CN202067762U - Primary electron emission device applicable to intelligent test of secondary electron yield - Google Patents
Primary electron emission device applicable to intelligent test of secondary electron yield Download PDFInfo
- Publication number
- CN202067762U CN202067762U CN2011201562879U CN201120156287U CN202067762U CN 202067762 U CN202067762 U CN 202067762U CN 2011201562879 U CN2011201562879 U CN 2011201562879U CN 201120156287 U CN201120156287 U CN 201120156287U CN 202067762 U CN202067762 U CN 202067762U
- Authority
- CN
- China
- Prior art keywords
- power supply
- focusing
- electron
- primary
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
The utility model relates to a primary electron emission device applicable to intelligent test of secondary electron yield, which comprises an electron gun, a power supply and a power supply control module. A thermal cathode, a modulation electrode, an acceleration electrode, a primary focusing cavity and a secondary focusing cavity which are respectively sleeved in an insulation barrel are successively fixedly connected to form the electron gun, axes of the thermal cathode, the modulation electrode, the acceleration electrode, the primary focusing cavity and the secondary focusing cavity are coincident, the power supply comprises a filament power supply, a modulation power supply, an acceleration power supply, a primary focusing power supply and a secondary focusing power supply and is respectively connected with the thermal cathode, the modulation electrode, the acceleration electrode, the primary focusing cavity and the secondary focusing cavity, the power control module comprises a D/A (digital to analog) conversion module and a PLC (programmable logic controller), and the PLC is connected with the power supply via the D/A conversion module so as to realize control of power supply voltage. The primary electron emission device can control make and break of electron emission at any time and guarantees that emitted electron beam diameters are in a quite small range, an adjustable range of energy of emitted electrons is large, and the primary electron emission device is a necessary constituent part of an intelligent solid material secondary electron yield testing device.
Description
Technical field
The utility model relates to electronics lift-off technology field, particularly is applicable to the primary electron emitter of secondary electron yield intelligence test.
Background technology
The ability of solid material secondary is used secondary electron yield usually
Characterize.Briefly, secondary electron yield may be defined as secondary emission electron stream
Flow with primary electron
The ratio.Solid material secondary electron yield testing apparatus is the favourable instrument that obtains its secondary electron yield, and an important component part of this instrument is exactly the primary electron emitter.Present primary electron emission is finished by electron gun, promptly produce the high-velocity electrons of directed movement with electron gun, launch have certain energy, a constant current is strong, the electronic beam current of certain beam diameter and the angle of departure, the direction of this electron beam and intensity can be controlled, and are made up of hot cathode, control electrode and some accelerating anodes etc. usually.The function of electron gun is to provide the electron beam that meets the demands, and the material of electron gun and process structure must be considered the convenience that processing and maintenance are used.
But existing electron gun is simple mechanical structure, has many defectives, as: do not have the control corresponding power supply, can not realize controlling at any time the break-make of electronics emission during work, the outgoing electron beam diameter is excessive, and the electron energy of outgoing is difficult to adjusting etc.
Summary of the invention
In view of the technical bottleneck of present above-mentioned Related Research Domain, the utility model provides a kind of primary electron emitter that is applicable to secondary electron yield intelligence test, comprises electron gun, power supply and energy supply control module; Described electron gun comprises and is set in the insulating cylinder and dead in line and the hot cathode that is fixedly connected sequentially, Wehnelt electrode, intensifying ring, once focuses on chamber and secondary focusing chamber; Described power supply comprises filament supply, modulation power source, accelerating power source, focusing power supply and secondary focusing power supply; Described energy supply control module comprises Programmable Logic Controller (hereinafter to be referred as PLC) and digital quantity analog quantity modular converter (hereinafter to be referred as the D/A modular converter); Filament supply, modulation power source, accelerating power source, focusing power supply and secondary focusing power supply respectively with corresponding hot cathode, Wehnelt electrode, intensifying ring, once focus on the chamber and be connected, so that voltage to be provided with the secondary focusing chamber; PLC is connected with the secondary focusing power supply with filament supply, modulation power source, accelerating power source, a focusing power supply by the D/A modular converter, is used to control each power source voltage size, realizes the control to electron gun then.
The described chamber that once focuses on comprises successively prefocusing utmost point connecting and back focusing electrode once, is used for the electron beam that has passed through intensifying ring is once focused on, and most electron streams can be passed through from once focusing on the chamber.Prefocusing utmost point and once the back assemble and extremely all have aperture, little axially bored line overlaps with the electron impact direction.
Aperture, a minimum hole of prefocusing is 4 cm～5 cm, and once back focusing electrode small aperture is 2 cm～3 cm.
Described secondary focusing chamber comprises successively in the secondary prefocusing utmost point that connects, the secondary focusing electrode behind the focusing electrode and secondary, be used for the electron beam that has passed through intensifying ring is carried out focusing on the second time, make the electron beam undergauge once more that has passed through once to focus on the chamber, reach required beam diameter value and penetrate along electron gun axis; In the secondary prefocusing utmost point, the secondary behind focusing electrode, the secondary focusing electrode all have aperture, and little axially bored line overlaps with the electron impact direction.
Aperture, the minimum hole of secondary prefocusing is 2.5 cm～3.5 cm, and the focusing electrode small aperture is 2 cm～3 cm in the secondary, and the focusing electrode small aperture is 1.5 cm～2.5 cm behind the secondary.
Described hot cathode comprises filament and covers on the little metallic cylinder of filament outside, to obtain the pulse modulation characteristic that uniform primary electron line is become reconciled, described little metallic cylinder outer surface scribbles one deck boride, described boride is a material with lanthanum hexaboride LaB6, so that negative electrode has stronger mithridatism, can repeatedly use, work function is less.
Described modulation very is sleeved on the metallic cylinder that the hot cathode outside and front end have aperture, and small aperture is slightly larger than the aperture of secondary electron gatherer, and electronics can pass through from described aperture.
Described acceleration very has the cylinder of aperture, is used for electron stream is quickened.
Filament supply index in the electron emitting device of the present utility model determines to have stabilized current characteristic preferably according to filament characteristic, in order to guarantee constant electronic beam current in the test process.Modulation power source is used to produce the pulsed electron line, and pulsewidth generally is selected in about 10 μ s, and voltage is 50V to the maximum.Accelerating power source is used to intensifying ring that high pressure is provided, and accelerating voltage will guarantee out also that when 50V the bundle hot spot is very little.The electron beam energy scope that whole electron emitting device produces is 50eV～50keV.
Concrete operation principle of the present utility model is:
When feeding electric current in the filament in the hot cathode, hot cathode is heated and emitting electrons, the voltage of change modulating stage can be controlled the number of electrons by the Wehnelt electrode aperture, change by the modulation power source voltage direction, realize the break-make control of once electron beam, form pulsed electron beam, enter into intensifying ring.Pass the electron beam of modulating stage aperture, under the effect of accelerating voltage, quicken to move to focusing electrode.But because the electric charge same sex is repelled each other, electron beam can scatter gradually.By once focusing on the focussing force in chamber and secondary focusing chamber, electronics is focused on again and be intersected in a bit, suitably regulate current potential extent between two focusing electrodes, just can make focus on the electron gun axis, finally launch the adjustable minimum electron beam of beam diameter that reaches of energy from electron gun.
Compared with prior art, the utlity model has following advantage:
(1) the utility model adopts PLC to adjust the size of modulation voltage at any time, controls with the break-make that realizes the electronics emission;
(2) the utility model has designed and has once focused on chamber and secondary focusing chamber, has both made electronics that the overwhelming majority emits from hot cathode can both be smoothly by electron gun the time, makes littler than conditional electronic rifle of beam diameter that the electron gun outgoing electron flows again;
(3) energy range of the utility model outgoing electron bundle is bigger, can reach 50eV～50keV, is much better than the conditional electronic emitter.
Description of drawings
Fig. 1 is applicable to the structural representation of the primary electron emitter of secondary electron yield intelligence test for the utility model.
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is described in further detail, but execution mode of the present utility model is not limited thereto.
Embodiment
The primary electron emitter that is applicable to secondary electron yield intelligence test of the present utility model comprises electron gun, power supply and energy supply control module.
As shown in Figure 1: described electron gun is by being set in the insulating cylinder 10 and the hot cathode 1 of dead in line, Wehnelt electrode 2, intensifying ring 3, once focusing on chamber 6 and secondary focusing chamber 11 and be fixedly connected sequentially and constitute; Described power supply comprises filament supply, modulation power source, accelerating power source, focusing power supply and secondary focusing power supply; Described energy supply control module comprises D/A modular converter and PLC; PLC is connected with the secondary focusing power supply with filament supply, modulation power source, accelerating power source, a focusing power supply by the D/A modular converter.
Hot cathode comprises filament and covers on the little metallic cylinder of filament outside that little metallic cylinder outer surface scribbles one deck LaB6, so that negative electrode has stronger mithridatism, can repeatedly use.
Modulation very is sleeved on the metallic cylinder that the hot cathode outside and front end have aperture, and electronics passes through from aperture.
Quicken very to have the cylinder of aperture, be used for electron stream and quicken.
Once focus on chamber 6 and comprise prefocusing utmost point 4 all having aperture and back focusing electrode 5 once, the electron beam that has passed through intensifying ring is carried out elementary focusing, most electron streams can be passed through from once focusing on the chamber, prefocusing utmost point and once the small aperture of back focusing electrode be respectively 4cm and 3cm.Secondary focusing chamber 11 comprises in the secondary prefocusing utmost point 7 that all has aperture, the secondary focusing electrode 9 behind the focusing electrode 8 and secondary, electron beam by intensifying ring is carried out focusing on the second time, make the electron beam undergauge once more by once focusing on the chamber, reach required beam diameter value and penetrate along electron gun axis.In the secondary prefocusing utmost point 7, the secondary behind focusing electrode 8 and the secondary small aperture of focusing electrode 9 be respectively 3 cm, 2.5cm and 1.5 cm.
Filament supply is connected with filament, is used to add the thermionic electron guns hot cathode, makes its emitting electrons; Modulation power source is connected with Wehnelt electrode, is used to regulate the current potential of Wehnelt electrode, and to realize the break-make control of emitting electrons, pulsewidth generally is selected in about 10 μ s, and voltage is 50V to the maximum; Accelerating power source is connected with intensifying ring, is used to the electron beam that quickens to come out from cathode emission, and accelerating voltage will guarantee out also that when 50V the bundle hot spot is very little; Focusing power supply and secondary focusing power supply respectively with once focus on the chamber and be connected with the secondary focusing chamber, the electron beam after quickening is once focused on and secondary focusing, make that electron beam passes through still can keep minimum beam diameter behind the whole electron gun.Described D/A modular converter is connected with PLC, and PLC is the core component of control power module, by the control of D/A modular converter FX2N-4DA realization to electron gun.
Primary electron emitter of the present utility model is controlled filament supply voltage and startup by control device when the emission primary electron, make electron gun hot cathode energising heating back emitting electrons; Also to set modulation power source then and put into voltage, set accelerating power source voltage, set focusing power supply voltage and secondary focusing supply voltage more respectively, make the electronics that emits from hot cathode be in the normal transmission state.The electron beam energy scope that whole primary electron emitter produces is 50eV～50keV.
Need to prove at last: above execution mode is the unrestricted the technical solution of the utility model in order to explanation only, although the utility model is had been described in detail with reference to above-mentioned execution mode, those of ordinary skill in the art is to be understood that: still can make amendment or be equal to replacement the utility model, and replace any modification and the part that do not break away from spirit and scope of the present utility model, and it all should be encompassed in the claim scope of the present utility model.
Claims (6)
1. be applicable to the primary electron emitter of secondary electron yield intelligence test, comprise electron gun, power supply and energy supply control module; Described electron gun comprises and is set in the insulating cylinder and dead in line and the hot cathode that is fixedly connected sequentially, Wehnelt electrode, intensifying ring; Described power supply comprises filament supply, modulation power source, accelerating power source; Described energy supply control module comprises Programmable Logic Controller; It is characterized in that: described electron gun also comprises once focusing chamber and the secondary focusing chamber that is set in the insulating cylinder and is connected successively with intensifying ring; Described power supply also comprises focusing power supply and secondary focusing power supply; Filament supply, modulation power source, accelerating power source, focusing power supply and secondary focusing power supply respectively with corresponding hot cathode, Wehnelt electrode, intensifying ring, once focus on the chamber and be connected with the secondary focusing chamber; Described energy supply control module also comprises digital quantity analog quantity modular converter, and Programmable Logic Controller is connected with the secondary focusing power supply with filament supply, modulation power source, accelerating power source, a focusing power supply by digital quantity analog quantity modular converter.
2. the primary electron emitter that is applicable to secondary electron yield intelligence test according to claim 1 is characterized in that: the described chamber that once focuses on comprises successively prefocusing utmost point connecting and back focusing electrode once; Prefocusing utmost point and once the back assemble and extremely all have aperture, little axially bored line overlaps with electron gun electron impact direction.
3. the primary electron emitter that is applicable to secondary electron yield intelligence test according to claim 2 is characterized in that: aperture, a described minimum hole of prefocusing is 4 cm～5 cm, and once back focusing electrode small aperture is 2 cm～3 cm.
4. the primary electron emitter that is applicable to secondary electron yield intelligence test according to claim 3 is characterized in that: described secondary focusing chamber comprises successively in the secondary prefocusing utmost point that connects, the secondary focusing electrode behind the focusing electrode and secondary; In the secondary prefocusing utmost point, the secondary behind focusing electrode, the secondary focusing electrode all have aperture, and little axially bored line overlaps with electron gun electron impact direction.
5. the primary electron emitter that is applicable to secondary electron yield intelligence test according to claim 4, it is characterized in that: aperture, the minimum hole of described secondary prefocusing is 2.5 cm～3.5 cm, the focusing electrode small aperture is 2 cm～3 cm in the secondary, and the focusing electrode small aperture is 1.5 cm～2.5 cm behind the secondary.
6. the primary electron emitter that is applicable to secondary electron yield intelligence test according to claim 5, it is characterized in that: described hot cathode comprises filament and covers on the little metallic cylinder of filament outside that described little metallic cylinder outer surface is coated with one deck lanthanum hexaboride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201562879U CN202067762U (en) | 2011-05-17 | 2011-05-17 | Primary electron emission device applicable to intelligent test of secondary electron yield |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201562879U CN202067762U (en) | 2011-05-17 | 2011-05-17 | Primary electron emission device applicable to intelligent test of secondary electron yield |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202067762U true CN202067762U (en) | 2011-12-07 |
Family
ID=45061619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201562879U Expired - Fee Related CN202067762U (en) | 2011-05-17 | 2011-05-17 | Primary electron emission device applicable to intelligent test of secondary electron yield |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202067762U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987924A (en) * | 2015-02-11 | 2016-10-05 | 中国科学院空间科学与应用研究中心 | Measuring apparatus for secondary electron emission of metal surface of satellite and application method thereof |
| CN106371395A (en) * | 2016-10-18 | 2017-02-01 | 中国原子能科学研究院 | Control system for isotope electromagnetic separator ion source |
| CN106540505A (en) * | 2017-02-03 | 2017-03-29 | 盐城工学院 | Electron irradiation pipe and VOC emission-control equipments |
| CN106730975A (en) * | 2017-02-03 | 2017-05-31 | 盐城工学院 | A kind of VOC emission-control equipments and VOC exhaust treatment systems |
| CN110504147A (en) * | 2019-08-29 | 2019-11-26 | 南京航空航天大学 | It is a kind of to communicate the x-ray source based on energy load signal for space X ray |
-
2011
- 2011-05-17 CN CN2011201562879U patent/CN202067762U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987924A (en) * | 2015-02-11 | 2016-10-05 | 中国科学院空间科学与应用研究中心 | Measuring apparatus for secondary electron emission of metal surface of satellite and application method thereof |
| CN106371395A (en) * | 2016-10-18 | 2017-02-01 | 中国原子能科学研究院 | Control system for isotope electromagnetic separator ion source |
| CN106540505A (en) * | 2017-02-03 | 2017-03-29 | 盐城工学院 | Electron irradiation pipe and VOC emission-control equipments |
| CN106730975A (en) * | 2017-02-03 | 2017-05-31 | 盐城工学院 | A kind of VOC emission-control equipments and VOC exhaust treatment systems |
| CN110504147A (en) * | 2019-08-29 | 2019-11-26 | 南京航空航天大学 | It is a kind of to communicate the x-ray source based on energy load signal for space X ray |
| CN110504147B (en) * | 2019-08-29 | 2020-12-01 | 南京航空航天大学 | X-ray source based on energy load signal for space X-ray communication |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202067762U (en) | Primary electron emission device applicable to intelligent test of secondary electron yield | |
| DE69830664T2 (en) | DEVICE FOR EMITTING A LOADED PARTICLE BEAM | |
| CN103928278B (en) | A kind of high-energy electron rifle | |
| US6856105B2 (en) | Multi-energy particle accelerator | |
| Brewer | High-intensity electron guns | |
| WO2016029065A1 (en) | Systems and methods utilizing a triode hollow cathode electron gun for linear particle accelerators | |
| JP2015008127A5 (en) | ||
| US7005809B2 (en) | Energy switch for particle accelerator | |
| CN102945781B (en) | Dual-mode multi-beam electron gun for dual-mode traveling wave tube and control method thereof | |
| CN109148245A (en) | Electron beam device and the X-ray generator and scanning electron microscope for having the electron beam device | |
| US7250727B2 (en) | High power, long focus electron source for beam processing | |
| CN104411084A (en) | Laser ion accelerating device adopting plasma cascade | |
| CN103474318A (en) | Sputtering ion gun | |
| CN109041399B (en) | Charged particle acceleration device | |
| KR101564680B1 (en) | Apparatus for supplying power of electron gun | |
| US6593579B2 (en) | RF modulated electron gun | |
| CN210093637U (en) | Ion accelerator | |
| TWI722167B (en) | Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability | |
| KR101665997B1 (en) | Apparatus for supplying power of electron gun | |
| CN103000479A (en) | Novel electronic gun | |
| CN204874719U (en) | Electron gun scanning signal wave form control circuit and vacuum coating machine | |
| KR100264917B1 (en) | Poewr controllable high current triode electron gun and controlling methode thereof | |
| KR101665994B1 (en) | Apparatus for supplying power of electron gun | |
| DE4104845C2 (en) | Electron beam generator, in particular for an electron beam gun | |
| CN117637417A (en) | Micro-focus electron gun using aperture structure for auxiliary focusing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20140517 |