CN109082634A - 一种质量厚度为500-1000μg/cm2自支撑镓薄膜及其制备方法 - Google Patents
一种质量厚度为500-1000μg/cm2自支撑镓薄膜及其制备方法 Download PDFInfo
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- CN109082634A CN109082634A CN201810933360.5A CN201810933360A CN109082634A CN 109082634 A CN109082634 A CN 109082634A CN 201810933360 A CN201810933360 A CN 201810933360A CN 109082634 A CN109082634 A CN 109082634A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
实施例1 | 对比例1 | 实施例2 | 对比例2 | |
残余应力(MPa) | 210 | 459 | 196 | 470 |
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810933360.5A CN109082634B (zh) | 2018-08-16 | 2018-08-16 | 一种质量厚度为500-1000μg/cm2自支撑镓薄膜及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810933360.5A CN109082634B (zh) | 2018-08-16 | 2018-08-16 | 一种质量厚度为500-1000μg/cm2自支撑镓薄膜及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN109082634A true CN109082634A (zh) | 2018-12-25 |
CN109082634B CN109082634B (zh) | 2020-04-24 |
Family
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CN201810933360.5A Active CN109082634B (zh) | 2018-08-16 | 2018-08-16 | 一种质量厚度为500-1000μg/cm2自支撑镓薄膜及其制备方法 |
Country Status (1)
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CN (1) | CN109082634B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060280973A1 (en) * | 2005-06-14 | 2006-12-14 | An-Cheng Sun | Tunable magnetic recording medium and its fabricating method |
CN101321427A (zh) * | 2008-07-22 | 2008-12-10 | 核工业西南物理研究院 | 直流磁过滤阴极真空弧等离子体源 |
JP5128335B2 (ja) * | 2008-03-26 | 2013-01-23 | 古河電気工業株式会社 | GaN系半導体基板、その製造方法および半導体素子 |
CN102976264A (zh) * | 2012-12-13 | 2013-03-20 | 中国科学院物理研究所 | 一种自支撑多层微纳米结构的制备方法 |
JP2016176104A (ja) * | 2015-03-19 | 2016-10-06 | Jxエネルギー株式会社 | 自立した銅薄膜の製造方法 |
CN106868460A (zh) * | 2017-01-03 | 2017-06-20 | 中国原子能科学研究院 | 一种质量厚度为400~2000μg/cm2自支撑Ir靶的制备工艺 |
CN107142449A (zh) * | 2017-05-04 | 2017-09-08 | 中国工程物理研究院激光聚变研究中心 | 一种高精度极小尺寸自支撑铍薄膜的制备方法 |
CN107611004A (zh) * | 2017-08-14 | 2018-01-19 | 南京大学 | 一种制备自支撑GaN衬底材料的方法 |
-
2018
- 2018-08-16 CN CN201810933360.5A patent/CN109082634B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060280973A1 (en) * | 2005-06-14 | 2006-12-14 | An-Cheng Sun | Tunable magnetic recording medium and its fabricating method |
JP5128335B2 (ja) * | 2008-03-26 | 2013-01-23 | 古河電気工業株式会社 | GaN系半導体基板、その製造方法および半導体素子 |
CN101321427A (zh) * | 2008-07-22 | 2008-12-10 | 核工业西南物理研究院 | 直流磁过滤阴极真空弧等离子体源 |
CN102976264A (zh) * | 2012-12-13 | 2013-03-20 | 中国科学院物理研究所 | 一种自支撑多层微纳米结构的制备方法 |
JP2016176104A (ja) * | 2015-03-19 | 2016-10-06 | Jxエネルギー株式会社 | 自立した銅薄膜の製造方法 |
CN106868460A (zh) * | 2017-01-03 | 2017-06-20 | 中国原子能科学研究院 | 一种质量厚度为400~2000μg/cm2自支撑Ir靶的制备工艺 |
CN107142449A (zh) * | 2017-05-04 | 2017-09-08 | 中国工程物理研究院激光聚变研究中心 | 一种高精度极小尺寸自支撑铍薄膜的制备方法 |
CN107611004A (zh) * | 2017-08-14 | 2018-01-19 | 南京大学 | 一种制备自支撑GaN衬底材料的方法 |
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CN109082634B (zh) | 2020-04-24 |
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Effective date of registration: 20211009 Address after: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee after: Taian Zhongquan Information Technology Co.,Ltd. Address before: 233700 No. 9 Niushi West Lane, north gate of Cuihu garden, Chengguan Town, Guzhen County, Bengbu City, Anhui Province Patentee before: Guzhen Kean Chuangbing Information Technology Co.,Ltd. Effective date of registration: 20211009 Address after: 271000 China Taishan high-end talent entrepreneurship base in the middle of Nantianmen street, development zone, Tai'an City, Shandong Province Patentee after: Taian Taishan Technology Co.,Ltd. Address before: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee before: Taian Zhongquan Information Technology Co.,Ltd. |