CN108550656B - Electric injection equilibrium annealing device - Google Patents
Electric injection equilibrium annealing device Download PDFInfo
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- CN108550656B CN108550656B CN201810474721.4A CN201810474721A CN108550656B CN 108550656 B CN108550656 B CN 108550656B CN 201810474721 A CN201810474721 A CN 201810474721A CN 108550656 B CN108550656 B CN 108550656B
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- 238000002347 injection Methods 0.000 title claims abstract description 79
- 239000007924 injection Substances 0.000 title claims abstract description 79
- 238000000137 annealing Methods 0.000 title claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims abstract description 113
- 238000000034 method Methods 0.000 claims abstract description 57
- 230000008569 process Effects 0.000 claims abstract description 57
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 238000007599 discharging Methods 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims description 63
- 238000009413 insulation Methods 0.000 claims description 9
- 238000002791 soaking Methods 0.000 claims description 6
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 238000005422 blasting Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 206010010904 Convulsion Diseases 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000036461 convulsion Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to an electric injection balanced annealing device which is used for annealing battery pieces and comprises a frame main body, wherein a roller conveying system is arranged at the bottom of the frame main body, a carrier for carrying the battery pieces sequentially passes through a feeding station, a reverse current injection station, a cooling station and a discharging station through the roller conveying system to carry out annealing treatment, the reverse current injection station is used for carrying out electric injection on the battery pieces in the carrier, the reverse current injection station comprises a plurality of process chambers, and each process chamber is internally provided with a group of auxiliary heating systems for carrying out auxiliary heating on the battery pieces carried on the carrier so as to maintain the upper temperature and the lower temperature balance of the battery pieces. The invention can realize annealing of the battery piece under the condition of electric injection, can ensure that the upper, lower and middle battery pieces can keep the temperature consistent, has high treatment efficiency, and can effectively improve the conversion efficiency of the battery piece.
Description
Technical Field
The invention relates to the technical field of battery piece processing, in particular to a device for annealing a battery piece, and especially relates to a device capable of realizing balanced annealing of a battery piece by electric injection.
Background
The silicon wafer (battery piece) contains oxygen, the oxygen has the effect of absorbing impurities, the silicon wafer is annealed, the oxygen remained in the silicon can be promoted to diffuse outwards, and a low-oxygen environment (clean area) is formed on the surface of the silicon wafer, so that the crystal defect caused by the oxygen can be reduced or even eliminated, the later device manufacturing is facilitated, and the resistivity and minority carrier lifetime of the silicon wafer can be influenced by the annealing of the silicon wafer. In addition, light Induced Degradation (LID) refers to a phenomenon of power degradation caused by solar cells and components during illumination. In order to improve the efficiency of the battery, a PERC (passivated emitter and back local contact battery) high-efficiency battery is developed at present, but practice shows that if the finished battery is not processed, the LID phenomenon of the high-efficiency battery can reduce the efficiency gain of the battery and reduce the conversion efficiency of a battery piece.
For the defects, annealing treatment is adopted at present, but if the annealing treatment is kept in an electrified state in the annealing process of the silicon wafer, the annealing effect of the silicon wafer is better, and the silicon wafer has more excellent performance, but no corresponding device is manufactured by the silicon wafer annealing equipment at present, and the whole temperature consistency is difficult to ensure when the battery piece is annealed, so that the silicon wafer annealing equipment which works reliably is urgently needed to solve the problem.
Disclosure of Invention
The invention aims to provide an electric injection balanced annealing device which can be used for realizing annealing of battery pieces under the electric injection condition, ensuring that the battery pieces at the upper part, the lower part and the middle part can keep the same temperature, and effectively improving the conversion efficiency of the battery pieces.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the invention provides an electric injection balanced annealing device which is used for annealing battery pieces and comprises a frame main body, wherein a roller conveying system is arranged at the bottom of the frame main body, a feeding station, a reverse current injection station, a cooling station and a discharging station are sequentially arranged in the frame main body along the advancing direction of the roller conveying system, a carrier for carrying the battery pieces sequentially passes through the feeding station, the reverse current injection station, the cooling station and the discharging station through the roller conveying system for annealing treatment, the reverse current injection station is used for carrying out electric injection on the battery pieces in the carrier, the reverse current injection station comprises a plurality of process chambers, and a group of auxiliary heating systems are arranged in each process chamber and are used for carrying out auxiliary heating on the battery pieces carried on the carrier so as to maintain the upper temperature and the lower temperature balance of the battery pieces.
For the above technical solutions, the inventors have further optimization measures.
Preferably, each group of auxiliary heating system comprises an upper auxiliary heating device and a lower auxiliary heating device, the upper auxiliary heating device comprises a first metal heating plate fixedly connected below the electrode frame, a first thermocouple for sensing the temperature of an upper battery piece is arranged in the first metal heating plate, the lower auxiliary heating device comprises a second metal heating plate fixed on the frame main body, a second thermocouple is arranged in the second metal heating plate, and the shells of the first metal heating plate and the second metal heating plate are simultaneously used for leading in a direct current power supply to perform electric injection on the battery piece clamped between the first metal heating plate and the second metal heating plate.
Further, a current injection system is configured in the reverse current injection station corresponding to each process chamber, the current injection system comprises a first electrode cylinder, a first electrode frame, a second electrode cylinder and a second electrode frame, the first electrode cylinder is vertically fixed on the frame main body and located above each process chamber, the first electrode frame is fixed at the bottom of the first electrode cylinder, the upper auxiliary heating device is fixed below the electrode frame, the second electrode cylinder is vertically fixed on the frame main body and located below each process chamber, the second electrode frame is fixed on the upper portion of the second electrode cylinder, and the lower auxiliary heating device is fixed above the second electrode frame.
Further, an infrared sensor for detecting the temperature of the battery cell located in the middle is provided at the side plate of the frame body corresponding to the middle of the battery cells stacked on the carrier.
Further, the first thermocouple measures the temperature of the first metal heating plate, compared with a set value, the temperature is lower than the set value, the first metal heating plate is opened, otherwise, the first metal heating plate is closed, and therefore the first metal heating plate is kept constant; the second thermocouple measures the temperature of the second metal heating plate, compared with the set value, if the temperature is lower than the set value, the second metal heating plate is opened, otherwise, the second metal heating plate is closed, so that the second metal heating plate is kept constant; the infrared sensor measures the temperature of the battery piece, and compared with a set value, when the temperature is lower than the set value, the air channel is closed, and when the temperature is higher than the set value, the air channel is opened, so that a constant temperature field with uniform temperature is always kept inside.
Still further, the auxiliary heating system further comprises a soaking air channel device, wherein the soaking air channel device comprises an upper air channel, a middle air channel and a lower air channel which are fixed in the middle of a side plate of the frame body, and the upper air channel, the middle air channel or the lower air channel is opened or closed and used for carrying out heat uniform distribution on the air flow of the battery piece air blast improvement gas stacked on the carrier.
Preferably, the plurality of process chambers include at least one high-temperature process chamber and at least one low-temperature process chamber, and the carrier drives the battery piece to anneal in the high-temperature process chamber before entering the low-temperature process chamber for annealing.
Preferably, the top of frame main part is provided with the updraft ventilator who is used for controlling the temperature to each station, is equipped with the middling pressure fan in reverse current injection station, the middling pressure fan sets up the top of reverse current injection station is used for controlling when the convulsions is not enough the temperature of reverse current injection station be equipped with the heat preservation wallboard on the four walls of reverse current injection station, and all be provided with the insulated door between every station, be equipped with the lift cylinder in the side department of insulated door, the lift cylinder pass through the connecting plate with the insulated door links to each other.
Preferably, the carrier comprises a bottom support made of mica, a plurality of baffle plates which are vertically arranged are fixed on the bottom support, a bearing cavity for placing the battery plates is defined on the bottom support, an opening is formed in the bottom of the bottom support, the second metal heating plate is used for contacting the stacked lowest-layer battery plates, and at least one group of locking plates are symmetrically arranged on the bottom support of the carrier and used for locking and limiting the positions of the battery plates on the bottom support.
Further, the roller conveying system comprises a plurality of continuous rollers which are arranged in parallel, the rollers are connected with a motor driving chain through roller shafts arranged at the end parts of the rollers, the rollers are directly driven by the motor driving chain, and C-shaped clamping rings, bearings, fixing rings and bearing seat flanges are sequentially arranged on the roller shafts.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
according to the electric injection annealing device, the reverse current injection station is used for carrying out electric injection on the battery piece in the carrier, so that the direct current injection on the battery piece is realized while the battery piece is annealed, the battery piece is heated under the electric injection condition, the self resistance of the silicon wafer is utilized to generate heat when the silicon wafer is electrified, the conversion efficiency of the battery piece can be improved by annealing under the condition, the photoinduced attenuation of the high-efficiency battery is reduced, and the efficiency gain of the battery is ensured.
Further, a high-temperature and low-temperature process cavity is configured in the reverse current injection station, and an auxiliary heating system is configured in the process cavity, so that temperature compensation can be performed on the battery pieces in each process cavity, annealing of the battery pieces at different temperatures is realized, the temperatures of the upper part, the lower part and the middle part of the battery pieces in each process cavity are controlled through thermocouples, the overall temperature of the stacked battery pieces is regulated, a more efficient annealing effect on the battery pieces is realized, and the conversion efficiency of the battery pieces is improved.
Furthermore, the adopted carrier can effectively stack and bear a large number of battery pieces, meanwhile, the arrangement of the battery pieces with different specifications on the carrier is convenient, in addition, the structure of the carrier is more suitable for the annealing characteristics of the battery pieces in the invention, the first metal heating plate and the second metal heating plate can be in direct contact with the surfaces of the battery pieces, the battery pieces can be electrified or thermally conductive, the battery pieces are annealed and heated by adopting electric heating, the metal heating plates in the upper auxiliary heating device and the lower auxiliary heating device are auxiliary heating when the self resistance of the silicon wafer is electrified, and the auxiliary heating can be started or closed according to actual production requirements to maintain the uniformity of the temperature of the battery pieces so as to better improve the annealing effect.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:
FIG. 1 is a schematic view showing the overall structure of an electric injection equilibrium annealing apparatus according to an embodiment of the present invention;
FIG. 2 is a side view of a reverse current injection station of the electrical injection equalization annealing device of FIG. 1;
fig. 3 is a schematic view of a structure of a carrier used in the electric injection annealing apparatus shown in fig. 1.
Wherein reference numerals are as follows:
1. a frame body 11, a horizontal frame;
2. the device comprises a roller conveying system 21, rollers 22, a motor driving chain 23, a groove body provided with roller shafts 24 and a carrier return conveying device;
3. a feeding station;
4. a reverse current injection station 41, a high-temperature process chamber 42, a low-temperature process chamber 43, a first electrode cylinder 44, a first electrode frame 45, a second electrode cylinder 46, a second electrode frame 47, a heat insulation door 48 and a lifting cylinder;
5. a cooling station, 51, a fan;
6. a blanking station;
7. carrier, 71, collet, 72, baffle, 73, lock plate;
8. a battery sheet;
91. an upper auxiliary heating device 911, a first metal heating plate 92, a lower auxiliary heating device 921, a second metal heating plate 93, an infrared sensor 941, an upper air channel 942, a middle air channel 943 and a lower air channel;
10. an air draft device; 11. and a gas flow rate display device.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The electric injection equalizing annealing device described in this embodiment is used for annealing treatment of a battery piece 8, as shown in fig. 1, and comprises a frame body 1, wherein a roller conveying system 2 is arranged at the bottom of the frame body 1, a feeding station 3, a reverse current injection station 4, a cooling station 5 and a discharging station 6 are sequentially arranged in the frame body 1 along the travelling direction of the roller conveying system, and a carrier 7 for carrying the battery piece 8 sequentially passes through the feeding station 3, the reverse current injection station 4, the cooling station 5 and the discharging station 6 through the roller conveying system for annealing treatment, wherein the annealing process is completed in the reverse current injection station 4, and the annealing is performed at the same time of electric injection. Fans for assisting rapid cooling are arranged in the cooling station 5 and the blanking station 6, so that cooling efficiency is improved.
Specifically, the reverse current injection station 4 is configured to electrically inject the battery piece 8 in the carrier 7, and at least two process chambers are disposed in the reverse current injection station 4. The electric injection annealing device in this embodiment includes a feeding station 3, three cooling stations 5 and a discharging station 6 with equal single-station length, eight process chambers are disposed in the reverse current injection station 4, and the length (according to the conveying direction) of each process chamber is equal to the length of the one feeding station 3 (or one cooling station 5 and one discharging station 6).
Taking each process time as a production beat, and moving the carrier 7 in the annealing device forward by one station as a whole when completing one production beat, and according to the first-come first-out principle, the carrier 7 which is placed earliest completes all processes earliest and moves to a blanking area to wait for taking materials. At the reverse current injection station 4, after the carrier 7 is moved to the process cavity, the carrier is limited by a position sensor, rolls off to stop rotating, direct current is introduced through a metal heating plate in the upper auxiliary heat device and the lower auxiliary heat device, then the battery piece 8 is subjected to electric injection heating, and the battery piece 8 can be uniformly heated by combining an external upper auxiliary heat device 91 and an external lower auxiliary heat device 92, so that the annealing quality is good. In addition, it should be noted that the direct current power supply can be directly installed and fixed in the frame body 1, so as to facilitate the introduction of direct current.
In the annealing device of this embodiment, the reverse current injection station 4 is configured to perform electrical injection on the battery piece 8 in the carrier 7, so that the electrical injection on the battery piece 8 is achieved while the battery piece 8 is annealed, so that the conversion efficiency of the battery piece 8 can be improved by annealing under the electrical injection condition, and the photoinduced attenuation of the high-efficiency battery is reduced, thereby ensuring the efficiency gain of the battery.
Each process chamber is provided with a group of auxiliary heating systems, and each group of auxiliary heating systems comprises an upper auxiliary heating device 91 and a lower auxiliary heating device 92, and the auxiliary heating systems are used for carrying out auxiliary heating on the battery pieces 8 carried on the carrier 7 so as to maintain the upper and lower temperature balance of the battery pieces 8. For a plurality of battery pieces 8 that stack together, through detecting its upper and lower temperature and comparing the difference between them with the threshold value that sets for, can guarantee that the temperature of each battery piece 8 all keeps at a invariable state, whole temperature is more balanced, can guarantee the annealing uniformity of each battery piece 8, and product performance is more superior.
In the reverse current injection station 4, one current injection system is respectively configured corresponding to each process chamber, each current injection system comprises a first electrode cylinder 43, a first electrode frame 44, a second electrode cylinder 45 and a second electrode frame 46, the first electrode cylinder 43 is vertically fixed on the frame body 1 and is positioned above each process chamber, the first electrode frame 44 is fixed at the bottom of the first electrode cylinder 43, the upper auxiliary heating device 91 is fixed below the electrode frame, the second electrode cylinder 45 is vertically fixed on the frame body 1 and is positioned below each process chamber, the second electrode frame 46 is fixed at the upper part of the second electrode cylinder 45, and the lower auxiliary heating device 92 is fixed above the second electrode frame 46. After the carrier 7 drives the battery piece 8 to enter the process cavity, the first electrode cylinder 43 is pressed down to drive the upper auxiliary heat device 91 to move down, the second electrode cylinder 45 is moved up to drive the lower auxiliary heat device 92 to move up, so that after the upper auxiliary heat device 91 and the lower auxiliary heat device 92 press the battery piece 8 from top to bottom simultaneously, direct current is injected into the silicon wafer through the outer shell of the upper auxiliary heat device 91, and the upper auxiliary heat device 91, the battery piece 8 and the lower auxiliary heat device 92 form a current injection loop.
Specifically, as shown in fig. 2, the upper auxiliary heating device 91 includes a first metal heating plate 911 fixedly connected to the lower side of the electrode frame, a first thermocouple (not shown in the drawing) for sensing the temperature of the first metal heating plate 911 is configured in the first metal heating plate 911, the thermocouple is configured in a conventional manner, and is not described in detail herein), the lower auxiliary heating device 92 includes a second metal heating plate 921 fixed on the frame body 1, and a second thermocouple (not shown in the drawing) for sensing the temperature of the second metal heating plate 921 is configured in the second metal heating plate 921, wherein the outer shells of the first metal heating plate 911 and the second metal heating plate 921 are simultaneously used for introducing a direct current power supply to perform electric injection to the battery piece 8 clamped between the first metal heating plate 911 and the second metal heating plate 921. An infrared sensor 93 is provided at a middle portion of the side plate of the frame body 1 corresponding to the battery cells 8 stacked on the carrier 7, the infrared sensor 93 being for detecting a temperature of the battery cells 8.
The first thermocouple measures the temperature of the first metal heating plate 911, and when the temperature is lower than the set value, the first metal heating plate 911 is turned on, and when the temperature is lower than the set value, the first metal heating plate 911 is turned off, thereby keeping the upper portion 911 heater constant. The second thermocouple measures the temperature 921 of the second metal heating plate, and when the temperature is lower than the set value, the second metal heating plate 921 is opened, whereas when the temperature is lower than the set value, the second metal heating plate 921 is closed, thereby keeping the second metal heating plate 921 constant temperature. The infrared sensor 93 measures the temperature of the battery piece 8, and compared with a set value, when the temperature is lower than the set value, the air passage is closed, and when the temperature is higher than the set value, the air passage is opened, so that a constant temperature field with uniform temperature is always kept inside.
It will be appreciated that the temperature detection and heat compensation can be performed on the whole stacked battery pieces 8, so that the upper temperature and the lower temperature are consistent, and meanwhile, the outer shell of the metal heating plate can be used as a conductive mechanism for the introduction of an external power supply, so that the whole structure is more compact, and meanwhile, the reliable introduction and the uniform trend of current can be ensured by the surface contact between the outer shell of the metal heating plate and the battery pieces 8.
It can be seen that in this embodiment, the high-temperature and low-temperature process chambers are configured in the reverse current injection station 4, and the auxiliary heating system is configured in the process chambers, so that temperature compensation can be performed on the battery pieces 8 in each process chamber, annealing at different temperatures of the battery pieces 8 can be achieved, the temperatures of the upper portion, the lower portion and the middle portion of the battery pieces 8 in each process chamber are controlled through the thermocouple, and the overall temperature of the stacked battery pieces 8 is adjusted, so that a more efficient annealing effect on the battery pieces 8 can be achieved, and the conversion efficiency of the battery pieces 8 is improved.
As for the radiation heating system in the reverse current injection station 4 in this embodiment, not only heat compensation but also heat equalization in each process chamber can be performed, and certainly, all the battery pieces 8 can be kept at the same temperature. The auxiliary heating system according to this embodiment further includes a soaking air channel device, where the soaking air channel device includes an upper air channel 941, a middle air channel 942 and a lower air channel 943 fixed in the middle of a side plate of the frame body 1, and the upper air channel 941, the middle air channel 942 or the lower air channel 943 are opened or closed, so as to uniformly distribute heat by blowing the air for improving the air flow of the stacked battery slices 8 on the carrier 7.
Preferably, the plurality of process chambers includes at least one high temperature process chamber 41 and at least one low temperature process chamber 42, and in this embodiment, includes 1 high temperature process chamber 41 disposed at the front and 7 low temperature process chambers 42 disposed at the rear. The carrier 7 drives the battery piece 8 to anneal in the high-temperature process chamber 41 and then enter the low-temperature process chamber 42 for annealing.
In addition, be provided with the updraft ventilator 10 that is used for controlling the temperature to each station air extraction at the top of frame main part 1, be equipped with the middling pressure fan in reverse current injection station 4, the middling pressure fan sets up the top of reverse current injection station 4 is used for controlling when the convulsions is not enough the temperature of reverse current injection station 4 be equipped with the heat preservation wallboard on the wall of reverse current injection station 4, and all be provided with the insulated door 47 between every station, be equipped with lift cylinder 48 in the side department of insulated door 47, lift cylinder 48 pass through the connecting plate with the insulated door 47 links to each other, and lift cylinder 48 is used for cooperating the beat to drive the action of insulated door 47. The inner layer of the heat insulation door 47 is provided with a heat insulation layer, and the heat insulation material is sandwiched between the inner layer and the heat insulation layer, so that the heat dissipation speed of the process chamber can be reduced, the process chamber has excellent heat insulation performance, and the energy conservation and consumption reduction are realized.
In addition, the roller conveying system 2 comprises a plurality of rollers 21 which are arranged continuously and in parallel, the rollers 21 are connected with a motor driving chain 22 through roller shafts arranged at the end parts of the rollers, and the rollers 21 are directly driven by the motor driving chain 22. The roller shaft is sequentially provided with a C-shaped clamping ring, a bearing, a fixed ring and a bearing seat flange. The roller 21 and the components thereof can be directly pulled out from the cavity after the bearing seat flange is disassembled, so that the assembly and disassembly are convenient, the structure is simple, and the operation and maintenance are convenient. The bearing of the roller shaft is arranged on the groove body 23, the groove body 23 is horizontally fixed along the length direction of the upper adjusting horizontal frame 11 of the frame main body 1 through an adjusting bolt, and the adjusting bolt is vertically arranged and is used for adjusting the upper and lower heights of the groove body 23 so as to adjust the level of the roller conveying system 2.
In addition, a carrier return conveying device 24 is arranged at the lower side of the frame body 1, and is used for conveying the annealed carrier from the blanking section to the feeding section, so that the work efficiency is improved.
In addition, a gas flow display device 11 is disposed on the outer side of the frame body 1, and is used for displaying the gas flow in each process chamber, and the sufficient gas flow can ensure that the temperature in the process chamber is more uniform.
In this embodiment, the carrier 7 includes a bottom support 71 made of mica, a plurality of vertically disposed baffles 72 are fixed on the bottom support 71, and the plurality of baffles 72 define a carrying cavity for placing the battery cells 8 on the bottom support 71, where an opening is formed at the bottom of the bottom support 71 to facilitate the second metal heating plate 921 in the lower auxiliary heating device to pass through so as to contact the stacked lowermost battery cells 8. At least one set of locking plates 73 is also symmetrically arranged on the bottom support 71 of the carrier 7 for locking and defining the position of the battery piece on the bottom support 71.
Because the carrier 7 adopted in the embodiment can effectively stack and bear a large number of battery pieces 8, and meanwhile, the arrangement of the battery pieces 8 with different specifications on the carrier 7 is convenient, in addition, the structure of the carrier 7 is more suitable for the annealing characteristics of the battery pieces 8 in the invention, the first metal heating plate 911 and the second metal heating plate 921 can be in direct contact with the surfaces of the battery pieces 8, and can electrify or conduct heat to the battery pieces 8, the invention adopts electric heating for annealing and heating the battery pieces 8, and the metal heating plates in the upper auxiliary heating device and the lower auxiliary heating device are auxiliary heating for heating when the self resistance of the silicon wafer serving as the battery pieces is electrified, and can be used for starting or closing the auxiliary heating according to actual production requirements to maintain the uniformity of the temperature of the battery pieces so as to better improve the annealing effect.
The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (6)
1. An electric injection balanced annealing device is used for annealing battery pieces and comprises a frame main body, wherein a roller conveying system is arranged at the bottom of the frame main body, a feeding station, a reverse current injection station, a cooling station and a discharging station are sequentially arranged in the frame main body along the advancing direction of the roller conveying system, a carrier for carrying the battery pieces sequentially passes through the feeding station, the reverse current injection station, the cooling station and the discharging station through the roller conveying system for annealing treatment, the reverse current injection station is used for carrying out electric injection on the battery pieces in the carrier, and the reverse current injection station comprises a plurality of process chambers, and the electric injection station is characterized in that a group of auxiliary heating systems are arranged in each process chamber and are used for carrying out auxiliary heating on the battery pieces carried on the carrier so as to maintain the upper temperature and the lower temperature balance of the battery pieces;
each group of auxiliary heating system comprises an upper auxiliary heating device and a lower auxiliary heating device, the upper auxiliary heating device comprises a first metal heating plate fixedly connected with the lower part of the electrode frame, a first thermocouple for sensing the temperature of an upper battery piece is arranged in the first metal heating plate, the lower auxiliary heating device comprises a second metal heating plate fixed on the frame main body, a second thermocouple is arranged in the second metal heating plate, wherein the shells of the first metal heating plate and the second metal heating plate are simultaneously used for guiding a direct current power supply, and electric injection is carried out on the battery piece clamped between the first metal heating plate and the second metal heating plate;
a current injection system is respectively configured in the reverse current injection station corresponding to each process cavity, the current injection system comprises a first electrode cylinder, a first electrode frame, a second electrode cylinder and a second electrode frame, the first electrode cylinder is vertically fixed on the frame main body and is positioned above each process cavity, the first electrode frame is fixed at the bottom of the first electrode cylinder, the upper auxiliary heating device is fixed below the electrode frame, the second electrode cylinder is vertically fixed on the frame main body and is positioned below each process cavity, the second electrode frame is fixed at the upper part of the second electrode cylinder, and the lower auxiliary heating device is fixed above the second electrode frame;
the auxiliary heating system further comprises a soaking air channel device, wherein the soaking air channel device comprises an upper air channel, a middle air channel and a lower air channel which are fixed in the middle of a side plate of the frame main body, and the upper air channel, the middle air channel or the lower air channel is opened or closed and used for uniformly distributing heat for improving air flow by blasting of battery pieces stacked on the carrier;
the carrier comprises a bottom support made of mica, a plurality of baffle plates which are vertically arranged are fixed on the bottom support, a bearing cavity for placing the battery plates is defined on the bottom support, an opening is formed in the bottom of the bottom support, the second metal heating plate is used for contacting the stacked lowest-layer battery plates, and at least one group of locking plates are symmetrically arranged on the bottom support of the carrier and used for locking and limiting the positions of the battery plates on the bottom support.
2. The apparatus according to claim 1, wherein an infrared sensor for detecting a temperature of the battery cell located in the middle is provided at the side plate of the frame body corresponding to the middle of the battery cells stacked on the carrier.
3. The apparatus of claim 2, wherein the first thermocouple measures a temperature of the first metal heating plate, and the first thermocouple opens the first metal heating plate when the temperature is lower than a set value, and closes the first metal heating plate when the temperature is lower than the set value, thereby keeping the first metal heating plate constant; the second thermocouple measures the temperature of the second metal heating plate, compared with the set value, if the temperature is lower than the set value, the second metal heating plate is opened, otherwise, the second metal heating plate is closed, so that the second metal heating plate is kept constant; the infrared sensor measures the temperature of the battery piece, and compared with a set value, when the temperature is lower than the set value, the air channel is closed, and when the temperature is higher than the set value, the air channel is opened, so that a constant temperature field with uniform temperature is always kept inside.
4. The apparatus of claim 1, wherein the plurality of process chambers comprises at least one high temperature process chamber and at least one low temperature process chamber, and wherein the carrier drives the battery piece to anneal in the high temperature process chamber before entering the low temperature process chamber for annealing.
5. The electric injection equalizing annealing apparatus according to claim 1, wherein an air draft device for controlling the air draft of each station is provided at the top of the frame body, a medium-pressure fan is provided in the reverse current injection station, the medium-pressure fan is provided at the top of the reverse current injection station for controlling the temperature of the reverse current injection station when the air draft is insufficient, heat insulation wall plates are provided on four walls of the reverse current injection station, and a heat insulation door is provided between each station, a lifting cylinder is provided at a side edge of the heat insulation door, and the lifting cylinder is connected with the heat insulation door through a connecting plate.
6. The electric injection equalizing annealing apparatus according to claim 1, wherein the roller conveying system comprises a plurality of continuous and parallel rollers, the rollers are connected with a motor driving chain through roller shafts arranged at the ends of the rollers, the rollers are directly driven by the motor driving chain, and the roller shafts are sequentially provided with a C-shaped clamping ring, a bearing, a fixing ring and a bearing seat flange.
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| CN111129227A (en) * | 2019-12-30 | 2020-05-08 | 浙江鸿禧能源股份有限公司 | Solar wafer electricity injection equipment |
| CN113130700B (en) * | 2020-01-13 | 2022-07-15 | 苏州阿特斯阳光电力科技有限公司 | Electric injection method and device of solar cell and electric injection equipment |
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