CN108906766B - CIGS glass substrate coating film cleaning system - Google Patents

CIGS glass substrate coating film cleaning system Download PDF

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Publication number
CN108906766B
CN108906766B CN201810723712.4A CN201810723712A CN108906766B CN 108906766 B CN108906766 B CN 108906766B CN 201810723712 A CN201810723712 A CN 201810723712A CN 108906766 B CN108906766 B CN 108906766B
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Prior art keywords
cleaning
glass substrate
unit
measuring
cloth
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CN108906766A (en
Inventor
李延平
陈坤
张荣松
高雪嵩
顾金茂
杨海明
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Cnbm Triumph Robotics Shanghai Co ltd
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Cnbm Triumph Robotics Shanghai Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/30Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20Investigating the presence of flaws
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention relates to a CIGS glass substrate film coating cleaning system, which comprises a conveying and positioning mechanism, a liquid dropping mechanism, a cloth rolling mechanism, a jacking cleaning mechanism and a measuring mechanism, wherein the mechanisms are mutually combined and connected to form a device capable of film coating and cleaning the CIGS glass substrate. The cleaning system with the structure is adopted to clean and erase the coating film overflowing from the substrate glass preposing process of the CIGS glass substrate to the back side, so that the subsequent process requirements of the glass substrate are realized, the automation of the processes of loading, cleaning, measuring and blanking is realized, the conveying and positioning of the substrate, the supply of cloth rolls, the dripping and sprinkling of cleaning liquid, the cleaning process and the result measurement do not need manual intervention, and the beat of the whole process is rapid and stable; after cleaning, the measuring device is directly attached to the surface of the CIGS glass substrate for measurement, the result is accurate, the operation is convenient, the working efficiency is improved, the CIGS yield is greatly improved, and the labor intensity of field workers is reduced.

Description

CIGS glass substrate coating film cleaning system
Technical Field
The invention relates to the field of automation, in particular to the field of cleaning of a CIGS glass substrate, and specifically relates to a CIGS glass substrate coating cleaning system.
Background
At present, the academic world and the industrial world generally believe that the development of solar cells enters the third generation mainly comprising thin film solar cells, and Copper Indium Gallium Selenide (CIGS) thin film solar cells are novel solar cells developed in the later 80 s of the 20 th century, serve as an important member of multi-component thin film cells, and become one of the research hotspots in the global photovoltaic field by virtue of excellent comprehensive properties. A typical multilayer film structure of CIGS includes a metal gate, an anti-reflective film, a window layer (ZnO), a transition layer, a light absorbing layer, a back electrode, and a glass substrate. In the preparation process, a CIGS film generally grows on a glass substrate plated with Mo, when a ZnO film layer is sputtered on the substrate, crystal grains can penetrate to the other side of the glass substrate through threading holes drilled on the substrate through a pre-procedure, and the overflowing crystal grain film layer can cause the short circuit phenomenon of a battery device, seriously influences the performance of a thin film battery and even causes the scrapping of a battery component.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a CIGS glass substrate coating and cleaning system which can realize automation of the processes of feeding, cleaning, measuring and small material.
In order to achieve the above object, a CIGS glass substrate coating cleaning system according to the present invention includes:
the CIGS glass substrate coating film cleaning system is mainly characterized by comprising the following components:
the conveying and positioning mechanism is used for conveying and positioning the CIGS glass substrate;
the liquid dropping mechanism is used for uniformly dropping and spraying the cleaning liquid;
the cloth rolling mechanism is used for driving the cleaning cloth on the cleaning cloth roll to move, and the cleaning cloth roll is formed by overlapping the cleaning cloth roll;
the jacking cleaning mechanism is used for cleaning the CIGS glass substrate;
the measuring mechanism is used for detecting whether the cleaned CIGS glass substrate meets the cleaning requirement;
the liquid dropping mechanism, the cloth roll mechanism and the jacking cleaning mechanism together form a cleaning module in the system;
the dropping liquid mechanism is located above the cloth roll mechanism, the jacking cleaning mechanism is located below the conveying and positioning mechanism, and the measuring mechanism is located at an outlet of the system.
Preferably, the conveying and positioning mechanism comprises a left conveying and positioning unit and a right conveying and positioning unit, the left conveying and positioning unit and the right conveying and positioning unit are respectively arranged on the left side and the right side of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of a track line formed by the movement of the CIGS glass substrate.
Preferably, the left conveying and positioning unit comprises a first conveying belt, the right conveying and positioning unit comprises a second conveying belt, and the CIGS glass substrate is arranged on the first conveying belt and the second conveying belt.
Furthermore, the left conveying positioning unit and the right conveying positioning unit respectively comprise a deceleration sensor, a stop sensor and a blocking cylinder;
each deceleration sensor, each stop sensor and each blocking cylinder are respectively adjacent to the corresponding first conveying belt and the corresponding second conveying belt;
and the top of each blocking cylinder is provided with a blocking block.
Furthermore, the left conveying positioning unit and the right conveying positioning unit respectively comprise a positioning sliding table air cylinder and a positioning clamping piece, and the positioning sliding table air cylinder is connected with the positioning clamping piece.
Preferably, the dropping mechanism comprises a first dropping unit and a second dropping unit, the first dropping unit and the second dropping unit are respectively arranged at the left side and the right side of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of a track line formed by the movement of the CIGS glass substrate.
Preferably, the first dripping unit and the second dripping unit respectively comprise a dripping valve, a valve body mounting part, a rotary table, a guide part and a cleaning liquid barrel;
the cleaning liquid barrel is used for storing cleaning liquid and is positioned at the bottom of the system;
the dropping valve is connected with the cleaning liquid barrel through a pipeline, is also connected with a compressed air control valve and is also fixed on the valve body mounting piece;
the valve body mounting part is eccentrically hinged with the rotating plate of the rotary table;
the guide piece is connected with the slotted hole at the tail part of the valve body installation piece.
Preferably, the cloth rolling mechanism comprises a first cloth rolling unit, a second cloth rolling unit and a telescopic cylinder, wherein the telescopic cylinder is respectively connected with the first cloth rolling unit and the second cloth rolling unit; the first cloth rolling unit and the second cloth rolling unit are respectively arranged on the left side and the right side of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of a track line formed by the movement of the CIGS glass substrate.
Preferably, the first cloth roll unit comprises a left mounting plate, and the second cloth roll unit comprises a right mounting plate; the cloth rolling mechanism also comprises a linear guide rail;
the tail part of the telescopic cylinder body is connected to the right mounting plate, and the head part of a piston rod of the telescopic cylinder is connected to the left mounting plate;
the left side mounting panel and the right side mounting panel all install respectively through the bearing diagonal in linear guide on two sliders of left and right sides.
Furthermore, the first cloth roll unit and the second cloth roll unit respectively comprise an inner side limiting block, an outer side limiting block, a tension brake, a cloth roll mounting seat, a fixed bearing seat, a large gear, a small gear, a first flexible coupling, a guide supporting rod, a first rotating shaft, a second rotating shaft and a second stepping motor;
the left mounting plate and the right mounting plate are respectively connected with the corresponding first rotating shaft and the corresponding guide supporting rod;
the two second rotating shafts are respectively supported by corresponding bearing assemblies fixed on the left mounting plate and the right mounting plate;
the first rotating shaft is connected with the corresponding yardage roll mounting seat, the first rotating shaft is connected with the corresponding fixed bearing seat, and the other side of the first rotating shaft is connected with the corresponding tension brake;
two ends of the cleaning cloth roll are respectively and correspondingly sleeved on the cloth roll mounting seat in the first cloth roll unit and the cloth roll mounting seat in the second cloth roll unit;
the cleaning cloth passes through the corresponding guide supporting rod in a winding way, and is clamped between the corresponding large gear and the corresponding small gear which are meshed with each other, the large gear is pressed on the small gear, and the small gear is arranged at one end of the second rotating shaft; the other side of the second rotating shaft is connected with the second stepping motor through a first flexible coupling;
the inner side limiting block and the outer side limiting block are respectively arranged on the inner side and the outer side of the corresponding section of the cleaning cloth roll.
Furthermore, the cloth roll mechanism also comprises a cloth roll receiving unit which is positioned below the first cloth roll unit and the second cloth roll unit.
Furthermore, the measuring mechanism comprises a first measuring mechanism unit and a second measuring mechanism unit;
the first measuring mechanism unit and the second measuring mechanism unit are respectively arranged on the left mounting plate and the right mounting plate;
the first measuring mechanism unit and the second measuring mechanism unit respectively comprise a measuring jacking cylinder, a second linear guide rail, a slide block mounting plate, a measuring part mounting plate, two measuring heads, a first measuring part, a second measuring part and a megohmmeter;
the measuring jacking cylinder is connected with the sliding block mounting plate;
the sliding block mounting plate is connected with the second linear guide rail;
the measuring part mounting plate is fixed on the sliding block mounting plate;
the first measuring part and the second measuring part are arranged on the measuring part mounting plate through springs, and the first measuring part and the second measuring part are respectively and correspondingly connected with a measuring head; and the two measuring heads are respectively connected with two input ports in the megohmmeter.
Furthermore, the measuring part mounting plate is an insulator, and the first measuring part and the second measuring part are not in contact with each other.
Preferably, the jacking cleaning mechanism comprises a first jacking cylinder, a first linear bearing, a second linear bearing, a third stepping motor, a synchronous belt, a first jacking cleaning machine unit and a second jacking cleaning machine unit;
the first linear bearing and the second linear bearing are respectively arranged on two sides of the first jacking cylinder;
the first jacking cleaning machine unit and the second jacking cleaning machine unit respectively comprise an eccentric shaft seat, a directional rod clamp, a cleaning head, a rotary rod and a synchronous belt pulley;
the third step motor is respectively connected with two synchronous belt wheels in the first jacking cleaning machine unit and the second jacking cleaning machine unit through the synchronous belts, and the two synchronous belt wheels are respectively arranged on two sides of the synchronous belts;
each cleaning head is connected with a corresponding synchronous belt wheel sequentially through a corresponding rotating rod and an eccentric shaft seat;
each directional rod clamp is connected with the corresponding cleaning head through the corresponding rotary rod.
Preferably, the system is placed inside a frame structure, the delivery positioning mechanism is fixed on the frame structure, and the dripping mechanism is placed on the top of the frame structure.
Preferably, the frame structure is further provided with glass, and the frame structure and the glass form an accommodating space together.
The CIGS glass substrate film coating cleaning system comprises a conveying and positioning mechanism, a liquid dropping mechanism, a cloth rolling mechanism, a jacking cleaning mechanism and a measuring mechanism, wherein the conveying and positioning mechanism, the liquid dropping mechanism, the cloth rolling mechanism, the jacking cleaning mechanism and the measuring mechanism are connected in a combined manner, so that the cleaning and erasing of a film coating overflowing from a substrate glass preposing process of the CIGS glass substrate to the back side are realized, the subsequent process requirements of the glass substrate are realized, the automation of the feeding, cleaning, measuring and discharging processes is realized, the conveying and positioning of the substrate, the supply of the cloth rolling, the dripping and sprinkling of cleaning liquid, the cleaning process and the result measurement do not need manual intervention, and the beat of the whole process is rapid and stable; after cleaning, the measuring device is directly attached to the surface of the CIGS glass substrate for measurement, the result is accurate, the operation is convenient, the working efficiency is improved, the CIGS yield is greatly improved, and the labor intensity of field workers is reduced.
Drawings
Fig. 1 is a schematic perspective view of a CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
Fig. 2 is a top view of a CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
Fig. 3 is a schematic diagram illustrating a first side structure of a cleaning module in a CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
Fig. 4 is a schematic diagram illustrating a second side structure of a cleaning module in the CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
Reference numerals
1. Conveying positioning mechanism
101. First conveying belt
102. Second conveyor belt
103. Deceleration sensor
104. Stop sensor
105. Blocking cylinder
106. Stop block
107. Positioning sliding table cylinder
108. Positioning clamp
2. Liquid dropping mechanism
201. Drip valve
202. Valve body mounting piece
203. Rotary table
204. Guide member
205. Cleaning liquid barrel
3. Cloth rolling mechanism
301. Telescopic cylinder
302. Right side mounting plate
3021. Yardage roll mount pad
3022. Fixed bearing seat
3023. Big gear
3024. Pinion gear
3025. First flexible coupling
3026. Guide support rod
3027A first rotation axis
3027B second rotation axis
3028. Second step motor
303. Left side mounting plate
304. First linear guide rail
305. Inner side limiting block
306. Outer side limiting block
307. Cleaning cloth roll
308. Tension brake
4. Jacking cleaning mechanism
401. First jacking cylinder
402A first linear bearing
402B second linear bearing
403. Third step motor
404. Synchronous belt
405. Eccentric shaft seat
406. Directional rod clamp
407. Cleaning head
408. Synchronous belt wheel
409. Rotary rod
5. Measuring mechanism
501. Measuring jacking cylinder
502. Second linear guide rail
503. Slider mounting plate
504. Mounting plate for measuring part
505. Measuring head
506A first measuring part
506B second measuring part
507. Megger
6. A cloth roll receiving unit.
Detailed Description
In order that the technical contents of the present invention can be more clearly described, the present invention will be further described with reference to specific embodiments.
The structure of the CIGS glass substrate coating cleaning system is shown in fig. 1 and 2, fig. 1 is a schematic perspective view of the CIGS glass substrate coating cleaning system according to an embodiment of the present invention, and fig. 2 is a top view of the CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
The CIGS glass substrate coating film cleaning system comprises:
a conveying and positioning mechanism 1 for conveying and positioning the CIGS glass substrate;
the liquid dropping mechanism 2 is used for uniformly dropping and sprinkling the cleaning liquid;
the cloth rolling mechanism 3 is used for placing a cleaning cloth roll on the cloth rolling mechanism 3, the cloth rolling mechanism 3 drives the cleaning cloth on the cleaning cloth roll to move, and the cleaning cloth roll is formed by folding the cleaning cloth roll;
the jacking cleaning mechanism is used for cleaning the CIGS glass substrate;
the measuring mechanism 5 is used for detecting whether the cleaned CIGS glass substrate meets the cleaning requirement or not;
the liquid dropping mechanism 2, the cloth rolling mechanism 3 and the jacking cleaning mechanism jointly form a cleaning module in the system;
dropping liquid mechanism 2 be located yardage roll mechanism 3's top, jacking wiper mechanism be located transport positioning mechanism 1's below, measuring mechanism 5 be located the exit of system.
Fig. 3 and 4 show the structure of the cleaning module, and fig. 3 is a schematic view of a first side structure of the cleaning module in the CIGS glass substrate coating cleaning system according to an embodiment of the present invention; fig. 4 is a schematic diagram illustrating a second side structure of a cleaning module in the CIGS glass substrate coating cleaning system according to an embodiment of the present invention.
In the above embodiment, the conveying and positioning mechanism 1 includes a left conveying and positioning unit and a right conveying and positioning unit, the left conveying and positioning unit and the right conveying and positioning unit are respectively disposed at the left and right sides of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of the track line formed by the movement of the CIGS glass substrate.
In the above embodiment, the left conveying and positioning unit includes the first conveying belt 101, the right conveying and positioning unit includes the second conveying belt 102, and the CIGS glass substrate is disposed on the first conveying belt 101 and the second conveying belt 102.
In the above embodiment, the left conveying positioning unit and the right conveying positioning unit each include a deceleration sensor 103, a stop sensor 104, and a blocking cylinder 105;
each of the deceleration sensor 103, the stop sensor 104, and the dam cylinder 105 is adjacent to the corresponding first conveyor belt 101 and the second conveyor belt 102;
a stopper 106 is mounted on the top of each of the stopper cylinders 105.
In the above embodiment, the left conveying and positioning unit and the right conveying and positioning unit both include the positioning sliding table cylinder 107 and the positioning clamping member 108, and the positioning sliding table cylinder 107 is connected with the positioning clamping member 108.
In the above embodiment, the dropping mechanism 2 includes a first dropping unit and a second dropping unit, the first dropping unit and the second dropping unit are respectively disposed at the left and right sides of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of the track line formed by the movement of the CIGS glass substrate.
In the above embodiments, the first dropping unit and the second dropping unit each include a dropping valve 201, a valve body mounting member 202, a turntable 203, a guide 204, and a cleaning liquid barrel 205;
the cleaning liquid barrel 205 is used for storing cleaning liquid, and the cleaning liquid barrel 205 is located at the bottom position of the system;
the dropping valve 201 is connected with the cleaning liquid barrel 205 through a pipeline, the dropping valve 201 is also connected with a compressed air control valve, and the dropping valve 201 is also fixed on the valve body mounting piece 202;
the valve body mounting member 202 is eccentrically hinged with a rotating plate of the turntable 203;
the guide member 204 is coupled to a slot in the rear of the valve body mounting member 202.
In the above embodiment, the cloth rolling mechanism 3 includes a first cloth rolling unit, a second cloth rolling unit, and a telescopic cylinder 301, and the telescopic cylinder 301 is connected to the first cloth rolling unit and the second cloth rolling unit respectively; the first cloth rolling unit and the second cloth rolling unit are respectively arranged at the left side and the right side of the transverse central line of the system, and the direction of the transverse central line is consistent with the direction of a track line formed by the movement of the CIGS glass substrate.
In the above embodiment, the first cloth rolling unit comprises a left mounting plate, and the second cloth rolling unit comprises a right mounting plate 302; the cloth rolling mechanism 3 also comprises a linear guide rail;
the tail part of the cylinder body of the telescopic cylinder 301 is connected to the right mounting plate 302, and the head part of the piston rod of the telescopic cylinder 301 is connected to the left mounting plate;
the left side mounting plate and the right side mounting plate 302 are respectively mounted on the left and right slide blocks on the linear guide rail through inclined supports.
In the above embodiments, the first cloth roll unit and the second cloth roll unit each include an inner side limiting block, an outer side limiting block, a tension brake, a cloth roll mounting seat 3021, a fixed bearing seat 3022, a large gear 3023, a small gear 3024, a first flexible coupling 3025, a guide support rod 3026, a first rotating shaft 3027A, a second rotating shaft 3027B, and a second stepping motor;
the left mounting plate and the right mounting plate 302 are respectively connected to a corresponding first rotating shaft 3027A and a corresponding guide support rod 3026;
the two second rotary shafts 3027B are supported by corresponding bearing assemblies fixed to the left and right mounting plates 302, respectively;
the first rotating shaft 3027A is connected with a corresponding yardage roll mounting seat 3021, the first rotating shaft 3027A is connected with a corresponding fixed bearing seat 3022, and the other side of the first rotating shaft 3027A is connected with a corresponding tension brake;
two ends of the cleaning cloth roll are respectively and correspondingly sleeved on the cloth roll mounting seat 3021 in the first cloth roll unit and the cloth roll mounting seat 3021 in the second cloth roll unit;
the cleaning cloth passes around the corresponding guide support bar 3026 and is sandwiched between the corresponding large gear 3023 and the small gear 3024 which are engaged with each other, the large gear 3023 is pressed against the small gear, and the small gear 3024 is mounted on one end of the second rotating shaft 3027B; the other side of the second rotating shaft 3027B is connected to the second stepping motor through a first flexible coupling 3025;
the inner side limiting block and the outer side limiting block are respectively arranged on the inner side and the outer side of the corresponding section of the cleaning cloth roll.
In the above embodiment, the cloth rolling mechanism 3 further includes a cloth roll receiving unit 6, and the cloth roll receiving unit 6 is located below the first cloth roll unit and the second cloth roll unit.
In the above embodiment, the measuring mechanism includes a first measuring mechanism unit and a second measuring mechanism unit;
the first measuring mechanism unit and the second measuring mechanism unit are respectively arranged on the left mounting plate and the right mounting plate 302;
the first measuring mechanism unit and the second measuring mechanism unit respectively comprise a measuring jacking cylinder 501, a second linear guide rail 502, a slide block mounting plate 503, a measuring part mounting plate 504, two measuring heads 505, a first measuring part 506A, a second measuring part 506B and a megger 507;
the measuring jacking cylinder 501 is connected with the sliding block mounting plate 503;
the slide block mounting plate 503 is connected with the second linear guide rail 502;
the measuring member mounting 504 is fixed to the slider mounting plate 503;
the first measuring part 506A and the second measuring part 506B are arranged on the measuring part mounting 504 through springs, and the first measuring part 506A and the second measuring part 506B are respectively correspondingly connected with one measuring head 505; and the two measuring heads 505 are respectively connected with two input ports in the megger 507.
In the above embodiment, the measuring member mounting 504 is an insulator, and there is no contact between the first measuring member 506A and the second measuring member 506B.
In the above embodiment, the jacking cleaning mechanism includes a first jacking cylinder, a first linear bearing, a second linear bearing, a third stepping motor 403, a synchronous belt 404, a first jacking cleaning machine unit and a second jacking cleaning machine unit;
the first linear bearing and the second linear bearing are respectively arranged on two sides of the first jacking cylinder;
the first jacking cleaning machine unit and the second jacking cleaning machine unit respectively comprise an eccentric shaft seat, an oriented rod clamp 406, a cleaning head 407, a rotating rod 409 and a synchronous pulley 408;
the third stepping motor 403 is respectively connected with two synchronous pulleys 408 in the first jacking cleaning machine unit and the second jacking cleaning machine unit through the synchronous belt 404, and the two synchronous pulleys 408 are respectively arranged on two sides of the synchronous belt;
each cleaning head 407 is connected with a corresponding synchronous pulley 408 sequentially through a corresponding rotating rod 409 and an eccentric shaft seat 405;
each of the directional bar clamps 406 is connected to a corresponding cleaning head 407 via a corresponding rotating bar 409.
In the above embodiment, the system is placed inside a frame structure, the delivery positioning mechanism 1 is fixed on the frame structure, and the dripping mechanism 2 is placed on the top of the frame structure.
In the above embodiment, the frame structure is further provided with glass, and the frame structure and the glass together form an accommodating space.
The CIGS glass substrate film coating cleaning system in the embodiment is full-automatic CIGS glass substrate film coating cleaning equipment, can clean and wipe a film coating overflowing to the other side, greatly improves the CIGS yield, mainly comprises a conveying and positioning mechanism, a liquid dropping mechanism, a cloth roll mechanism, a jacking cleaning mechanism and a measuring mechanism, realizes the automation of the processes of feeding, cleaning, measuring and blanking, does not need manual intervention in the conveying and positioning of the substrate, the supply of the cloth roll, the dripping and sprinkling of the cleaning liquid, the cleaning process and the result measurement, and has fast and stable rhythm in the whole process; the CIGS glass substrate film coating cleaning system in the embodiment uses the air cylinder to provide power to position and clean the substrate, and the speed and the pressure of the air cylinder are adjustable; after cleaning, the measuring device is directly attached to the surface of the substrate for measurement, so that the result is accurate; the same substrate can be cleaned and measured for the second time, so that the cleaning effect is ensured; the cloth roll and the liquid storage barrel used by the invention are placed towards the two sides of the equipment, thus being beneficial to manual replacement; the cleaning cloth used by the invention is sent into the containing area at the bottom of the equipment for centralized treatment, so that the environmental protection is good, and the operability of workers is improved.
The following describes the structural relationship and the working process of the CIGS glass substrate coating cleaning system according to the present invention in the above embodiments with reference to specific embodiments.
The CIGS glass substrate coating cleaning system in the above embodiment mainly includes a conveying and positioning mechanism, a dropping mechanism, a cloth rolling mechanism, a jacking cleaning mechanism, and a measuring mechanism.
The conveying and positioning mechanism comprises a support (namely a frame structure), a first conveying belt, a second conveying belt, a speed reduction sensor, a stop sensor, a blocking cylinder, a left positioning sliding table cylinder, a right positioning sliding table cylinder and a positioning clamping piece. Glass substrate is arranged in transport forward on two conveyor belts, passes through in proper order the speed reduction sensor response reduces conveying speed, stop sensor response and stop transport forward, glass substrate still can transport a short distance forward under the effect of inertial force this moment, touch block the nylon of cylinder top installation and stop after blockking the piece. The positioning clamping piece is connected with the positioning sliding table cylinder, the left and right positioning sliding table cylinders drive the positioning clamping piece to move towards the middle respectively, and the glass substrate is clamped to complete positioning.
The conveying and positioning mechanism 1 is fixed on the frame of the device, after the glass substrate is conveyed into the device, the glass substrate is placed on the first conveying belt 101 and the second conveying belt 102 to be conveyed in the forward direction, the conveying speed is reduced after the glass substrate is sensed by the speed reduction sensor 103, the glass substrate is stopped from being conveyed forward after the glass substrate reaches the stop sensor 104, and at the moment, the glass substrate is still conveyed forward for a short distance under the action of inertia force and stops after the glass substrate touches the stop block 106 arranged at the top of the stop cylinder 105. Location clamping piece 108 with location slip table cylinder 107 is connected, location slip table cylinder 107 drives location clamping piece 108 and removes to the glass substrate direction, positioning mechanism controls the structure the same, controls and presss from both sides tightly jointly the glass substrate accomplishes the locate function.
The dropping mechanism 2 is fixed on the top frame of the device, and comprises a dropping valve 201, a valve body mounting piece 202, a rotary table 203, a guide piece 204 and a cleaning liquid barrel 205, and is mainly used for uniformly dropping and sprinkling the cleaning liquid on the cleaning cloth for cleaning the glass substrate; the cleaning cloth is arranged on the cloth rolling mechanism 3; the cleaning liquid is placed in a cleaning liquid barrel 205 of a bottom plate of the device and is supplied to the cavity of a dropping valve 201 through a pipeline, the dropping valve 201 controls the opening and closing of a valve through compressed air, the dropping valve 201 is fixed on the valve body mounting piece 202, the valve body mounting piece 202 is eccentrically hinged with a rotating plate of the rotating platform 203, and the guide piece 204 is connected with a slotted hole at the tail part of the valve body mounting piece 202 to guide the valve body mounting piece 202; the components form a crank sliding block mechanism, and the drip valve 201 is positioned at the end part of a mechanism crank and uniformly drips cleaning liquid on the cleaning cloth; the left and right structures of the dropping mechanism 2 are the same, and the dropping mechanism completes the functions together.
The cloth roll mechanism 3 comprises a telescopic cylinder 301, a right side mounting plate 302, a left side mounting plate 303, a linear guide rail 304, an inner side limit block 305, an outer side limit block 306, a cleaning cloth roll 307, a tension brake 308, a cloth roll mounting seat 3021, a fixed bearing seat 3022, a large gear 3023, a small gear 3024, a first flexible coupling 3025, a guide support rod 3026, a first rotating shaft 3027A, a second rotating shaft 3027B, and a second stepping motor 3028; the tail part of the cylinder body of the telescopic cylinder 301 is connected to the right mounting plate 302, the head part of the piston rod of the telescopic cylinder 301 is connected to the left mounting plate 303 in a floating manner, and the mounting plates are respectively mounted on a left slider and a right slider of the linear guide rail 304 through inclined supports; the structure of the roll feed mechanisms on the mounting plates on both the left and right sides of the roll mechanism 3 is the same, and the right side is taken as an example for detailed description, wherein the right mounting plate 302 is connected to the first rotating shaft 3027A, the first rotating shaft 3027A is connected to the roll mounting seat 3021, the roll 307 is fitted on the roll mounting seat 3021, the fixed bearing seat 3022 is connected to one side of the first rotating shaft 3027A, the tension brake 308 is connected to the other side of the first rotating shaft 3027A, the brake of the tension brake 308 is adjustable to ensure that the roll 307 is not freely rotated, and the cleaning cloth unwound from the roll 307 is always maintained in a desired tension state; the guide support bar 3026 is installed on the right mounting plate 302, the cleaning cloth passes through the guide support bar 3026 by a specific winding method, and is sandwiched between the large gear 3023 and the small gear 3024 which are engaged with each other (wherein, the specific winding method means that the cleaning cloth is laid on the upper surface of the guide support bar 3026, and passes through the guide support bar 3026 under the supporting action of the guide support bar 3026, and the guide support bar mainly plays a role of supporting and guiding the cleaning cloth), the large gear 3023 is pressed against the small gear 3024 under the action of the torsion spring, the small gear 3024 is installed at one end of the second rotation shaft 3027B, the other side of the second rotation shaft 3027B is connected with the second stepping motor 3028 through the first flexible coupling 3025, the second rotation shaft 3027B is supported by a bearing assembly fixed on the mounting plate 302, and the second stepping motor 3028 rotates to drive the second rotation shaft 3027B to pull the roll 3027B which is fed to the bottom of the roll-type roll receiving apparatus for receiving the cleaning cloth which is cleaned on the glass substrate to wait for the concentrated treatment of the operator, and the unused cleaning cloth is moved from the roll 307 to the drip-dispensing mechanism 307 for dripping the drip-type cleaning cloth dropping mechanism 201; telescopic cylinder 301 stretches out and the action of withdrawal drives right side mounting panel 302 and left side mounting panel 303 move to the outside and to the inboard simultaneously, through installing on the aluminium alloy inboard stopper 305 and outside stopper 306 are injectd clean yardage roll 307's position, when guaranteeing inboard clean yardage roll 307's centre parting line is located glass substrate treats the position of wasing under, during the outside clean yardage roll 307's centre parting line is located dropping liquid mechanism 2 under dropping liquid valve 201 export, yardage roll mechanism 3 left and right sides structure is the same, accomplishes the function jointly, and in the process of laying of foretell cleaning cloth, the relation between the guiding support pole of the yardage roll mount pad of cleaning cloth and both sides is roughly as follows:
after one end of the cleaning cloth is led out from the cloth roll mounting seat on one side, the cleaning cloth at the end is firstly hung on the guide supporting rod above the cloth roll mounting seat on the side, then hung on the guide supporting rod above the cloth roll mounting seat on the other side, and finally rolled into the cloth roll mounting seat on the other side, namely the cleaning cloth is respectively lapped on the upper surfaces of the two guide supporting rods 3026, and under the supporting action of the guide supporting rods 3026, the two guide supporting rods 3026 mainly play a role in supporting and guiding the cleaning cloth.
The jacking cleaning mechanism 4 is an action executing mechanism for cleaning the glass substrate and comprises a first jacking cylinder 401, a first linear bearing 402A, a second linear bearing 402B, a third stepping motor 403, a synchronous belt 404, an eccentric shaft seat 405405, a directional rod clamp 406, a cleaning head 407, a synchronous belt pulley 408 and a rotating rod 409; the first jacking cylinder 401 pushes the whole cleaning mechanism to move along the vertical direction, the first linear bearing 402A and the second linear bearing 402B are used as guides, the third stepping motor 403 pulls the two bilaterally symmetrical synchronous pulleys 408 to rotate through the synchronous belt 404, the eccentric shaft seats 405 are mounted on the synchronous pulleys 408, the cleaning heads 407 are mounted on the rotating rods 409, the rotating rods 409 are fixed on the eccentric shaft seats 405, the left and right cleaning heads 407 are respectively positioned right below positions to be cleaned on two sides of a glass substrate, when the cleaning cloth of the cloth rolling mechanism moves to the inner side below the positions to be cleaned of the glass substrate, the jacking cylinder 401 extends upwards, the cleaning heads 407 jack the cleaning cloth up and attach the cleaning cloth to the surfaces of the positions to be cleaned of the glass substrate, the third stepping motor 403 rotates to drive the cleaning heads 407 to rotate around the central axis of the eccentric shaft seats 405 to drive the cleaning cloth to clean the surfaces of the designated areas of the glass substrate, and the directional rod clamps 406 clamp the rotating rods 409 of the cleaning heads 407 in the process to prevent the cleaning heads from rotating rods 407 from rotating around the axes, thereby avoiding the cleaning heads from rotating around the tilting and ensuring good cleaning effect and wrinkling.
The measuring mechanism 5 is used for checking whether the cleaning effect meets the requirement; the device comprises a measuring jacking cylinder 501, a second linear guide rail 502, a slide block mounting plate 503, a measuring part mounting plate 504, a measuring head 505, a first measuring part 506A, a second measuring part 506B and a megohmmeter 507; the measuring mechanism 5 comprises two sets on the cleaning device, which are respectively arranged on the right side mounting plate 302 and the left side mounting plate 303 of the cloth rolling mechanism 3, taking one set as an example, the measuring jacking cylinder 501 is connected with the slider mounting plate 503 in a floating way, the measuring jacking cylinder 501 pushes the slider mounting plate 503 to linearly ascend and descend along the second linear guide rail 502, the measuring piece mounting plate 504 is fixed to the slider mounting plate 503, the first measuring piece 506A and the second measuring piece 506B float on the measuring piece mounting plate 504 by the supporting force of a spring, and when the cloth roll moves to the inside, the first measuring piece 506A and the second measuring piece 506B are right below the glass substrate cleaning position, the side head 505 includes two measuring parts 506A and 506B fixed to the first measuring part, respectively, the two measuring heads 505 are connected to two input ports of the megger 507 placed on the device bottom plate through wires, the measuring member mounting plate 504 is an insulator, there is no contact between the first measuring member 506A and the second measuring member 506B, the measurement jacking cylinder 501 extends upwards to drive the first measurement member 506A and the second measurement member 506B to be attached to the cleaned position of the glass substrate, then the megger 507 measures the value and compares the value with the preset data to judge whether the cleaning result is qualified; the result of the measurement is qualified, the piston rod of the positioning sliding table air cylinder 107 extends out, the glass substrate is loosened, the first conveying belt 101 and the second conveying belt 102 run to convey the glass substrate away from the equipment to the next station, and meanwhile, the subsequent second glass substrate begins to enter the equipment; if the measurement result is unqualified, the glass substrate is kept in a positioning and clamping state, and the equipment performs a cleaning process for the second time; if the measurement result of the glass substrate after the secondary cleaning is not qualified, the automatic operation of the equipment is automatically stopped and an alarm is given.
The CIGS glass substrate film coating cleaning system comprises a conveying and positioning mechanism, a liquid dropping mechanism, a cloth rolling mechanism, a jacking cleaning mechanism and a measuring mechanism, wherein the mechanisms are connected in a combined manner to clean and erase a film coating overflowing from a substrate glass preposing process of the CIGS glass substrate to the back side, so that the subsequent process requirements of the glass substrate are met, the automation of the processes of feeding, cleaning, measuring and discharging is realized, the conveying and positioning of the substrate, the supply of the cloth rolling, the dripping and sprinkling of cleaning liquid, the cleaning process and the result measurement do not need manual intervention, and the beat of the whole process is rapid and stable; after cleaning, the measuring device is directly attached to the surface of the CIGS glass substrate for measurement, so that the result is accurate, the operation is convenient, the working efficiency is improved, the CIGS yield is greatly improved, and the labor intensity of field workers is reduced.
In this specification, the invention has been described with reference to specific embodiments thereof. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the invention. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense.

Claims (15)

1. A CIGS glass substrate coating film cleaning system is characterized by comprising:
the conveying and positioning mechanism is used for conveying and positioning the CIGS glass substrate;
the liquid dropping mechanism is used for uniformly dropping and spraying the cleaning liquid;
the cloth roll mechanism is used for driving the cleaning cloth on the cleaning cloth roll to move, and the cleaning cloth roll is formed by overlapping the cleaning cloth roll;
the jacking cleaning mechanism is used for cleaning the CIGS glass substrate;
the measuring mechanism is used for detecting whether the cleaned CIGS glass substrate meets the cleaning requirement;
the liquid dropping mechanism, the cloth rolling mechanism and the jacking cleaning mechanism jointly form a cleaning module in the system;
the dropping mechanism is positioned above the cloth roll mechanism, the jacking cleaning mechanism is positioned below the conveying and positioning mechanism, and the measuring mechanism is positioned at an outlet of the system;
the cloth rolling mechanism comprises a first cloth rolling unit, a second cloth rolling unit and a telescopic cylinder, and the telescopic cylinder is respectively connected with the first cloth rolling unit and the second cloth rolling unit; the first cloth rolling unit and the second cloth rolling unit are respectively arranged at the left side and the right side of the transverse center line of the system, and the direction of the transverse center line is consistent with the direction of a track line formed by the movement of the CIGS glass substrate;
the first cloth rolling unit comprises a left mounting plate, and the second cloth rolling unit comprises a right mounting plate; the tail part of the cylinder body of the telescopic cylinder is connected with the right side mounting plate, and the head part of a piston rod of the telescopic cylinder is movably connected with the left side mounting plate;
the stretching and retracting actions of the telescopic cylinder drive the right mounting plate and the left mounting plate to move outwards and inwards simultaneously; when the cloth roll mechanism is arranged on the inner side, the middle division line of the cleaning cloth roll is positioned right below the position, to be cleaned, of the glass substrate, when the cloth roll mechanism is arranged on the outer side, the middle division line of the cleaning cloth roll is positioned right below the outlet of a liquid dropping valve of the liquid dropping mechanism, the left structure and the right structure of the cloth roll mechanism are the same, and the functions are jointly completed;
the jacking cleaning mechanism comprises a first jacking cylinder, a first jacking cleaning machine unit and a second jacking cleaning machine unit, wherein the first jacking cleaning machine unit and the second jacking cleaning machine unit both comprise cleaning heads;
the cleaning heads are respectively arranged on the left and right sides and are respectively positioned right below positions to be cleaned on the two sides of the glass substrate, when the cleaning cloth of the cloth rolling mechanism moves to the lower side of the position to be cleaned of the glass substrate towards the inner side, the first jacking cylinder extends upwards, and the cleaning heads jack the cleaning cloth to be attached to the surface of the position to be cleaned of the glass substrate; the cleaning head drives the cleaning cloth to clean the surface of the designated area of the glass substrate.
2. The CIGS glass substrate coating and cleaning system as recited in claim 1, wherein said conveying and positioning mechanism comprises a left conveying and positioning unit and a right conveying and positioning unit, said left conveying and positioning unit and said right conveying and positioning unit are respectively disposed on the left and right sides of a transverse center line of said system, and the direction of said transverse center line is consistent with the direction of a track line formed by the movement of said CIGS glass substrate.
3. The CIGS glass substrate coating and cleaning system of claim 2, wherein said left transport positioning unit comprises a first transport belt, said right transport positioning unit comprises a second transport belt, and said CIGS glass substrate is placed on said first transport belt and said second transport belt.
4. The CIGS glass substrate coating cleaning system of claim 3,
the left conveying positioning unit and the right conveying positioning unit respectively comprise a speed reduction sensor, a stop sensor and a blocking cylinder;
each deceleration sensor, each stop sensor and each blocking cylinder are respectively adjacent to the corresponding first conveying belt and the corresponding second conveying belt;
and the top of each blocking cylinder is provided with a blocking block.
5. The CIGS glass substrate film coating cleaning system of claim 4, wherein the left conveying and positioning unit and the right conveying and positioning unit both comprise a positioning sliding table cylinder and a positioning clamping piece, and the positioning sliding table cylinder is connected with the positioning clamping piece.
6. The CIGS glass substrate coating and cleaning system as recited in claim 1, wherein said dropping mechanism comprises a first dropping unit and a second dropping unit, said first dropping unit and said second dropping unit being respectively disposed on left and right sides of a transverse centerline of said system, said transverse centerline being oriented in a direction corresponding to a direction of a trajectory formed by movement of said CIGS glass substrate.
7. The CIGS glass substrate coating cleaning system of claim 6,
the first dripping unit and the second dripping unit respectively comprise a dripping valve, a valve body mounting part, a rotary table, a guide part and a cleaning liquid barrel;
the cleaning liquid barrel is used for storing cleaning liquid and is positioned at the bottom of the system;
the dropping valve is connected with the cleaning liquid barrel through a pipeline, is also connected with a compressed air control valve and is also fixed on the valve body mounting piece;
the valve body mounting part is eccentrically hinged with the rotating plate of the rotary table;
the guide piece is connected with the slotted hole at the tail part of the valve body installation piece.
8. The CIGS glass substrate coating cleaning system as claimed in claim 1, wherein the cloth rolling mechanism further comprises a linear guide;
the left side mounting plate and the right side mounting plate are respectively mounted on the left slider and the right slider on the linear guide rail through inclined supports.
9. The CIGS glass substrate coating cleaning system of claim 8,
the first cloth rolling unit and the second cloth rolling unit respectively comprise an inner side limiting block, an outer side limiting block, a tension brake, a cloth rolling mounting seat, a fixed bearing seat, a large gear, a small gear, a first flexible coupling, a guide supporting rod, a first rotating shaft, a second rotating shaft and a second stepping motor;
the left mounting plate and the right mounting plate are respectively connected with the corresponding first rotating shaft and the corresponding guide supporting rod;
the two second rotating shafts are respectively supported by corresponding bearing assemblies fixed on the left mounting plate and the right mounting plate;
the first rotating shaft is connected with the corresponding yardage roll mounting seat, the first rotating shaft is connected with the corresponding fixed bearing seat, and the other side of the first rotating shaft is connected with the corresponding tension brake;
the two cleaning cloth rolls are respectively and correspondingly sleeved on the cloth roll mounting seat in the first cloth roll unit and the cloth roll mounting seat in the second cloth roll unit;
the cleaning cloth passes through the corresponding guide supporting rod in a winding way, and is clamped between the corresponding large gear and the corresponding small gear which are meshed with each other, the large gear is pressed on the small gear, and the small gear is arranged at one end of the second rotating shaft; the other side of the second rotating shaft is connected with the second stepping motor through a first flexible coupling;
the inner side limiting block and the outer side limiting block are respectively arranged on the inner side and the outer side of the corresponding section of the cleaning cloth roll.
10. The CIGS glass substrate coating cleaning system of claim 8, wherein said cloth roll mechanism further comprises a cloth roll receiving unit, said cloth roll receiving unit is located below said first cloth roll unit and said second cloth roll unit.
11. The CIGS glass substrate coating and cleaning system of claim 8, wherein said measuring mechanism comprises a first measuring mechanism unit and a second measuring mechanism unit;
the first measuring mechanism unit and the second measuring mechanism unit are respectively arranged on the left mounting plate and the right mounting plate;
the first measuring mechanism unit and the second measuring mechanism unit respectively comprise a measuring jacking cylinder, a second linear guide rail, a slide block mounting plate, a measuring piece mounting plate, two measuring heads, a first measuring piece, a second measuring piece and a megohmmeter;
the measuring jacking cylinder is movably connected with the sliding block mounting plate;
the slide block mounting plate is connected with the second linear guide rail;
the measuring part mounting plate is fixed on the sliding block mounting plate;
the first measuring part and the second measuring part are arranged on the measuring part mounting plate through springs, and the first measuring part and the second measuring part are respectively and correspondingly connected with one measuring head; and the two measuring heads are respectively connected with two input ports in the megohmmeter.
12. The CIGS glass substrate coating cleaning system as claimed in claim 11, wherein said measuring member mounting plate is an insulator, and wherein said first measuring member and said second measuring member are free from contact with each other.
13. The CIGS glass substrate coating and cleaning system of claim 1, wherein the jacking and cleaning mechanism comprises a first linear bearing, a second linear bearing, a third stepping motor and a synchronous belt;
the first linear bearing and the second linear bearing are respectively arranged on two sides of the first jacking cylinder;
the first jacking cleaning machine unit and the second jacking cleaning machine unit respectively comprise an eccentric shaft seat, a directional rod clamp, a rotary rod and a synchronous belt wheel;
the third step motor is respectively connected with two synchronous belt wheels in the first jacking cleaning machine unit and the second jacking cleaning machine unit through the synchronous belts, and the two synchronous belt wheels are respectively arranged on two sides of the synchronous belts;
each cleaning head is connected with a corresponding synchronous belt pulley sequentially through a corresponding rotating rod and an eccentric shaft seat;
each directional rod clamp is connected with the corresponding cleaning head through the corresponding rotary rod.
14. The CIGS glass substrate film coating and cleaning system as claimed in claim 1, wherein said system is disposed within a frame structure, said transport positioning mechanism is fixed to said frame structure, and said dripping mechanism is disposed on top of said frame structure.
15. The CIGS glass substrate coating cleaning system as claimed in claim 14, wherein the frame structure further comprises glass, and the frame structure and the glass together form a receiving space.
CN201810723712.4A 2018-07-04 2018-07-04 CIGS glass substrate coating film cleaning system Active CN108906766B (en)

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Application publication date: 20181130

Assignee: WUXI SHANGSHI ELECTRONIC TECHNOLOGY Co.,Ltd.

Assignor: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd.

Contract record no.: X2023310000131

Denomination of invention: CIGS Glass Substrate Coating Cleaning System

Granted publication date: 20230224

License type: Common License

Record date: 20230705

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Patentee after: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd.

Country or region after: China

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Patentee before: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd.

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