CN108880324B - 压电驱动装置、电子部件输送装置、机器人、投影仪 - Google Patents

压电驱动装置、电子部件输送装置、机器人、投影仪 Download PDF

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Publication number
CN108880324B
CN108880324B CN201810407274.0A CN201810407274A CN108880324B CN 108880324 B CN108880324 B CN 108880324B CN 201810407274 A CN201810407274 A CN 201810407274A CN 108880324 B CN108880324 B CN 108880324B
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China
Prior art keywords
piezoelectric
drive device
axis
bearing
piezoelectric drive
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CN201810407274.0A
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English (en)
Chinese (zh)
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CN108880324A (zh
Inventor
荒川豊
岩崎友寿
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/22—Arrangements or mountings of driving motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/142—Adjusting of projection optics
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0007—Movement of one or more optical elements for control of motion blur
    • G03B2205/0015—Movement of one or more optical elements for control of motion blur by displacing one or more optical elements normal to the optical axis
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201810407274.0A 2017-05-08 2018-04-28 压电驱动装置、电子部件输送装置、机器人、投影仪 Active CN108880324B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-092203 2017-05-08
JP2017092203A JP2018191437A (ja) 2017-05-08 2017-05-08 圧電駆動装置、電子部品搬送装置、ロボット、プロジェクターおよびプリンター

Publications (2)

Publication Number Publication Date
CN108880324A CN108880324A (zh) 2018-11-23
CN108880324B true CN108880324B (zh) 2023-02-28

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Country Status (3)

Country Link
US (1) US11050365B2 (enExample)
JP (1) JP2018191437A (enExample)
CN (1) CN108880324B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017009542B3 (de) * 2017-10-13 2019-01-03 Marco Systemanalyse Und Entwicklung Gmbh Positioniervorrichtung
CN109889084B (zh) * 2019-04-09 2020-01-24 哈尔滨工业大学 压电驱动的进给调姿装置及其激励方法
CN109889086B (zh) * 2019-04-09 2020-01-24 哈尔滨工业大学 一种三自由度压电驱动微纳操控机械臂及其激励方法
JP2020179428A (ja) * 2019-04-23 2020-11-05 セイコーエプソン株式会社 水平多関節ロボット
JP7314713B2 (ja) 2019-08-21 2023-07-26 セイコーエプソン株式会社 圧電駆動装置およびロボット
JP2021035213A (ja) * 2019-08-27 2021-03-01 セイコーエプソン株式会社 圧電駆動装置およびロボット
GB2598467B (en) * 2020-08-31 2022-12-14 Canon Kk Vibration driving device and image pickup apparatus using this
JP7662139B2 (ja) * 2021-09-24 2025-04-15 アルプスアルパイン株式会社 レンズホルダ駆動装置
CN116131657A (zh) * 2021-11-11 2023-05-16 华为技术有限公司 电机及电子设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11235062A (ja) * 1998-02-12 1999-08-27 Nikon Corp 振動アクチュエータ駆動装置及びレンズ鏡筒
JP4229095B2 (ja) * 2002-06-14 2009-02-25 セイコーエプソン株式会社 駆動装置およびこれを備えた装置
KR100819246B1 (ko) * 2006-08-16 2008-04-02 삼성전자주식회사 스테핑 모터
JP4891053B2 (ja) * 2006-12-21 2012-03-07 オリンパス株式会社 超音波モータ
JP2013055740A (ja) * 2011-09-01 2013-03-21 Nikon Corp 振動アクチュエータ及び光学機器
JP6040528B2 (ja) 2012-01-17 2016-12-07 セイコーエプソン株式会社 ハンドラーおよび検査装置
JP2013258824A (ja) * 2012-06-12 2013-12-26 Seiko Epson Corp 移動機構、ロボットハンド、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、投影装置、搬送装置
JP6337432B2 (ja) * 2013-09-10 2018-06-06 セイコーエプソン株式会社 関節駆動装置及びロボット
JP6305077B2 (ja) 2013-12-16 2018-04-04 キヤノン株式会社 振動波モータ
JP2016027780A (ja) * 2014-06-30 2016-02-18 キヤノン株式会社 振動型アクチュエータ、レンズ鏡筒、撮像装置及び自動ステージ
JP2016016479A (ja) 2014-07-08 2016-02-01 Ntn株式会社 関節駆動装置
JP6439466B2 (ja) * 2015-01-30 2018-12-19 セイコーエプソン株式会社 圧電駆動装置、ロボット及びロボットの駆動方法
WO2016132321A1 (en) * 2015-02-18 2016-08-25 Imax Emea Limited Despeckling system for projected light
JP6919275B2 (ja) * 2017-03-31 2021-08-18 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター
JP2018182871A (ja) * 2017-04-11 2018-11-15 セイコーエプソン株式会社 圧電駆動装置、電子部品搬送装置、ロボット、プロジェクターおよびプリンター

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US11050365B2 (en) 2021-06-29
CN108880324A (zh) 2018-11-23
JP2018191437A (ja) 2018-11-29
US20180323729A1 (en) 2018-11-08

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