CN116014036A - Solar cell, preparation method thereof, light injection device and light injection system - Google Patents
Solar cell, preparation method thereof, light injection device and light injection system Download PDFInfo
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- CN116014036A CN116014036A CN202310087012.1A CN202310087012A CN116014036A CN 116014036 A CN116014036 A CN 116014036A CN 202310087012 A CN202310087012 A CN 202310087012A CN 116014036 A CN116014036 A CN 116014036A
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- 238000002347 injection Methods 0.000 title claims abstract description 107
- 239000007924 injection Substances 0.000 title claims abstract description 107
- 238000002360 preparation method Methods 0.000 title abstract description 6
- 229910052802 copper Inorganic materials 0.000 claims abstract description 54
- 239000010949 copper Substances 0.000 claims abstract description 54
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims abstract description 40
- 239000012298 atmosphere Substances 0.000 claims abstract description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000001678 irradiating effect Effects 0.000 claims abstract description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 5
- 238000001179 sorption measurement Methods 0.000 claims description 37
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
- 238000003860 storage Methods 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 15
- 238000007254 oxidation reaction Methods 0.000 abstract description 5
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000011049 filling Methods 0.000 abstract description 2
- 210000004027 cell Anatomy 0.000 description 47
- 239000010410 layer Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 16
- 238000005516 engineering process Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 238000007639 printing Methods 0.000 description 8
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 5
- 239000005751 Copper oxide Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 229910000431 copper oxide Inorganic materials 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 210000005056 cell body Anatomy 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000013083 solar photovoltaic technology Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
Solar cell and preparation method, light injection device and light injection system thereof belong to the technical field of photovoltaics. The light injection device comprises a heating furnace, and a light injection lamp and a conveyor which are arranged in the furnace chamber of the heating furnace. The two ends of the furnace chamber of the heating furnace are provided with furnace openings, and each furnace opening is provided with a furnace door for selectively closing and exposing the furnace chamber. When the light injection device provided by the application is used for carrying out light injection of the battery piece electroplated with the copper grid line, the battery piece to be subjected to light injection can be placed on the conveyor in the furnace chamber, and then the furnace door is closed to form a sealed chamber. And vacuumizing the furnace chamber, filling inert atmosphere such as nitrogen and the like to regulate the atmosphere to normal pressure, then raising the temperature in the furnace chamber, and irradiating the battery piece by using a light injection lamp arranged in the furnace chamber for light injection. The light injection of the cell is carried out in inert atmosphere, so that the oxidation of the copper grid line can be prevented, and the conversion efficiency and the current collection efficiency of the solar cell are improved.
Description
Technical Field
The application relates to the technical field of solar cells, in particular to a solar cell, a preparation method thereof, a light injection device and a light injection system.
Background
Currently, one of the leading edge solar photovoltaic technologies is to replace the traditional silver paste printing with copper interconnection technology. Another major advantage of copper interconnect technology over traditional silver paste printing technology, in addition to cost, is that copper interconnect can be thinned. One of the core technologies for fine line formation is a pattern transfer technology of wet film photoresist.
In the copper interconnection battery technology, wet film photoresist is used for printing, developing and electroplating to manufacture copper grid lines of battery pieces, so that the traditional silver paste printing technology is replaced. In the prior art, the solar cell for preparing the grid line by adopting the copper interconnection technology has lower conversion efficiency and current collection efficiency.
Disclosure of Invention
The present invention provides a solar cell, a method for manufacturing the same, a light injection device and a light injection system, which are used for partially or completely improving the problem of low conversion efficiency of the solar cell in the related art.
In a first aspect, an embodiment of the present application provides a method for manufacturing a solar cell, including: forming a copper seed layer on the battery piece main body, and forming a photoresist layer on the copper seed layer; exposing and developing the photoresist layer to form a grid line groove exposing part of the copper seed layer; forming an electroplated copper grid line in the grid line groove, and removing photoresist to obtain a battery piece; and (5) injecting light into the battery piece. Wherein the light injection comprises: and heating the battery sheet under an inert atmosphere and radiating light.
And forming a copper seed layer on the battery piece main body, exposing and developing the photoresist layer on the copper seed layer to obtain a grid line groove exposing part of the copper seed layer, forming a copper grid line in the grid line groove by electroplating, and removing the photoresist layer to obtain the battery piece provided with the thinned grid line electrode. And the battery piece with the copper grid lines is subjected to light injection, so that the conversion efficiency of the solar battery can be improved.
And the cell is placed in inert atmosphere for light injection, so that the oxidation of the electroplated copper grid line in a high-temperature environment during light injection can be avoided, and the current collection efficiency of the solar cell is further improved.
With reference to the first aspect, in a first possible implementation manner provided in the first aspect of the present application, in the light injection step, the heating temperature is 100-300 ℃, and the intensity of the illumination radiation is 30-60suns;
optionally, the heating temperature is 200-220 ℃;
optionally, the inert atmosphere comprises nitrogen.
And heating the battery piece to 100-300 ℃ in a nitrogen atmosphere, and then irradiating the battery piece with the illumination radiation intensity of 30-60suns, so that the conversion efficiency of the solar battery can be improved.
In a second aspect, an embodiment of the present application provides a solar cell, which is prepared according to the preparation method of the solar cell provided in the first aspect.
The solar cell manufactured by the solar cell manufacturing method provided by the first aspect comprises a copper grid line electrode. When the battery piece provided with the copper grid line electrode is subjected to light injection so as to improve the conversion efficiency, the battery piece is positioned in an inert atmosphere, and the prepared copper grid line electrode cannot be oxidized in a high-temperature environment in the light injection process, so that the surface of the copper grid line in the solar battery is free of copper oxide, and the conversion efficiency and the current collection efficiency of the solar battery are improved.
In a third aspect, embodiments of the present application provide a light injection device for light injection of a copper grid line solar cell. The light injection device comprises a heating furnace, a light injection lamp and a conveyor. The heating furnace is internally provided with a furnace chamber, and both ends of the furnace chamber are provided with furnace openings. Each oven port is provided with an oven door for selectively closing and exposing the oven cavity. The light injection lamp is arranged in the furnace chamber and used for irradiating the solar battery placed in the furnace chamber. The conveyor is arranged in the furnace chamber and used for conveying the solar cells.
Two ends of a furnace chamber of the heating furnace are respectively provided with a furnace mouth, and a conveyor is arranged in the heating furnace, so that the battery piece enters the heating furnace from one furnace mouth for light injection, the heating furnace is moved out from the other furnace mouth after light injection is completed, and the production efficiency of the light injection device is improved.
And, a door for closing or exposing the cavity is provided at each of the oven openings, and the battery pieces to be light-injected can be placed on a conveyor in the cavity and then the door is closed to form a sealed chamber. And vacuumizing the furnace chamber, filling inert atmosphere such as nitrogen and the like to adjust the atmosphere to normal pressure, then raising the temperature in the furnace chamber, and irradiating the battery piece by using a light injection lamp arranged in the furnace chamber to perform light injection. Because the furnace chamber for injecting light can be sealed by the furnace door, the battery piece can be injected with light under inert atmosphere, the oxidation of the copper grid line is prevented, and the conversion efficiency and the current collection efficiency of the solar battery are further improved.
With reference to the third aspect, in an alternative embodiment of the present application, the conveyor is a roller conveying structure. The roller conveying structure comprises a first side plate, a second side plate and a plurality of rollers arranged between the first side plate and the second side plate at intervals. The two ends of the first side plate and the second side plate extend from the furnace mouth to the outside of the furnace chamber respectively, and the first side plate and the second side plate are provided with two contact parts for contacting with the furnace wall. Each contact part is embedded in the furnace wall of the heating furnace close to the furnace mouth, and the top surface of the roller on two sides of each contact part along the radial direction is not lower than the furnace wall. The oven door is selectively contacted with the oven wall to close and expose the oven door.
The conveyor is arranged into a roller conveying structure, and two ends of the roller conveying structure penetrate out of the furnace cavity from two furnace openings respectively, so that battery pieces outside the heating furnace can be conveniently conveyed into the furnace cavity from one furnace opening by the roller conveyor, and battery pieces in the furnace cavity can be conveniently conveyed out from the other furnace opening.
And each contact part of the two side plates of the roller type conveying structure is respectively embedded into the furnace wall at the two furnace openings, so that the furnace opening can be closed when the furnace door is used for contacting the furnace wall. Meanwhile, the top surfaces of the rollers positioned at the two ends of the contact part are not lower than the furnace wall, so that the battery pieces can pass through the furnace wall near the furnace mouth to enter and exit the furnace chamber in the opened state of the furnace door, and the battery pieces are conveyed.
With reference to the third aspect, in an alternative embodiment of the present application, the light injection device includes a carrier, and the solar cell is placed on the drum through the carrier; the carrier comprises a bearing plate and an adsorption hole arranged on the bearing plate.
By rolling the drum, the battery piece placed on the drum can be moved along the extending direction of the side plate. If the battery piece is directly placed on the roller, the battery piece can be worn to damage the battery piece, and the quality of the solar battery is reduced. In the implementation process, the battery piece is placed on the bearing plate in the carrier, the battery piece is adsorbed and fixed by the adsorption hole, and the battery piece is prevented from being worn by the contact of the bearing plate and the roller.
With reference to the third aspect, in an optional embodiment of the present application, the carrier plate includes a plurality of carrier portions, and each carrier portion is provided with an adsorption hole.
The bearing plate is provided with a plurality of bearing parts, so that a plurality of battery pieces can be conveyed at the same time. And, the surface of the loading plate having the plurality of loading parts is larger than that of the battery sheet, which reduces the possibility of deviation during the contact with the plurality of rollers.
With reference to the third aspect, in an optional embodiment of the present application, an adsorption cavity is provided in the carrier plate, and each adsorption hole is communicated with the adsorption cavity; the cavity mouth of the adsorption cavity is provided with a pressure regulating valve for selectively increasing or reducing the pressure of the adsorption cavity so as to adsorb or desorb the solar cell.
The adsorption cavity communicated with each adsorption hole is formed in the bearing plate, the pressure in the adsorption cavity can be increased through the pressure regulating valve, and then the adsorption force between each adsorption hole and the battery piece is increased, so that the adsorption of the battery piece is realized.
And the pressure in the adsorption cavity can be reduced through the pressure regulating valve, so that the adsorption force between each adsorption hole and the battery piece is reduced, the desorption of the battery piece is realized, and the operation convenience is improved.
In a fourth aspect, an embodiment of the present application provides a light injection system, including the light injection device provided in the third aspect, a first conveyor belt and a first conveyor disposed at one end of the heating furnace, and a second conveyor belt and a second conveyor disposed at the other end of the heating furnace. The conveyor has opposite first and second ends. The first operation machine moves to and from the first conveying belt and the first end, and the second operation machine moves to and from the second conveying belt and the second end, so that the solar cells can be transported.
Optionally, a first storage table is arranged between the first conveyor belt and the first end;
optionally, a second storage table is disposed between the second conveyor belt and the second end.
The front end and the rear end of the light injection device are respectively provided with a corresponding conveyor and a corresponding running machine, a battery piece to be subjected to light injection at the front end of the light injection device can be sent to the conveyor in the light injection device, then light injection is carried out in the conveying process of the conveyor, after the light injection is completed, the battery piece is transferred to the rear end of the light injection device, the automation of a light injection system is improved, and the light injection efficiency of the light injection system is further improved.
With reference to the fourth aspect, in an alternative embodiment of the present application, the first and/or second manipulator includes a screw, a guide rod, and a suction cup; the sucking disc is in threaded connection with the screw rod and is in sliding connection with the guide rod.
The sucker is in threaded connection with the screw rod and is in sliding connection with the guide rod, so that the sucker can reciprocate along the axial direction of the screw rod in the rotation process of the screw rod, the battery piece is adsorbed by the sucker, and the adsorbed battery piece is placed on a corresponding conveyor or conveying belt to finish feeding or discharging of the battery piece.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a prior art light injection furnace;
FIG. 2 is a schematic cross-sectional view of a prior art light injected battery cell;
FIG. 3 is a schematic plan view of a light injection system as provided by examples of the present application;
FIG. 4 is a schematic cross-sectional view of a light injection device provided herein;
fig. 5 is a schematic cross-sectional view of a solar cell prepared and obtained according to the present application.
Icon: 1-a light injection system; 10-a light injection device; 11-a heating furnace; 111-furnace chamber; 112-furnace mouth; 113-oven door; 12-a light injection lamp; 13-a conveyor; 131-a first side plate; 132-a second side plate; 133-roller; 14-a carrier; 141-a carrier plate; 1411-a carrier; 142-adsorption holes; 143-an adsorption chamber; 144-a pressure regulating valve; 21-a first conveyor belt; 22-a first handler; 23-a second conveyor belt; 24-a second conveyor; 25-a first storage station; 26-a second storage station;
100-light implanter; 200-a solar cell; 201-copper grid lines; 202-an oxide layer of copper; 203-battery plate body.
Detailed Description
Embodiments of the technical solutions of the present application will be described in detail below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical solutions of the present application, and thus are only examples, and are not intended to limit the scope of protection of the present application.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having" and any variations thereof in the description of the present application and in the description of the drawings above are intended to cover non-exclusive inclusions.
In the description of the embodiments of the present application, the technical terms "first," "second," etc. are used merely to distinguish between different objects and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, a particular order or a primary or secondary relationship. In the description of the embodiments of the present application, the meaning of "plurality" is two or more unless explicitly defined otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.
In the description of the embodiments of the present application, the term "plurality" refers to two or more (including two), and similarly, "multiple" refers to two or more (including two), and "multiple" refers to two or more (including two).
In the description of the embodiments of the present application, the orientation or positional relationship indicated by the technical terms "bottom", "inside", etc. are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of describing the embodiments of the present application and simplifying the description, and are not indicative or implying that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the embodiments of the present application.
In the description of the embodiments of the present application, unless explicitly specified and limited otherwise, the terms "connected," "fixed" and the like are to be construed broadly and include, for example, either fixedly connected, detachably connected, or integrally formed; or may be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present application will be understood by those of ordinary skill in the art according to the specific circumstances.
Currently, one of the leading edge solar photovoltaic technologies is to replace the traditional silver paste printing with copper interconnection technology. Another major advantage of copper interconnect technology over traditional silver paste printing technology, in addition to cost, is that copper interconnect can be thinned. The inventor finds that the conversion efficiency of the solar cell prepared by using the existing copper interconnection technology is lower, so the inventor tries to carry out light injection on the copper interconnection cell sheet so as to improve the conversion efficiency of the solar cell.
However, the inventors found that the conversion efficiency and the current collection efficiency of the solar cell 200 are low after light injection of the battery sheet using the existing light injection apparatus. The inventors analyzed the cause, considered that:
referring to fig. 1, a conventional light implanter 100 is used to place a battery piece on a conveyor belt, then send the battery piece into an open hearth, implant light into the battery piece, and then send the battery piece after light injection out through the conveyor belt.
As the furnace is open, when the battery piece is light injected, referring to fig. 2, the copper grid line 201 will contact with oxygen and water vapor in the air environment under high temperature condition, and oxidize, forming a copper oxide layer 202 on the surface of the copper grid line 201. The surface of the copper grid line 201 is oxidized, and thus the conversion efficiency and the current collection efficiency of the solar cell 200 are affected.
Therefore, the light injection equipment is further improved, so that the probability of oxidization of the copper grid line during light injection can be avoided to a certain extent, and the conversion efficiency of the solar cell is further improved. In order to make the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.
The present application provides a light injection system 1. Referring to fig. 3, the light injection system 1 includes a light injection device 10, a first conveyor belt 21 and a first conveyor 22 disposed at one end of a heating furnace 11, and a second conveyor belt 23 and a second conveyor 24 disposed at the other end of the heating furnace 11. The first conveyor 22 reciprocates to and from the first conveyor belt 21 and the first end of the conveyor 13 to transfer the battery pieces conveyed by the first conveyor belt 21 to the feed end of the conveyor 13. The second conveyor 24 reciprocates from the second conveyor belt 23 and the second end of the conveyor 13 to transfer the battery piece conveyed by the discharge end of the conveyor 13 to the second conveyor belt 23 to be sent to the next process.
Referring to fig. 4, the light injection device 10 includes a heating furnace 11, a light injection lamp 12, and a conveyor 13. The heating furnace 11 is provided with a furnace chamber 111 inside, and both ends of the furnace chamber 111 have furnace openings 112. Each of the oven ports 112 is provided with an oven door 113 for selectively closing and exposing the oven cavity 111. The light injection lamp 12 is disposed at the cavity 111 for irradiating the solar cell 200 disposed in the cavity 111. The conveyor 13 is disposed in the oven chamber 111 for conveying the battery pieces.
A schematic cross-sectional view of a solar cell 200 after light injection using the light injection device 10 provided in this example is shown in fig. 5.
Referring to fig. 5, the surface of the copper gate line 201 is free of the copper oxide layer 202.
The heating furnace 11, the light injection lamp 12, and the conveyor 13 in the light injection device 10 provided in the examples of the present application are described in further detail below with reference to the accompanying drawings, respectively.
The furnace chamber 111 in the heating furnace 11 is used for providing the required temperature conditions and process sites for the light injection of the battery cells; two ends of the furnace chamber 111 are respectively provided with a furnace mouth 112 so as to facilitate continuous light injection operation of the battery piece; the furnace door 113 is arranged at each furnace opening 112, so that the furnace chamber 111 can be sealed, a sealing space is provided for light injection of the battery piece, the battery piece in the light injection process is prevented from being oxidized by contact with oxygen, and the copper oxide layer 202 is prevented from being formed on the surface of the copper grid line 201.
The specific arrangement form of the heating furnace 11 is not limited, and the related personnel can perform corresponding adjustment as required under the condition that the battery piece for light injection in the furnace chamber 111 is ensured not to contact with oxidizing substances such as oxygen.
In one possible embodiment, the heating furnace 11 is a box furnace structure, and the furnace mouth 112 is a rectangular opening structure. Correspondingly, the furnace door 113 is of a rectangular flat plate structure which is mutually matched with the furnace mouth 112 of the rectangular opening structure. When it is necessary to close the door 113, a rectangular flat plate-shaped door may be inserted into the wall of the heating furnace 11 near the mouth 112 to close the mouth 112.
The light injection lamp 12 is disposed in the oven cavity 111, and is used for irradiating the battery piece and injecting light into the battery piece.
The present application is not limited to a particular type of light-injection lamp 12, and in some possible embodiments, the light-injection lamp 12 is an LED lamp, an infrared lamp, or a laser lamp. The light coverage area of the light injection lamp 12 is larger than the surface area of the battery piece. Illustratively, the light-injecting lamp 12 is a flat plate structure, and may simultaneously irradiate the surfaces of a plurality of battery pieces.
The conveyor 13 is disposed in the oven cavity 111, and is used for continuously conveying the battery pieces for light injection in sequence, and for delivering the battery pieces after light injection out of the oven cavity 111.
The specific arrangement of the conveyor 13 is not limited in this application, and the relevant person may make a corresponding choice as required.
In some possible embodiments, the conveyor 13 may be a chain conveyor, a belt conveyor, or a roller conveyor.
Further, in order to facilitate the feeding of the battery cells outside the oven cavity 111 into the oven cavity 111 and the feeding of the battery cells inside the oven cavity 111 out of the oven cavity 111, in a possible embodiment, both ends of the conveyor 13 may be extended from the two oven openings 112 to the outside of the oven cavity 111, respectively.
Further, in order to enable both ends of the conveyor 13 to protrude from the furnace opening 112 outside the furnace chamber 111, respectively, the furnace chamber 111 can be closed with the furnace door 113 provided at the furnace opening 112, and in one possible embodiment, the conveyor 13 may be provided in a roller type conveying structure.
Specifically, the conveyor 13 of the roller conveying structure includes a first side plate 131 and a second side plate 132, and a plurality of rollers 133 disposed between the first side plate 131 and the second side plate 132 at intervals. The second side plates 132 of the first side plates 131 are disposed in parallel, and both ends of each roller 133 are rotatably connected to the first side plates 131 and the second side plates 132, respectively. When the battery sheet is conveyed by the conveyor 13 of the roller conveying structure, the battery sheet is placed on the roller 133 such that the battery sheet moves in the extending direction of the first and second side plates 131 and 132 by the rotation of the roller 133.
In order to enable the battery pieces to enter the furnace chamber 111 from the first furnace mouth 112 under the action of the conveyor 13 of the roller conveying structure and then pass out of the furnace chamber 111 from the second furnace mouth 112, contact parts at two ends of the first side plate 131 and the second side plate 132 can be respectively embedded in the furnace wall of the heating furnace 11 close to the furnace mouth 112, rollers 133 are arranged inside and outside the furnace wall, and the top of the rollers 133 is level with the furnace wall at the furnace mouth 112 or exceeds the furnace wall. The first side plate 131 and the second side plate 132 are embedded in the furnace wall, so that the normal operation of the conveyor 13 with the roller conveying structure can be ensured, and the furnace door 113 can be used for sealing the furnace mouth 112 by contacting the furnace wall (when the furnace door 113 is contacted with the furnace wall to seal the furnace mouth 112, the roller 133 positioned inside and outside the furnace wall can still normally rotate, and the battery pieces positioned inside and outside the furnace chamber 111 can be normally conveyed), and an inert atmosphere light injection environment can be provided for the battery pieces entering the furnace chamber 111.
By rolling the drum 133, the battery piece placed on the drum 133 can be moved in the extending direction of the side plate. If the battery piece is directly placed on the roller 133, the battery piece is worn to damage the battery piece, and the quality of the solar cell 200 is reduced.
Further, the present example also provides a carrier 14 for carrying the battery cells. The carrier 14 includes a carrier plate 141 and an adsorption hole 142 disposed on the carrier plate 141.
The battery piece is placed on the bearing plate 141 in the carrier 14, and is adsorbed and fixed by the adsorption hole 142, so as to bear and fix the battery piece. Then, the carrier 14 carrying the battery pieces is placed on the roller 133, so that the battery pieces can be prevented from directly contacting the roller 133, and the quality of the solar cell 200 is further improved.
Further, in order to improve the production efficiency of the light injection device 10, in one possible embodiment, the carrier plate 141 includes a plurality of carrier portions 1411, each carrier portion 1411 is provided with an adsorption hole 142, and each carrier portion 1411 may be fixed with one battery piece.
In addition, the plurality of bearing parts 1411 are arranged, so that the contact area of the bearing plate 141 and the roller 133 can be increased, and the probability of the bearing plate 141 shifting in the conveying process is reduced.
Illustratively, the carrier 141 includes four carriers 1411, and the four carriers 1411 may be distributed in a "field" shape.
Further, in order to facilitate the operation of adsorbing or desorbing the battery cells by each adsorption hole 142, in one possible embodiment, an adsorption cavity 143 may be provided inside the carrier plate 141. The adsorption chamber 143 communicates with each adsorption hole 142, and a pressure regulating valve 144 is provided at an opening of the adsorption chamber 143. The pressure of the adsorption cavity 143 can be adjusted by the pressure regulating valve 144, so as to adjust the adsorption force between each adsorption hole 142 and the battery piece, so as to adsorb and desorb multiple battery pieces at the same time.
Further, in order to facilitate the adjustment of the atmosphere in the oven cavity 111, a corresponding air extraction pipe and an air inlet pipe may be provided at the heating furnace 11, and the air extraction pipe and the air outlet pipe are respectively used for extracting the air in the oven cavity 111 and inputting the inert gas.
For example, the air inlet pipe may extend from the furnace wall at the first furnace opening 112 into the furnace chamber 111, the air exhaust pipe may extend from the furnace wall at the other furnace opening 112 into the furnace chamber 111, and both the air inlet pipe and the air exhaust pipe are hermetically connected to the furnace wall.
The particular arrangement of first and second operators 22, 24 is not limited in this application and the associated personnel may make corresponding adjustments as desired.
In one possible embodiment, the first and second handlers 22, 24 each include suction cups that are used to suction the battery cells for transfer.
Further, the first handler 22 further includes a screw and a guide rod. Both ends of the screw rod and the cutter bar are respectively positioned above the feeding ends of the first conveying belt 21 and the conveyor 13, and the sucker reciprocates along the axial direction of the screw rod. The second handler 24 may be provided in the same manner as the first handler 22.
Further, a cooling pipe may be provided at the discharge end of the conveyor 13 to cool the battery cells discharged from the oven cavity 111.
Further, a first storage table 25 and a second storage table 26 may be disposed at two ends of the conveyor 13, so as to buffer the battery pieces transferred by the first conveyor 22 and the second conveyor 24, so as to facilitate loading by using the carrier 14.
Further, a third conveyor may be provided to transfer the carriers 14 stored from the second storage stage 26 to the first storage stage 25 for carrying new battery pieces.
Further, the example of the present application also provides a method for manufacturing a solar cell, including:
the method comprises the steps of battery piece main body, copper plating seed layer, coating (front surface or back surface), drying, coating (back surface or front surface), drying, printing, developing, electroplating, removing film and light injection.
The battery piece body can be a silicon layer (an intrinsic amorphous silicon layer and a P-type amorphous silicon film layer are deposited on the front surface of the silicon substrate, and an intrinsic amorphous silicon layer and an N-type amorphous silicon film layer are deposited on the back surface of the silicon substrate) and a transparent conductive oxide film layer.
The copper plating seed layer is a copper metal layer deposited on the surface of the battery piece main body. Front side coating and back side coating refer to coating a photoresist layer on the copper seed layer.
The printing is to expose specific parts of the coated photoresist, and then remove the exposed photosensitive material during development to form a gate trench exposing part of the copper seed layer.
Wherein, electroplating is to electroplate copper grid lines in the grid line grooves; the film removing process is to remove the film on the surface layer of the battery piece after the copper grid line is electroplated and etch back the film, and remove the film in the non-grid line area.
The light injection process refers to that the cell piece after the film removal process is placed in a high-temperature environment of inert atmosphere for illumination, so that the conversion efficiency of the solar cell is improved.
Further, with the light injection system 1 provided in this example, the battery piece after film removal is placed at the feeding end of the conveyor 13, and then sent into the oven cavity 111, the oven door 113 is closed, and light injection is performed on the battery piece.
Further, when the light injection is performed, the temperature in the cavity 111 may be 100-300 ℃, the atmosphere condition in the cavity 111 may be adjusted to a nitrogen atmosphere, and then the surface of the battery sheet is irradiated with light having an intensity of 30-60 suns.
The specific process conditions before light injection are not limited, and related personnel can prepare the battery piece provided with the electroplated copper grid line by using a conventional copper interconnection technology, and then perform light injection on the battery piece under an inert atmosphere.
Further, by the above-described preparation method, the example of the present application also obtains a solar cell 200.
With continued reference to fig. 5, the solar cell 200 includes a cell body 203 and a copper grid 201 disposed on the cell body 203. Compared to the solar cell 200 obtained by the prior art manufacturing method of fig. 2, the present example provides a solar cell 200 in which the surface of the copper grid line 201 is free of copper oxide.
The working principle of the light injection system provided by the embodiment of the application is as follows:
two furnace openings 112 are respectively arranged at two ends of the furnace chamber 111 of the heating furnace 11, and a conveyor 13 is arranged in the heating furnace 11, so that battery pieces enter the furnace chamber 111 of the heating furnace 11 from one furnace opening 112 for light injection, and after light injection is completed, the battery pieces are moved out of the furnace chamber 111 of the heating furnace 11 from the other furnace opening 112, thereby improving the production efficiency of the light injection device 10.
And, at each of the oven openings 112, an oven door 113 for closing or exposing the oven cavity 111 is provided, and the battery piece to be light-injected may be placed on the conveyor 13 within the oven cavity 111, and then the oven door 113 is closed to form a sealed chamber. Then, the cavity 111 is evacuated, an inert atmosphere such as nitrogen is filled to adjust the atmosphere to normal pressure, then the temperature in the cavity 111 is raised, and the battery piece is irradiated by the implantation lamp 12 provided in the cavity 111 to perform light implantation.
Since the furnace chamber 111 for injecting light can be closed by the furnace door 113, the cell can be injected with light in an inert atmosphere, so that the oxidation probability of the copper grid line 201 is reduced, and the conversion efficiency of the solar cell 200 is improved.
The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the same, but rather, various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (10)
1. A method of manufacturing a solar cell, comprising:
forming a copper seed layer on the battery piece main body, and forming a photoresist layer on the copper seed layer; exposing and developing the photoresist layer to form a grid line groove exposing part of the copper seed layer; forming an electroplated copper grid line in the grid line groove, and removing the photoresist to obtain a battery piece; injecting light into the battery piece;
wherein the light injection comprises: and heating the battery piece and radiating light under an inert atmosphere.
2. The method of manufacturing a solar cell according to claim 1, wherein in the light injection step, the heating temperature is 100-300 ℃, and the intensity of the illumination radiation is 30-60suns;
optionally, the heating temperature is 200-220 ℃;
optionally, the inert atmosphere comprises nitrogen.
3. A solar cell characterized by being produced by the production method of a solar cell according to claim 1 or 2.
4. A light injection device for light injection of a copper grid line solar cell, comprising:
the heating furnace is internally provided with a furnace chamber, and both ends of the furnace chamber are provided with furnace openings; each furnace mouth is provided with a furnace door for selectively closing and exposing the furnace chamber;
the light injection lamp is arranged in the furnace chamber and used for irradiating the solar battery placed in the furnace chamber;
and the conveyor is arranged in the furnace chamber and is used for conveying the solar cells.
5. The light injection apparatus of claim 4 wherein said conveyor is a roller conveyor structure comprising a first side plate and a second side plate and a plurality of rollers disposed in spaced relation between said first side plate and said second side plate;
the two ends of the first side plate and the second side plate extend out of the furnace chamber from the furnace mouth respectively, and the first side plate and the second side plate are provided with two contact parts for contacting with the furnace wall of the heating furnace; each contact part is embedded in the furnace wall of the heating furnace close to the furnace mouth, and the top surface of the roller on two sides of each contact part along the radial direction is not lower than the furnace wall; the oven door is selectively in contact with the oven wall to close and expose the oven door.
6. The light injection apparatus of claim 5 wherein said light injection apparatus comprises a carrier by which said solar cells are placed on said drum; the carrier comprises a bearing plate and an adsorption hole arranged on the bearing plate.
7. The light injection apparatus of claim 6 wherein said carrier plate comprises a plurality of carrier portions, each of said carrier portions being provided with said adsorption holes.
8. The light injection apparatus of claim 7 wherein said carrier plate is internally provided with adsorption cavities, each of said adsorption holes being in communication with said adsorption cavity; and the cavity opening of the adsorption cavity is provided with a pressure regulating valve for selectively increasing or decreasing the pressure of the adsorption cavity so as to adsorb or desorb the solar cell.
9. A light injection system, comprising:
the light injection device of any one of claims 4-8; the conveyor has opposite first and second ends;
a first conveyor belt and a second conveyor belt are arranged at one end of the heating furnace;
the first operation machine moves to and from the first conveying belt and the first end, and the second operation machine moves to and from the second conveying belt and the second end, so as to transfer the solar cells;
optionally, a first storage table is arranged between the first conveyor belt and the first end;
optionally, a second storage table is disposed between the second conveyor belt and the second end.
10. The light injection system of claim 9 wherein said first and/or second manipulator comprises a screw, a guide bar, and a suction cup; the sucking disc is in threaded connection with the screw rod and is in sliding connection with the guide rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202310087012.1A CN116014036A (en) | 2023-01-30 | 2023-01-30 | Solar cell, preparation method thereof, light injection device and light injection system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310087012.1A CN116014036A (en) | 2023-01-30 | 2023-01-30 | Solar cell, preparation method thereof, light injection device and light injection system |
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