CN108581816A - Three-phase flow dynamic pressure cavitation polishing method and device - Google Patents
Three-phase flow dynamic pressure cavitation polishing method and device Download PDFInfo
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- CN108581816A CN108581816A CN201810280953.6A CN201810280953A CN108581816A CN 108581816 A CN108581816 A CN 108581816A CN 201810280953 A CN201810280953 A CN 201810280953A CN 108581816 A CN108581816 A CN 108581816A
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- polishing
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- abrasive
- dynamic pressure
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of three-phase flow dynamic pressure cavitation polishing method, free curve surface work pieces are fixed on polishing fluid container bottom by fixture, cylindrical polishing tool is not directly contacted with and is immersed in polishing fluid with free curve surface work pieces, serial-parallel mirror polished land controls the pose of polishing tool opposite piece, and tool and workpiece surface is made to remain a small processing gap；Servo motor drives cylindrical polishing tool high speed rotation above workpiece by attachment device, the polishing fluid for being mixed with abrasive grain is set to be rotated together under the high-speed rotating effect of tool, polishing fluid squeezes by being generated when wedge gap between tool and workpiece and improves pressure, generates dynamic pressure；Abrasive grain is pressed into workpiece surface and generates surface and sub-surface damage, realizes the polishing of workpiece surface very high degree of precision.The present invention improves polishing efficiency under the premise of not causing the damage on surface and sub-surface.
Description
Technical field
The present invention relates to Ultraprecision Machining fields, more specifically, more particularly to a kind of three-phase flow dynamic pressure cavitation throwing
Light method and device.
Background technology
With the development of science and technology, Ultraprecision Machining is both the important development direction of Modern Manufacturing Science technology,
It is the important foundation of the following advanced manufacturing technology again.The rise of Ultra-precision Turning makes the rough surface of current most workpiece
Degree etc. is obtained for significant improvement, meanwhile, the promotion that the Performance And Reliability of product also obtains.Accompanying problem is that right
The element precision of different field requires increasingly to increase.Higher machining accuracy and surface quality in order to obtain, need in precise light
It learns part and super smooth surface processing is realized on functional crystal material surface.Technique of super smooth surface processing is in Ultraprecision Machining
In in occupation of highly important status, be the important embodiment of a national science and technology level and overall national strength.However under normal conditions,
For super smooth surface processing in order to realize the removal of atom level material, processing when, can use the active force of very little to workpiece
Surface is processed, and process time is often longer, and processing efficiency is very low, while processing cost also can be very high.Thus
As it can be seen that how improving processing efficiency in the case where ensureing not causing surface and sub-surface damage, reducing processing is precision manufactureing
It is badly in need of the technical barrier solved in field.
In order to realize that the Super-smooth Surface Polishing of these parts, the country have been developed that many kinds of super smooth surface processings
Method.Existing Machining Technology of Super Smooth Surface is totally segmented into two classes, a kind of direct with workpiece surface by machining tool
It contacts to be processed, such as：Traditional grinding, polishing etc. carried out as tool using abrasive band, grinding wheel or other flexible materials.
The micro-cutting that this kind of processing method is formed workpiece surface using the fine abrasive grains on tool is to remove the micro- grand of workpiece surface
It rises, to achieve the effect that polishing.Although processing efficiency is higher, also there is certain and limitation.
1. the particle size due to abrasive grain differs, cause the Abrasive Polishing active force of tool surfaces uneven, unavoidably
Is caused to workpiece by surface and sub-surface damage for ground.
2. due to the processing method of tool contact formula, can not the workpiece more special to some contour structures be processed,
The inner wall of such as workpiece, hole position, because tool is difficult to not to be processed due to stretching into.Another kind of processing method is then not against processing
Tool is in direct contact with workpiece surface and is polished, such as：Fluid polishing, electrobrightening, chemical polishing, magnetic grinding and polishing etc..This
In a kind of processing method, fluid polishing it is most widely used.Fluid polishing is by swiftly flowing liquid and its carrying
Abrasive grain washes away workpiece surface and achievees the purpose that polishing.Current two-phase flow polishing method equally exists some disadvantages：
1. fluid flow rate is not high and flow direction is single.Fluid is unable to reach turbulence-like relative to the flow velocity of workpiece surface
State, and in the single laminar condition in flow direction, keep the abrasive grain impact direction in polishing fluid consistent, cut generated to workpiece,
Cause the damage of surface and sub-surface.
2. since abrasive grain flow direction is almost the same, causes one layer of abrasive grain for being only affixed on workpiece surface to play polishing and make
With polishing efficiency is low.
3. the recycling service efficiency of abrasive Flow is low, generate wear particle deposition in process, influence polishing effect and
Efficiency.
Invention content
In order to overcome the lower deficiency of the polishing efficiency of existing polishing method, the present invention is in order to polish free curve surface work pieces
When, under the premise of not causing the damage on surface and sub-surface, improve polishing efficiency, it is proposed that a kind of three-phase flow dynamic pressure cavitation throwing
Light method and device.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of three-phase flow dynamic pressure cavitation polishing method, free curve surface work pieces are fixed on polishing fluid container bottom by fixture,
The serial-parallel mirror platform being made of Three Degree Of Freedom series connection platform and three bar parallel connection platforms being installed on above container, cylinder are thrown
Optical tool is installed on serial-parallel mirror platform end with servo motor；It polishes liquid container both sides and abrasive Flow delivery pump, delivery pump is housed
It is connected with the blender of the other side by abrasive Flow delivery hose；Supersonic generator is then installed on multi freedom degree mechanical end；
Cylindrical polishing tool is not directly contacted with and is immersed in polishing fluid with free curve surface work pieces, the control of serial-parallel mirror polished land
The pose of polishing tool opposite piece makes tool and workpiece surface remain a small processing gap；Servo motor is logical
The cylindrical polishing tool high speed rotation above workpiece of attachment device driving is crossed, the polishing fluid for being mixed with abrasive grain is made to be revolved in tool high speed
It being rotated together under the action of turning, polishing fluid squeezes by being generated when wedge gap between tool and workpiece and improves pressure,
Generate dynamic pressure；Constantly the angle of level of approximation removes impact workpiece surface to the abrasive grain being incorporated in polishing fluid under the action of dynamic pressure
The part of microscopic protrusions forms certain material to workpiece and removes；By adjusting mounted on the ultrasonic bubble of mechanical arm tail end
The distance between generator and tool and angle make the microgap between amplitude transformer alignment tools and workpiece work, in amplitude transformer
End generates cavitation bubble, and cavitation bubble is constantly expanded and compressed under ultrasonic wave positive pressure phase and negative pressure phase separation, by liquid
Since the pressure change in dynamic pressure region, cavitation bubble crumble and fall when dynamic pressure region；Crumble and fall generation energy driving be mixed with abrasive grain
Polishing fluid, increase abrasive grain impact velocity, increase abrasive grain impact randomness, improve polishing efficiency, avoid abrasive grain single direction
Flowing generates cut to workpiece, while the tool workpiece of avoiding is in direct contact, and abrasive grain is pressed into workpiece surface and generates surface and sub-surface
The polishing of workpiece surface very high degree of precision is realized in damage.
Further, it will be stirred using abrasive Flow delivery hose in order to avoid the wear particle deposition in polishing fluid in polishing process
Device connects into an abrasive particle flow circulating system with two abrasive Flow delivery pumps mounted on polishing liquid container both sides.
Further, cylindrical polishing tool surface or smooth or be provided with groove, free curve surface work pieces are fixed by fixture
In polishing fluid container bottom, tool and workpiece are all totally submerged in being mixed in the polishing fluid of abrasive grain；Three bar parallel connection platforms are installed on
Serial-parallel mirror platform is formed on the Z-direction guide rail of Three Degree Of Freedom series connection platform, polishing tool is mounted on serial-parallel mirror mechanism end,
The position of tool is controlled along X, Y, Z-direction by series connection platform, parallel connection platform controls the posture of tool, makes polishing tool relative to work
The pose of part can accurately control.
Further, servo motor drives polishing tool high speed rotation while tool keeps microgap above workpiece,
The polishing fluid for being mixed with abrasive grain rotates together under the high-speed rotating effect of tool, and polishing fluid is by the wedge shape between tool and workpiece
Pressure is improved because generating extruding when gap, generates dynamic pressure；It is continuous under the action of dynamic pressure to be incorporated in the abrasive grain in polishing fluid
The angle of ground level of approximation goes to the part of impact workpiece surface microscopic protrusions, and forming certain material to workpiece removes.
Ultrasonic bubble generator is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, and multi-degree-of-freemechanical mechanical arm is not
Pose of the disconnected adjustment supersonic generator amplitude transformer relative to dynamic pressure region, makes the cavitation bubble that amplitude transformer end generates just pass through
Cross dynamic pressure region.When ultrasonic bubble generator works, amplitude transformer end generates a large amount of cavitation bubbles, and cavitation bubble is in ultrasonic wave
It constantly expands and shrinks under positive pressure phase and negative pressure phase separation, by the pressure change due to dynamic pressure region when Hydrodynamic region,
Cavitation bubble generation is quickly crumbled and fall.
The abrasive particle flow circulating system is made of two abrasive Flow delivery pumps, blender and abrasive Flow delivery hose.Two
Abrasive Flow delivery pump is respectively arranged in polishing platform both sides, passes through the blender phase of abrasive Flow delivery hose and the other side
Even.Liquid-solid two phase abrasive particle flow circulating system can effectively avoid wear particle deposition in polishing fluid container bottom, improve the recycling of abrasive Flow
Service efficiency, to promote polishing efficiency.
A kind of three-phase flow dynamic pressure cavitation burnishing device, described device include Three Degree Of Freedom series connection platform, three bar parallel connection platforms,
It is mixed with the polishing fluid of abrasive grain, abrasive Flow delivery pump, abrasive Flow delivery hose, blender, multi-degree-of-freemechanical mechanical arm, workpiece, polishing
Liquid container, fixture, servo motor, shaft coupling, polishing tool and ultrasonic bubble generator are installed on above polishing liquid container
Three Degree Of Freedom series connection platform is mainly made of X, Y, Z-direction guide rail, and the guide rail in three directions is driven by motor respectively, for controlling
The position of polishing tool；Three bar parallel connection platforms are made of moving platform and silent flatform, and wherein moving platform is made of three telescopic rods,
Posture for controlling polishing tool；Three bar parallel connection platforms are installed on the Z-direction guide rail of Three Degree Of Freedom series connection platform and organize bunchiness
And series-parallel connection platform, polishing tool is connected with servo motor is mounted on serial-parallel mirror mechanism end, and polishing tool is made to be kept with workpiece
High speed rotation while microgap generates dynamic pressure region；Free curve surface work pieces are then fixed on polishing fluid container bottom by fixture,
And it is totally submerged in being mixed in the polishing fluid of abrasive grain；Two abrasive Flow delivery pumps are respectively arranged in polishing liquid container both sides, lead to
It crosses abrasive Flow delivery hose with other side blender to be connected, for avoiding the wear particle deposition in polishing process；Supersonic gas is soaked
Raw device is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, the cavitation gas for making supersonic generator amplitude transformer end generate
Bubble is just past dynamic pressure region.
The polishing tool is cylindrical polishing tool, and cylindrical polishing tool then passes through attachment device and servo motor phase
Company is installed on three bar parallel connection platform ends, and tool surfaces are with groove or smooth.
Two abrasive Flow delivery pumps are respectively arranged in polishing platform both sides, pass through abrasive Flow delivery hose and blender
It is connected with polishing liquid container；Abrasive particle flow circulating system ceaselessly recycles the abrasive Flow in polishing container in polishing process
Stirring and conveying.
Beneficial effects of the present invention are mainly manifested in：Under the premise of not causing the damage on surface and sub-surface, improves and throw
Light efficiency.
Description of the drawings
Fig. 1 is the overall structure diagram of three-phase flow dynamic pressure cavitation burnishing device of the present invention.
Fig. 2 is the partial structural diagram of three-phase flow dynamic pressure cavitation burnishing device of the present invention.
In figure, 1-Z traversing guides motor, 2-X traversing guides motor, 14-Y traversing guides motor, 3-Y traversing guides, 4-X
Traversing guide, 5- silent flatforms, 6- moving platforms, 7- are mixed with the polishing fluid of abrasive grain, 8 (11)-abrasive Flow delivery pump, the conveying of 9- abrasive Flows
Hose, 10- blenders, 12-Z traversing guides, 13- multi-degree-of-freemechanical mechanical arms, 15- workpiece, 16- polishings liquid container, 17- workpiece clamps
The cylindrical buffer of tool, 18- telescopic rods, 19- telescopic rods motor, 20- servo motors, 21- shaft couplings, 22- with grooves
Tool, 23- shaft couplings, 24- ultrasonic bubble generators.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings.
Referring to Figures 1 and 2, a kind of three-phase flow dynamic pressure cavitation polishing method, free curve surface work pieces are fixed on throwing by fixture
Light liquid container bottom, the serial-parallel mirror being made of Three Degree Of Freedom series connection platform and three bar parallel connection platforms being installed on above container
Platform, cylindrical polishing tool are installed on serial-parallel mirror platform end with servo motor；It polishes liquid container both sides and abrasive Flow is housed
Delivery pump, delivery pump are connected by abrasive Flow delivery hose with the blender of the other side；Supersonic generator is then installed on mostly certainly
By degree mechanical end；Cylindrical polishing tool is not directly contacted with and is immersed in polishing fluid with free curve surface work pieces, goes here and there and mixes
The pose for joining polished land control polishing tool opposite piece, between making tool and workpiece surface remain a small processing
Gap；Servo motor drives cylindrical polishing tool high speed rotation above workpiece by attachment device, makes the polishing for being mixed with abrasive grain
Liquid rotates together under the high-speed rotating effect of tool, and polishing fluid generates extruding when passing through the wedge gap between tool and workpiece
And pressure is improved, generate dynamic pressure；It is incorporated in the constantly angle of level of approximation under the action of dynamic pressure of the abrasive grain in polishing fluid
The part for going impact workpiece surface microscopic protrusions forms certain material to workpiece and removes；By adjusting mounted on mechanical arm end
The distance between the ultrasonic bubble generator and tool at end and angle, make the microgap between amplitude transformer alignment tools and workpiece
Work, amplitude transformer end generate cavitation bubble, cavitation bubble under ultrasonic wave positive pressure phase and negative pressure phase separation constantly expansion and
Compression, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble is crumbled and fall；It crumbles and fall the energy of generation
Driving is mixed with the polishing fluid of abrasive grain, increases abrasive grain impact velocity, increases abrasive grain and impacts randomness, improves polishing efficiency, avoid grinding
The flowing of grain single direction generates cut to workpiece, while the tool workpiece of avoiding is in direct contact, and abrasive grain is pressed into workpiece surface and generates
Surface and sub-surface damage realize the polishing of workpiece surface very high degree of precision.
Further, it will be stirred using abrasive Flow delivery hose in order to avoid the wear particle deposition in polishing fluid in polishing process
Device connects into an abrasive particle flow circulating system with two abrasive Flow delivery pumps mounted on polishing liquid container both sides.
Further, cylindrical polishing tool surface or smooth or be provided with groove, free curve surface work pieces are fixed by fixture
In polishing fluid container bottom, tool and workpiece are all totally submerged in being mixed in the polishing fluid of abrasive grain；Three bar parallel connection platforms are installed on
Serial-parallel mirror platform is formed on the Z-direction guide rail of Three Degree Of Freedom series connection platform, polishing tool is mounted on serial-parallel mirror mechanism end,
The position of tool is controlled along X, Y, Z-direction by series connection platform, parallel connection platform controls the posture of tool, makes polishing tool relative to work
The pose of part can accurately control.
Further, servo motor drives polishing tool high speed rotation while tool keeps microgap above workpiece,
The polishing fluid for being mixed with abrasive grain rotates together under the high-speed rotating effect of tool, and polishing fluid is by the wedge shape between tool and workpiece
Pressure is improved because generating extruding when gap, generates dynamic pressure；It is continuous under the action of dynamic pressure to be incorporated in the abrasive grain in polishing fluid
The angle of ground level of approximation goes to the part of impact workpiece surface microscopic protrusions, and forming certain material to workpiece removes.
Ultrasonic bubble generator is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, and multi-degree-of-freemechanical mechanical arm is not
Pose of the disconnected adjustment supersonic generator amplitude transformer relative to dynamic pressure region, makes the cavitation bubble that amplitude transformer end generates just pass through
Cross dynamic pressure region.When ultrasonic bubble generator works, amplitude transformer end generates a large amount of cavitation bubbles, and cavitation bubble is in ultrasonic wave
It constantly expands and shrinks under positive pressure phase and negative pressure phase separation, by the pressure change due to dynamic pressure region when Hydrodynamic region,
Cavitation bubble generation is quickly crumbled and fall.
The abrasive particle flow circulating system is made of two abrasive Flow delivery pumps, blender and abrasive Flow delivery hose.Two
Abrasive Flow delivery pump is respectively arranged in polishing platform both sides, passes through the blender phase of abrasive Flow delivery hose and the other side
Even.Liquid-solid two phase abrasive particle flow circulating system can effectively avoid wear particle deposition in polishing fluid container bottom, improve the recycling of abrasive Flow
Service efficiency, to promote polishing efficiency.
A kind of three-phase flow dynamic pressure cavitation burnishing device, including 1-Z traversing guides motor, 2-X traversing guides motor, the side 3-Y
Direction guiding rail, 4-X traversing guides, 5- silent flatforms, 6- moving platforms, 7- are mixed with the polishing fluid of abrasive grain, 8 (11)-abrasive Flow delivery pump, 9-
Abrasive Flow delivery hose, 10- blenders, 12-Z traversing guides, 13- multi-degree-of-freemechanical mechanical arms, 14-Y traversing guides motor, 15-
Free curve surface work pieces, 16- polishings liquid container, 17- work piece holders, 18- telescopic rods, 19- telescopic rods motor, 20- servo electricity
Machine, 21- shaft couplings, the cylindrical polishing tool of 22- with grooves, 23- shaft couplings, 24- ultrasonic bubble generators.；Described
Free curve surface work pieces 15 are fixed on 16 bottom of polishing liquid container by work piece holder 17, and are totally submerged in the throwing for being mixed with abrasive grain
In light liquid 7；Three Degree Of Freedom series connection platform is mainly formed and is installed on by X-direction guide rail 4, Y-direction guide rail 3, Z-direction guide rail 12
16 top of liquid container is polished, the guide rail in three directions is driven by guide rail motor 1,2,14 respectively；Three bar parallel connection platforms are mainly by quiet
Platform 5 is formed with moving platform 6, and wherein moving platform 6 is mainly made of three telescopic rods 18.Three bar parallel connection platforms are installed on three certainly
Serial-parallel mirror platform is formed by 12 end of Z-direction guide rail of degree series connection platform.The cylindrical polishing tool 22 and servo of with groove
Motor 20, which is connected, is mounted on serial-parallel mirror mechanism end, makes polishing tool and high speed rotation while workpiece holding microgap, production
Lively intermediate pressure section.Two abrasive Flow delivery pumps 8,11 are respectively arranged in 16 both sides of polishing liquid container, pass through abrasive Flow delivery hose 9
It is connected with other side blender 10, for avoiding the wear particle deposition in polishing process.Ultrasonic bubble generator 24 is installed on more
13 end of degree-of-freedom manipulator.
When three-phase flow dynamic pressure cavitation burnishing device works, the cylindrical polishing tool of serial-parallel mirror polished land control relative to
The pose of workpiece makes polishing tool remain that a small processing gap, tool are totally submerged with workpiece with workpiece surface
In polishing fluid.Cylindrical polishing tool high speed rotation is driven by servo motor, makes the polishing fluid for being mixed with abrasive grain in tool high speed
It is rotated together under the action of rotation, generates dynamic pressure.Abrasive grain in polishing fluid is under the action of dynamic pressure stream continuously by adding
Break gap, and with the angle of level of approximation go impact workpiece surface microscopic protrusions part, certain material is formed to workpiece
It removes.Ultrasonic bubble generating mechanism constantly adjusts pose of the amplitude transformer relative to dynamic pressure region, the sky for making amplitude transformer end generate
Change bubble just past Hydrodynamic region.Due to dynamic pressure region pressure change, cavitation cloud is promoted to crumble and fall, the energy for generation of crumbling and fall
Driving is mixed with the polishing fluid of abrasive grain, increases abrasive grain impact velocity, increases abrasive grain and impacts randomness, improves polishing efficiency, avoid grinding
The flowing of grain single direction generates cut to workpiece, realizes the polishing of workpiece surface very high degree of precision.As polishing carries out, abrasive Flow
The circulatory system carries out circulation conveying to the abrasive grain in polishing container, avoids the wear particle deposition in polishing fluid.Three-phase flow dynamic pressure cavitation
Burnishing device includes mainly serial-parallel mirror polished land, abrasive particle flow circulating system, ultrasonic bubble generating mechanism, workpiece, polishing
Liquid container, fixture, polishing tool, the polishing fluid for being mixed with abrasive grain.
The serial-parallel mirror polished land is made of three bar parallel connection platforms and Three Degree Of Freedom series connection platform.Three Degree Of Freedom string
Connection platform is mainly made of X, Y, Z-direction guide rail, and three bar parallel connection platforms are installed on the Z-direction guide rail of Three Degree Of Freedom series connection platform
On, the guide rail in three directions is driven by motor respectively；Three bar parallel connection platforms are mainly made of moving platform and silent flatform, wherein dynamic flat
Platform is mainly made of three telescopic rods, and cylindrical polishing tool, which is then connected by attachment device with servo motor, is installed on three bars
Parallel connection platform end, tool surfaces can with groove it is also smooth.Series connection platform controls the position of tool along X, Y, Z-direction, in parallel
The posture of platform courses tool allows polishing tool to be accurately controlled relative to the pose of workpiece.
The tool keeps microgap, servo motor to drive polishing tool high speed rotation, be mixed with abrasive grain above workpiece
Polishing fluid rotated together under the high-speed rotating effect of tool, polishing fluid by when wedge gap between tool and workpiece because
It generates and squeezes and improve pressure, generate dynamic pressure.It is incorporated in constantly approximate water under the action of dynamic pressure of the abrasive grain in polishing fluid
Flat angle goes to the part of impact workpiece surface microscopic protrusions, and forming certain material to workpiece removes.
The ultrasonic bubble generating mechanism is made of ultrasonic bubble generator with multi-degree-of-freemechanical mechanical arm.Ultrasonic wave
Bubble generator is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, and is not limited to mechanical arm, adjustable ultrasonic hair
Any device of raw device end pose.Multi-degree-of-freemechanical mechanical arm constantly adjusts supersonic generator amplitude transformer relative to dynamic pressure
The pose in region makes the cavitation bubble that amplitude transformer end generates just past dynamic pressure region.When ultrasonic bubble generator works,
Amplitude transformer end generates a large amount of cavitation bubbles, and cavitation bubble is constantly expanded and received under ultrasonic wave positive pressure phase and negative pressure phase separation
Contracting, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble generation is quickly crumbled and fall.
The material removal is that Hydrodynamic and cavitation crumble and fall to grain motion state and be distributed the synthesis result changed,
Polishing efficiency is improved, workpiece surface and sub-surface damage are avoided, achievees the effect that uniformity polishes.
The abrasive particle flow circulating system is made of two abrasive Flow delivery pumps with blender.Two abrasive Flow delivery pumps point
It is not installed on polishing platform both sides, is connected with blender and polishing liquid container by abrasive Flow delivery hose.Abrasive Flow is followed
Loop system in polishing process ceaselessly to polishing container in abrasive Flow carry out circulation stirring with conveying, avoid wear particle deposition in
Polishing fluid container bottom improves the recycling service efficiency of abrasive Flow, to promote polishing efficiency.
Above-described embodiment is presently preferred embodiments of the present invention, is not the limitation to technical solution of the present invention, as long as
Without the technical solution that creative work can be realized on the basis of the above embodiments, it is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (9)
1. a kind of three-phase flow dynamic pressure cavitation polishing method, it is characterised in that：Free curve surface work pieces are fixed on polishing fluid by fixture
Container bottom is installed on the serial-parallel mirror being made of with three bar parallel connection platforms Three Degree Of Freedom series connection platform above container and puts down
Platform, cylindrical polishing tool are installed on serial-parallel mirror platform end with servo motor；It is defeated equipped with abrasive Flow to polish liquid container both sides
Pump, delivery pump is sent to be connected with the blender of the other side by abrasive Flow delivery hose；Supersonic generator is then installed on mostly freely
Spend mechanical end；Cylindrical polishing tool is not directly contacted with and is immersed in polishing fluid with free curve surface work pieces, serial-parallel mirror
Polished land controls the pose of polishing tool opposite piece, between so that tool and workpiece surface is remained a small processing
Gap；Servo motor drives cylindrical polishing tool high speed rotation above workpiece by attachment device, makes the polishing for being mixed with abrasive grain
Liquid rotates together under the high-speed rotating effect of tool, and polishing fluid generates extruding when passing through the wedge gap between tool and workpiece
And pressure is improved, generate dynamic pressure；It is incorporated in the constantly angle of level of approximation under the action of dynamic pressure of the abrasive grain in polishing fluid
The part for going impact workpiece surface microscopic protrusions forms certain material to workpiece and removes；By adjusting mounted on mechanical arm end
The distance between the ultrasonic bubble generator and tool at end and angle, make the microgap between amplitude transformer alignment tools and workpiece
Work, amplitude transformer end generate cavitation bubble, cavitation bubble under ultrasonic wave positive pressure phase and negative pressure phase separation constantly expansion and
Compression, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble is crumbled and fall；It crumbles and fall the energy of generation
Driving is mixed with the polishing fluid of abrasive grain, increases abrasive grain impact velocity, increases abrasive grain and impacts randomness, improves polishing efficiency, avoid grinding
The flowing of grain single direction generates cut to workpiece, while the tool workpiece of avoiding is in direct contact, and abrasive grain is pressed into workpiece surface and generates
Surface and sub-surface damage realize the polishing of workpiece surface very high degree of precision.
2. a kind of three-phase flow dynamic pressure cavitation polishing method as described in claim 1, it is characterised in that：In order to keep away in polishing process
Exempt from the wear particle deposition in polishing fluid, is ground blender with mounted on polish liquid container both sides two using abrasive Flow delivery hose
Grain stream delivery pump connects into an abrasive particle flow circulating system.
3. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 1 or 2, it is characterised in that：Cylindrical polishing tool table
Face is smooth or be provided with groove, and free curve surface work pieces are fixed on polishing fluid container bottom by fixture, and tool and workpiece are all complete
It is immersed in the polishing fluid for being mixed with abrasive grain；Three bar parallel connection platforms are installed on the Z-direction guide rail of Three Degree Of Freedom series connection platform and form
Serial-parallel mirror platform, polishing tool are mounted on serial-parallel mirror mechanism end, control the position of tool along X, Y, Z-direction by series connection platform
It sets, parallel connection platform controls the posture of tool, and polishing tool is allow to be accurately controlled relative to the pose of workpiece.
4. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2 or claim 3, it is characterised in that：Tool is protected above workpiece
Servo motor drives polishing tool high speed rotation while holding microgap, is mixed with the polishing fluid of abrasive grain in the high-speed rotating work of tool
It is rotated together under, polishing fluid is generated by improving pressure due to generating extruding when wedge gap between tool and workpiece
Dynamic pressure；Constantly the angle of level of approximation goes impact workpiece surface microcosmic to the abrasive grain being incorporated in polishing fluid under the action of dynamic pressure
The part of protrusion forms certain material to workpiece and removes.
5. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2 or claim 3, it is characterised in that：Ultrasonic bubble generator
It is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, multi-degree-of-freemechanical mechanical arm constantly adjusts supersonic generator amplitude transformer
Relative to the pose in dynamic pressure region, make the cavitation bubble that amplitude transformer end generates just past dynamic pressure region.Supersonic gas is soaked
When raw device work, amplitude transformer end generates a large amount of cavitation bubbles, cavitation bubble under ultrasonic wave positive pressure phase and negative pressure phase separation not
Disconnected expansion and contraction, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble generation is quickly crumbled and fall.
6. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2, it is characterised in that：The abrasive particle flow circulating system by
Two abrasive Flow delivery pumps, blender and abrasive Flow delivery hose composition.Two abrasive Flow delivery pumps are respectively arranged in polishing and add
Work platform both sides are connected by abrasive Flow delivery hose with the blender of the other side.Liquid-solid two phase abrasive particle flow circulating system can have
Effect avoids wear particle deposition in polishing fluid container bottom, the recycling service efficiency of abrasive Flow is improved, to promote polishing efficiency.
7. a kind of device of three-phase flow dynamic pressure cavitation polishing method as described in claim 1, it is characterised in that：Described device packet
Include Three Degree Of Freedom series connection platform, three bar parallel connection platforms, the polishing fluid for being mixed with abrasive grain, abrasive Flow delivery pump, abrasive Flow delivery hose,
Blender, multi-degree-of-freemechanical mechanical arm, workpiece, polishing liquid container, fixture, servo motor, shaft coupling, polishing tool and supersonic gas
Generator is steeped, the Three Degree Of Freedom series connection platform above polishing liquid container is installed on and is mainly made of X, Y, Z-direction guide rail, three sides
To guide rail driven respectively by motor, the position for controlling polishing tool；Three bar parallel connection platforms are by moving platform and silent flatform group
At wherein moving platform is made of three telescopic rods, the posture for controlling polishing tool；Three bar parallel connection platforms are installed on three certainly
By forming serial-parallel mirror platform on the Z-direction guide rail of degree series connection platform, polishing tool is connected mounted on string and is mixed with servo motor
Join mechanism end, makes polishing tool and high speed rotation while workpiece holding microgap, generate dynamic pressure region；Free curve surface work pieces
Polishing fluid container bottom is then fixed on by fixture, and is totally submerged in being mixed in the polishing fluid of abrasive grain；Two abrasive Flows are defeated
It send pump to be respectively arranged in polishing liquid container both sides, is connected with other side blender by abrasive Flow delivery hose, is thrown for avoiding
Wear particle deposition in photoreduction process；Ultrasonic bubble generator is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, makes to surpass
The cavitation bubble that sonic generator amplitude transformer end generates is just past dynamic pressure region.
8. device as claimed in claim 7, it is characterised in that：The polishing tool is cylindrical polishing tool, and cylinder is thrown
Optical tool, which is then connected by attachment device with servo motor, is installed on three bar parallel connection platform ends, and tool surfaces are with groove or light
It is sliding.
9. device as claimed in claim 7 or 8, it is characterised in that：Two abrasive Flow delivery pumps are respectively arranged in polishing
Platform both sides are connected by abrasive Flow delivery hose with blender and polishing liquid container；Abrasive particle flow circulating system is in polishing process
In ceaselessly to polishing container in abrasive Flow carry out circulation stirring with conveying.
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