CN108548608A - A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor and preparation method thereof - Google Patents
A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor and preparation method thereof Download PDFInfo
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- CN108548608A CN108548608A CN201810352311.2A CN201810352311A CN108548608A CN 108548608 A CN108548608 A CN 108548608A CN 201810352311 A CN201810352311 A CN 201810352311A CN 108548608 A CN108548608 A CN 108548608A
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- thermopile
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/028—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples using microstructures, e.g. made of silicon
Abstract
A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor of the present invention and preparation method thereof, belongs to film heat flux sensor technical field；Provide that electric potential signal and high sensitivity, response time are short, steady operation and can realize the 3D write-through aluminium oxide ceramics film heat flux sensors and preparation method thereof that thermoelectrical potential signal stabilization is read in the high temperature environment；Technical solution is：A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor, including upper temperature gradient separation layer, upper thermopile, positive extraction electrode, connector, micro-ceramic substrate, lower thermopile, cathode extraction electrode and lower temperature gradient separation layer, the upper surface of micro-ceramic substrate is equipped with the upper thermopile that 3D printing generates, temperature gradient separation layer is coated with above upper thermopile, the lower surface of micro-ceramic substrate is equipped with the lower thermopile that 3D printing generates, and lower temperature gradient separation layer is coated with above lower thermopile；The present invention can be used for temperature gradient fields of measurement.
Description
Technical field
The present invention relates to a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensors and preparation method thereof, belong to film heat
Flow sensor technical field.
Background technology
Heat flow transducer determines the hot-fluid parameter by object by measuring the temperature gradient of object.Current thermal-flow sensor
Device is divided into two kinds of heat flow transducers of round foil and diaphragm type, and the circular foil heat flux transducer response time is long, is more than centainly to use work
Water cooling is needed as temperature so that device volume is larger；In contrast, diaphragm type sensor thermoelectrical potential weak output signals are not
It is easily identified and differentiates by instrument, in addition, diaphragm type sensing sensitivity is smaller, error is big.One kind of patent CN203643055U reports
The thermoelectric pile Limited Number integrated for the film heat flux sensor of the big heat-flow measurement of high temperature, temperature gradient thermal boundary layer material is because leading
Hot coefficient is big so that the temperature gradient very little generated so that and thermopile thermoelectric gesture output signal strength is limited, so that
Output sensitivity very little proposes very high request to data acquisition instrument；In addition, the manufacture craft of the sensor and its lead is numerous
Miscellaneous, lead is easy to soften and poor contact at high temperature.In addition, the thermopile of diaphragm type heat flow transducer is usually placed in list
Layer, sensitivity need to be further increased.
Invention content
A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor of the present invention and preparation method thereof, overcomes the prior art
Existing deficiency, provide electric potential signal and high sensitivity, response time it is short, can be in steady operation in the high temperature environment and realization
The 3D write-through aluminium oxide ceramics film heat flux sensors and preparation method thereof that thermoelectrical potential signal stabilization is read.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：A kind of 3D write-throughs aluminium oxide ceramics is thin
Film heat flow transducer, including upper temperature gradient separation layer, upper thermopile, positive extraction electrode, connector, micro-ceramic base
The upper surface of bottom, lower thermopile, cathode extraction electrode and lower temperature gradient separation layer, micro-ceramic substrate is equipped with 3D printing
The upper thermopile generated is coated with temperature gradient separation layer, the lower surface of micro-ceramic substrate above upper thermopile
Equipped with the lower thermopile that 3D printing generates, lower temperature gradient separation layer is coated with above lower thermopile, upper thermopile is logical
It crosses connector with lower thermopile to be connected, positive extraction electrode is connected with upper thermopile, cathode extraction electrode and lower thermocouple
Heap is connected.
Further, the upper thermopile includes upper positive thermopile and upper cathode thermopile, upper anode thermocouple
Heap is connected with upper cathode thermopile, and the anode extraction electrode is connected with the upper positive thermopile；The lower thermocouple
Heap includes lower cathode thermopile and lower positive thermopile, and lower cathode thermopile is connected with lower positive thermopile, described
Cathode extraction electrode is connected with lower cathode thermopile.
Further, in the positive thermocouple and a upper cathode thermopile in a upper positive thermopile
Cathode thermocouple connect to form a pair of of thermocouple, multipair thermocouple ending is connected, and thermocouple is to being looped around the micron
The hot-fluid sensitizing range of grade ceramic bases upper surface.
Further, in the positive thermocouple and a lower cathode thermopile in a lower positive thermopile
Cathode thermocouple connect to form a pair of of thermocouple, multipair thermocouple ending is connected, and thermocouple is to being looped around the micron
The hot-fluid sensitizing range of grade ceramic bases lower surface.
Further, the thermocouple is to including the different C-shaped thermocouple circle of multiple diameters.
Further, the number of turns of the C-shaped thermocouple circle is 6.
Further, the material that the upper thermopile and the lower thermopile are selected is platinum -10 thermocouple of platinum rhodium, anode
The material that extraction electrode is selected is platinum, and the material that cathode extraction electrode is selected is platinum rhodium 10.
Further, the material that the upper thermopile and the lower thermopile are selected is gold-gold-palladium thermocouple, and anode draws
The material for going out electrode selection is gold, and the material that cathode extraction electrode is selected is gold-palladium.
Further, the connector material therefor and the material used in the positive extraction electrode or the cathode extraction electrode
Expect identical.
A kind of production method of above-mentioned 3D write-throughs aluminium oxide ceramics film heat flux sensor, includes the following steps：
S1. the via in 3D printer ceramic nozzle alignment micro-ceramic substrate is used, via is filled using molten metal,
It is cooled to room temperature to form connector；
S2. use the alignment positioning of 3D printer ceramic nozzle, in the micron-scale the positive thermocouple of upper epidermis printing of ceramic bases and
Positive extraction electrode, is cooled to room temperature；
S3. the alignment positioning of 3D printer ceramic nozzle is used, the upper epidermis of ceramic bases prints cathode thermocouple in the micron-scale,
So that cathode thermocouple is connected with connector, is cooled to room temperature；
S4. use 3D printer ceramic nozzle alignment positioning, in the micron-scale ceramic bases layer printing cathode thermocouple and
Cathode extraction electrode, is cooled to room temperature；
S5. the alignment positioning of 3D printer ceramic nozzle is used, in the micron-scale the positive thermocouple of layer printing of ceramic bases,
So that positive thermocouple is connected with connector, is cooled to room temperature；
S6. the corresponding mask plate of use, which is aligned, goes up thermopile, brushing high temperature heat-resistant thermal insulation coatings, and thermopile is complete in covering
Portion's cold junction point, temperature gradient separation layer in formation, then heats to 300 DEG C of drying；
S7. it is directed at lower thermopile using corresponding mask plate, brushing high temperature heat-resistant thermal insulation coatings cover the complete of lower thermopile
Portion's cold junction point forms lower temperature gradient separation layer, then heats to 300 DEG C of drying；
S8. the micro-ceramic substrate for being painted with high temperature heat-resistant thermal insulation coatings is sintered in sintering furnace at 500 DEG C 1 hour at
Type, thin film sensor complete.
Compared with prior art, the device have the advantages that being：The present invention is made pottery using thickness for micron grade aluminum oxide
Porcelain substrate and refractory metal enable heat flow transducer that heat flow transducer to be enable to realize high response frequency in the high temperature environment in work
Rate works；The film metal thickness printed using 3D direct writes is uniform and thin, not only simple for process, but also will improve hot-fluid and pass
The response frequency of sensor and the stable reading for realizing thermoelectrical potential signal；The sensor of design, which is extraction, to be made at filament extraction electrode
In low-temperature space, it can be achieved that stablizing for thermoelectrical potential signal is read；The thermocouple printed using 3D direct writes makes it be recycled for film
Around series model, 3D is integrated with intensive thermocouple arrays structure in limited areal, the high temperature resistant for selecting thermal coefficient very low
Heat insulating coatings and Dual-layer temperature gradient separation layer heat-insulation and heat-preservation generate big temperature gradient, three's synergistic effect heat outputting
Potential increases, so that sensitivity increases.
Description of the drawings
Fig. 1 is the front view of the embodiment of the present invention.
Fig. 2 is the vertical view of the embodiment of the present invention.
Fig. 3 is the explosive view of the embodiment of the present invention.
Fig. 4 is the process flow chart of production method of the embodiment of the present invention.
Fig. 5 is the test wiring schematic diagram of the embodiment of the present invention.
In figure, the upper temperature gradient separation layers of 1-, the upper positive thermopiles of 2-, 3- anode extraction electrodes, the upper cathode thermoelectricity of 4-
Even heap, 5- connectors, 6- micro-ceramic substrates, cathode thermopile under 7-, 8- cathode extraction electrodes, positive thermocouple under 9-
Heap, temperature gradient separation layer under 10-, 11- hot-fluids sensitizing range, 12- extraction electrode lead-out area, 13- silver wires, 14- thermoelectricity
Gesture reads equipment.
Specific implementation mode
Following further describes the present invention with reference to the drawings.
As shown in Figure 1-Figure 3, a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor of the present invention, including upper temperature ladder
Degree separation layer 1, upper thermopile, positive extraction electrode 3, connector 5, micro-ceramic substrate 6, lower thermopile, cathode draw
Go out electrode 8 and lower temperature gradient separation layer 10, the upper surface of micro-ceramic substrate 6 is equipped with the upper thermocouple that 3D printing generates
Heap, temperature gradient separation layer 1 is coated with above upper thermopile, and the lower surface of micro-ceramic substrate 6 is given birth to equipped with 3D printing
At lower thermopile, be coated with lower temperature gradient separation layer 10 above lower thermopile, upper thermopile by connector 5 with
Lower thermopile is connected, and positive extraction electrode 3 is connected with upper thermopile, and cathode extraction electrode 8 is connected with lower thermopile.Even
5 material therefor of fitting and the material identical used in positive extraction electrode 3 or cathode extraction electrode 8.
The material that upper temperature gradient separation layer 1 and lower temperature gradient separation layer 10 are selected is thermostable heat-isolating nanometer gas
Phase silicon dioxide compound micro mist, thickness 1mm.The material that micro-ceramic substrate 6 is selected is aluminium oxide ceramics.
Upper thermopile includes upper positive thermopile 2 and upper cathode thermopile 4, upper anode thermopile 2 and upper negative
Pole thermopile 4 is connected, and positive extraction electrode 3 is connected with upper positive thermopile 2；Lower thermopile includes lower cathode thermocouple
Heap 7 and lower positive thermopile 9, lower cathode thermopile 7 are connected with lower positive thermopile 9, and cathode extraction electrode 8 is born with lower
Pole thermopile is connected.
The cathode thermocouple in positive thermocouple and a upper cathode thermopile 4 in one upper positive thermopile 2
Series connection forms a pair of of thermocouple, and multipair thermocouple ending is connected, and thermocouple is to being looped around 6 upper surface of micro-ceramic substrate
Hot-fluid sensitizing range 11.It is negative in positive thermocouple and a lower cathode thermopile 7 under one in positive thermopile 9
Very hot galvanic couple connects to form a pair of of thermocouple, and multipair thermocouple ending is connected, and thermocouple is to being looped around micro-ceramic base
The hot-fluid sensitizing range 11 of 6 lower surface of bottom.Thermocouple is to including the different C-shaped thermocouple circle of 6 diameters.To realize limited areal
Film thermopile electrode design is by multipair thermocouple electricity by the output of the big thermoelectrical potential signal of interior film filament thermoelectric pile electrode
Pole Cyclic Rings are around concatenated structure so that thermocouple probes are paved with the face of entire thermopile substrate up and down in limited areal
Product forms space thermocouple electrod-array.
When the material that upper thermopile and lower thermopile are selected is platinum-platinum 10 thermocouple of rhodium, positive extraction electrode 3 selects
Material is platinum, and the material that cathode extraction electrode 8 is selected is platinum rhodium 10.
When the material that upper thermopile and lower thermopile are selected is gold-gold-palladium thermocouple, what positive extraction electrode 3 was selected
Material is gold, and the material that cathode extraction electrode 8 is selected is gold-palladium.
As shown in figure 4, the present invention also provides a kind of systems of above-mentioned 3D write-throughs aluminium oxide ceramics film heat flux sensor
Make method, includes the following steps：
S1. the via in 3D printer ceramic nozzle alignment micro-ceramic substrate is used, via is filled using molten metal,
It is cooled to room temperature to form connector；
S2. use the alignment positioning of 3D printer ceramic nozzle, in the micron-scale the positive thermocouple of upper epidermis printing of ceramic bases and
Positive extraction electrode, is cooled to room temperature；
S3. the alignment positioning of 3D printer ceramic nozzle is used, the upper epidermis of ceramic bases prints cathode thermocouple in the micron-scale,
So that cathode thermocouple is connected with connector, is cooled to room temperature；
S4. use 3D printer ceramic nozzle alignment positioning, in the micron-scale ceramic bases layer printing cathode thermocouple and
Cathode extraction electrode, is cooled to room temperature；
S5. the alignment positioning of 3D printer ceramic nozzle is used, in the micron-scale the positive thermocouple of layer printing of ceramic bases,
So that positive thermocouple is connected with connector, is cooled to room temperature；
S6. the corresponding mask plate of use, which is aligned, goes up thermopile, brushing high temperature heat-resistant thermal insulation coatings, and thermopile is complete in covering
Portion's cold junction point, temperature gradient separation layer in formation, then heats to 300 DEG C of drying；
S7. it is directed at lower thermopile using corresponding mask plate, brushing high temperature heat-resistant thermal insulation coatings cover the complete of lower thermopile
Portion's cold junction point forms lower temperature gradient separation layer, then heats to 300 DEG C of drying；
S8. the micro-ceramic substrate for being painted with high temperature heat-resistant thermal insulation coatings is sintered in sintering furnace at 500 DEG C 1 hour at
Type, thin film sensor complete.
As shown in figure 5, reading signal, extraction electrode and thermocouple to improve sensor response frequency and stablizing for thermoelectrical potential
The electrode of heap uses 3D direct-write process.Micro-ceramic substrate 6 be thermopile electrode and extraction electrode and lower temperature gradient every
Absciss layer 10 provides attachment and supporting function, to realize thermopile electrode and extraction electrode technique, and increases lower temperature gradient
The adhesive ability of separation layer 10,6 upper surface polishing treatment of micro-ceramic substrate, in addition, 6 structure design of micro-ceramic substrate
For extraction shape, which is divided into hot-fluid sensitizing range 11 and extraction electrode lead-out area 12, and extraction electrode is drawn
Region 12 is longer so that working as sensor sensing regional work at high temperature, extraction electrode lead-out area 12 can maintain lower temperature side
Just it uses silver wire 13 to connect extraction electrode and realize and stablizes reading signal.
This sensor reads equipment 14 at work, by the extraction electrode for being in cold end region connection thermoelectrical potential and is led by silver
Line 13 stablizes the thermoelectrical potential signal for reading sensor.To realize the output of the big thermoelectrical potential signal of thermoelectric pile in limited areal, on
Lower temperature gradient separation layer selects the thermostable heat-isolating nano-gas-phase silicon dioxide compound micro mist of thermal coefficient 0.03, up and down temperature
It is covered in by mask plate printing on thermopile electrode degree gradient separation layer, leads to an each pair of thermocouple part in sensor
It is exposed, directly incude extraneous hot-fluid and temperature, another part is capped to be embedded in temperature gradient separation layer and micro-ceramic substrate
Between material, when sensor is in for testing hot-fluid, be covered with temperature gradient separation layer thermoelectric pile electrode with it is exposed thin
The big temperature gradient perpendicular to hot-fluid will be formed between thermoelectric pile electrode, this will be with Cyclic Rings intensive thermoelectricity made of concatenated
The thermoelectrical potential signal that heap electrode synergistic effect keeps heat flow transducer big, so that measurement sensitivity gets a promotion.
Although being particularly shown and describing the present invention, those skilled in the art with reference to its exemplary embodiment
It should be understood that in the case where not departing from the spirit and scope of the present invention defined by claim, form can be carried out to it
With the various changes in details.
Claims (10)
1. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor, it is characterised in that：Including upper temperature gradient separation layer
（1）, upper thermopile, positive extraction electrode（3）, connector（5）, micro-ceramic substrate（6）, lower thermopile, cathode draw
Go out electrode（8）With lower temperature gradient separation layer（10）, micro-ceramic substrate（6）Upper surface be equipped with 3D printing generate upper heat
Galvanic couple heap is coated with temperature gradient separation layer above upper thermopile（1）, micro-ceramic substrate（6）Lower surface be equipped with
The lower thermopile that 3D printing generates is coated with lower temperature gradient separation layer above lower thermopile（10）, upper thermopile is logical
Cross connector（5）It is connected with lower thermopile, positive extraction electrode（3）It is connected with upper thermopile, cathode extraction electrode（8）With
Lower thermopile is connected.
2. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 1, it is characterised in that：It is described
Upper thermopile includes upper positive thermopile（2）With upper cathode thermopile（4）, upper anode thermopile（2）With upper cathode
Thermopile（4）It is connected, the anode extraction electrode（3）With the upper positive thermopile（2）It is connected；The lower thermopile
Including lower cathode thermopile（7）With lower positive thermopile（9）, lower cathode thermopile（7）With lower positive thermopile（9）
It is connected, the cathode extraction electrode（8）It is connected with lower cathode thermopile.
3. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 1, it is characterised in that：One
The upper positive thermopile（2）In positive thermocouple and a upper cathode thermopile（4）In cathode thermocouple
Series connection forms a pair of of thermocouple, and multipair thermocouple ending is connected, and thermocouple is to being looped around the micro-ceramic substrate（6）
The hot-fluid sensitizing range of upper surface（11）.
4. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 1, it is characterised in that：One
The lower positive thermopile（9）In positive thermocouple and a lower cathode thermopile（7）In cathode thermocouple
Series connection forms a pair of of thermocouple, and multipair thermocouple ending is connected, and thermocouple is to being looped around the micro-ceramic substrate（6）
The hot-fluid sensitizing range of lower surface（11）.
5. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 3 or 4, it is characterised in that：
The thermocouple is to including the different C-shaped thermocouple circle of multiple diameters.
6. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 5, it is characterised in that：It is described
The number of turns of C-shaped thermocouple circle is 6.
7. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 1, it is characterised in that：It is described
The material that upper thermopile and the lower thermopile are selected is platinum -10 thermocouple of platinum rhodium, positive extraction electrode（3）The material of selection
Material is platinum, cathode extraction electrode（8）The material of selection is platinum rhodium 10.
8. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 1, it is characterised in that：It is described
The material that upper thermopile and the lower thermopile are selected is gold-gold-palladium thermocouple, positive extraction electrode（3）The material of selection
For gold, cathode extraction electrode（8）The material of selection is gold-palladium.
9. a kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor according to claim 7 or 8, it is characterised in that：
The connector（5）Material therefor and the positive extraction electrode（3）Or the cathode extraction electrode（8）Material phase used
Together.
10. a kind of system according to a kind of any 3D write-throughs aluminium oxide ceramics film heat flux sensors of claim 1-9
Make method, it is characterised in that include the following steps：
S1. the via in 3D printer ceramic nozzle alignment micro-ceramic substrate is used, via is filled using molten metal,
It is cooled to room temperature to form connector；
S2. use the alignment positioning of 3D printer ceramic nozzle, in the micron-scale the positive thermocouple of upper epidermis printing of ceramic bases and
Positive extraction electrode, is cooled to room temperature；
S3. the alignment positioning of 3D printer ceramic nozzle is used, the upper epidermis of ceramic bases prints cathode thermocouple in the micron-scale,
So that cathode thermocouple is connected with connector, is cooled to room temperature；
S4. use 3D printer ceramic nozzle alignment positioning, in the micron-scale ceramic bases layer printing cathode thermocouple and
Cathode extraction electrode, is cooled to room temperature；
S5. the alignment positioning of 3D printer ceramic nozzle is used, in the micron-scale the positive thermocouple of layer printing of ceramic bases,
So that positive thermocouple is connected with connector, is cooled to room temperature；
S6. the corresponding mask plate of use, which is aligned, goes up thermopile, brushing high temperature heat-resistant thermal insulation coatings, and thermopile is complete in covering
Portion's cold junction point, temperature gradient separation layer in formation, then heats to 300 DEG C of drying；
S7. it is directed at lower thermopile using corresponding mask plate, brushing high temperature heat-resistant thermal insulation coatings cover the complete of lower thermopile
Portion's cold junction point forms lower temperature gradient separation layer, then heats to 300 DEG C of drying；
S8. the micro-ceramic substrate for being painted with high temperature heat-resistant thermal insulation coatings is sintered in sintering furnace at 500 DEG C 1 hour at
Type, thin film sensor complete.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810352311.2A CN108548608A (en) | 2018-04-19 | 2018-04-19 | A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor and preparation method thereof |
| PCT/CN2019/082819 WO2019201229A1 (en) | 2018-04-19 | 2019-04-16 | 3d direct-writing aluminum oxide ceramic film heat-flow sensor and manufacturing method therefor |
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| CN201810352311.2A CN108548608A (en) | 2018-04-19 | 2018-04-19 | A kind of 3D write-throughs aluminium oxide ceramics film heat flux sensor and preparation method thereof |
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| CN109959463A (en) * | 2019-03-12 | 2019-07-02 | 哈尔滨理工大学 | A kind of fast-response redundancy membrane type thermocouple |
| WO2019201229A1 (en) * | 2018-04-19 | 2019-10-24 | 中北大学 | 3d direct-writing aluminum oxide ceramic film heat-flow sensor and manufacturing method therefor |
| CN110954234A (en) * | 2019-12-18 | 2020-04-03 | 厦门大学 | Polymer precursor ceramic film RTD and preparation method thereof |
| CN111024269A (en) * | 2019-12-25 | 2020-04-17 | 中国计量大学 | Planar heat flow sensor for measuring heat flow along wall surface and calibration method thereof |
| CN112643049A (en) * | 2020-12-04 | 2021-04-13 | 中国科学院力学研究所 | 3D printing manufacturing method and device for thermocouple transient heat flow sensor |
| CN113526975A (en) * | 2020-04-16 | 2021-10-22 | 中国石油天然气股份有限公司 | Alumina carrier material with gradient structure and 3D printing forming method thereof |
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| WO2019201229A1 (en) * | 2018-04-19 | 2019-10-24 | 中北大学 | 3d direct-writing aluminum oxide ceramic film heat-flow sensor and manufacturing method therefor |
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| CN113526975A (en) * | 2020-04-16 | 2021-10-22 | 中国石油天然气股份有限公司 | Alumina carrier material with gradient structure and 3D printing forming method thereof |
| CN112643049A (en) * | 2020-12-04 | 2021-04-13 | 中国科学院力学研究所 | 3D printing manufacturing method and device for thermocouple transient heat flow sensor |
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| WO2019201229A1 (en) | 2019-10-24 |
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