CN108906766A - CIGS glass substrate plated film cleaning system - Google Patents
CIGS glass substrate plated film cleaning system Download PDFInfo
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- CN108906766A CN108906766A CN201810723712.4A CN201810723712A CN108906766A CN 108906766 A CN108906766 A CN 108906766A CN 201810723712 A CN201810723712 A CN 201810723712A CN 108906766 A CN108906766 A CN 108906766A
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- yardage roll
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- 238000004140 cleaning Methods 0.000 title claims abstract description 195
- 239000011521 glass Substances 0.000 title claims abstract description 106
- 239000000758 substrate Substances 0.000 title claims abstract description 105
- 230000007246 mechanism Effects 0.000 claims abstract description 139
- 239000007788 liquid Substances 0.000 claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 239000004744 fabric Substances 0.000 claims description 75
- 230000005540 biological transmission Effects 0.000 claims description 27
- 230000001360 synchronised effect Effects 0.000 claims description 27
- 238000009434 installation Methods 0.000 claims description 21
- 238000007667 floating Methods 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 3
- 230000004807 localization Effects 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000006210 lotion Substances 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 14
- 238000004801 process automation Methods 0.000 abstract description 4
- 239000005357 flat glass Substances 0.000 abstract description 3
- 239000012528 membrane Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 27
- 208000007101 Muscle Cramp Diseases 0.000 description 7
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/20—Investigating the presence of flaws
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention relates to a kind of CIGS glass substrate plated film cleaning systems, wherein the system includes orientating and conveying mechanisms, liquid dropping mechanism, yardage roll mechanism, jacking wiper mechanism and measuring mechanism, can plate the device of Membrane cleaning to CIGS glass substrate by the intercombination of said mechanism and connection composition one.Realize that the plated film for spilling into back side to the preposition process of the base plate glass of CIGS glass substrate carries out cleaning erasing using the cleaning system of this kind of structure, realize the subsequent technique requirement of glass substrate, realize feeding-cleaning-measurement-blanking process automation, the conveying positioning of substrate, the supply of yardage roll, cleaning solution drop spill, cleaning process and outcome measurement are not necessarily to manual intervention, entire technical process beat fast and stable；Measuring device is directly sticked CIGS glass baseplate surface and is measured after the completion of cleaning, guarantees that result is accurate, and it is convenient to operate, and improves work efficiency, and greatly improves CIGS yields, mitigates the labor intensity of field personnel.
Description
Technical field
The present invention relates to the cleaning fields, in particular to one kind of automatic field more particularly to a kind of CIGS glass substrate
CIGS glass substrate plated film cleaning system.
Background technique
Academic circles at present and industrial circle generally believe that the development of solar battery has entered
The main third generation, copper-indium-galliun-selenium film solar cell (CIGS) are the new type solar energy electricity that developed the late 1980s
Pond, its important a member as multicomponent compound film battery become grinding for global photovoltaic art by superior comprehensive performance
Study carefully one of hot spot.The typical multi-layer film structure of CIGS includes metal gate, antireflective coating, Window layer (ZnO), transition zone, light absorption
Layer, back electrode and glass substrate.During the preparation process, CIGS thin film is usually and grows out in the glass substrate for be coated with Mo
, when sputtering at ZnO film layer on underlay substrate, crystal grain can arrive thoroughly glass by the threading hole that preposition process drills out on substrate
The another side of glass substrate, these crystal grain film layers overflowed will cause the short circuit phenomenon of battery device, seriously affect hull cell
Performance even results in battery component and scraps.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned prior art, a kind of achievable feeding-cleaning-survey is provided
Amount-small powder process automation CIGS glass substrate plated film cleaning system.
To achieve the goals above, CIGS glass substrate plated film cleaning system of the invention has following constitute：
The CIGS glass substrate plated film cleaning system, is mainly characterized by, the system includes：
Orientating and conveying mechanisms, for conveying and positioning the CIGS glass substrate；
Liquid dropping mechanism spills cleaning solution for uniformly dripping；
Yardage roll mechanism, cleaning cloth are provided in the yardage roll mechanism, and have the yardage roll mechanism to drive the cleaning on cleaning yardage roll
Cloth is mobile, and the cleaning yardage roll is made of the cleaning cloth wound；
Jack wiper mechanism, the cleaning for the CIGS glass substrate；
Measuring mechanism, for examining whether the CIGS glass substrate after over cleaning meets cleaning requirement；
Liquid dropping mechanism, yardage roll mechanism and the jacking wiper mechanism collectively forms the cleaning module in the system；
The liquid dropping mechanism is located at the top of the yardage roll mechanism, and the jacking wiper mechanism is located at described defeated
The lower section of positioning mechanism is sent, the measuring mechanism is located at the exit of the system.
Preferably, the orientating and conveying mechanisms include left transmission positioning unit and right transmission positioning unit, the left side
Transmission positioning unit and right transmission positioning unit are respectively placed in the left and right sides of the system cross central line, the transverse direction
It is consistent that the direction of center line with the CIGS glass substrate moves the direction for the trajectory line to be formed.
More preferably, the left transmission positioning unit includes the first conveyor belt, and the right transmission positioning unit includes
Second conveyor belt, the CIGS glass substrate are placed in first conveyor belt and the second conveyor belt.
Further, the left transmission positioning unit and right transmission positioning unit include deceleration sensor, stop
Sensor and stop cylinder；
Each deceleration sensor, stop sensor and the stop cylinder respectively with corresponding first conveyor belt and
Second conveyor belt is adjacent；
A stopper is mounted at the top of each stop cylinder.
Further, the left transmission positioning unit and right transmission positioning unit include positioning slider cylinder and determine
Position clamping element, the positioning slider cylinder are connected with the positioning clamping element.
Preferably, the liquid dropping mechanism includes the first drip units and the second drip units, the first dropping liquid list
Member is respectively placed in the left and right sides of the system cross central line, the direction of the cross central line with the second drip units
It is consistent that the direction for the trajectory line to be formed is moved with the CIGS glass substrate.
More preferably, first drip units and the second drip units include liquid-dropping valve, valve body installation part, turntable,
Guide part and cleaning solution bucket；
The cleaning solution bucket is for storing cleaning solution, and the cleaning solution bucket position is in the bottom position of the system
It sets；
The liquid-dropping valve is connected by pipeline with the cleaning solution bucket, and the liquid-dropping valve is also controlled with compressed air
Valve is connected, and the liquid-dropping valve is also fixed on the valve body installation part；
The rotor plate of the valve body installation part and the turntable is eccentric hinged；
The guide part is connect with the slot of the valve body installation part tail portion.
Preferably, the yardage roll mechanism includes the first cloth roll unit, the second cloth roll unit and telescopic cylinder, it is described
Telescopic cylinder be connected respectively with the first cloth roll unit and the second cloth roll unit；The first cloth roll unit and
Two cloth roll units are respectively placed in the left and right sides of the system cross central line, the direction of the cross central line with it is described
CIGS glass substrate move the trajectory line to be formed direction it is consistent.
More preferably, the first cloth roll unit includes a left side mounting plate, and the second cloth roll unit includes one right
Side mounting plate；The yardage roll mechanism further includes linear guide；
It is floating that the telescopic cylinder cylinder body tail portion is connected to the right side mounting plate, the piston rod head of the telescopic cylinder
It is dynamic to be connected to left side mounting plate；
The left side mounting plate and right side mounting plate passes through bearing diagonal and is respectively arranged in the linear guide
On two sliding blocks in left and right.
Further, the first cloth roll unit and the second cloth roll unit include inner side limiting-position block, outside
Side limited block, tension braker, yardage roll mounting base, fixed bearing block, gear wheel, pinion gear, the first flexible clutch, guiding branch
Strut, the first rotary shaft, the second rotary shaft, second stepper motor；
The left side mounting plate and right side mounting plate is connected with corresponding first rotary shaft and guiding support bar respectively；
Second rotary shaft described in two respectively be fixed on left side mounting plate and right side mounting plate on corresponding bearing
Component is support；
First rotary shaft is connected with corresponding yardage roll mounting base, and described first rotates the corresponding fixing axle of axis connection
Seat is held, the first rotary shaft other side connects corresponding tension braker；
Clean yardage roll mounting base of the corresponding set in both ends in the first cloth roll unit of yardage roll and described
In second cloth roll unit yardage roll mounting base；
The cleaning cloth around pass through corresponding guiding support bar, and the cleaning cloth be clipped in it is corresponding intermeshing
Between the gear wheel and pinion gear, the gear wheel is pressed on the small tooth, and the pinion gear is mounted in described
Second rotary shaft one end；The second rotary shaft other side passes through the first flexible clutch and the second stepper motor phase
Connection；
Each the inner side limiting-position block and outside limited block are respectively placed in the cleaning yardage roll corresponding one section
Inner side and outer side.
Further, the yardage roll mechanism further includes a yardage roll housing unit, and the yardage roll housing unit is located at
The lower section of the first cloth roll unit and the second cloth roll unit.
Further, measuring mechanism the first measuring mechanism unit and the second measuring mechanism unit；
The first measuring mechanism unit and the second measuring mechanism unit is respectively placed in the left side mounting plate and the right side
On the mounting plate of side；
The first measuring mechanism unit includes that measurement jacking cylinder, second straight line are led with the second measuring mechanism unit
Rail, sliding block mounting plate, measuring piece mounting plate, two gauge heads, the first measuring piece, the second measuring piece, megameter；
The measurement jacking cylinder and the sliding block mounting plate floating connection；
The sliding block mounting plate is connected with the second straight line guide rail；
The measuring piece mounting plate is fixed on the sliding block mounting plate；
First measuring piece and second measuring piece are set on the measuring piece mounting plate by spring, and described
One measuring piece with the second measuring piece is corresponding with gauge head described in one respectively is connected；And gauge head described in two is respectively with described million
Two input ports in the table of Europe are connected.
Further, the measuring piece mounting plate is insulator, and first measuring piece and described second
It is contactless between measuring piece.
Preferably, the jacking wiper mechanism include the first jacking cylinder, first straight line bearing, second straight line bearing,
Third stepper motor, synchronous belt, the first jacking cleaning machine unit and the second jacking cleaning machine unit；
The first straight line bearing and second straight line bearing is respectively placed in the two sides of first jacking cylinder；
The described first jacking cleaning machine unit and the second jacking cleaning machine unit include eccentric axis seat, orient bar cramp,
Cleaning head, swingle and synchronous pulley；
The third stepper motor by the synchronous belt respectively with the described first jacking cleaning machine unit and the
Synchronous pulley described in two in two jacking cleaning machine units is connected, and synchronous pulley described in two be respectively placed in it is described
Synchronous belt two sides；
Each cleaning head passes sequentially through corresponding swingle, eccentric axis seat is connected with corresponding synchronous pulley
It connects；
Each orientation bar cramp passes through corresponding swingle and is connected with corresponding cleaning head.
Preferably, the system is placed in inside a frame structure, the orientating and conveying mechanisms are fixed on the frame knot
On structure, the liquid dropping mechanism is placed in the top of the frame structure.
More preferably, glass is additionally provided in the frame structure, an accommodating is collectively formed in the frame structure and glass
Space.
The CIGS glass substrate plated film cleaning system, including orientating and conveying mechanisms, liquid dropping mechanism, yardage roll mechanism, jacking are clearly
Washing machine structure, measuring mechanism are connected by the combination between said mechanism, are realized to the preposition work of the base plate glass of CIGS glass substrate
The plated film that sequence spills into back side carries out cleaning erasing, realizes the subsequent technique requirement of glass substrate, realizes feeding-cleaning-measurement-
Blanking process automation, the conveying positioning of substrate, the supply of yardage roll, cleaning solution drop spill, cleaning process and outcome measurement it is equal
Without manual intervention, entire technical process beat fast and stable；Measuring device directly sticks CIGS glass substrate after the completion of cleaning
Surface measures, and guarantees that result is accurate, and it is convenient to operate, and improves work efficiency, and greatly improves CIGS yields, mitigates existing
The labor intensity of field staff.
Detailed description of the invention
Fig. 1 is the schematic perspective view of CIGS glass substrate plated film cleaning system of the invention in an embodiment.
Fig. 2 is the top view of CIGS glass substrate plated film cleaning system of the invention in an embodiment.
Fig. 3 is the first side structure of cleaning module in CIGS glass substrate plated film cleaning system of the invention in an embodiment
Schematic diagram.
Fig. 4 is the second side structure of cleaning module in CIGS glass substrate plated film cleaning system of the invention in an embodiment
Schematic diagram.
Appended drawing reference
1 orientating and conveying mechanisms
101 first conveyor belts
102 second conveyor belts
103 deceleration sensors
104 stop sensors
105 stop cylinders
106 stoppers
107 positioning slider cylinders
108 positioning clamping elements
2 liquid dropping mechanisms
201 liquid-dropping valves
202 valve body installation parts
203 turntables
204 guide parts
205 cleaning solution buckets
3 yardage roll mechanisms
301 telescopic cylinders
302 right side mounting plates
3021 yardage roll mounting bases
3022 fixed bearing blocks
3023 gear wheels
3024 pinion gears
3025 first flexible clutch
3026 guiding support bars
The first rotary shaft of 3027A
The second rotary shaft of 3027B
3028 second stepper motors
303 left side mounting plates
304 first straight line guide rails
305 inner side limiting-position blocks
306 outside limited blocks
307 cleaning yardage rolls
308 tension brakers
4 jacking wiper mechanisms
401 first jacking cylinders
402A first straight line bearing
402B second straight line bearing
403 third stepper motors
404 synchronous belts
405 eccentric axis seats
406 orientation bar cramps
407 cleaning heads
408 synchronous pulleys
409 swingles
5 measuring mechanisms
501 measurement jacking cylinders
502 second straight line guide rails
503 sliding block mounting plates
504 measuring piece mounting plates
505 gauge heads
The first measuring piece of 506A
The second measuring piece of 506B
507 megameters
6 yardage roll housing units
Specific embodiment
It is further to carry out combined with specific embodiments below in order to more clearly describe technology contents of the invention
Description.
The structure of the CIGS glass substrate plated film cleaning system is as shown in Figure 1, 2, and Fig. 1 is of the invention in an embodiment
The schematic perspective view of CIGS glass substrate plated film cleaning system, Fig. 2 are CIGS glass substrate of the invention in an embodiment
The top view of plated film cleaning system.
The CIGS glass substrate plated film cleaning system, wherein the system includes：
Orientating and conveying mechanisms 1, for conveying and positioning the CIGS glass substrate；
Liquid dropping mechanism 2 spills cleaning solution for uniformly dripping；
Yardage roll mechanism 3, cleaning cloth are provided in the yardage roll mechanism 3, and there have the yardage roll mechanism 3 to drive to be clear on cleaning yardage roll
Clean cloth is mobile, and the cleaning yardage roll is made of the cleaning cloth wound；
Jack wiper mechanism, the cleaning for the CIGS glass substrate；
Measuring mechanism 5, for examining whether the CIGS glass substrate after over cleaning meets cleaning requirement；
Liquid dropping mechanism 2, yardage roll mechanism 3 and the jacking wiper mechanism collectively forms the cleaning mould in the system
Block；
The liquid dropping mechanism 2 is located at the top of the yardage roll mechanism 3, and the jacking wiper mechanism is located at described
The lower section of orientating and conveying mechanisms 1, the measuring mechanism 5 are located at the exit of the system.
Wherein, the structure of the cleaning module is as shown in Figure 3 and Figure 4, and Fig. 3 is CIGS glass of the invention in an embodiment
Cleaning module the first side structure schematic diagram in glass substrate film coating cleaning system；Fig. 4 is CIGS glass of the invention in an embodiment
Cleaning module second side structural schematic diagram in glass substrate film coating cleaning system.
In the above-described embodiments, the orientating and conveying mechanisms 1 include left transmission positioning unit and right transmission positioning unit,
The left transmission positioning unit and right transmission positioning unit are respectively placed in the left and right sides of the system cross central line, institute
It is consistent that the direction for the cross central line stated with the CIGS glass substrate moves the direction for the trajectory line to be formed.
In the above-described embodiments, the left transmission positioning unit includes the first conveyor belt 101, and the right conveying is fixed
Bit location includes the and conveyor belt 102, the CIGS glass substrate be placed in first conveyor belt 101 with the and it is defeated
It send on belt 102.
In the above-described embodiments, the left transmission positioning unit and right transmission positioning unit include 103 before deceleration window,
Stop sensor 104 and stop cylinder 105；
103, stop sensor 104 and stop cylinder 105 are defeated with corresponding first respectively before each deceleration window
Send belt 101 and and conveyor belt 102 is adjacent；
A stopper 106 is mounted at the top of each stop cylinder 105.
In the above-described embodiments, the left transmission positioning unit and right transmission positioning unit include positioning slider cylinder
107 and positioning clamping element 108, the positioning slider cylinder 107 is connected with the positioning clamping element 108.
In the above-described embodiments, the liquid dropping mechanism 2 includes the first drip units and the second drip units, and described the
One drip units and the second drip units are respectively placed in the left and right sides of the system cross central line, the transverse center
It is consistent that the direction of line with the CIGS glass substrate moves the direction for the trajectory line to be formed.
In the above-described embodiments, first drip units and the second drip units include liquid-dropping valve 201, valve body peace
Piece installing 202, turntable 203, guide part 204 and cleaning solution bucket 205；
The cleaning solution bucket 205 is for storing cleaning solution, and the cleaning solution bucket 205 is located at the bottom of the system
Portion position；
The liquid-dropping valve 201 is connected by pipeline with the cleaning solution bucket 205, and the liquid-dropping valve 201 also with pressure
Contracting air shut-off valve door is connected, and the liquid-dropping valve 201 is also fixed on the valve body installation part 202；
The rotor plate of the valve body installation part 202 and the turntable 203 is eccentric hinged；
The guide part 204 is connect with the slot of 202 tail portion of valve body installation part.
In the above-described embodiments, the yardage roll mechanism 3 includes the first cloth roll unit, the second cloth roll unit and stretches
Cylinder 301, the telescopic cylinder 301 are connected with the first cloth roll unit and the second cloth roll unit respectively；Described
First cloth roll unit and the second cloth roll unit are respectively placed in the left and right sides of the system cross central line, in the transverse direction
It is consistent that the direction of heart line with the CIGS glass substrate moves the direction for the trajectory line to be formed.
In the above-described embodiments, the first cloth roll unit includes a left side mounting plate, the second cloth roll unit
Including a right side mounting plate 302；The yardage roll mechanism 3 further includes linear guide；
The 301 cylinder body tail portion of telescopic cylinder is connected to the work of the right side mounting plate 302, the telescopic cylinder 301
Stopper rod head floating connection is in left side mounting plate；
The left side mounting plate and right side mounting plate 302 is respectively arranged in the linear guide by bearing diagonal
The sliding block of left and right two on.
In the above-described embodiments, the first cloth roll unit and the second cloth roll unit include inner side limiting-position
Block, outside limited block, tension braker, yardage roll mounting base 3021, fixed bearing block 3022, gear wheel 3023, pinion gear 3024,
First flexible clutch 3025, guiding support bar 3026, the first rotary shaft 3027A, the second rotary shaft 3027B, the second stepping electricity
Machine；
The left side mounting plate and right side mounting plate 302 respectively with corresponding first rotary shaft 3027A and guide support
Bar 3026 is connected；
Second rotary shaft 3027B described in two respectively be fixed on left side mounting plate and right side mounting plate 302 on pair
The bearing assembly answered is support；
The first rotary shaft 3027A and the connection of corresponding yardage roll mounting base 3021, the first rotary shaft 3027A connect
Corresponding fixed bearing block 3022 is connect, first other side rotary shaft 3027A connects corresponding tension braker；
Clean yardage roll mounting base 3021 and institute of the corresponding set in both ends of yardage roll in the first cloth roll unit
In the second cloth roll unit yardage roll mounting base 3021 stated；
The cleaning cloth is around passing through corresponding guiding support bar 3026, and the cleaning cloth is clipped in and corresponding mutually nibbles
Between the gear wheel 3023 and pinion gear 3024 closed, the gear wheel 3023 is pressed on the small tooth, described
Pinion gear 3024 is mounted in the second described one end rotary shaft 3027B；Second other side rotary shaft 3027B is soft by first
Property shaft coupling 3025 is connected with the second stepper motor；
Each the inner side limiting-position block and outside limited block are respectively placed in the cleaning yardage roll corresponding one section
Inner side and outer side.
In the above-described embodiments, the yardage roll mechanism 3 further includes a yardage roll housing unit 6, and the yardage roll is stored single
Member 6 is located at the lower section of the first cloth roll unit and the second cloth roll unit.
In the above-described embodiments, measuring mechanism the first measuring mechanism unit and the second measuring mechanism unit；
The first measuring mechanism unit and the second measuring mechanism unit is respectively placed in the left side mounting plate and the right side
On side mounting plate 302；
The first measuring mechanism unit and the second measuring mechanism unit includes that measurement jacking cylinder 501, second is straight
Line guide rail 502, sliding block mounting plate 503, measuring piece install 504, two gauge heads 505, the first measuring piece 506A, the second measuring piece
506B, megameter 507；
The measurement jacking cylinder 501 and 503 floating connection of sliding block mounting plate；
The sliding block mounting plate 503 is connected with the second straight line guide rail 502；
The measuring piece installation 504 is fixed on the sliding block mounting plate 503；
The first measuring piece 506A and the second measuring piece 506B sets the measuring piece installation 504 by spring
On, the first measuring piece 506A and the second measuring piece 506B respectively with gauge head 505 is corresponding described in one is connected；And two institutes
The gauge head 505 stated is connected with two input ports in the megameter 507 respectively.
In the above-described embodiments, the measuring piece installs 504 as insulator, and the first measuring piece 506A and institute
It is contactless between the second measuring piece 506B stated.
In the above-described embodiments, the jacking wiper mechanism include the first jacking cylinder, it is first straight line bearing, second straight
Spool is held, third stepper motor 403, synchronous belt 404, first jack cleaning machine unit and the second jacking cleaning machine unit；
The first straight line bearing and second straight line bearing is respectively placed in the two sides of first jacking cylinder；
The first jacking cleaning machine unit and the second jacking cleaning machine unit includes eccentric axis seat, orientation bar cramp
406, cleaning head 407, swingle 409 and synchronous pulley 408；
The third stepper motor 403 jacks cleaning machine list with described first respectively by the synchronous belt 404
Synchronous pulley 408 described in two in member and the second jacking cleaning machine unit is connected, and synchronous pulley 408 described in two
It is respectively placed in the two sides of the synchronous belt；
Each cleaning head 407 pass sequentially through corresponding swingle 409, eccentric axis seat 405 with it is corresponding synchronous
Belt wheel 408 is connected；
Each orientation bar cramp 406 is connected by corresponding swingle 409 with corresponding cleaning head 407.
In the above-described embodiments, the system is placed in inside a frame structure, and the orientating and conveying mechanisms 1 are fixed on
In the frame structure, the liquid dropping mechanism 2 is placed in the top of the frame structure.
In the above-described embodiments, glass, the frame structure and the common shape of glass are additionally provided in the frame structure
At an accommodating space.
CIGS glass substrate plated film cleaning system in the above-described embodiments is a kind of full-automatic CIGS glass substrate plated film
Cleaning equipment can clean the plated film that erasing spills into another side, greatly improve CIGS yields, main includes conveying localization machine
Structure, liquid dropping mechanism, yardage roll mechanism, jacking wiper mechanism and measuring mechanism realize that feeding-cleaning-measurement-blanking process is automatic
Change, the conveying positioning of substrate, the supply of yardage roll, cleaning solution drop spill, cleaning process and outcome measurement are not necessarily to manual intervention,
Entire technical process beat fast and stable；CIGS glass substrate plated film cleaning system in above-described embodiment is provided dynamic using cylinder
Power carries out the positioning and cleaning of substrate, and cylinder speed and pressure are adjustable；Measuring device directly sticks substrate after the completion of cleaning
Surface measures, and guarantees that result is accurate；Same substrate can carry out secondary cleaning and measurement, guarantee cleaning effect；Institute of the present invention
The yardage roll and liquid storing barrel used is placed towards equipment two sides, is conducive to manually replace；Cleaning cloth feeding after use of the present invention is set
It is focused in the storage area of standby bottom, the feature of environmental protection is good, while improving the operability of staff.
Combined with specific embodiments below, further illustrate that CIGS glass substrate of the invention in above-described embodiment plates Membrane cleaning
The structural relation of system and, workflow.
CIGS glass substrate plated film cleaning system in above-described embodiment mainly include orientating and conveying mechanisms, liquid dropping mechanism,
Yardage roll mechanism, jacking wiper mechanism and measuring mechanism.
The orientating and conveying mechanisms include bracket (i.e. frame structure), the first conveyor belt, the second conveyor belt, slowing down passes
Sensor, stop sensor, stop cylinder, left positioning slider cylinder, right positioning slider cylinder, positioning clamping element.Glass substrate is set
It is conveyed forward in two conveyor belts, successively reduces conveying speed, the stopping by deceleration sensor induction
Sensor sensing stopping conveys forward, and glass substrate can still convey forward a small distance under the action of inertia force at this time,
Stop after encountering the nylon barrier block installed at the top of the stop cylinder.The positioning clamping element and the positioning slide unit gas
Cylinder is connected, and the left and right positioning slider cylinder drives positioning clamping element mobile to centre respectively, and it is complete to clamp the glass substrate
At positioning.
The orientating and conveying mechanisms 1 are fixed on the invention device framework, and glass substrate delivers into present device
Afterwards, the direction conveying that moves forward is placed in first conveyor belt 101 and the second conveyor belt 102, by the deceleration sensor
Device 103 reduces conveying speed after incuding, and reaches after the stop sensor 104 incudes and stops conveying forward, at this time in inertia
Glass substrate can still convey forward a small distance under the action of power, encounter the resistance installed at the top of the stop cylinder 105
Stop after block 106.The positioning clamping element 108 is connected with the positioning slider cylinder 107, the positioning slider cylinder
107 drive positioning clamping element 108 mobile to glass substrate direction, and the tiled configuration of the positioning mechanism is identical, the common folder in left and right
The tight glass substrate completes positioning function.
The liquid dropping mechanism 2 is fixed on the invention equipment top frame, including liquid-dropping valve 201, valve body installation part 202,
Cleaning solution is mainly sprinkled upon on the cleaning cloth of cleaning glass substrate with ground drop by turntable 203, guide part 204, cleaning solution bucket 205；
The cleaning cloth is installed in the yardage roll mechanism 3；The cleaning solution is placed in the cleaning solution bucket 205 of equipment bay,
It is supplied to by pipeline in the cavity of liquid-dropping valve 201, the liquid-dropping valve 201 passes through the opening and closing of compressed air control valve door, described
Liquid-dropping valve 201 is fixed on the valve body installation part 202, and the rotor plate of the valve body installation part 202 and the turntable 203 is eccentric
Hingedly, the guide part 204 is connect with the slot of 202 tail portion of valve body installation part, is led to the valve body installation part 202
To；Component described above constitutes a slider-crank mechanism, and the end that the liquid-dropping valve 201 is located at crank is equal by cleaning solution
Even drop is spilt on cleaning cloth；2 tiled configuration of liquid dropping mechanism is identical, completes function jointly.
The yardage roll mechanism 3 include telescopic cylinder 301, right side mounting plate 302, left side mounting plate 303, linear guide 304,
Inner side limiting-position block 305, outside limited block 306, cleaning yardage roll 307, tension braker 308, yardage roll mounting base 3021, fixing bearing
Seat 3022, gear wheel 3023, pinion gear 3024, the first flexible clutch 3025, guiding support bar 3026, the first rotary shaft
3027A, the second rotary shaft 3027B, second stepper motor 3028；The 301 cylinder body tail portion of telescopic cylinder is connected to the right side
Mounting plate 302,301 piston rod head floating connection of the telescopic cylinder are in left side mounting plate 303, and the mounting plate is by tiltedly propping up
Support is respectively arranged on the sliding block of left and right two of the linear guide 304；On the 3 arranged on left and right sides mounting plate of yardage roll mechanism
Yardage roll conveying mechanism structure is identical, is told about in detail by taking right side as an example, the right side mounting plate 302 and first rotary shaft
3027A connection, the first rotary shaft 3027A and the yardage roll mounting base 3021 connection, described 307 sets of cleaning yardage roll described
In yardage roll mounting base 3021, the side of the first rotary shaft 3027A connects the fixed bearing block 3022, first rotation
The other side axis 3027A connects tension braker 308, and the braking of the tension braker 308 keeps Tension Adjustable, it is ensured that described
Cleaning yardage roll 307 is not freely rotated, so that the cleaning cloth that the cleaning yardage roll 307 is unfolded is positively retained at required tension always
State；The guiding support bar 3026 is mounted on the right side mounting plate 302, and the cleaning cloth passes through institute by specific winding
Guiding support bar 3026 is stated, is clipped between the intermeshing gear wheel 3023 and pinion gear 3024 (wherein, described specific
Winding refer to that cleaning cloth rides on the upper surface of guiding support bar 3026, in the supporting role of the guiding support bar 3026
Under across guiding support bar, guiding support bar primarily serves support and guiding role to cleaning cloth), the gear wheel 3023 exists
It is pressed under the action of torsional spring in the pinion gear 3024, the pinion gear 3024 is mounted in second one end rotary shaft 3027B, described
Second other side rotary shaft 3027B is connect by the first flexible clutch 3025 with the second stepper motor 3028, and described the
For two rotary shaft 3027B to be fixed on the 302 upper bearing (metal) component of mounting plate as support, the second stepper motor 3028 rotates band
Move the yardage roll storage that the second rotary shaft 3027B is rotated and then the cloth for cleaning glass substrate is pulled to be sent into device bottom
Operator's centralized processing is waited in unit 6, while not used cleaning cloth can be unfolded to be moved to from the cleaning yardage roll 307
Liquid dropping mechanism drop is waited to spill cleaning agent below the liquid-dropping valve 201 of the liquid dropping mechanism 2；The stretching of the telescopic cylinder 301
Outward and move inward simultaneously with the movement drive right side mounting plate 302 and left side mounting plate 303 of retraction, passes through peace
The inner side limiting-position block 305 and outside limited block 306 limit the position of the cleaning yardage roll 307 on aluminum profile, guarantee
The middle separated time of the cleaning yardage roll 307 is located at the underface of glass substrate position to be cleaned when inside, and when outside is described clearly
The middle separated time of clean yardage roll 307 is located at the underface that the liquid-dropping valve 201 of the liquid dropping mechanism 2 exports, and the yardage roll mechanism 3 is left
Right structure is identical, completes function jointly, in the installation course of above-mentioned cleaning cloth, the yardage roll mounting base of cleaning cloth and two sides and
Relationship between the guiding support bar of two sides is substantially as follows：
Behind the one end for drawing the cleaning cloth in the yardage roll mounting base of side, which is first hung on the side cloth
It rolls up on the guiding support bar above mounting base, then is hung on the guiding support bar above the yardage roll mounting base of the other side, finally roll up
In the yardage roll mounting base for entering the other side, that is to say, that cleaning cloth rides over the upper surface of two guiding support bars 3026 respectively
On, under the supporting role of the guiding support bar 3026, two guiding support bars 3026 primarily serve the branch to cleaning cloth
Support and guiding role.
The jacking wiper mechanism 4 be the action actuating mechanism of cleaning glass substrate, including the first jacking cylinder 401, the
One linear bearing 402A, second straight line bearing 402B, third stepper motor 403, synchronous belt 404, eccentric axis seat 405405, orientation
Bar cramp 406, cleaning head 407, synchronous pulley 408, swingle 409；First jacking cylinder 401 pushes entire wiper mechanism edge
Vertical direction movement, the first straight line bearing 402A and second straight line bearing 402B are as guiding, the third stepper motor
403 pull the two symmetrical synchronous pulleys 408 to rotate by the synchronous belt 404, on synchronous pulley 408 described in installation
Eccentric axis seat 405, the cleaning head 407 are mounted on the swingle 409, and the swingle 409 is fixed on the eccentric shaft
Seat 405, the cleaning head 407 or so each one is located at the underface of glass substrate two sides position to be cleaned, above-mentioned yardage roll machine
When the cleaning cloth of structure is toward below medial movement to glass substrate position to be cleaned, the jacking cylinder 401 is stretched out upwards, institute
It states cleaning head 407 and cleaning cloth is jacked up to the surface of position to be cleaned for being attached to glass substrate, the third stepper motor 403 rotates band
The central axis rotation that the cleaning head 407 is moved around the eccentric axis seat 405 drives cleaning cloth to specify region surface to glass substrate
It is cleaned, the orientation bar cramp 406 clamps the swingle 409 for installing the cleaning head 407 in the process, prevents institute
It states cleaning head 407 to rotate around Pivot Point Center, to avoid the corrugation of cleaning cloth and skew, guarantees that cleaning effect is good.
The measuring mechanism 5 is used to examine whether the effect of cleaning meets the requirements；Including measuring jacking cylinder 501, second
Linear guide 502, sliding block mounting plate 503, measuring piece mounting plate 504, gauge head 505, the first measuring piece 506A, the second measuring piece
506B, megameter 507；The measuring mechanism 5 includes two sets on the cleaning equipment, is separately mounted to the yardage roll machine
On the right side mounting plate 302 and the left side mounting plate 303 of structure 3, for a set of, 501 He of measurement jacking cylinder
503 floating connection of sliding block mounting plate, the measurement jacking cylinder 501 push the sliding block mounting plate 503 along described second
Linear guide 502 ramps and declines, and the measuring piece mounting plate 504 is fixed on the sliding block mounting plate 503, described
The first measuring piece 506A and the second measuring piece 506B the measuring piece mounting plate 504 floated on by the support force of spring
On, yardage roll be moved to inside when described in the first measuring piece 506A and the second measuring piece 506B in cleaning glass substrate position
Underface, side head 505 includes two, is individually fixed in the first measuring piece 506A and second measuring piece
506B, two gauge heads 505 two that the megameter 507 being placed on equipment bay is connected to by conducting wire are defeated
Inbound port, the measuring piece mounting plate 504 is insulator, between the first measuring piece 506A and the second measuring piece 506B
Contactless, the measurement jacking cylinder 501 is stretched out toward top drives the first measuring piece 506A and second measuring piece
506B sticks the position after the cleaning glass substrate, then the megameter 507 measure numerical value and with preset data into
Row comparison is therefore, it is determined that whether wash result is qualified；Measurement result is qualified, and the piston rod of the positioning slider cylinder 107 stretches out,
The glass substrate is unclamped, first conveyor belt 101 and second conveyor belt 102 operating are defeated by the glass substrate
Present device is sent from out to next station, while subsequent second glass substrate initially enters present device；If measurement result
Unqualified, then the glass substrate is held in position that clamped condition is motionless, and present device executes cleaning process for the second time；For two
If the glass substrate measurement result after secondary cleaning is still unqualified, present device is automatically stopped automatic operating and accuses
It is alert.
Using the CIGS glass substrate plated film cleaning system, including orientating and conveying mechanisms, liquid dropping mechanism, yardage roll mechanism, top
Wiper mechanism, measuring mechanism are risen, is connected by the combination between said mechanism, before realizing to the base plate glass of CIGS glass substrate
It sets process and spills into the plated film of back side and carry out cleaning erasing, realize the subsequent technique requirement of glass substrate, realize feeding-cleaning-
Measurement-blanking process automation, the conveying positioning of substrate, the supply of yardage roll, cleaning solution drop spill, the survey of cleaning process and result
Amount is not necessarily to manual intervention, entire technical process beat fast and stable；Measuring device directly sticks CIGS glass after the completion of cleaning
Substrate surface measures, and guarantees that result is accurate, and it is convenient to operate, and improves work efficiency, and greatly improves CIGS yields, subtracts
The labor intensity of light field personnel.
In this description, the present invention is described with reference to its specific embodiment.But it is clear that can still make
Various modifications and alterations are without departing from the spirit and scope of the invention.Therefore, the description and the appended drawings should be considered as illustrative
And not restrictive.
Claims (16)
1. a kind of CIGS glass substrate plated film cleaning system, which is characterized in that the system includes：
Orientating and conveying mechanisms, for conveying and positioning the CIGS glass substrate；
Liquid dropping mechanism spills cleaning solution for uniformly dripping；
Yardage roll mechanism, cleaning cloth are provided in the yardage roll mechanism, and have the yardage roll mechanism that the cleaning cloth on cleaning yardage roll is driven to move
Dynamic, the cleaning yardage roll is made of the cleaning cloth wound；
Jack wiper mechanism, the cleaning for the CIGS glass substrate；
Measuring mechanism, for examining whether the CIGS glass substrate after over cleaning meets cleaning requirement；
Liquid dropping mechanism, yardage roll mechanism and the jacking wiper mechanism collectively forms the cleaning module in the system；
The liquid dropping mechanism is located at the top of the yardage roll mechanism, and it is fixed that the jacking wiper mechanism is located at the conveying
The lower section of position mechanism, the measuring mechanism are located at the exit of the system.
2. CIGS glass substrate plated film cleaning system according to claim 1, which is characterized in that the conveying localization machine
Structure includes left transmission positioning unit and right transmission positioning unit, and the left transmission positioning unit and right transmission positioning unit are distinguished
It is placed in the left and right sides of the system cross central line, the direction of the cross central line and the CIGS glass substrate
The direction for moving the trajectory line formed is consistent.
3. CIGS glass substrate plated film cleaning system according to claim 2, which is characterized in that the left conveying positioning
Unit includes the first conveyor belt, and the right transmission positioning unit includes the second conveyor belt, the CIGS glass substrate
It is placed in first conveyor belt and the second conveyor belt.
4. CIGS glass substrate plated film cleaning system according to claim 3, which is characterized in that
The left transmission positioning unit and right transmission positioning unit include deceleration sensor, stop sensor and blocking gas
Cylinder；
Each deceleration sensor, stop sensor and the stop cylinder respectively with corresponding first conveyor belt and second
Conveyor belt is adjacent；
A stopper is mounted at the top of each stop cylinder.
5. CIGS glass substrate plated film cleaning system according to claim 4, which is characterized in that the left conveying positioning
Unit and right transmission positioning unit include positioning slider cylinder and positioning clamping element, the positioning slider cylinder with it is described
Positioning clamping element is connected.
6. CIGS glass substrate plated film cleaning system according to claim 1, which is characterized in that the liquid dropping mechanism packet
Include the first drip units and the second drip units, first drip units and the second drip units, which are respectively placed in, described is
The left and right sides of system cross central line, the direction of the cross central line and the CIGS glass substrate move the rail to be formed
The direction of trace is consistent.
7. CIGS glass substrate plated film cleaning system according to claim 6, which is characterized in that
First drip units and the second drip units include liquid-dropping valve, valve body installation part, turntable, guide part and clear
Washing lotion bucket；
The cleaning solution bucket is for storing cleaning solution, and the cleaning solution bucket position is in the bottom position of the system；
The liquid-dropping valve is connected by pipeline with the cleaning solution bucket, and the liquid-dropping valve also with compressed air control valve door
It is connected, and the liquid-dropping valve is also fixed on the valve body installation part；
The rotor plate of the valve body installation part and the turntable is eccentric hinged；
The guide part is connect with the slot of the valve body installation part tail portion.
8. CIGS glass substrate plated film cleaning system according to claim 1, which is characterized in that the yardage roll mechanism packet
Include the first cloth roll unit, the second cloth roll unit and telescopic cylinder, the telescopic cylinder respectively with the first yardage roll list
Member and the second cloth roll unit are connected；It is lateral that the first cloth roll unit and the second cloth roll unit is respectively placed in the system
The left and right sides of center line, the direction of the cross central line and the CIGS glass substrate move the trajectory line to be formed
Direction is consistent.
9. CIGS glass substrate plated film cleaning system according to claim 8, which is characterized in that the first yardage roll list
Member includes a left side mounting plate, and the second cloth roll unit includes a right side mounting plate；The yardage roll mechanism further includes straight
Line guide rail；
The telescopic cylinder cylinder body tail portion is connected to the right side mounting plate, the piston rod head of the telescopic cylinder floats and connects
It is connected to left side mounting plate；
The left side mounting plate and right side mounting plate passes through the left and right that bearing diagonal is respectively arranged in the linear guide
On two sliding blocks.
10. CIGS glass substrate plated film cleaning system according to claim 9, which is characterized in that
The first cloth roll unit and the second cloth roll unit include inner side limiting-position block, outside limited block, tension system
Dynamic device, yardage roll mounting base, fixed bearing block, gear wheel, pinion gear, the first flexible clutch, guiding support bar, the first rotation
Axis, the second rotary shaft, second stepper motor；
The left side mounting plate and right side mounting plate is connected with corresponding first rotary shaft and guiding support bar respectively；
Second rotary shaft described in two respectively be fixed on left side mounting plate and right side mounting plate on corresponding bearing assembly
For support；
First rotary shaft is connected with corresponding yardage roll mounting base, and described first rotates the corresponding fixing bearing of axis connection
Seat, the first rotary shaft other side connect corresponding tension braker；
Clean yardage roll mounting base and described second of the corresponding set in both ends of yardage roll in the first cloth roll unit
In cloth roll unit yardage roll mounting base；
The cleaning cloth around passing through corresponding guiding support bar, and the cleaning cloth be clipped in it is corresponding intermeshing described
Gear wheel and pinion gear between, the gear wheel is pressed on the small tooth, the pinion gear be mounted in described second
Rotary shaft one end；The second rotary shaft other side is connected by the first flexible clutch with the second stepper motor
It connects；
Each the inner side limiting-position block and outside limited block are respectively placed in corresponding one section of inside in the cleaning yardage roll
The outside and.
11. CIGS glass substrate plated film cleaning system according to claim 9, which is characterized in that the yardage roll mechanism
It further include a yardage roll housing unit, the yardage roll housing unit is located at the first cloth roll unit and the second cloth roll unit
Lower section.
12. CIGS glass substrate plated film cleaning system according to claim 9, which is characterized in that the measuring mechanism
First measuring mechanism unit and the second measuring mechanism unit；
The first measuring mechanism unit and the second measuring mechanism unit, which is respectively placed in the left side mounting plate and right side, pacifies
In loading board；
The first measuring mechanism unit and the second measuring mechanism unit include measurement jacking cylinder, second straight line guide rail,
Sliding block mounting plate, measuring piece mounting plate, two gauge heads, the first measuring piece, the second measuring piece, megameter；
The measurement jacking cylinder and the sliding block mounting plate floating connection；
The sliding block mounting plate is connected with the second straight line guide rail；
The measuring piece mounting plate is fixed on the sliding block mounting plate；
First measuring piece and second measuring piece are set on the measuring piece mounting plate by spring, and described first surveys
Amount part with the second measuring piece is corresponding with gauge head described in one respectively is connected；And gauge head described in two respectively with the megameter
In two input ports be connected.
13. CIGS glass substrate plated film cleaning system according to claim 12, which is characterized in that the measuring piece peace
Loading board is insulator, and contactless between first measuring piece and second measuring piece.
14. CIGS glass substrate plated film cleaning system according to claim 1, which is characterized in that the jacking cleaning
Mechanism is clear including the first jacking cylinder, first straight line bearing, second straight line bearing, third stepper motor, synchronous belt, the first jacking
Washing machine unit and the second jacking cleaning machine unit；
The first straight line bearing and second straight line bearing is respectively placed in the two sides of first jacking cylinder；
The first jacking cleaning machine unit and the second jacking cleaning machine unit includes eccentric axis seat, orientation bar cramp, cleaning
Head, swingle and synchronous pulley；
The third stepper motor is pushed up with the first jacking cleaning machine unit and second respectively by the synchronous belt
Synchronous pulley described in rising two in cleaning machine unit is connected, and synchronous pulley described in two be respectively placed in it is described same
Walk the two sides of band；
Each cleaning head passes sequentially through corresponding swingle, eccentric axis seat is connected with corresponding synchronous pulley；
Each orientation bar cramp passes through corresponding swingle and is connected with corresponding cleaning head.
15. CIGS glass substrate plated film cleaning system according to claim 1, which is characterized in that the system is placed in
Inside one frame structure, the orientating and conveying mechanisms are fixed in the frame structure, and the liquid dropping mechanism is placed in described
The top of frame structure.
16. CIGS glass substrate plated film cleaning system according to claim 15, which is characterized in that the frame structure
On be additionally provided with glass, an accommodating space is collectively formed in the frame structure and glass.
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| CN201810723712.4A CN108906766B (en) | 2018-07-04 | 2018-07-04 | CIGS glass substrate coating film cleaning system |
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| CN201810723712.4A CN108906766B (en) | 2018-07-04 | 2018-07-04 | CIGS glass substrate coating film cleaning system |
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Application publication date: 20181130 Assignee: WUXI SHANGSHI ELECTRONIC TECHNOLOGY Co.,Ltd. Assignor: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd. Contract record no.: X2023310000131 Denomination of invention: CIGS Glass Substrate Coating Cleaning System Granted publication date: 20230224 License type: Common License Record date: 20230705 |
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Address after: No. 66, Sibo Road, Sijing Town, Songjiang District, Shanghai, 201601 Patentee after: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd. Country or region after: China Address before: 201108 room 912, Liqin building, 1885 Duhui Road, Minhang District, Shanghai Patentee before: CNBM TRIUMPH ROBOTICS (SHANGHAI) Co.,Ltd. Country or region before: China |