CN104972404A - Flow polishing device for manufacturing ultrasmooth surfaces by gas-liquid-solid abrasive flow - Google Patents

Abstract

The invention discloses a gas-liquid-solid three-phase abrasive particle flow ultra-smooth surface fluid polishing device capable of achieving the atomic level material removal effect, including an intelligent electric control cabinet, an air pump, a polishing processing platform, and two servo-controlled abrasive particle flow delivery pumps , agitator, air pipe and abrasive flow delivery hose, the air pump is connected to the polishing processing platform through the air pipe, and the polishing processing platform is connected to two servo-controlled abrasive flow delivery pumps and agitator through the abrasive flow delivery hose A liquid-solid two-phase abrasive particle flow circulation system; the entire polishing device is controlled by the intelligent electrical control cabinet; the invention uses a gas-liquid-solid three-phase abrasive particle flow high-speed turbulent vortex to repeatedly grind the workpiece in the circulation system Polishing can improve the utilization efficiency of abrasive flow, and can effectively filter processing residues to reduce sewage discharge, realize clean processing, save energy, and be green and environmentally friendly.

Description

A fluid polishing device for ultra-smooth surface with gas-liquid-solid three-phase abrasive flow

technical field

The invention relates to a fluid ultra-smooth surface grinding and polishing device, in particular to a gas-liquid-solid three-phase abrasive particle flow ultra-smooth surface fluid polishing device.

Background technique

In the high-tech fields such as modern optics, electronic information and thin film science, it is necessary to realize ultra-smooth surface manufacturing (Ultrasmooth Surface Manufacturing) on the surface of precision optical parts and functional crystal materials, such as soft X-ray optical system, laser gyro mirror, high-density wave Demultiplexer, high-energy laser mirror, functional optical device, optical window, etc.

Precision optical parts and functional crystal material parts are key components of high-end optical equipment and electronic manufacturing equipment, while ultra-smooth surface processing equipment itself belongs to ultra-precision processing high-end equipment. Therefore, research on key scientific issues of ultra-smooth surface processing , to explore new principles, new processes and new equipment for ultra-smooth surface processing, in line with the needs of the development of national strategic emerging industries (high-end equipment manufacturing).

Ultra-smooth surface requires extremely low surface roughness (<1nm RMS), more importantly, it must ensure the integrity of the surface lattice of the functional crystal material workpiece surface while obtaining the extremely high shape accuracy of the workpiece surface, so as to prevent the occurrence of processing deterioration layer And lead to sub-surface damage, for the surface of precision optical parts requires extremely low surface waviness, so as to achieve low scattering characteristics, high transmittance and surface reflectivity. Generally speaking, ultra-smooth surface processing is to achieve atomic-level material removal, and the force on the surface of the workpiece is very small during processing. Therefore, it is a typical slow-work and meticulous processing method, with extremely low efficiency and high processing costs. Realizing low-cost, high-efficiency ultra-smooth surface processing without the occurrence of processing-deteriorated layers and sub-surface damage is an urgent technical problem in the field of precision manufacturing.

Existing ultra-smooth surface processing methods can be generally divided into two categories, one class relies on processing tools to contact the surface of the workpiece to achieve processing (such as grinding, polishing, etc. using grinding wheels, abrasive belts or other flexible materials as tools), and the other class Instead of relying on processing tools to directly contact the surface of the workpiece, the high-speed flow of the abrasive flow carrying fine abrasive particles is used to process the surface of the workpiece. This type of processing method can be collectively referred to as fluid polishing. At present, the main abrasive flow polishing processing methods mainly include: extrusion honing polishing, abrasive water jet polishing, magnetorheological polishing, magnetic jet polishing, electrorheological fluid polishing, etc. These methods use the wall impact effect when the abrasive grain flow contacts the machined surface to form micro-cutting of the abrasive grain on the surface to remove the surface material and achieve the finishing effect.

However, due to the inherent characteristics of the above-mentioned abrasive flow processing method, many of them cannot obtain satisfactory surface roughness after processing. In some existing fluid polishing processing methods, the flow velocity of the fluid relative to the surface of the workpiece is low and the flow direction is single (the method in which the tool rotates relative to the workpiece to drive the fluid flow in the gap between the two, such as magnetorheological polishing, belongs to this case ). At this time, because the fluid flow rate is not enough to reach a turbulent state, it is generally in a laminar flow state, and the flow direction of the abrasive grains is basically the same. Only the abrasive grains at the surface fluid in direct contact with the workpiece have the opportunity to contact the processed surface, so they really play a cutting role. The abrasive particles are only a very small part of the abrasive particles in the fluid, and only act on the raised peaks from a single direction, so the processing efficiency is naturally not high. In some other fluid polishing methods, the normal impact force of the fluid relative to the surface of the workpiece is too large or the angle between the force and the surface of the workpiece is unreasonable (this is the case for polishing methods that impact the surface of the workpiece in the form of abrasive water jets. )Defects. At this time, although the fluid flow rate can be very high, the impact direction of the abrasive particles is still basically the same, and the area of direct contact between the impact flow and the workpiece is small. If the normal impact force is too small, the processing efficiency is very low, and the normal impact force is too high. Large or unreasonable angles between the force and the surface of the workpiece may lead to surface damage and new rough surfaces, so it is difficult to grasp the coordination relationship between processing quality and processing efficiency. Considering the broad demand prospects for ultra-precision optical parts and functional crystal materials in today's society, to solve the technical problems of ultra-smooth surface precision manufacturing, it is still necessary to propose new solutions to achieve atomic-level ultra-smooth surface precision machining effects.

Contents of the invention

The purpose of the present invention is to realize the technical problem of low-cost and high-efficiency ultra-smooth surface processing in the field of precision manufacturing under the premise of ensuring that no processing deterioration layer and sub-surface damage occur, and proposes a gas-liquid that can achieve the effect of removing materials at the atomic level Solid three-phase abrasive flow ultra-smooth surface fluid polishing device.

The present invention achieves the above object through the following technical solutions: a gas-liquid-solid three-phase abrasive flow ultra-smooth surface fluid polishing device, including an intelligent electrical control cabinet, an air pump, a polishing processing platform, two servo-controlled abrasive flow delivery pumps, Stirrer, air pipe and abrasive flow delivery hose, the air pump is connected to the polishing processing platform through the air pipe, and the polishing processing platform is connected to two servo-controlled abrasive flow delivery pumps and agitator through the abrasive flow delivery hose Liquid-solid two-phase abrasive particle flow circulation system; the entire polishing device is controlled by the intelligent electrical control cabinet.

The polishing processing platform includes a frame, a high-precision screw transmission system, a frame transmission member, a disc-shaped polishing tool, a stainless steel rotary joint, a gas pipe joint, a workpiece fixture, a workpiece fixture mounting base and a stainless steel water tank, and the stainless steel water tank is installed On the frame, the mounting base of the workpiece fixture is fixed on the bottom of the stainless steel water tank, and the workpiece fixture is fixed on the mounting base of the workpiece fixture; the frame on both sides of the stainless steel water tank is fixed with high-precision screw drive systems symmetrically distributed left and right, two The high-precision lead screw transmission system connects the frame transmission component and drives the frame transmission component to move up and down; the disc-shaped polishing tool is installed on the frame transmission component directly above the workpiece fixture; the two high-precision lead screws The transmission system drives the disc-shaped polishing tool to move up and down in the stainless steel water tank by driving the frame transmission member to move up and down.

The disc-shaped polishing tool and the upper surface of the workpiece to be processed form a large-area macro-distance gap, the disc-shaped polishing tool is provided with an inner cavity, and the top surface of the disc-shaped polishing tool is provided with a hole for injecting into the inner cavity. Abrasive grain injection channel for polishing abrasive grains, the abrasive grain injection channel is connected to the abrasive grain flow delivery hose through a stainless steel rotary joint and communicated with two servo-controlled abrasive grain flow delivery pumps through the abrasive grain flow delivery hose; the disc The side of the shaped polishing tool is also provided with at least two airflow injection passages evenly distributed, the airflow injection passage communicates with the inner chamber and is used to inject high-speed airflow into the inner chamber, and the airflow injection passage is connected to the air pipe through the air pipe joint And connect the air pump through the trachea.

Further, the optimal number of abrasive particle injection channels is three, and the optimal number of airflow injection channels is three.

Further, the high-precision lead screw transmission system includes a stepping motor, a lead screw and a linear guide rail, the lead screw and the linear guide rail are installed vertically, one end of the lead screw is connected to the stepping motor through a coupling, and the stepping motor is fixed On the frame; the other end of the lead screw is fixed on the frame through a bearing seat; the two ends of the linear guide rail are directly fixed on the frame; the frame transmission member is connected to the lead screw And the linear guide rail and is driven by the stepping motor to move up and down in the stainless steel water tank.

Further, the top surface of the disc-shaped polishing tool is also provided with a resin glass window, and the resin glass window is a colorless transparent circular glass made of resin material. The fluid movement in the inner cavity of the disc-shaped polishing tool can be visually observed through the resin glass window, and the resin glass window has good machining performance, and is fixedly installed on the top surface of the disc-shaped polishing tool by screws, The stability of the device is improved.

Further, the outer surface of the mounting base of the workpiece fixture is treated with a chrome-plating process. This process improves the anti-corrosion and anti-corrosion properties of the workpiece fixture installation base, thereby improving the service life of the device and preventing the abrasive grain flow from being polluted by impurities such as rust.

Further, the intelligent electrical control cabinet includes PLC intelligent controllers, relays, servo motor drivers, various sensors and other electrical components, and the intelligent electrical control cabinet accurately perceives the parameters of the associated equipment through the various sensors. In the working state, issue instructions in time to perform high-precision control on the equipment associated with it.

Further, the capacity of the air pump is 32 liters, and the maximum pressure is 2 MPa. The air pump injects high-speed airflow into the disc-shaped polishing tool through the air pipe, and then drives the liquid-solid two-phase abrasive particles in the disc-shaped polishing tool. The flow rotates at a high speed to achieve a turbulent state, forming a high-speed turbulent vortex of a gas-liquid-solid three-phase abrasive particle flow.

Further, the trachea is a hard plastic tube with a diameter of eight quarters. The trachea has good bending resistance, which ensures the stability of the high-speed airflow in the airflow injection channel and the consistency of the flow velocity and pressure of each multi-directional airflow injection channel.

Further, the abrasive particle flow conveying hose is a transparent rubber hose embedded with steel wires. The abrasive particle flow delivery hose has very good bending resistance, which prevents complex changes such as turbulence when the high-speed fluid passes through the bend, thereby ensuring that the liquid-solid phase injected into the inner cavity of the disc-shaped polishing tool phase abrasive flow stability.

The beneficial effects of the present invention are:

1) Using a non-contact disc-shaped polishing tool to form large-area micro-pitch gaps on the surface of the workpiece, it can efficiently remove materials at the atomic level for large-area flat or large-area curved workpieces with moderate curvature changes, and the surface roughness can reach below Rq1 nanometers. Moreover, the optical corrugation and surface damage meet the requirements of ultra-smooth surface processing, and the processing efficiency is more than doubled compared with the prior art.

2) The micro-sized bubbles in the gas-liquid-solid three-phase abrasive flow can collapse in an appropriate manner under the control of the blending amount and flow rate. During the collapse process, the nearby abrasive particles can be accelerated and pushed, which greatly improves the The probability of machining action produced by abrasive particles.

3) The present invention can improve the research and development technology basis of ultra-precision processing devices, and promote the development of ultra-precision processing devices in China.

4) Using gas-liquid-solid three-phase abrasive flow high-speed turbulent vortex to repeatedly polish the workpiece in the circulation system can improve the utilization efficiency of abrasive flow, and can effectively filter processing residues to reduce sewage discharge, and realize Clean processing, energy saving, green and environmental protection.

Description of drawings

Fig. 1 is a schematic structural view of a gas-liquid-solid three-phase abrasive particle flow ultra-smooth surface fluid polishing device of the present invention.

Fig. 2 is a schematic structural view of a disc-shaped polishing device of the present invention.

Fig. 3 is a top view of the disc-shaped polishing device of the present invention.

Fig. 4 is a schematic structural view of the polishing processing platform of the present invention.

In the figure, 1-intelligent electrical control cabinet, 2-polishing processing platform, 3(5)-servo-controlled abrasive flow delivery pump, 4-stirrer, 6-abrasive flow delivery hose, 7-air pipe, 8-air pump , 9-workpiece, 10-effective polishing area, 11-abrasive, 12-gas-liquid-solid three-phase abrasive flow high-speed turbulent vortex, 13-resin glass window, 21-frame, 22-bearing seat, 23-line Guide rail, 24-lead screw nut, 25-lead screw, 26-coupling, 27-stepper motor, 28-frame transmission component, 29-disc-shaped polishing tool, 211-stainless steel rotary joint, 212-trachea joint , 214-workpiece fixture, 215-workpiece fixture installation base, 216-stainless steel sink. the

Detailed ways

The present invention will be further described below in conjunction with accompanying drawing:

As shown in Figures 1 to 4, a gas-liquid-solid three-phase abrasive flow ultra-smooth surface fluid polishing device includes an intelligent electrical control cabinet 1, an air pump 8, a polishing processing platform 2, and two servo-controlled abrasive flow delivery pumps 3 , 5, agitator 4, gas pipe 7 and abrasive grain flow conveying hose 6, described air pump 8 is connected polishing processing platform 2 through gas pipe 7, and described polishing processing platform 2 is connected with two servo control via abrasive grain flow conveying flexible pipe 6 Abrasive flow delivery pumps 3, 5 and agitator 4 are connected to form a liquid-solid two-phase abrasive flow circulation system; the entire polishing device is controlled by the intelligent electrical control cabinet 1;

The polishing processing platform 2 includes a frame 21, a high-precision lead screw transmission system, a frame transmission member 28, a disc-shaped polishing tool 29, a stainless steel rotary joint 211, a gas pipe joint 212, a workpiece fixture, a workpiece fixture mounting base 215 and a stainless steel Water tank 216, described stainless steel water tank 216 is installed on the frame 21, and workpiece fixture mounting base 215 is fixed on stainless steel water tank 216 bottoms, and workpiece clamp is fixed on the workpiece fixture mounting base 215; On the frame 21 of described stainless steel water tank 216 two sides A high-precision lead screw transmission system with left-right symmetrical distribution is fixed, and two high-precision lead screws 25 transmission systems are connected to the frame transmission member 28 and drive the frame transmission member 28 to move up and down; the disc-shaped polishing tool 29 is installed on the On the frame transmission member 28 directly above the workpiece fixture; the two high-precision lead screw 25 transmission systems drive the disc-shaped polishing tool 29 in the stainless steel water tank 216 by driving the frame transmission member 28 to move up and down up and down movement;

Described disc-shaped polishing tool 29 and the upper surface of processed workpiece 9 form the micro-distance gap of large area, and disc-shaped polishing tool 29 is provided with inner cavity, and the top surface of disc-shaped polishing tool 29 is provided with and communicates with the inner cavity. The abrasive grain injection channel for injecting polishing abrasive grains, the abrasive grain injection channel is connected to the abrasive grain flow conveying hose 6 through the stainless steel rotary joint 211 and is conveyed with two servo-controlled abrasive grain flow through the abrasive grain flow conveying hose 6 The pumps 3 and 5 communicate; the side of the disc-shaped polishing tool 29 is also provided with at least two airflow injection channels evenly distributed, and the airflow injection channels communicate with the inner cavity and are used to inject high-speed airflow into the inner cavity , the gas flow injection channel is connected to the air pipe 7 through the air pipe joint 212 and connected to the air pump 8 through the air pipe 7 . .

The optimal number of abrasive particle injection channels is three, and the optimal number of airflow injection channels is three.

The transmission system of the high-precision leading screw 25 includes a stepper motor 27, a leading screw 25 and a linear guide rail 23, the leading screw 25 and the linear guide rail 23 are installed vertically, and one end of the leading screw 25 is connected to the stepping motor through a shaft coupling 26 27. The stepper motor 27 is fixed on the frame 21; the other end of the screw 25 is fixed on the frame 21 through the bearing seat 22; the two ends of the linear guide rail 23 are directly fixed on the frame 21. On the frame 21; the frame transmission member 28 connects the lead screw 25 and the linear guide rail 23 and is driven by the stepping motor 27 to move up and down in the stainless steel water tank 216. the

The top surface of the disc-shaped polishing tool 29 is also provided with a resin glass window, and the resin glass window is a colorless transparent circular glass made of resin material.

The outer surface of the workpiece fixture mounting base 215 is treated with chrome plating.

The intelligent electrical control cabinet 1 includes PLC intelligent controllers, relays, servo motor drivers, various sensors and other electrical components, and the intelligent electrical control cabinet 1 accurately perceives the work of the associated equipment through the various sensors State, and timely issue instructions to perform high-precision control on the associated equipment.

The capacity of the air pump 8 is 32 liters, and the maximum pressure is 2 MPa. The air pump 8 injects high-speed airflow into the disc-shaped polishing tool 29 through the air pipe 7, and then drives the liquid-solid two-phase abrasive particle flow in the disc-shaped polishing tool to rotate at a high speed to achieve a turbulent state, forming a gas-liquid-solid three-phase Abrasive flow High speed turbulent vortex12.

Described trachea 7 is the hard plastic tube that diameter is eight minutes. The air pipe 7 has good bending resistance, which ensures the stability of the high-speed airflow in the airflow injection channel and the consistency of the flow velocity and pressure of each multi-directional airflow injection channel.

The abrasive flow conveying hose 6 is a transparent rubber hose embedded with steel wires. The abrasive particle flow conveying hose 6 has very good bending resistance, which prevents complex changes such as turbulence when the high-speed fluid passes through the bend, thereby ensuring that the liquid-solid fluid injected into the inner cavity of the disc-shaped polishing tool Stability of two-phase abrasive flow.

The metric threaded joint at one end of the stainless steel rotary joint 211 is screwed and fixed on the disc-shaped polishing tool 29 , and the hose joint at the other end is sleeved in the abrasive particle flow delivery hose 6 and fastened by a steel wire hoop. The metric threaded joint at one end of the air pipe joint 212 is screwed and fixed on the disc-shaped polishing tool 29 , and the ferrule-type air pipe joint at the other end is connected with the air pipe 7 . The workpiece 9 is installed on the workpiece holder 214, and the workpiece holder 214 is installed on the workpiece holder installation base 215, wherein, the workpiece 9 and the disc-shaped polishing tool 29 are concentrically installed, and the distance between the two is not more than 1 millimeter, to form the described Large area macro gap.

The specific implementation steps of the device are as follows: Inject the liquid-solid two-phase abrasive particle flow into the inner cavity of the disc-shaped polishing tool 29 at a high speed, which drives and forms the gas-liquid-solid three-phase abrasive particle in the large-area micro-pitch gap of the effective polishing area 10 Flow high-speed turbulent vortex 12, when injecting liquid-solid two-phase abrasive particle flow in disc-shaped polishing tool 29 inner chambers, utilize multi-directional air flow injection method to the liquid-solid two-phase abrasive particle flow of disc-shaped polishing tool 29 inner chambers A high-speed airflow is injected into the grain flow, and the high-speed airflow is injected along the outer edge of the liquid-solid two-phase abrasive grain flow to increase the rotation speed of the high-speed turbulent vortex 12 of the gas-liquid-solid three-phase abrasive grain flow in the effective polishing area 10 . By visually observing the movement law of the gas-liquid-solid three-phase abrasive particle flow high-speed turbulent vortex 12, adjusting relevant control parameters to make the gas-liquid-solid three-phase abrasive particle flow high-speed turbulent vortex 12 reach the best working state for polishing. After polishing for a certain period of time, test and analyze the workpiece 9, compare and verify that the collapse of the micro-sized bubbles accelerates the cutting effect of the abrasive grains 11 on the workpiece 9, optimize the polishing process plan, and finally draw up a specific Polishing process scheme, the workpiece 9 is polished.

When working, the intelligent electrical control cabinet 1 first turns off the air pump 8, the servo-controlled abrasive flow delivery pumps 3, 5 and the agitator 4, and first adds a certain amount of polishing liquid and abrasive particles into the stainless steel water tank 216 to form a liquid-solid two-phase abrasive flow 6. After that, the stepper motor 27 in the polishing processing platform 2 is controlled by the intelligent electrical control cabinet 1, and then the disc-shaped polishing tool 29 mounted on the frame 21 is driven to move with high precision, so that the disc-shaped polishing tool 29 moves to The distance between the bottom surface 5 of the disc-shaped polishing tool and the upper surface of the workpiece 9 is not greater than 1 mm. At this time, the servo-controlled abrasive flow conveying pumps 3, 5 and agitator 4 are controlled by the intelligent electrical control cabinet 1, and finally the air pump 8 is controlled by the intelligent electrical control cabinet 1, and injected into the inner cavity 4 of the disc-shaped polishing tool High-speed airflow; adjust the working parameters of various equipment through the intelligent electrical control cabinet 1, visually observe the movement of the abrasive grain flow in the inner cavity 4 of the disc-shaped polishing tool from the resin glass window 13, and adjust to the best processing state for polishing Operation.

The construction process of the polishing device:

①Selection of servo-controlled abrasive flow delivery pump:

The selection of the servo-controlled abrasive flow delivery pump is the core issue in the construction of the polishing device. For the present invention, the servo-controlled abrasive particle flow delivery pump should meet two basic conditions: the technical parameters such as the maximum flow rate and the maximum outlet pressure of the delivery pump should be able to generate turbulence in the multi-directional liquid-solid two-phase abrasive flow injection channel 1.5 times the basic requirement; the transfer pump can transfer two-phase fluid containing solid abrasive particles.

The hydraulic diameter of the multi-directional liquid-solid two-phase abrasive flow injection channel is d=0.032m

For pipeline flow, the temporary Reynolds number Recr from laminar flow to turbulent flow should be between 2100 and 4000, that is, when the Reynolds number Re is less than 2000, it is a laminar flow state, and when the Reynolds number Re is greater than 4000, it is a turbulent flow state. Taking the upper limit of the floating interval of Recr as 4000, the pipeline fluid Reynolds number is directly proportional to flow velocity and hydraulic diameter, and inversely proportional to fluid viscosity. Knowing the kinematic viscosity of water at room temperature, the critical flow velocity and flow rate of the turbulent flow generated by the multi-directional liquid-solid two-phase abrasive flow injection channel can be obtained;

You can choose the pump model. The preliminary choice is the MS1 series mechanical diaphragm metering pump of the Italian SEKO brand. The flow rate is 5.5-530 liters/hour, the maximum pressure is 10 bar, and its maximum Reynolds number can fully meet the requirements of fully turbulent flow.

②Selection of abrasive and workpiece

According to the actual needs of the polishing processing device, the shape of the required abrasive should be relatively regular, preferably spherical particles with a diameter of nanometers.

According to the above requirements, the reference abrasive grains selected by this device are as follows:

Abrasive grain 1: silicon carbide (SiC) micropowder, its basic characteristic parameters are as follows: specific gravity 3.2, color: black or green, mesh number: 100,000-1,000.

Abrasive grain 2: aluminum oxide (Al2O3) powder, its basic characteristic parameters are as follows: specific gravity 3.95, color: white, mesh number: 100000-1000.

The workpieces selected by this device are: circular monocrystalline silicon wafers or circular K9 glass and other flat or large-area components with slow curvature changes.

③Design of polishing processing platform

In order to solve the problem of equipment rusting during processing, the frame of the polishing processing platform and the mounting base of the workpiece fixture adopt the plastic spraying process. The stainless steel water tank, lead screw, lead screw nut, linear guide rail, and connecting screws are all made of stainless steel. Components, disc-shaped polishing tools, and workholding fixtures are made of aluminum.

A pair of high-precision screw transmission systems installed symmetrically on the frame, the effective transmission stroke of the screw is 300 mm, and the effective transmission stroke of the high-precision linear guide rails arranged in parallel on both sides of the high-precision screw transmission system is also 300 mm , so the disc-shaped polishing tool mounted on the frame transmission member moves a stroke of 300 mm. The workpiece fixture is installed on the workpiece fixture installation base and placed in a stainless steel water tank. The workpiece fixture and the disc-shaped polishing tool are installed concentrically. Precise control is achieved.

The above-described embodiments are only preferred embodiments of the present invention, and are not limitations to the technical solutions of the present invention. As long as they are technical solutions that can be realized on the basis of the above-mentioned embodiments without creative work, they should be regarded as falling into the scope of the patent of the present invention. within the scope of protection of rights.

Claims (9)

1. a gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device, it is characterized in that: comprise intelligent electric switch board (1), air pump (8), polishing platform (2), two SERVO CONTROL abrasive Flow delivery pumps (3, 5), agitator (4), tracheae (7) and abrasive Flow delivery hose (6), described air pump (8) connects polishing platform (2) by tracheae (7), described polishing platform (2) is by abrasive Flow delivery hose (6) and two SERVO CONTROL abrasive Flow delivery pumps (3, 5) and agitator (4) connect into a liquid-solid two phase abrasive particle flow circulating system, whole burnishing device carries out process control by described intelligent electric switch board (1),

Described polishing platform (2) comprises frame (21), Precision Lead-Screw transmission system, frame driving member (28), disc polishing tool (29), stainless steel swivel joint (211), gas-tpe fitting (212), work piece holder, work piece holder mounting seat (215) and stainless steel trough (216), described stainless steel trough (216) is arranged in frame (21), work piece holder mounting seat (215) is fixed on stainless steel trough (216) bottom, work piece holder is fixed in work piece holder mounting seat (215), the frame (21) of described stainless steel trough (216) both sides is fixed with the Precision Lead-Screw transmission system of symmetrical distribution, two Precision Lead-Screws (25) transmission system connection frame driving member (28) also drive described frame driving member (28) to move up and down, disc polishing tool (29) is arranged on the frame driving member (28) directly over described work piece holder, described two Precision Lead-Screw (25) transmission systems drive described disc polishing tool (29) to move up and down in described stainless steel trough (216) by driving described frame driving member (28) to move up and down,

Described disc polishing tool (29) forms large-area microspur gap with the upper surface of workpiece to be machined (9), disc polishing tool (29) is provided with inner chamber, the end face of disc polishing tool (29) is provided with the abrasive particle injection channel for injecting polishing abrasive particle with inner space, and described abrasive particle injection channel is connected abrasive Flow delivery hose (6) by stainless steel swivel joint (211) and is communicated with two SERVO CONTROL abrasive Flow delivery pumps (3,5) by abrasive Flow delivery hose (6); The side of described disc polishing tool (29) is also provided with equally distributed at least two air-flow injection channels, described air-flow injection channel and described inner space for injecting high velocity air to described inner chamber, described air-flow injection channel connects tracheae (7) by gas-tpe fitting (212) and connects air pump (8) by tracheae (7).

2. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, is characterized in that: described abrasive particle injection channel optimum number is three, and air-flow injection channel optimum number is three.

3. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, it is characterized in that: described Precision Lead-Screw (25) transmission system comprises stepper motor (27), leading screw (25) and line slideway (23), leading screw (25) and line slideway (23) are vertically installed, one end of described leading screw (25) connects stepper motor (27) by shaft coupling (26), and stepper motor (27) is fixed in described frame (21); The other end of described leading screw (25) is fixed in described frame (21) by bearing block (22); The two ends of described line slideway (23) are directly fixed in described frame (21); Described frame driving member (28) connects leading screw (25) and line slideway (23) and moved up and down in described stainless steel trough (216) by the driving of described stepper motor (27).

4. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, it is characterized in that: described disc polishing tool (29) end face is also provided with plexiglas form, and described plexiglas form is the water white transparency circular glass be made up of resin material.

5. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, is characterized in that: the outer surface of described work piece holder mounting seat (215) adopts chromium plating treatment process to process.

6. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, it is characterized in that: described intelligent electric switch board (1) comprises PLC intelligent controller, relay, motor servo driver, various kinds of sensors and other appliance components, described intelligent electric switch board (1), by the duty of described various kinds of sensors accurate perception associated equipment, sends instruction in time and carries out high accuracy control to the equipment of associated.

7. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, is characterized in that: the capacity of air pump (8) is 32 liters, maximum pressure is 2 MPas.

8. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, is characterized in that: described tracheae (7) for diameter be the plastic conduit of eight points.

9. a kind of gas-liquid-solid three-phase abrasive Flow super-smooth surface fluid polishing device according to claim 1, is characterized in that: the transparent rubber flexible pipe that described abrasive Flow delivery hose (6) is embedded steel wire.