipe; 102-an airway tube; 103-cathode water outlet pipe; 104 high voltage lead terminals;
2-an anode; 201-anode water inlet pipe; 202-anode water outlet pipe;
3-powder feeding barrel; 301-signal transmission line; 302-a pressure spring; 303-an ultrasonic generator; 304-a separator; 305-metal powder; 306-powder feeding adjusting rod; 307-screw interface; 308-powder injection port; 309-sealing the plug;
4-powder feeding head; 401-powder feeding head water inlet pipe; 402-powder feeding head water outlet pipe; 403-powder guide pipe;
5-an insulating shield; 6-ring insulator;
7-first water-cooling air resistance; 701-water cooling air resistance water inlet; 702-water-cooling air lock water outlet;
8-a focusing coil; 9-middle section gun body; 901-a first molecular pump interface flange; 902-water inlet a;
903-water outlet A; 10-a fixed ring; 11-molten drop bunch; 12-lower segment gun body; 1201-second molecular pump interface flange; 1202-water inlet B; 1203-water outlet B;
13-cladding a seeker; 1301-cladding seeker water inlet pipe 1302-cladding seeker water outlet pipe.
Detailed Description
The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the invention and are not intended to limit the scope of the invention, i.e., the invention is not limited to the embodiments described, but covers any modifications, alterations, and improvements in the parts, components, and connections without departing from the spirit of the invention.
In the description of the present invention, it should be noted that unless otherwise specified, the terms "upper end", "lower end", and the like, indicate orientations or positional relationships only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present invention. The terms "mounted" and "disposed" are to be construed broadly and may include, for example, direct mounting or indirect mounting via an intermediary. The specific meaning of the above terms in the present invention can be understood as appropriate to those of ordinary skill in the art.
Due to the limitation of the current electron gun structure, no matter a direct-heating type electron gun or an indirect-heating type electron gun, electron beam current must be output from the axis of the electron gun, and a conventional electron gun needs a high-voltage insulating structure, a vacuum acquisition system, a cooling system and an electromagnetic regulation and control system, so that the volume of the electron gun is difficult to be miniaturized, and a cladding head structure for laser direct-current deposition coaxial powder feeding is difficult to obtain. Aiming at the structural limitation of the additive manufacturing electron gun device in the prior art, the inventor invents an electron gun device for coaxially feeding powder.
Fig. 1 is a schematic structural diagram of an electron gun apparatus according to an embodiment of the present invention.
As shown in FIG. 1, the invention discloses a coaxial-strand fuse wire additive manufacturing electron gun device, which comprises a water-cooled cathode 1, an anode 2, a powder feeding barrel 3, a powder feeding head 4, an annular insulator 6, a focusing coil 8, a cladding guide head 13 and the like. Wherein, the water-cooled cathode 1 is arranged at the upper end of the electron gun, and the water-cooled cathode 1 is provided with a through hole and a concave spherical cavity along the central axis; the powder feeding barrel 3 is arranged at the upper end of the outer part of the water-cooled cathode 1, the powder feeding barrel 3 comprises a vibration adjusting mechanism, and the vibration adjusting mechanism can be used for adjusting the powder feeding amount of the metal powder in the powder feeding barrel 3; the powder feeding head 4 is arranged in a cavity of the electron gun and is used for feeding metal powder into the cavity of the electron gun, the upper end of the powder feeding head 4 is arranged in a through hole of the water-cooled cathode 1, and the powder feeding head 4 is communicated with the powder feeding barrel 3 through a powder guide pipe 403; the anode 2 is arranged at the lower end of the water-cooled cathode 1 and is arranged at the periphery of the powder feeding head 4, and the anode 2 is connected with the water-cooled cathode 1 through an annular insulator 6; the focusing coil 8 is arranged in a middle gun body 9 of the electron gun and is used for focusing the electron beams into electron beam spots, and the middle gun body 9 is connected with the lower end of the anode 2; the cladding guide head 13 is arranged at the outlet position of the lower gun body 12 of the electron gun, and the cladding guide head 13 is provided with a through hole and can be used for sending out the metal droplet bundle 11; wherein, the water-cooled cathode 1, the anode 2, the powder feeding head 4, the powder guiding tube 403, the focusing coil 8 and the cladding guiding head 13 are all coaxially arranged.
In the electron gun device of the present invention, the water-cooled cathode 1, the anode 2, the powder feeding head 4, the powder guiding tube 403, the focusing coil 8 and the cladding guiding head 13 are coaxially arranged from top to bottom along the axis in sequence, and form a cavity with a cavity, metal powder is fed to the powder feeding head 4 according to a predetermined powder feeding amount through the powder feeding barrel 3, after an electron beam with high energy density formed near the powder feeding head 4 is electromagnetically focused by the focusing coil 8, the metal powder fed in the powder guiding tube 403 is melted to form the metal droplet beam 11, and the metal droplet beam 11 is fed to a designated area through a central hole of the cladding guiding head 13 for deposition molding. The powder discharge amount of the metal powder is adjusted through the vibration adjusting mechanism of the powder feeding barrel 3, and the powder feeding head 4 and other related components are coaxially mounted, so that the coaxial output of the metal powder and the electron beam is realized, and the application field of the electron gun device in additive manufacturing is greatly improved.
Referring to fig. 1, specifically, the water-cooled cathode 1 is a tapered tubular structure with a wide top and a narrow bottom, a cooling water circulation channel is arranged inside the water-cooled cathode 1 and used for connecting a water-cooled machine, a cathode water inlet pipe 101 and a cathode water outlet pipe 103 of the cooling water circulation channel are both installed on the upper end surface of the water-cooled cathode 1, the lower end of the water-cooled cathode 1 is inward concave to form a concave spherical structure, the lower end surface of the water-cooled cathode 1 is connected with the anode 2 through an annular insulator 6 to form a cavity, and the water-cooled cathode 1 is further provided with a gas guide tube 102 connected with a gas flow regulator and a high-voltage lead end 104 connected with negative high.
In addition, the water-cooled cathode 1 of the present embodiment is made of an aluminum alloy material. And install insulating shield cover 5 in the outside of water-cooled cathode 1, wrap up water-cooled cathode 1, the wall thickness of insulating shield cover 5 is able to bear the high pressure and reaches more than 60kv, and the height is about 60mm higher than water-cooled cathode 1 to guarantee that insulating strength of insulating shield cover 5 along its inner surface is enough big. The water-cooled cathode 1 and the anode 2 are installed and connected through an annular insulator 6, the thickness of the annular insulator 6 is not less than 60mm, and the maximum withstand voltage is not less than 60 kv.
The upper end face of the water-cooled cathode 1 is provided with a fixing ring 10, an insulating sealing snap ring 15 is arranged between the water-cooled cathode 1 and the fixing ring 10, the powder feeding head 4 is arranged on a boss inside the insulating sealing snap ring 15, and the powder guide pipe 403 is introduced into a central through hole of the fixing ring 10 and extends into a cavity of the powder feeding head 4.
Specifically, powder feeding head 4 is a hollow long conical structure, powder feeding head 4 is installed in a cavity of an electronic gun in a wide manner from top to bottom, after powder feeding head 4 is placed on a boss inside a sealing snap ring 15, fixing ring 10 is installed, a plurality of through holes are uniformly distributed on fixing ring 10, fixing ring 10 is tightly connected with insulating sealing snap ring 15 through screws, the lower end of fixing ring 10 is made to compress the upper end face of powder feeding head 4, a first annular sealing ring 1501 is arranged in an installation gap between powder feeding head 4 and water-cooled cathode 1, and a second annular sealing ring 1502 is arranged between powder feeding head 4 and insulating sealing snap ring 15 and used for sealing the installation gap and ensuring the sealing performance of the device.
The wide end surface of the powder feeding head 4 is also provided with a powder feeding head water inlet pipe 401 and a powder feeding head water outlet pipe 402, the powder feeding head water inlet pipe 401 extends from the fixing ring 10 to the cavity of the powder feeding head 4, and the powder guide pipe 403 is coaxially arranged in the powder feeding head 4.
In addition, as shown in fig. 1, an anode water inlet 201 is provided at the lower end of the anode 2, and an anode water outlet 202 is provided at the upper end of the anode 2, which can be used for cooling the anode 2.
The lower terminal surface of positive pole 2 passes through the flange to be connected with middle section rifle body 9, be equipped with first molecular pump interface flange 901 on the middle section rifle body 9, water inlet A902 and delivery port A903, be equipped with first water-cooling air lock 7 in the middle section rifle body 9, the direction of height surface and the internal surface of middle section rifle body 9 of first water-cooling air lock 7 closely cooperate, the inside of first water-cooling air lock 7 is equipped with water-cooling air lock inlet tube 701 and water-cooling air lock outlet pipe 702, first molecular pump interface flange 901 connects first molecular pump, be used for guaranteeing that discharge chamber indoor vacuum reaches the settlement requirement, water-cooling air lock inlet tube 701 communicates water inlet A902, water-cooling air lock outlet pipe 702 communicates delivery port A903.
The lower end inner wall of the middle gun body 9 is also provided with a circumferential horizontal boss, the bottom of the first water-cooling air resistor 7 is connected with and coaxial with the focusing coil 8, and then the bottom of the focusing coil 8 is arranged on the circumferential horizontal boss.
The lower-section gun body 12 is provided with a second molecular pump interface flange 1201, the upper wide end of the cladding guide head 13 is connected with the lower-section gun body 12, the cladding guide head 13 is of a conical structure provided with a through hole, and the surface of the cladding guide head 13 is provided with a cladding guide head water inlet pipe 1301 and a cladding guide head water outlet pipe 1302.
Fig. 2 is a schematic structural view of a powder feeding barrel in the electron gun apparatus according to the embodiment of the present invention.
Referring to fig. 1 and 2, a partition 304 is disposed in a top barrel cavity of the powder feeding barrel 3, the ultrasonic generator 303 is disposed on the partition 304, a pressure spring 302 is further disposed on the partition 304 at one end of the ultrasonic generator 303, the pressure spring 302 is disposed at the periphery of the ultrasonic generator 303 in a spiral shape, and is used for providing a pressure for the metal powder 305 when the powder feeding barrel 3 is inverted, so as to protect the ultrasonic generator 303 from being extruded, and after the metal powder 305 is completely fed out, the longitudinal extension of the pressure spring 302 can reach the maximum axial length of the inner cavity of the powder feeding barrel 3. The bottom of the powder feeding barrel 3 is provided with a powder injection port 308, metal powder 305 is injected into the barrel cavity of the powder feeding barrel 3 through the powder injection port 308, after the powder is filled, the powder injection port 308 is blocked by a sealing plug 309 arranged on the powder injection port 308, the center of the bottom of the powder feeding barrel 3 is also provided with a screw joint port 307 connected with a powder guide pipe 403, and the end part of a powder feeding adjusting rod 306 extends into the screw joint port 307.
As shown in fig. 2, the vibration adjusting mechanism of the powder feeding barrel 3 comprises an ultrasonic generator 303 and a powder feeding adjusting rod 306, the ultrasonic generator 303 is connected with an external control power supply through a signal transmission line 301, the ultrasonic generator 303 drives the powder feeding adjusting rod 306 to vibrate, the powder feeding adjusting rod 306 extends into the powder feeding barrel 3 to be contacted with the metal powder 305, the vibration frequency of the powder feeding adjusting rod 306 can be changed by changing the vibration frequency of the ultrasonic generator 303, and then the friction force between the powder feeding adjusting rod 306 and the metal powder 305 and the inner surface of the screw joint 307 is changed, so that the purpose of adjusting the powder feeding amount is achieved.
The working process of the coaxial powder feeding electronic gun device comprises the following steps:
after all parts of water-cooling pipelines of the electron gun are correspondingly connected, starting a first molecular pump to pump vacuum, and when the vacuum degree in a discharge chamber formed by the water-cooling cathode 1, the anode 2 and the powder feeding head 4 meets the set requirement, connecting the water-cooling cathode with high pressure, and starting a second molecular pump; inert gas is introduced into a discharge chamber, plasma discharge is formed in the discharge chamber under the action of a high-voltage electric field, under the influence of the anode effect of the annular plasma, an annular electron beam 14 with high energy density is formed near the conical head of the powder feeding head 4, after electromagnetic focusing is carried out by a focusing coil 8, metal powder 305 fed along a powder guide pipe 403 is melted to form a metal droplet beam 11, and the metal droplet beam 11 is fed to a specified forming area through a center hole of a cladding guide head 13 to be deposited and formed.
It should be noted that the power of the ring-shaped electron beam 14 can be adjusted by the high voltage introduced from the high voltage lead 104 on the water-cooled cathode 1 and the inert gas flow introduced from the gas-guide tube 102; and the feeding amount of the metal powder 305 is obtained by changing the vibration frequency of the powder feeding adjustment rod 306 by adjusting the vibration frequency of the ultrasonic generator 303, and during the operation, the metal powder 305 is gradually fed, and the pressure spring 302 is gradually extended until the metal powder 305 is completely fed.
In summary, according to the coaxial powder feeding electron gun apparatus of the present invention, the water-cooled cathode, the anode, the powder feeding head, the powder guiding tube, the focusing coil and the cladding guiding head are sequentially and coaxially arranged from top to bottom along the axis, the powder feeding barrel feeds the metal powder to the powder feeding head according to the predetermined powder feeding amount, the electron beam with high energy density formed near the powder feeding head is electromagnetically focused by the focusing coil, the metal powder fed in the powder guiding tube is melted to form the metal droplet beam, and the metal droplet beam is sent to the designated area for deposition molding through the central hole of the cladding guiding head. The powder discharging amount of the metal powder is adjusted through the vibration adjusting mechanism of the powder feeding barrel, and the powder feeding head and other related components are coaxially mounted, so that the coaxial output of the metal powder and the electron beam is realized, and the application field of the electron gun device in additive manufacturing is greatly improved.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. It is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (14)

1. An electron gun apparatus for coaxial powder feeding, comprising:
the water-cooled cathode (1) is arranged at the upper end of the electron gun, and a through hole and a concave spherical cavity are formed in the water-cooled cathode (1) along a central shaft;
the powder feeding barrel (3) is arranged at the upper end of the outside of the water-cooled cathode (1), the powder feeding barrel (3) comprises a vibration adjusting mechanism, and the vibration adjusting mechanism is used for adjusting the powder feeding amount of metal powder in the powder feeding barrel (3);
the powder feeding head (4) is arranged in a cavity of the electron gun and is used for feeding metal powder into the cavity of the electron gun, the upper end of the powder feeding head (4) is arranged in a through hole of the water-cooled cathode (1), and the powder feeding head (4) is communicated with the powder feeding barrel (3) through a powder guide pipe (403);
the anode (2) is arranged at the lower end of the water-cooled cathode (1) and is arranged at the periphery of the powder feeding head (4), and the anode (2) is connected with the water-cooled cathode (1) through an annular insulator (6);
the focusing coil (8) is arranged in a middle-section gun body (9) of the electron gun and is used for focusing the electron beams into electron beam spots, and the middle-section gun body (9) is connected with the lower end of the anode (2);
the cladding guide head (13) is arranged at the outlet position of the lower gun body (12) of the electron gun, and the cladding guide head (13) is provided with a through hole and used for sending out the metal droplet bundle (11);
the water-cooled cathode (1), the anode (2), the powder feeding head (4), the powder guide pipe (403), the focusing coil (8) and the cladding guide head (13) are coaxially arranged.
2. The coaxial powder feeding electron gun device according to claim 1, wherein a fixing ring (10) is arranged on the upper end surface of the water-cooled cathode (1), an insulating sealing snap ring (15) is arranged between the water-cooled cathode (1) and the fixing ring (10), the powder feeding head (4) is mounted on the insulating sealing snap ring (15), so that the lower end of the fixing ring (10) presses the upper end surface of the powder feeding head (4), and the powder guide pipe (403) extends into the cavity of the powder feeding head (4) through a central through hole of the fixing ring (10).
3. The coaxial powder feeding electron gun device according to claim 2, wherein a cooling water circulation channel is arranged inside the water-cooled cathode (1), a cathode water inlet pipe (101) and a cathode water outlet pipe (103) of the cooling water circulation channel are both installed on the water-cooled cathode (1), the water-cooled cathode (1) is further provided with a gas guide pipe (102) and a high-pressure lead end (104), and the gas guide pipe (102) is introduced into the cavity of the water-cooled cathode (1).
4. The coaxial powder feeding electron gun device according to claim 1, wherein metal powder (305) is injected into the barrel cavity of the powder feeding barrel (3), the vibration adjusting mechanism of the powder feeding barrel (3) comprises an ultrasonic generator (303) and a powder feeding adjusting rod (306), the ultrasonic generator (303) is connected with an external control power supply through a signal transmission line (301), the ultrasonic generator (303) drives the powder feeding adjusting rod (306) to vibrate, and the powder feeding adjusting rod (306) extends into the powder feeding barrel (3) to be in contact with the metal powder (305).
5. The coaxial powder feeding electron gun device according to claim 4, wherein a partition plate (304) is arranged in a top barrel cavity of the powder feeding barrel (3), the ultrasonic generator (303) is arranged on the partition plate (304), a powder injection port (308) is arranged at the bottom of the powder feeding barrel (3), the metal powder (305) is injected into the barrel cavity of the powder feeding barrel (3) through the powder injection port (308), and a sealing plug (309) is arranged on the powder injection port (308) and used for plugging the powder injection port (308).
6. The coaxial powder feeding electron gun device according to claim 5, characterized in that a screw joint (307) is arranged at the center of the bottom of the powder feeding barrel (3), the end of the powder feeding adjusting rod (306) extends into the screw joint (307), and the screw joint (307) is connected with the powder guide pipe (403).
7. The coaxial powder feeding electron gun device according to claim 6, wherein a pressure spring (302) is provided on the partition plate (304) at one end of the ultrasonic generator (303), and the pressure spring (302) is spirally provided at the periphery of the ultrasonic generator (303) for protecting the ultrasonic generator (303) from being pressed.
8. The coaxial powder feeding electron gun device according to claim 2, characterized in that the powder feeding head (4) is a hollow long conical structure, the powder feeding head (4) is installed in the cavity of the electron gun with a wide top and a narrow bottom, a first annular sealing ring (1501) is arranged in the installation gap between the powder feeding head (4) and the water-cooled cathode (1), and a second annular sealing ring (1502) is arranged between the powder feeding head (4) and the insulating sealing snap ring (15).
9. The coaxial powder feeding electron gun device according to claim 8, characterized in that a powder feeding head water inlet pipe (401) and a powder feeding head water outlet pipe (402) are installed on the wide end surface of the powder feeding head (4), the powder feeding head water inlet pipe (401) extends into the cavity of the powder feeding head (4) through the central through hole of the fixing ring (10), and the powder guide pipe (403) is coaxially installed in the powder feeding head (4).
10. The coaxial powder feeding electron gun device according to claim 1, characterized in that the lower end of the anode (2) is provided with an anode water inlet (201), and the upper end of the anode (2) is provided with an anode water outlet (202) for cooling the anode (2).
11. The coaxial powder feeding electron gun device according to claim 1, wherein a first molecular pump interface flange (901), a water inlet a (902) and a water outlet a (903) are arranged on the middle section gun body (9), a first water-cooling air resistor (7) is arranged in the middle section gun body (9), the outer surface of the first water-cooling air resistor (7) in the height direction is tightly matched with the inner surface of the middle section gun body (9), a water-cooling air resistor water inlet pipe (701) and a water-cooling air resistor water outlet pipe (702) are arranged inside the first water-cooling air resistor (7), the first molecular pump interface flange (901) is connected with the first molecular pump, the water-cooling air resistor water inlet pipe (701) is communicated with the water inlet a (902), and the water-cooling air resistor water outlet pipe (702) is communicated with the water outlet a (903).
12. The coaxial powder feeding electron gun device according to claim 11, wherein an annular horizontal boss is provided on the inner wall of the lower end of the middle gun body (9), the bottom of the first water-cooled air resistor (7) is connected and coaxial with the focusing coil (8), and the focusing coil (8) is mounted on the annular horizontal boss.
13. The coaxial powder feeding electron gun device according to claim 1, wherein the lower gun body (12) is provided with a second molecular pump interface flange (1201), the upper wide end of the cladding guide head (13) is connected with the lower gun body (12), the cladding guide head (13) is a conical structure provided with a through hole, and a cladding guide head water inlet pipe (1301) and a cladding guide head water outlet pipe (1302) are arranged on the surface of the cladding guide head (13).
14. The electron gun apparatus for coaxial powder feeding according to any one of claims 1-11, characterized in that an insulating shield (5) is installed outside the water-cooled cathode (1), and the wall thickness of the insulating shield (5) has a predetermined pressure resistance strength and is higher than the water-cooled cathode (1) in height for securing the insulating strength of the inner surface of the insulating shield (5).
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