CN114473720A - Method and device for polishing lens array optical element - Google Patents
Method and device for polishing lens array optical element Download PDFInfo
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- CN114473720A CN114473720A CN202210100332.1A CN202210100332A CN114473720A CN 114473720 A CN114473720 A CN 114473720A CN 202210100332 A CN202210100332 A CN 202210100332A CN 114473720 A CN114473720 A CN 114473720A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 238000007517 polishing process Methods 0.000 claims abstract description 11
- 238000010008 shearing Methods 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 230000008719 thickening Effects 0.000 claims description 16
- 230000000694 effects Effects 0.000 claims description 15
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A structured polishing head in the polishing device is fixed on a polishing head rotating motor, and the shearing rate of polishing liquid is adjusted by changing the rotating speed. And the polishing head rotating motor is connected with the voice coil motor through the polishing head angle transformation platform, and the voice coil motor keeps the polishing force between the polishing head and the workpiece constant in the polishing process. And the polishing head angle transformation platform is connected with the three-axis linkage platform, so that a constant gap is kept between the structured polishing head and the workpiece. The polishing solution tank is arranged on the workpiece rotating platform, the curved lens array workpiece is arranged on the inner surface of the polishing solution tank, and continuous and uniform polishing of the workpiece is realized through rotation of the polishing solution tank. The invention can realize low-damage or even non-damage polishing of the lens array optical element and realize nano or even sub-nano roughness. In addition, two polishing methods of the lens array optical element are provided based on the high flexibility characteristic of non-contact polishing, and the processing controllability is improved.
Description
Technical Field
The invention belongs to the field of precision/ultra-precision machining, relates to a polishing method and a polishing device for a micro-array optical element, and particularly relates to a polishing method and a polishing device for a lens array optical element.
Background
The microlens array is an array composed of micro-scale lenses. Because it has the characteristics of small size and high integration level, it can implement the functions which can not be implemented by some traditional optical elements, and can form some novel optical systems. In addition, the optical fiber coupling device is widely applied to various photoelectric sensors, high-end illumination, beam shaping, beam homogenization, optical fiber coupling, laser coupling and the like. For a fine structure, the surface shape determines the function of the fine structure, the surface quality determines the performance of the fine structure, the surface quality is generally required to reach the nanometer level surface shape precision to reach the micron level, and for elements with special performance requirements, even the elements with sub-nanometer level roughness and sub-micron level surface shape precision are required to reach without surface damage. To meet the quality requirements, ultra-precision polishing is widely used for the processing of microarray optical elements. Conventional contact polishing is widely used for polishing aspheric surfaces, but polishing traces and abrasive particle embedding are introduced into the polished surfaces, so that non-contact polishing-shear thickening polishing is widely used in the processing of optical elements.
Chinese patent CN201910567560.8 discloses a profiling polishing method for through type microlens array workpieces, which uses a processed through type microlens array workpiece as a forming turning tool to cut a wool polishing rod, re-engraves the array shape on the workpiece to the wool rod, and polishes the array units of the workpiece, so that only through type workpieces with simple structure can be processed, the application range is small, the processing precision completely depends on the degree of adhesion between the polishing head and the curved surface, the processing repeatability is good, and the reliability is poor.
Chinese patent CN202010131772.4 discloses an ion beam polishing method for manufacturing micro-nano step array structure, which determines the ion beam polishing process removal function of the dielectric layer thin film through a single-point residence polishing test, but the method has extremely low ion beam processing efficiency and extremely high processing cost.
Chinese patent CN201210192915.8 discloses an ultra-precise curved surface polishing method based on non-newtonian fluid shear thickening effect, which utilizes non-newtonian fluid to directly wash a rotating workpiece to polish a curved surface, but because the curvatures of different positions of the curved surface workpiece are different, the removal uniformity of the surface cannot be guaranteed, so the method is still not suitable for elements containing a lens array or curved surfaces with high surface shape requirements.
At present, in the polishing method of the microarray optical element, on one hand, the implementation method is more traditional, polishing marks or abrasive particles can be embedded and damaged on the surface of the element, or the efficiency is low; on the other hand, the current method is directed to array element structures which are single, or array structures with parallel features, or low-precision curved surfaces without array structures. Therefore, it is desirable to provide a method and an apparatus for polishing a curved surface of a complex lens array with high efficiency and high precision.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a high-efficiency, high-precision and nondestructive polishing method and device for a micro-lens array optical element.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a polishing device for optical elements of a lens array comprises a workpiece rotating platform 1, a polishing liquid tank 2, a polishing head angle conversion platform 3, a voice coil motor 4, a polishing head rotating motor 5, a structured polishing head 6 and a curved lens array workpiece 8.
The structured polishing head 6 is fixed on the polishing head rotating motor 5 through a coupler, rotates under the driving of the polishing head rotating motor 5, and can change the shearing rate of the polishing solution by changing the rotating speed, so that different polishing effects are achieved.
The polishing head rotating motor 5 is connected with the voice coil motor 4 through the polishing head angle transformation platform 3, and the voice coil motor 4 can output constant force, so that the polishing force between the structured polishing head 6 and a workpiece can be kept constant in the polishing process. The voice coil motor 4 is connected with the polishing head angle conversion platform 3 through a bolt and is driven by the polishing head angle conversion platform 3 to rotate, so that the polishing head rotating motor 5 and the polishing head 6 are driven to incline at any angle.
The polishing head angle conversion platform 3 is connected with the three-axis linkage platform, and the polishing head angle conversion platform 3 can realize the adjustment of the polishing head 6 in the positions in the X direction, the Y direction and the Z direction under the driving of the three-axis linkage platform, so that the constant gap between the structured polishing head 6 and the workpiece 8 can be kept.
The polishing solution tank 2 is mounted on the workpiece rotating platform 1 through bolts, continuously rotates under the drive of the workpiece rotating platform 1, and can change the rotating speed. The curved lens array workpiece 8 is arranged on the inner surface of the polishing liquid tank 2 through bolts and pins, and continuous and uniform polishing of the workpiece 8 is realized through rotation of the polishing liquid tank 2.
A lens array optical element polishing method comprising the steps of:
the first step is as follows: the workpiece is tightly connected with the polishing solution tank 2 through bolts and pins, and the rotating motor of the polishing solution tank 2 is started to enable the workpiece 8 to rotate at a certain speed, wherein the speed range is controlled to be 50-1000 rpm.
The second step is that: and pouring the polishing solution with the shear thickening effect into the polishing solution tank 2 to ensure that the workpiece is completely immersed in the polishing solution, wherein the distance between the upper liquid level of the polishing solution and the top end of the workpiece is 10-30 mm.
The third step: and starting the polishing head rotating motor 5 to enable the structured polishing head 6 to rotate at a certain speed, wherein the rotating speed range is 5000 plus 8000rpm, and the angle between the polishing head 6 and the workpiece is 30-60 degrees by adjusting the polishing head angle conversion platform 3.
The fourth step: by controlling the tool track 9 of the structured polishing head 6, the high-efficiency, high-precision and nondestructive polishing of the curved lens array workpiece is realized. In the fourth step, the present invention provides 2 trajectory control modes for the structured polishing head 6:
(1) gap pattern, as in fig. 3: the whole device is based on a three-axis linkage platform, and before polishing, firstly, a tool setting mode is adopted to enable the gap between the structured polishing head 6 and the workpiece 8 to be 0.1-0.3 mm. Secondly, the movement locus of the structured polishing head 6 is designed, so that the sweeping area of the structured polishing head 6 is consistent with the contour of the workpiece 8, and the working gap 7 between the structured polishing head 6 and the workpiece 8 is always kept constant in the polishing process.
(2) Pressure mode, as in fig. 4: before the polishing process, first, the structured polishing head 6 is controlled to a position 3 to 5mm from the workpiece. Secondly, a voice coil motor 4 is controlled to output a constant loading pressure 10, the loading pressure range is 0.1-1N, the structured polishing head 6 is slowly close to the workpiece under the action of the loading pressure 10, the structured polishing head 6 drives polishing liquid to generate a shear thickening effect and generate dynamic pressure in the movement process of the polishing head 6, when the dynamic pressure and the loading pressure 10 are balanced, the polishing head is suspended at a position where a gap is fixed relative to the workpiece, and in the polishing process, the structured polishing head 6 continuously floats under the action of the loading pressure 10 due to the fact that the surface profile of the workpiece continuously changes, so that the pressure between the structured polishing head 6 and the workpiece 8 is kept constant, and at the moment, the working gap 7 is kept in a certain range along with the pressure.
Further, the polishing head 6 for shear thickening as shown in fig. 5 may be designed to be spherical, cylindrical, pumpkin-shaped, etc., and different shapes may be adapted to different types of lens array optical elements, and the spherical and pumpkin-shaped polishing heads may be adapted to polish and shape the curved lens array optical elements. The cylindrical polishing head is suitable for polishing the planar lens array optical element, the contact area of the cylindrical polishing head and a workpiece is relatively large, and the polishing efficiency is high.
Furthermore, as shown in fig. 5, the structured polishing head 6 can be grooved in a grid shape, a pit shape, an arc shape, and a crescent shape, so as to increase the driving capability of the polishing liquid in the contact area, enhance the holding force on the abrasive particles and increase the dynamic pressure of the polishing liquid, thereby increasing the contact pressure of the abrasive particles on the workpiece, and realize the high-efficiency and high-precision polishing of the lens array optical element.
Further, the polishing solution for shear thickening can generate shear thickening effect under the composite action of multiple physical fields such as ultrasound, vibration, magnetic field and the like or under the action of a single physical field, and the abrasive particles can be magnetic abrasive particles or non-magnetic abrasive particles according to processing conditions and the action of the selected physical field. The non-magnetic abrasive particles can be one or a combination of more of aluminum oxide, silicon carbide, diamond, cerium oxide and zirconium oxide, and have the particle size of 0.5-10 mu m and the proportion of 15-25 wt%.
The specific process of the invention is as follows: the structured polishing head 6 drives the polishing solution with the shear thickening effect to rotate, and the shear thickening effect of the polishing solution between the polishing head 6 and the workpiece 8 is guaranteed. As shown in fig. 2, the polishing head 6 drives the polishing liquid with shear thickening effect to rotate, and when the relative movement speed of the polishing liquid and the workpiece reaches a critical point, the contact part of the polishing liquid and the workpiece is subjected to shear thickening (the area in contact with the workpiece shows increased viscosity). The viscosity of the polishing solution in the contact area is increased sharply, so that the polishing solution presents solid characteristics instantly, a flexible fixed grinding tool is formed at a processing position, and micro-convex peaks on the surface of a workpiece are removed through the micro-cutting effect of abrasive particles. In addition, the shear thickening polishing solution has fluidity, so that the formed 'flexible fixed abrasive tool' has good goodness of fit with various workpiece surface shapes. On the other hand, the structured polishing head 6 can form a dynamic pressure effect area on the surface of the workpiece, so that the contact pressure of abrasive particles to the workpiece is increased, rough peaks on the surface of the workpiece can be effectively removed, the polishing efficiency is improved, and the efficient removal of materials is realized.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention provides a method for polishing the lens array optical element by adopting a non-contact method, which can realize low-damage and even non-damage polishing of the lens array optical element and can realize nano and even sub-nano roughness.
(2) Based on the high flexibility characteristic of non-contact polishing, the invention provides 2 polishing methods and devices of the lens array optical element, namely a gap mode and a pressure mode. The gap mode can realize the polishing of the surface of the lens array workpiece by controlling the working gap 7; the pressure mode achieves polishing of the lens array surface by adjusting the output pressure. The dynamic polishing pressure and the shearing force can be controlled by adjusting the output force of the voice coil motor and the distance between the polishing head and the workpiece, so that the processing controllability is improved.
Drawings
FIG. 1 is a diagram of a lens array optical element polishing apparatus;
FIG. 2 is a schematic view of a polishing process;
FIG. 3 is a schematic view of a gap pattern;
FIG. 4 is a schematic view of a pressure mode;
FIG. 5 is a schematic view of a polishing head type;
in the figure: 1, a workpiece rotating platform; 2, a polishing solution tank; 3, polishing head angle changing platform; 4, a voice coil motor; 5, polishing head rotating motor; 6 structured polishing head; 7, a working clearance; 8, a curved lens array workpiece; 9 tool trajectory; 10 is loaded with pressure.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows: a method and apparatus for gap-mode polishing of lens array optical elements.
Referring to the accompanying drawings, which are shown in fig. 1, fig. 2, fig. 3 and fig. 5, the present embodiment is a lens array optical element 8 gap mode polishing method and apparatus, the apparatus is based on a three-axis linkage platform, and is composed of a workpiece rotating platform 1, a polishing liquid tank 2, a polishing head angle changing platform 3, a polishing head rotating motor 5, a cylindrical polishing head 6 and a curved lens array workpiece 8.
The spherical cylindrical head polishing head 6 is fixed on the polishing head rotating motor 5 through a coupler, the diameter of the cylindrical polishing head 6 is 25mm, and the size characteristic of the surface pit structure is that the period of 3mm is 6 mm. The length and width of the planar lens array workpiece 8 are 47.8mm, the lens arrays are staggered at equal intervals, the period is 4mm, the aperture of the micro lens is 1mm, and the depth is 1.5-3 mu m.
The polishing head rotating motor 5 is connected with the polishing head angle conversion platform 3, and the polishing head rotating motor 5 rotates under the driving of the polishing head angle conversion platform 3 to enable the structured polishing head 6 to incline to 30 degrees.
The polishing head angle conversion platform 3 is driven by the three-axis linkage platform to realize the adjustment of the polishing head 6 in the X, Y and Z directions. And a fixed gap of 0.1mm is kept between the cylindrical polishing head 6 and the workpiece.
The polishing solution tank 2 is connected with the workpiece rotating platform 1 through a bolt and continuously rotates under the drive of the workpiece rotating platform 1. The planar lens array optical element is connected with the polishing solution tank 2 through a workpiece fixing hole. The structured polishing head 6 is matched with the rotation of the polishing liquid tank 2 to realize continuous and uniform polishing of the workpiece.
The polishing method of the planar lens array optical element comprises the following steps:
the first step is as follows: the plane lens array optical element is tightly connected with the polishing solution tank 2 through the workpiece fixing hole, and the polishing solution rotating motor is started to enable the plane lens array optical element to rotate at the speed of 200 rpm.
The second step: and (3) putting the polishing solution with the shear thickening effect into the polishing solution tank 2 to ensure that the workpiece is completely immersed in the polishing solution.
The third step: by adjusting the three-axis platform, the polishing head 6 reaches a specified position, the included angle between the lowest point of the polishing head 6 and the surface of the planar microarray optical element is 45 degrees, and the working gap 7 is 0.1 mm. And starting a polishing head 6 rotating motor to enable the rotating speed of the polishing head 6 to reach 5000 rpm.
The fourth step: and setting the motion parameters of the three-axis linkage platform, and adjusting the three-axis platform to enable the polishing head 6 to reach the position of the edge of the workpiece, wherein the working gap 7 between the lowest point of the polishing head 6 and the surface of the planar lens array optical element is 0.1 mm. By controlling the tool track 9 of the polishing head 6, the working gap 7 between the cylindrical polishing head 6 and the workpiece 8 is ensured to be constant all the time, and the planar lens array optical element is polished with high efficiency, high precision and no damage.
The second embodiment: a pressure mode polishing method and apparatus for a lens array optical element.
As shown in the attached drawings 1, 2, 4 and 5, the pressure mode polishing method and device applied to the lens array optical element in the embodiment are realized by a workpiece rotating platform 1, a polishing liquid groove 2, a polishing head angle changing platform 3, a voice coil motor 4, a polishing head rotating motor 5 and a pumpkin-shaped polishing head 6.
The spherical pumpkin-shaped head polishing head 6 is fixed on the polishing head rotating motor 5 through a coupler, and the change of the shearing rate of the polishing solution is realized by changing the rotating speed, so that different polishing effects are achieved.
The diameter of the pumpkin-shaped polishing head 6 is 25mm, and the size characteristic of the surface pit structure is that the period of 3mm is 6 mm. The aperture of the curved surface lens array workpiece 8 is 47.8mm, the lens arrays are staggered at equal intervals, the period is 4mm, the aperture of the micro lens is 1mm, and the depth is 1.5-3 mu m.
The polishing head rotating motor 5 is connected with the voice coil motor 4, the voice coil motor 4 can output a constant force, and the polishing force between the polishing head 6 and a workpiece can be always constant at 0.5N in the polishing process.
And the voice coil motor 4 is connected with the polishing head angle conversion platform 3 and is driven by the polishing head angle conversion platform 3 to rotate.
The polishing solution tank 2 is connected with the workpiece rotating platform 1 through a bolt and continuously rotates under the drive of the workpiece rotating platform 1. The lens array optical element is connected with the polishing solution tank 2 through a workpiece bolt. Continuous and uniform polishing of the workpiece is realized through the rotation of the polishing liquid tank 2.
The lens array optical element polishing method comprises the following steps:
the first step is as follows: the lens array optical element is tightly fixed with the polishing solution tank 2 through a bolt, and the polishing solution rotating motor is started to rotate the lens array optical element at the speed of 200 rpm.
The second step is that: the structured polishing head 6 was adjusted to a position 3mm above the extreme edge of the workpiece.
The third step: and starting a polishing head 6 rotating motor to enable the rotating speed of the polishing head 6 to reach 5000 rpm.
The fourth step: and (3) putting the polishing solution with the shear thickening effect into the polishing solution tank 2, and ensuring that the liquid level of the polishing solution is 10mm at the topmost end of the workpiece.
The fifth step: setting voice coil motor parameters, controlling the motion track of the polishing head 6 through the motion of the voice coil motor, enabling the included angle between the optical elements of the lens array of the polishing head 6 to be 45 degrees, keeping the loading pressure 10 constant at 0.5N, and realizing high-efficiency, high-precision and nondestructive polishing of the optical elements of the lens array.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration of the principles of the present invention, but that various changes and modifications may be made without departing from the spirit and scope of the invention, and such changes and modifications are within the scope of the invention as claimed.
Claims (5)
1. The polishing device for the lens array optical element is characterized by comprising a workpiece rotating platform (1), a polishing liquid groove (2), a polishing head angle conversion platform (3), a voice coil motor (4), a polishing head rotating motor (5), a structured polishing head (6) and a curved lens array workpiece (8);
the structured polishing head (6) is fixed on a polishing head rotating motor (5) through a coupler, rotates under the driving of the polishing head rotating motor (5), and adjusts the shearing rate of the polishing solution by changing the rotating speed;
the polishing head rotating motor (5) is connected with the voice coil motor (4) through the polishing head angle conversion platform (3), and the voice coil motor (4) outputs constant force, so that the polishing force between the structured polishing head (6) and a workpiece can be kept constant in the polishing process; the voice coil motor (4) is connected with the polishing head angle conversion platform (3) and driven by the polishing head angle conversion platform (3) to rotate so as to drive the polishing head rotating motor (5) and the polishing head (6) to incline at any angle;
the polishing head angle conversion platform (3) is connected with the three-axis linkage platform, and the polishing head angle conversion platform (3) can realize the adjustment of the polishing head (6) in the positions in the three directions of X, Y and Z under the driving of the three-axis linkage platform, so that the structural polishing head (6) and the workpiece (8) keep a constant gap;
the polishing liquid tank (2) is arranged on the workpiece rotating platform (1), continuously rotates under the driving of the workpiece rotating platform (1), and can change the rotating speed; the curved lens array workpiece (8) is arranged on the inner surface of the polishing liquid tank (2), and the continuous and uniform polishing of the workpiece (8) is realized through the rotation of the polishing liquid tank (2).
2. A lens array optical element polishing apparatus according to claim 1, wherein the structured polishing head (6) is designed as a spherical, cylindrical, pumpkin-shaped head, with different shapes to accommodate different types of lens array optical elements: the spherical and pumpkin-shaped polishing head is suitable for polishing and modifying the curved lens array optical element; the cylindrical polishing head is suitable for polishing the planar lens array optical element.
3. A lens array optical element polishing apparatus as claimed in claim 1, wherein the structured polishing head (6) surface can be grooved in a grid, a dimple, an arc or a crescent.
4. A lens array optical element polishing method implemented based on the polishing apparatus according to any one of claims 1 to 3, characterized by comprising the steps of:
the first step is as follows: tightly connecting the workpiece with the polishing solution tank (2), starting a rotating motor of the polishing solution tank (2), and enabling the workpiece (8) to rotate at the speed of 50-1000 rpm;
the second step is that: pouring the polishing solution with the shear thickening effect into the polishing solution tank (2) to ensure that the workpiece is completely immersed in the polishing solution;
the third step: starting a polishing head rotating motor (5) to enable the structured polishing head (6) to rotate at a certain speed, wherein the rotating speed range is 5000-;
the fourth step: the high-efficiency, high-precision and nondestructive polishing of the curved lens array workpiece is realized by controlling the tool track (9) of the structured polishing head (6); the structured polishing head (6) has two track control modes:
1) gap mode: the whole device is supported by a three-axis linkage platform, and before polishing, firstly, a tool setting mode is adopted to ensure that the gap between a structured polishing head (6) and a workpiece (8) is between 0.1 and 0.3 mm; secondly, designing a motion track of the structured polishing head (6), so that the sweeping area of the structured polishing head (6) is consistent with the contour of the workpiece (8), and ensuring that a working gap 7 between the structured polishing head (6) and the workpiece (8) is always constant in the polishing process;
2) pressure mode: before polishing, firstly, controlling a structured polishing head (6) at a position 3-5mm away from a workpiece; secondly, a voice coil motor (4) is controlled to output constant loading pressure (10), the loading pressure range is 0.1-1N, the structured polishing head (6) is slowly close to the workpiece under the action of the loading pressure (10), the structured polishing head (6) drives polishing liquid to generate a shear thickening effect and generate dynamic pressure in the movement process of the polishing head (6), when the dynamic pressure and the loading pressure (10) are balanced, the polishing head is suspended at a position corresponding to the workpiece, and in the polishing process, due to the fact that the surface contour of the workpiece changes constantly, the structured polishing head (6) floats constantly under the action of the loading pressure (10), so that the pressure between the structured polishing head (6) and the workpiece (8) is kept constant, and at the moment, the working gap (7) is kept in a certain range along with the pressure.
5. A lens array optical element polishing method as set forth in claim 4, wherein in the second step, the upper liquid surface of the polishing liquid is between 10 and 30mm from the top end of the workpiece.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114986363A (en) * | 2022-08-05 | 2022-09-02 | 徐州汉裕铝业股份有限公司 | Aluminum product bulb burnishing device |
| CN115401530A (en) * | 2022-08-30 | 2022-11-29 | 大连理工大学 | Shape-controlled flexible polishing method for microarray mold |
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| CN115401530B (en) * | 2022-08-30 | 2023-08-01 | 大连理工大学 | Shape-controlled flexible polishing method for microarray die |
| WO2024045493A1 (en) * | 2022-08-30 | 2024-03-07 | 大连理工大学 | Shape-controlled flexible polishing method for microarray mold |
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