CN207116458U - The annealing device of crystal silicon solar energy battery - Google Patents
The annealing device of crystal silicon solar energy battery Download PDFInfo
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- CN207116458U CN207116458U CN201720702484.3U CN201720702484U CN207116458U CN 207116458 U CN207116458 U CN 207116458U CN 201720702484 U CN201720702484 U CN 201720702484U CN 207116458 U CN207116458 U CN 207116458U
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- 238000000137 annealing Methods 0.000 title claims abstract description 29
- 239000013078 crystal Substances 0.000 title claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 13
- 239000010703 silicon Substances 0.000 title claims abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 55
- 238000001816 cooling Methods 0.000 claims abstract description 37
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 239000011261 inert gas Substances 0.000 claims abstract description 17
- 238000009434 installation Methods 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000002826 coolant Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 230000002045 lasting effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910052717 sulfur Inorganic materials 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 238000005086 pumping Methods 0.000 abstract description 9
- 230000033228 biological regulation Effects 0.000 abstract description 5
- 238000003475 lamination Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 5
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 5
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
The utility model discloses a kind of annealing device of crystal silicon solar energy battery, including：Cavity, the cavity is connected with the vacuum plant and inert gas installation of outside, to provide vacuum and inert gas environment；And it is placed in the injecting mechanism of the inside cavity, the injecting mechanism includes upper mounting plate setting up and down, lower platform and it is supported in guide rail between the two, at least one in the upper mounting plate and the lower platform can be slided along the guide rail, to adjust spacing between the two, the relative surface of the upper mounting plate and the lower platform is provided with cooling platform, the surface of the cooling platform is provided with can be separated with heating electrode adiabatic or that closure is to conduct heat, insulating blanket is provided between the cooling platform and the heating electrode, the heating electrode connection external power source, the vacuum plant and inert gas installation, the cooling platform connection control system；It can realize the independent regulation and control of electrical pumping and annealing process.
Description
Technical field
It the utility model is related to solar cell processing technique field, more particularly to a kind of crystal silicon solar energy battery moves back
Fiery device.
Background technology
Single crystal battery piece compares polycrystalline cell piece and has efficient advantage, and polycrystalline silicon battery plate then utilizes its significant cost
The defects of advantage is to make up its efficiency, existing PERC technologies enable polycrystalline PERC battery efficiencies suitable with conventional single, but by
This photo attenuation problem brought strongly limit its scale volume production application.More than a variety of create present single polycrystalline market
It is unexpectedly changing, and it is exactly the key point that can be dispelled the clouds and see the sun to solve crystal-silicon battery slice LID attenuation problems.
Now research shows that the main attenuation process of single crystal battery piece can be illustrated using the compound body Models of BO, and polycrystalline
The attenuating mechanism of silicon chip is not yet apparent.Polysilicon chip compares monocrystalline silicon piece and more crystal boundaries and dislocation defects, and metal be present
Impurity content, cause body minority carrier life time relatively low, and the advantage that PERC technologies can effectively reduce surface recombination is even more by the polycrystal longevity
Order the defects of low highlights further.Its attenuation process is also increasingly complex, it is understood that there may be a variety of Forming Mechanisms, such as：B-O, Fe-B, and
Part deep level metal impurity etc..Current research points out, the quality of silicon chip in itself, such as crystal defect, metals content impurity, and
The thermal process that cell piece undergoes when manufacturing is likely to be the key factor for influenceing polycrystalline cell piece photo attenuation.
To it is corresponding the defects of and impurity to be passivated be the effective means that suppresses photo attenuation, dominant mechanism is：Illumination or
It is the formation that electrical pumping changes carrier concentration induction complex centre, while changes the quasi-Fermi level of electronics, promotes corresponding member
Element is passivated to complex centre.To realize the injection mode, the existing anti-LID technologies of crystal silicon mainly pass through photo-thermal stove and electricity
What implantation annealing stove was realized.Existing anti-LID technologies, the photo attenuation problem of monocrystalline silicon piece can be successfully eliminated, but more
Crystal-silicon battery slice produces little effect.Trace it to its cause and be temperature used in every kind of complex centre and apply external voltage window all phases not to the utmost
Together.Once beyond corresponding temperature or applying external voltage window, the complex centre of loss of activity will be activated.Single
Injection mode is difficult to effectively be passivated all complex centres.For a variety of attenuating mechanisms, there will be more height for polycrystalline processing mode
Stage is, it is necessary to longer processing time.
In the prior art, it is thus proposed that the equipment that light implantation annealing can be realized, using different light sources (Halogen lamp LED/
LED/ laser) photothermal technique can effectively suppress the light decays of monocrystalline PERC batteries, by conversion efficiency attenuation results from before
3%~5% is reduced within 1.5%.But because each light source can only be handled monolithic battery piece simultaneously, such as to extend spoke
According to processing time, number of light sources can only be increased or reduce production capacity, this measure will cause production cost to increase, industrialization difficulty compared with
Greatly.Therefore, also it has been proposed that the equipment of electrical pumping annealing, the technology equally achieve good effect on monocrystalline PERC cell pieces
Fruit；However, cell piece temperature passes through cell piece joule heat, it is difficult to realizes the independent regulation and control of electrical pumping and annealing process, simultaneously
Laminated cell piece state will influence laminated cell piece temperature, it is difficult to ensure the uniformity of injection technology.In addition, also it has been proposed that profit
Temperature control is carried out to cell piece with constant temperature cavity heating, but the problem of temperature rate is slow be present, it is difficult to effectively carries out temperature
Degree regulation and control.
Utility model content
The purpose of this utility model is to propose a kind of annealing device of crystal silicon solar energy battery, can realize electrical pumping
Regulate and control with the independence of annealing process.
To use following technical scheme up to this purpose, the utility model：
The annealing device of crystal silicon solar energy battery, including：
Cavity, the cavity is connected with the vacuum plant and inert gas installation of outside, to provide vacuum and inert gas
Environment；And
Be placed in the injecting mechanism of the inside cavity, the injecting mechanism include upper mounting plate setting up and down, lower platform and
Guide rail between the two is supported in, at least one in the upper mounting plate and the lower platform can be slided along the guide rail,
To adjust spacing between the two,
The relative surface of the upper mounting plate and the lower platform is provided with cooling platform, the surface of the cooling platform
Being provided with can be separated with heating electrode adiabatic or that closure is to conduct heat, described to cool down between platform and the heating electrode
Insulating blanket is provided with, the heating electrode connects external power source,
The vacuum plant and inert gas installation, the cooling platform connection control system.
Preferably, the can be connected with along the platform that the guide rail slides in the upper mounting plate and the lower platform
One transmission device, to drive the platform to slide.
Preferably, the upper mounting plate and the lower platform are respectively connected with the second transmission device, second transmission device
Enable to the cooling platform and the heating electrode separation or closure；
Second transmission device is interval air valve.
Preferably, first transmission device and second transmission device are the stroke that can realize pressure setting
Cylinder or hydraulic system, first transmission device and second transmission device are connected with the control system.
Preferably, the power supply output is constant DC voltage, the adjustable range of the voltage is 0-1000V；Or
The power supply output is Constant Direct Current electric current, and the adjustable range of the electric current is 0-20A.
Preferably, the heating electrode is internally provided with heating unit and the temperature measuring unit for temperature feedback,
The heating unit is resistance wire or heating ceramic, and the heating electrode is the electrode of stainless steel, copper or aluminium material,
The heating temperature range of the heating electrode is -450 DEG C of room temperature；
The temperature measuring unit is K, S, E or Type B thermocouple, and the heating unit, the temperature measuring unit connect the control
System.
Preferably, the cooling platform is internally provided with cooling pipe, circulated inside the cooling pipe
Cooling medium, to lasting radiating；
The cooling medium is empty gas and water or oil.
Preferably, the insulating blanket is the bed course that thermal conductivity is high and insulate, the insulating blanket is insulating ceramics.
Preferably, the inert gas is nitrogen, argon gas or helium.
Preferably, the injecting mechanism is at least two, at least two injecting mechanisms are connected in series.
The beneficial effects of the utility model are：
Annealing device of the present utility model, injecting mechanism is set in inside cavity, injecting mechanism setting is put down for two up and down
Platform, at least one can be slided up and down for two platforms, so as to adjust between the upper and lower away from being folded so as to adapt to the cell piece of different height
Layer, to clamp cell piece lamination, and heating electrode and cooling platform are set on the relative surface of platform, using heating electrode
Closed-loop path is formed with cell piece lamination, cooling is realized using platform is cooled down, so as to realize electrical pumping and annealing process
Independent regulation and control, solve the problems, such as the independent regulation and control that can not realize electrical pumping and annealing process in the prior art, and whole operation is
Complete, thus do not influenceed by external environment in the vacuum and inert gas environment of inside cavity, avoid disturbing.
Brief description of the drawings
Fig. 1 is the structural representation of annealing device of the present utility model.
In figure：100- cell piece laminations；1- cavitys；2- heats electrode；3- cools down platform；4- insulating blankets；5- first is passed
Dynamic device；The transmission devices of 6- second；7- upper mounting plates；8- lower platforms；9- guide rails；10- injecting mechanisms；11- power supplys.
Embodiment
Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by embodiment.
As shown in figure 1, the annealing device for the crystal silicon solar energy battery that an example of the present utility model provides, including cavity
1, the cavity 1 is connected with the vacuum plant and inert gas installation of outside, vacuum plant and the inert gas installation connection
Control system.When the annealing device is started working, control system control vacuum plant and inert gas installation provide vacuum and
Inert gas, so as to provide vacuum and inert gas environment inside cavity 1.Preferably, the inert gas is nitrogen, argon
Gas or helium.
The annealing device also includes the injecting mechanism 10 being placed in inside the cavity 1, in the present embodiment, the implanter
Structure 10 is at least two, and at least two injecting mechanisms 10 are connected in series.
The injecting mechanism 10 includes upper mounting plate 7 setting up and down, lower platform 8 and is supported in guide rail 9 between the two, institute
Stating at least one in upper mounting plate 7 and the lower platform 8 can slide along the guide rail 9, to adjust spacing between the two.
The first transmission device 5 can be connected with along the platform that the guide rail 9 slides in the upper mounting plate 7 and the lower platform 8, with
The platform is driven to slide.First transmission device 5 is connected with the control system.Especially, in the present embodiment, lower platform
8 is slidably set, and upper mounting plate 7 is fixed setting, thus the first transmission device 5 is arranged at the bottom of lower platform 8, and first passes
Dynamic device 5 can drive lower platform 8 to be slided up and down along guide rail 9, you can the spacing between adjustment upper mounting plate 7, lower platform 8, from
And the cell piece lamination of different height is adapted to, to clamp cell piece lamination 100, condition is provided for subsequent operation.
The relative surface of the upper mounting plate 7 and the lower platform 8 is provided with cooling platform 3, and the cooling platform 3 connects
Connected control system.Preferably, the cooling platform 3 is internally provided with cooling pipe, there is circulation inside the cooling pipe
The cooling medium of flowing, to lasting radiating；The cooling medium is empty gas and water or oil.Certainly, in addition, for cooling down
Other modes, such as use gas condensing mode, cooling gas is quickly passed through and exported, increase heat exchange, can also realize soon
Quickly cooling is but.
The surface of the cooling platform 3 is provided with can be separated with heating electrode 2 adiabatic or that closure is to conduct heat, institute
State heating electrode 2 and connect external power source 11.
Preferably, what the power supply 11 exported is constant DC voltage, the adjustable range of the voltage is 0-1000V, example
As 0V, 10V, 20V, 30V, 50V, 70V, 100V, 120V, 150V, 180V, 200V, 250V, 300V, 400V, 450V, 500V,
600V、700V、800V、900V、1000V；Or the output of power supply 11 is Constant Direct Current electric current, the adjustable range of the electric current is
0-20A, for example, 0A, 1A, 2A, 3A, 4A, 5A, 6A, 7A, 8A, 9A, 10A, 11A, 12A, 13A, 14A, 15A, 16A, 17A, 18A,
19A、20A。
Preferably, the heating electrode 2 is internally provided with heating unit and the temperature measuring unit for temperature feedback, institute
It is resistance wire or heating ceramic to state heating unit, and the temperature measuring unit is K, S, E or Type B thermocouple, the heating unit, described
Temperature measuring unit connects the control system, in heating process, controls heating unit heats by control system, temperature measuring unit is real-time
Thermometric simultaneously feeds back to control system, thus heats accurately.
Preferably, the heating electrode 2 is the electrode of stainless steel, copper or aluminium material, the heating temperature of the heating electrode 2
Degree scope is -450 DEG C of room temperature, for example, can be room temperature (25 DEG C), 30 DEG C, 45 DEG C, 62 DEG C, 70 DEG C, 100 DEG C, 124 DEG C, 135
℃、160℃、190℃、200℃、230℃、240℃、268℃、270℃、280℃、300℃、310℃、340℃、360℃、
400℃、410℃、420℃、430℃、440℃、450℃。
Insulating blanket 4 is provided between the cooling platform 3 and the heating electrode 2.Preferably, the insulating blanket
4 be the bed course that thermal conductivity is high and insulate, and e.g., the insulating blanket 4 is insulating ceramics.
After cell piece lamination 100 is placed on the heating electrode 2 of lower platform 8, control system controls the first transmission device 5 to drive
The dynamic upward sliding of lower platform 8, it can drive cooling platform 3, insulating blanket 4 thereon to heat electrode 2 and the cell piece of the above
The upward sliding together of lamination 100, until the top of cell piece lamination 100 contradicts the heating electrode 2 to upper mounting plate 7；By upper and lower
Upper and lower ends of two heating electrodes 2 respectively with cell piece lamination 100 contact, and realize electrical connection, form closed-loop path, can be used for
Electrical pumping technique.
At this moment, heating electrode 2 is in heated condition, in order to avoid cooling down heating shadow of the cooling of platform 3 to heating electrode 2
Ring, the upper mounting plate 7 and the lower platform 8 are respectively connected with the second transmission device 6, second transmission device 6 with the control
System connection processed；Second transmission device 6 enables to the cooling platform 3 and the heating electrode 2 to separate or close；Make
To be preferred, second transmission device 6 is interval air valve.Then control interval air valve will cool down platform and heating electrode to control system
Separation, to avoid conducting heat.After heating terminates, control system control interval air valve will cool down platform and heating electrode closure, with
Realize heat transfer；Now, control system control cooling platform 3 is begun to cool down.In whole process, heating and afterwards during electrical pumping
Be cooled to completely self-contained two processes, be independent of each other, independent operation.
Preferably, first transmission device 5 and second transmission device 6 are the row that can realize pressure setting
Stroke cylinder or hydraulic system.
The annealing device, by upper and lower two heat electrode in integrated warming unit and temperature measuring unit, realize be powered with
The integrated flat heater electrode of heated for controlling temperature.Simple electrode is compared, can simultaneously or independently realize electric note to laminated cell piece
Enter and temperature adjusting；Cavity heat transfer temperature control is compared, can realize that fast temperature change is adjusted by the temperature setting of flat heater electrode
Section.Control the contact with heating electrode of cooling platform that laminated cell piece temperature can be achieved with separating using the second transmission device
Quick change, cooling velocity is up to 30 DEG C/min.
Technical principle of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality
With new principle, and the limitation to scope of protection of the utility model can not be construed in any way.Based on explanation herein,
Those skilled in the art, which would not require any inventive effort, can associate other embodiments of the present utility model,
These modes are fallen within the scope of protection of the utility model.
Claims (10)
1. the annealing device of crystal silicon solar energy battery, it is characterised in that including：
Cavity (1), the cavity (1) is connected with the vacuum plant and inert gas installation of outside, to provide vacuum and indifferent gas
Body environment；And
The internal injecting mechanism (10) of the cavity (1) is placed in, the injecting mechanism (10) includes upper mounting plate setting up and down
(7), lower platform (8) and guide rail (9) between the two is supported in, at least one in the upper mounting plate (7) and the lower platform (8)
It is individual to be slided along the guide rail (9), to adjust spacing between the two,
The relative surface of the upper mounting plate (7) and the lower platform (8) is provided with cooling platform (3), the cooling platform
(3) surface is provided with can be separated with adiabatic or close heating electrode (2) to conduct heat, the cooling platform (3) with
Insulating blanket (4) is provided between the heating electrode (2), the heating electrode (2) connects external power source (11),
The vacuum plant and inert gas installation, cooling platform (3) the connection control system.
2. annealing device according to claim 1, it is characterised in that in the upper mounting plate (7) and the lower platform (8)
The first transmission device (5) can be connected with along the platform that the guide rail (9) slides, to drive the platform to slide.
3. annealing device according to claim 2, it is characterised in that the upper mounting plate (7) and the lower platform (8) connect
The second transmission device (6) is connected to, second transmission device (6) enables to the cooling platform (3) and the heating electrode
(2) separate or close；
Second transmission device (6) is interval air valve.
4. annealing device according to claim 3, it is characterised in that first transmission device (5) and described second passes
Dynamic device (6) is the stroke cylinder or hydraulic system that can realize pressure setting, first transmission device (5) and described the
Two transmission devices (6) are connected with the control system.
5. according to the annealing device described in claim any one of 1-4, it is characterised in that power supply (11) output is constant
DC voltage, the adjustable range of the voltage is 0-1000V；Or
Power supply (11) output is Constant Direct Current electric current, and the adjustable range of the electric current is 0-20A.
6. according to the annealing device described in claim any one of 1-4, it is characterised in that the inside of the heating electrode (2) is set
Heating unit and the temperature measuring unit for temperature feedback are equipped with,
The heating unit is resistance wire or heating ceramic, and the heating electrode (2) is the electrode of stainless steel, copper or aluminium material,
The heating temperature range of the heating electrode (2) is -450 DEG C of room temperature；
The temperature measuring unit is K, S, E or Type B thermocouple, and the heating unit, the temperature measuring unit connect the control system.
7. according to the annealing device described in claim any one of 1-4, it is characterised in that the inside of the cooling platform (3) is set
Cooling pipe is equipped with, there is the cooling medium circulated inside the cooling pipe, to lasting radiating；
The cooling medium is empty gas and water or oil.
8. according to the annealing device described in claim any one of 1-4, it is characterised in that the insulating blanket (4) is thermal conductivity
High and insulation bed course, the insulating blanket (4) is insulating ceramics.
9. according to the annealing device described in claim any one of 1-4, it is characterised in that the inert gas is nitrogen, argon gas
Or helium.
10. according to the annealing device described in claim any one of 1-4, it is characterised in that the injecting mechanism (10) is at least
Two, at least two injecting mechanisms (10) are connected in series.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720702484.3U CN207116458U (en) | 2017-06-16 | 2017-06-16 | The annealing device of crystal silicon solar energy battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720702484.3U CN207116458U (en) | 2017-06-16 | 2017-06-16 | The annealing device of crystal silicon solar energy battery |
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| Publication Number | Publication Date |
|---|---|
| CN207116458U true CN207116458U (en) | 2018-03-16 |
Family
ID=61577186
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720702484.3U Expired - Fee Related CN207116458U (en) | 2017-06-16 | 2017-06-16 | The annealing device of crystal silicon solar energy battery |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108550656A (en) * | 2018-05-17 | 2018-09-18 | 苏州晶洲装备科技有限公司 | A kind of electrical pumping equilibrium annealing device |
| WO2020000793A1 (en) * | 2018-06-28 | 2020-01-02 | 华南理工大学 | Crystalline silicon photovoltaic solar cell electric injection annealing test device and method |
| CN111584681A (en) * | 2020-05-11 | 2020-08-25 | 杭州晶宝新能源科技有限公司 | Solar cell performance improvement process production line |
| CN116014036A (en) * | 2023-01-30 | 2023-04-25 | 通威太阳能（成都）有限公司 | Solar cell, preparation method thereof, light injection device and light injection system |
-
2017
- 2017-06-16 CN CN201720702484.3U patent/CN207116458U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108550656A (en) * | 2018-05-17 | 2018-09-18 | 苏州晶洲装备科技有限公司 | A kind of electrical pumping equilibrium annealing device |
| CN108550656B (en) * | 2018-05-17 | 2023-11-21 | 苏州晶洲装备科技有限公司 | Electric injection equilibrium annealing device |
| WO2020000793A1 (en) * | 2018-06-28 | 2020-01-02 | 华南理工大学 | Crystalline silicon photovoltaic solar cell electric injection annealing test device and method |
| US11929448B2 (en) | 2018-06-28 | 2024-03-12 | South China University Of Technology | Electric injection annealing test device and a method thereof for crystalline silicon photovoltaic solar cells |
| CN111584681A (en) * | 2020-05-11 | 2020-08-25 | 杭州晶宝新能源科技有限公司 | Solar cell performance improvement process production line |
| CN116014036A (en) * | 2023-01-30 | 2023-04-25 | 通威太阳能（成都）有限公司 | Solar cell, preparation method thereof, light injection device and light injection system |
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