CN104972404B - A kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device - Google Patents
A kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device Download PDFInfo
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- CN104972404B CN104972404B CN201510056741.6A CN201510056741A CN104972404B CN 104972404 B CN104972404 B CN 104972404B CN 201510056741 A CN201510056741 A CN 201510056741A CN 104972404 B CN104972404 B CN 104972404B
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- 238000005498 polishing Methods 0.000 title claims abstract description 99
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- 239000000463 material Substances 0.000 claims abstract description 12
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- 229910001220 stainless steel Inorganic materials 0.000 claims description 21
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- 238000004401 flow injection analysis Methods 0.000 claims description 15
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- 239000007924 injection Substances 0.000 claims description 15
- 229910000831 Steel Inorganic materials 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 14
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- 229920005372 Plexiglas® Polymers 0.000 claims description 10
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 230000033001 locomotion Effects 0.000 claims description 7
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- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
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- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 238000004458 analytical method Methods 0.000 description 1
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- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0084—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a mixture of liquid and gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device that can reach atomic level material removal effect, including intelligent electric switch board, air pump, polishing platform, two SERVO CONTROL abrasive Flow delivery pumps, agitator, trachea and abrasive Flow delivery hoses, the air pump connects polishing platform by trachea, and the polishing platform connects into a liquid-solid two phase abrasive particle flow circulating system by abrasive Flow delivery hose and two SERVO CONTROL abrasive Flow delivery pumps and agitator；Whole burnishing device is processed process control by the intelligent electric switch board；The present invention is vortexed in blood circulation using gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow and is polished repeatedly the utilization ratio that processing can improve abrasive Flow to the workpiece, and processing residue can be effectively filtered with less sewage discharge, realize cleaning processing, energy saving, environmental protection.
Description
Technical field
The present invention relates to fluid super-smooth surface grinding and polishing device, in particular, is related to a kind of gas-liquid-solid three-phase mill
Grain stream super-smooth surface fluid polishing device.
Background technology
In high-technology fields such as contemporary optics, electronic information and membrane sciences, need in precision optics part and function
Realize super smooth surface processing (Ultrasmooth Surface Manufacturing), such as grenz ray in crystalline material surface
Optical system, laser gyro reflecting mirror, high-density wavelength division multiplexer, superlaser reflecting mirror, function optics, optical window
Deng.
Precision optics part and functional crystal material part belong to the key of advanced optical equipment and electronic manufacture equipment
Parts, and super smooth surface processing equipment itself then belongs to the high-end equipment of Ultra-precision Turning, therefore, for super-smooth surface plus
The key scientific problems of work conduct a research, and explore the new principle of super smooth surface processing, new technology and new equipment, meet national war
The demand that slightly property new industry (high-end equipment manufacturing) develops.
Super-smooth surface except require extremely low surface roughness value (<1nm RMS), it is often more important that workpiece must obtained
The high form accuracy in surface is simultaneously, it is ensured that functional crystal material crystal lattice integrity, prevents affected layer
With cause sub-surface damage, for precision optics piece surface then requires extremely low surface waviness, special so as to realize low scattering
Property, high-transmission rate and surface reflectivity.In general, super smooth surface processing is removed for realizing atom level material, during processing pair
The active force very little of surface of the work, is consequently belonging to the processing mode that typically slow work yields fine products, extremely inefficient, and processing cost is very
High.Realize that inexpensive, efficient super-smooth surface adds on the premise of guaranteeing to occur without affected layer and sub-surface damage
Work is the technical barrier that precision manufactureing field is badly in need of solving.
Existing Machining Technology of Super Smooth Surface, can totally be divided into two classes, and a class contacts surface of the work reality by machining tool
Now processing (such as uses emery wheel, abrasive band or other flexible materials as the grinding of instrument, polishing etc.), another kind of then not against processing
Instrument directly contact surface of the work, but realize adding surface of the work using the flow at high speed of the abrasive Flow for carrying fine abrasive grains
This class processing method can be referred to as fluid polishing by work.Currently main abrasive Flow polishing processing method mainly has：Extruding
Hone polish, the polishing of abrasive particle water jet, MRF, Magnetorheological Jet Polishing, ER fluid polishing etc..These methods utilize abrasive particle
Wall shock effect when stream is contacted with finished surface, forms abrasive particle and realizes that to the micro-cutting on surface surfacing is removed, reach
Skin processing effect.
But the inherent characteristicses due to above-mentioned abrasive Flow Machining method, the rough surface of much not already available satisfaction after processing
Degree.In some fluid polishing processing methods existing, the flow velocity on fluid opposite piece surface is low and flow direction is single (with work
Tool opposite piece rotation, the method for driving flow of fluid at gap between the two, such as MRF then belong to this feelings
Condition).At this moment, as rate of flow of fluid is not enough to reach turbulence state, laminar condition, abrasive particle flow direction basic are typically in
Cause, only have an opportunity to contact with surface to be machined with the abrasive particle at the subsurface fluid of workpiece directly contact, therefore real performance is cut
The abrasive particle for cutting effect is few part of abrasive particle in fluid, and only acts on raised peak, working (machining) efficiency nature from single direction
Not high.Also exist in other fluid polishing processing method fluid opposite piece surface normal direction impact force excessive or effect
Power unreasonable with the angle of surface of the work (such case is belonged to the polishing Fang Ze that abrasive particle water-jet stream mode impacts surface of the work)
Defect.At this moment, though rate of flow of fluid can reach very high, abrasive particle impact direction is still basically identical, and impingement flow is direct with workpiece
The area of contact is little, if normal direction impact force is too small, working (machining) efficiency is very low, and normal direction impulsive force is excessive or active force and workpiece table
The angle in face is unreasonable, surface damage and new rough surface may be caused to occur, therefore it is difficult to hold processing quality and add
The rapport of work efficiency rate.Examine from the nowadays social wide demand prospect to ultra-precise optical part and functional crystal material
Consider, solve the technical barrier of super-smooth surface precision manufactureing, still need and propose new solution to reach the ultraphotic of atomic level
Sliding surface accurate processing effect.
Content of the invention
The purpose of the present invention is that realizes precision system on the premise of guaranteeing to occur without affected layer and sub-surface damage
Make field low cost, the technical barrier of high efficiency super smooth surface processing, it is proposed that one kind can reach atomic level material and go
Gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device except effect.
The present invention is achieved through the following technical solutions above-mentioned purpose：A kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface stream
Body burnishing device, including intelligent electric switch board, air pump, polishing platform, two SERVO CONTROL abrasive Flow delivery pumps, stirrings
Device, trachea and abrasive Flow delivery hose, the air pump connect polishing platform by trachea, and the polishing platform passes through
Abrasive Flow delivery hose and two SERVO CONTROL abrasive Flow delivery pumps and agitator connect into a liquid-solid two phase abrasive Flow circulation
System；Whole burnishing device is processed process control by the intelligent electric switch board.
The polishing platform includes frame, Precision Lead-Screw drive system, frame driving member, disc buffer
Tool, rustless steel swivel joint, gas-tpe fitting, work piece holder, work piece holder mounting seat and stainless steel trough, the stainless steel water
In frame, work piece holder mounting seat is fixed on stainless steel water trench bottom to groove, and work piece holder is fixed on work piece holder peace
On dress base；It is fixed with the Precision Lead-Screw drive system of symmetrical distribution in the frame of the stainless steel trough both sides, two
Individual Precision Lead-Screw drive system connection frame driving member simultaneously drives the frame driving member to move up and down；Disc is polished
Instrument is on the frame driving member directly over the work piece holder；Described two Precision Lead-Screw drive systems are by driving
The dynamic frame driving member moves up and down and drives the disc polishing tool to move up and down in the stainless steel trough.
The disc polishing tool forms large-area microspur gap with the upper surface of workpiece to be machined, and disc is polished
Instrument is provided with inner chamber, and the top surface of disc polishing tool is provided with and is led to for injecting the abrasive particle for polishing abrasive particle injection with inner space
Road, the abrasive particle injection channel abrasive Flow delivery hose is connected by rustless steel swivel joint and by abrasive Flow delivery hose and
Two SERVO CONTROL abrasive Flow delivery pump connections；The side of the disc polishing tool is additionally provided with equally distributed at least two
Air-flow injection channel, the air-flow injection channel with the inner space and are used for injecting high velocity air to the inner chamber, described
Air-flow injection channel connects trachea by gas-tpe fitting and connects air pump by trachea.
Further, abrasive particle injection channel optimum number is three, and air-flow injection channel optimum number is three.
Further, the Precision Lead-Screw drive system includes motor, leading screw and line slideway, leading screw and straight line
Guide rail is vertically-mounted, and one end of the leading screw connects motor by shaft coupling, and motor is fixed in the frame；Institute
The other end for stating leading screw is fixed in the frame by bearing block；The two ends of the line slideway are directly anchored to the frame
On；Frame driving member connection leading screw and line slideway simultaneously receive the driving of the motor in the stainless steel trough
Move up and down.
Further, the disc polishing tool top surface is additionally provided with plexiglas form, and the plexiglas form is
The water white transparency circular glass being made up of resin material.Can be thrown with disc described in Visual Observations Observations by the plexiglas form
Fluid motion in optical tool inner chamber, and the plexiglas form has good machining property, is fixed by screw
Installed in the top surface of disc polishing tool, the steadiness of device is improve.
Further, the outer surface of the work piece holder mounting seat is processed using chromium plating process technique.The technique
Improve anticorrosive, the stainless property of work piece holder mounting seat, and then improve the service life of device, prevent abrasive Flow
Polluted by impurity such as rust.
Further, the intelligent electric switch board includes PLC intelligent controllers, relay, motor servo driver, each
Class sensor and other appliance components, the intelligent electric switch board are accurately perceived by the various kinds of sensors and are closed therewith
The working condition of connection equipment, sending instruction in time carries out high accuracy control to the equipment of associated.
Further, the capacity of air pump be 32 liters, maximum pressure be 2 MPas, the air pump by trachea to the disk
High velocity air is injected in shape polishing tool, and then drives the liquid-solid two phase abrasive Flow in disc polishing tool to be rotated to reach at a high speed
To turbulence state, form gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow and be vortexed.
Further, the trachea is a diameter of eight points of plastic conduit.Trachea has good buckle resistance energy, protects
Stability and the flow velocity of each multi-directional airflow injection channel interior air-flow of high velocity air in the air-flow injection channel are demonstrate,proved
Concordance with pressure.
Further, the abrasive Flow delivery hose is the transparent rubber flexible pipe of embedded steel wire.Abrasive Flow delivery hose has
There is very good buckle resistance energy, prevent high-velocity fluid from the complicated change such as flow-disturbing, and then guarantee can be being produced by bending place
The stability of liquid-solid two phase abrasive Flow described in the injection disc polishing tool inner chamber.
The beneficial effects of the present invention is：
1) large area microspur gap is formed using contactless disc polishing tool in surface of the work, can be to large area
The large area curve surface work pieces that plane or Curvature varying relax carry out efficient atom level material and remove, and surface roughness reaches Rq1 and receives
Rice is following, and optics ripple and surface damage situation meet super smooth surface processing requirement, and working (machining) efficiency is improved compared with prior art
More than one times.
2) the micro-dimension bubble in gas-liquid-solid three-phase abrasive Flow can be with appropriate side under the control of blended amount and flow velocity
Formula crumbles and fall, and neighbouring abrasive particle is produced during crumbling and fall and accelerates impetus, the elaboration of abrasive particle generation is greatly improved
Probability.
3) present invention can lift the research and development technology basis of ultra-precision processing apparatus, promote China's ultra-precision processing apparatus
Development.
4) it is vortexed using gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow and repeatedly the workpiece is polished in blood circulation
Processing can improve the utilization ratio of abrasive Flow, it is possible to effectively filter processing residue with less sewage discharge, realize cleaning
Processing, energy saving, environmental protection.
Description of the drawings
Fig. 1 is a kind of structural representation of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device of the invention.
Fig. 2 is the structural representation of disc burnishing device of the present invention.
Fig. 3 is the top view of disc burnishing device of the present invention.
Fig. 4 is the structural representation of polishing platform of the present invention.
In figure, 1- intelligent electric switch boards, 2- polishing platforms, 3 (5)-SERVO CONTROL abrasive Flow delivery pumps, 4- stirrings
Device, 6- abrasive Flow delivery hoses, 7- tracheas, 8- air pumps, 9- workpiece, the effective polishing areas of 10-, 11- abrasive particles, 12- gas-liquid-solid three-phases
Abrasive Flow high velocity turbulent flow vortex, 13- plexiglas forms, 21- frames, 22- bearing blocks, 23- line slideways, 24- feed screw nuts,
25- leading screws, 26- shaft couplings, 27- motors, 28- frame driving members, 29- disc polishing tools, the rotation of 211- rustless steels
Adaptor, 212- gas-tpe fittings, 214- work piece holders, 215- work piece holder mounting seats, 216- stainless steel troughs.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As shown in figures 1-4, a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device, including intelligent electric
Switch board 1, air pump 8, polishing platform 2, two SERVO CONTROL abrasive Flow delivery pumps 3,5, agitator 4, trachea 7 and abrasive Flows
Delivery hose 6, the air pump 8 connect polishing platform 2 by trachea 7, and the polishing platform 2 is conveyed by abrasive Flow
Flexible pipe 6 and two SERVO CONTROL abrasive Flow delivery pumps 3,5 and agitator 4 connect into a liquid-solid two phase abrasive particle flow circulating system；
Whole burnishing device is processed process control by the intelligent electric switch board 1；
The polishing platform 2 includes frame 21, Precision Lead-Screw drive system, frame driving member 28, disc
Polishing tool 29, rustless steel swivel joint 211, gas-tpe fitting 212, work piece holder, work piece holder mounting seat 215 and rustless steel
Tank 216, in frame 21, work piece holder mounting seat 215 is fixed on stainless steel trough to the stainless steel trough 216
216 bottoms, work piece holder are fixed in work piece holder mounting seat 215；Solid in the frame 21 of 216 both sides of the stainless steel trough
Surely there are the Precision Lead-Screw drive system of symmetrical distribution, two 25 drive system connection frame driving members of Precision Lead-Screw
28 and the frame driving member 28 is driven to move up and down；Disc polishing tool 29 is directly over the work piece holder
On frame driving member 28；25 drive system of described two Precision Lead-Screws is transported about 28 by driving the frame driving member
Move and drive the disc polishing tool 29 to move up and down in the stainless steel trough 216；
The disc polishing tool 29 forms large-area microspur gap, disc with the upper surface of workpiece to be machined 9
Polishing tool 29 is provided with inner chamber, and the top surface of disc polishing tool 29 is provided with the mill for injecting polishing abrasive particle with inner space
Grain injection channel, the abrasive particle injection channel connect abrasive Flow delivery hose 6 by rustless steel swivel joint 211 and pass through abrasive particle
Stream delivery hose 6 is connected with two SERVO CONTROL abrasive Flow delivery pumps 3,5；The side of the disc polishing tool 29 is additionally provided with
Equally distributed at least two air-flows injection channel, the air-flow injection channel with the inner space and are used for the inner chamber
Injection high velocity air, the air-flow injection channel connect trachea 7 by gas-tpe fitting 212 and connect air pump 8 by trachea 7..
Abrasive particle injection channel optimum number is three, and air-flow injection channel optimum number is three.
25 drive system of the Precision Lead-Screw includes motor 27, leading screw 25 and line slideway 23, leading screw 25 and straight
Line guide rail 23 is vertically-mounted, and one end of the leading screw 25 connects motor 27 by shaft coupling 26, and motor 27 is fixed on
In the frame 21；The other end of the leading screw 25 is fixed in the frame 21 by bearing block 22；The line slideway 23
Two ends be directly anchored in the frame 21；The frame driving member 28 connects leading screw 25 and line slideway 23 and by described
The driving of motor 27 moves up and down in the stainless steel trough 216.
29 top surface of disc polishing tool is additionally provided with plexiglas form, and the plexiglas form is by resinous wood
The water white transparency circular glass that material is made.
The outer surface of the work piece holder mounting seat 215 is processed using chromium plating process technique.
The intelligent electric switch board 1 includes PLC intelligent controllers, relay, motor servo driver, various kinds of sensors
With other appliance components, the intelligent electric switch board 1 accurately perceives associated equipment by the various kinds of sensors
Working condition, send in time instruction high accuracy control is carried out to the equipment of associated.
The capacity of air pump 8 is 32 liters, maximum pressure is 2 MPas.The air pump 8 is polished to the disc by trachea 7
High velocity air is injected in instrument 29, and then drives the liquid-solid two phase abrasive Flow in disc polishing tool to be rotated to reach rapids at a high speed
Stream mode, forms gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow vortex 12.
The trachea 7 is a diameter of eight points of plastic conduit.Trachea 7 has good buckle resistance energy, it is ensured that institute
State stability and the flow velocity and pressure of each multi-directional airflow injection channel interior air-flow of high velocity air in air-flow injection channel
Concordance.
Transparent rubber flexible pipe of the abrasive Flow delivery hose 6 for embedded steel wire.Abrasive Flow delivery hose 6 has very good
Good buckle resistance energy, prevents high-velocity fluid can produce the complicated change such as flow-disturbing by bending place, and then ensure that and inject institute
State the stability of liquid-solid two phase abrasive Flow described in disc polishing tool inner chamber.
The metric thread joint of 211 one end of rustless steel swivel joint is tightened on the disc polishing tool 29,
The hose coupling of the other end is enclosed within the abrasive Flow delivery hose 6 and is tightened by steel wire anchor ear.The metric system of 212 one end of gas-tpe fitting
Nipple is tightened on the disc polishing tool 29, and the bite type gas-tpe fitting of the other end is then connected with trachea 7.
Workpiece 9 on the work piece holder 214, work piece holder 214 in work piece holder mounting seat 215, wherein, workpiece 9 with
The 29 concentric installation of disc polishing tool, and spacing is not more than 1 millimeter between the two, to form the large area microspur gap.
The specific implementation step of the device is as follows：Liquid-solid two phase abrasive particle is injected to 29 inner chamber high speed of disc polishing tool
Stream, its drive in the large area microspur gap of effective polishing area 10 and form gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow vortex 12,
While liquid-solid two phase abrasive Flow is injected in 29 inner chamber of disc polishing tool, using multi-directional airflow method for implanting to disk
High velocity air is injected in the liquid-solid two phase abrasive Flow of 29 inner chamber of shape polishing tool, and high velocity air is along the outer of liquid-solid two phase abrasive Flow
Edge injects, and improves rotary speed of the gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow vortex 12 in effective polishing area 10.By regarding
Feel the characteristics of motion of observation gas-liquid-solid three-phase abrasive Flow high velocity turbulent flow vortex 12, adjusting associated control parameters makes the gas-liquid-solid three
Phase abrasive Flow high velocity turbulent flow vortex 12 reaches optimal working condition and is polished processing.Carry out the polishing of certain time
Afterwards, test analysis are carried out to workpiece 9, the cutting effect of 11 pairs of workpiece 9 of abrasive particle described in contrast verification, and then optimize polishing plus
Work process program, finally drafts specific polishing process scheme, is polished processing to workpiece 9.
During work, intelligent electric switch board 1 first closes air pump 8, SERVO CONTROL abrasive Flow delivery pump 3,5 and agitator 4, first
Toward stainless steel trough 216, a certain amount of polishing fluid and abrasive particle is first added to form liquid-solid two phase abrasive Flow 6, afterwards by intelligent electric control
The motor 27 in polishing platform 2, and then disc buffer of the drive installation in frame 21 are opened in the control of cabinet processed 1
Have 29 high-precision motions, make disc polishing tool 29 move to disc polishing tool bottom surface 5 with 9 upper surface of workpiece distance not
At more than 1 millimeter.Now, then by intelligent electric switch board 1 control to open SERVO CONTROL abrasive Flow delivery pump 3,5 and agitator 4,
Finally control to open air pump 8 by intelligent electric switch board 1, high velocity air is injected in disc polishing tool inner chamber 4；By intelligence
Energy electrical control cabinet 1 adjusts the running parameter of various equipment, from 13 Visual Observations Observations disc polishing tool of plexiglas form
The motion conditions of abrasive Flow in chamber 4, are adjusted to optimal machining state and are polished processing operation.
The build process of burnishing device：
1. the selection of SERVO CONTROL abrasive Flow delivery pump：
The selection of SERVO CONTROL abrasive Flow delivery pump is the key problem that burnishing device is built.For the present invention, watch
Clothes control abrasive Flow delivery pump should meet two primary conditions：The technology ginseng such as the maximum stream flow of delivery pump and maximum outlet pressure
Number should be can be at 1.5 times of the basic demand of turbulization in multidirectional liquid-solid two phase abrasive Flow injection channel；Delivery pump energy
Enough two-phase fluid of the conveying containing solid abrasive particles granule.
The hydraulic diameter of multidirectional liquid-solid two phase abrasive Flow injection channel is d=0.032m
For pipeline flows, its laminar flow to turbulent flow faces a reynolds number Re cr and should both work as Reynolds between 2100～4000
It is laminar condition when number Re is less than 2000, when reynolds number Re is for turbulence state more than 4000.Take the fluctuation area upper limit of Recr
4000, pipeline fluid Reynolds number is directly proportional to flow velocity, hydraulic diameter, is inversely proportional to fluid viscosity.The motion of water under known room temperature
Viscosity, at this moment can obtain multidirectional liquid-solid two phase abrasive Flow injection channel turbulization critical flow velocity and flow；Pump can be selected
Model, initial option is the MS1 series mechanical diaphragm metering pumps of Italian SEKO brands, and flow is 5.5～530 ls/h,
Maximum pressure is 10bar, and its maximum Reynolds number can meet the requirement that turbulent flow fully occurs completely.
2. the selection of abrasive material and workpiece
According to polishing processing device actual demand, the shape of required abrasive material wants comparison rule, preferably a diameter of nanoscale
Other spheroidal particle.
According to above-mentioned requirements, the reference abrasive particle selected by this device has following two：
Abrasive particle 1：Carborundum (SiC) micropowder, its basic feature parameter are as follows：Proportion 3.2, color：Black or green, mesh
Number：100000～1000.
Abrasive particle 2：Aluminium oxide (Al2O3) micropowder, its basic feature parameter are as follows：Proportion 3.95, color：White, mesh number：
100000～1000.
Workpiece selected by this device is：The plane such as circular single crystal silicon chip or circle K9 glass or curvature conversion are slow
Large area components and parts.
3. the design of polishing platform
In order to solve equipment work in-process problem of rustiness, the frame of polishing platform, work piece holder mounting seat are adopted
Plastic-blasting handling process, stainless steel trough, leading screw, feed screw nut, line slideway, attachment screw all adopt stainless steel material, frame
Driving member, disc polishing tool, work piece holder adopt aluminum.
A pair of Precision Lead-Screw drive systems being symmetrically mounted in frame, effective transmission stroke of leading screw is 300 millimeters,
The effective transmission stroke for being arranged in parallel in the high accuracy line slideway of Precision Lead-Screw drive system both sides is also 300 millimeters, institute
The stroke of the disc polishing tool movement with disc polishing tool on frame driving member is as 300 millimeters.Workpiece
Fixture is placed in stainless steel trough in work piece holder mounting seat, and work piece holder is concentric with disc polishing tool
Install, the bottom surface of disc polishing tool is not more than 1 millimeter with workpiece surface spacing, by intelligent controller precise control reality
Existing.
Above-described embodiment is presently preferred embodiments of the present invention, is not the restriction to technical solution of the present invention, as long as
Without the technical scheme that creative work can be realized on the basis of above-described embodiment, it is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (9)
1. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device, it is characterised in that：Control including intelligent electric
Cabinet (1), air pump (8), polishing platform (2), two SERVO CONTROL abrasive Flow delivery pumps (3,5), agitator (4), tracheas (7)
With abrasive Flow delivery hose (6), described air pump (8) connect polishing platform (2) by trachea (7), and the polishing is put down
Platform (2) connects into one by abrasive Flow delivery hose (6) with two SERVO CONTROL abrasive Flow delivery pumps (3,5) and agitator (4)
Bar liquid-solid two phase abrasive particle flow circulating system；Whole burnishing device is processed process control by intelligent electric switch board (1)；
Described polishing platform (2) include frame (21), Precision Lead-Screw drive system, frame driving member (28), disk
Shape polishing tool (29), rustless steel swivel joint (211), gas-tpe fitting (212), work piece holder, work piece holder mounting seat
(215) and stainless steel trough (216), described stainless steel trough (216) in frame (21), work piece holder mounting seat
(215) stainless steel trough (216) bottom is fixed on, and work piece holder is fixed in work piece holder mounting seat (215)；Described stainless
The Precision Lead-Screw drive system of symmetrical distribution, two high accuracy are fixed with the frame (21) of steel water tank (216) both sides
Leading screw (25) drive system connection frame driving member (28) simultaneously drives described frame driving member (28) to move up and down；Disc
Polishing tool (29) is on the frame driving member (28) directly over the work piece holder；Described two Precision Lead-Screws
(25) drive system drives disc polishing tool (29) to exist by driving described frame driving member (28) to move up and down
Move up and down in stainless steel trough (216)；
Disc polishing tool (29) form large-area microspur gap, disc with the upper surface of workpiece to be machined (9)
Polishing tool (29) is provided with inner chamber, and the top surface of disc polishing tool (29) is provided with and polishes abrasive particle with inner space for injecting
Abrasive particle injection channel, the abrasive particle injection channel by rustless steel swivel joint (211) connect abrasive Flow delivery hose (6) and
Connected with two SERVO CONTROL abrasive Flow delivery pumps (3,5) by abrasive Flow delivery hose (6)；The disc polishing tool
(29) side is additionally provided with equally distributed at least two air-flows injection channel, the air-flow injection channel and the inner space
And be used for injecting high velocity air to the inner chamber, the air-flow injection channel connects trachea (7) by gas-tpe fitting (212) and leads to
Cross trachea (7) connection air pump (8).
2. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Abrasive particle injection channel optimum number is three, and air-flow injection channel optimum number is three.
3. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Precision Lead-Screw (25) drive system includes motor (27), leading screw (25) and line slideway (23), leading screw (25)
Vertically-mounted with line slideway (23), one end of the leading screw (25) connects motor (27), stepping by shaft coupling (26)
Motor (27) is fixed in the frame (21)；The other end of leading screw (25) is fixed on the frame by bearing block (22)
(21) on；The two ends of line slideway (23) are directly anchored in the frame (21)；Described frame driving member (28) connect
Connect leading screw (25) and line slideway (23) and receive the driving of the motor (27) upper and lower in the stainless steel trough (216)
Motion.
4. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Disc polishing tool (29) top surface is additionally provided with plexiglas form, and the plexiglas form is by resin material
The water white transparency circular glass that makes.
5. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：The outer surface of work piece holder mounting seat (215) is processed using chromium plating process technique.
6. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Described intelligent electric switch board (1) include PLC intelligent controllers, relay, motor servo driver, various kinds of sensors and
Other appliance components, intelligent electric switch board (1) accurately perceive associated equipment by the various kinds of sensors
Working condition, send in time instruction high accuracy control is carried out to the equipment of associated.
7. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：The capacity of air pump (8) is 32 liters, maximum pressure is 2 MPas.
8. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Trachea (7) are a diameter of eight points of plastic conduit.
9. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, its feature exist
In：Abrasive Flow delivery hose (6) are the transparent rubber flexible pipe of embedded steel wire.
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| CN105643473B (en) * | 2015-12-28 | 2017-12-26 | 广州大学 | A kind of lapping device of cylindrical work outer peripheral face |
| CN108581817B (en) * | 2018-04-02 | 2020-11-27 | 浙江工业大学 | Method and device for Fenton-assisted three-phase flow hydrodynamic cavitation polishing of SiC optical curved surface |
| CN109594456B (en) * | 2019-01-25 | 2020-03-06 | 吉林大学 | Frequency tester of rotary vehicle-mounted pavement crack detection system based on electrorheological fluid |
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