CN208206329U - A kind of self-calibration film thermocouple - Google Patents
A kind of self-calibration film thermocouple Download PDFInfo
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- CN208206329U CN208206329U CN201820884600.2U CN201820884600U CN208206329U CN 208206329 U CN208206329 U CN 208206329U CN 201820884600 U CN201820884600 U CN 201820884600U CN 208206329 U CN208206329 U CN 208206329U
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- thermocouple
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Abstract
The utility model discloses a kind of self-calibration film thermocouples.Once plating is formed with golden pole and platinode to the utility model on insulating bottom layer, and the node of two contact electrodes is hot thermocouple node；Golden pole, platinode and the hot thermocouple node is known as thermocouple；The thermocouple concatenates the semicircular arc film platinum resistor there are two different radii on platinode, and the center of circle of the semicircular arc film platinum resistor is located at the center of hot thermocouple node.The self-calibration film thermocouple of the utility model is integrated with a golden platinum film thermocouple and two film platinum resistors, and the temperature combination temperature prediction model when demarcating film thermocouple according to film platinum resistor can realize that film thermocouple hot junction temperature calculates.
Description
Technical field
The utility model belongs to surface temperature measurement field, is related to a kind of self-calibration film thermocouple.
Background technique
In accelerated surface field of temperature measurement, film thermocouple can be used for high precision transient since thermal capacitance is small, fast response time
Surface temperature measurement.Accurate calibration film thermocouple static characteristic is to realize that high precision transient surface is surveyed using film thermocouple
The premise of temperature.The standard calibration method of traditional armoured thermocouple is currently generallyd use to the static demarcating method of film thermocouple,
But there are some problems when by this method applied to film thermocouple, affect film thermocouple surface temperature to a certain extent
Measurement.
Summary of the invention
In view of the shortcomings of the prior art, the utility model provides a kind of self-calibration film thermocouples.
The technical solution adopted in the utility model is:
Once plating is formed with golden pole and platinode to the utility model on insulating bottom layer, and the node of two contact electrodes is thermoelectricity
Even hot junction；Golden pole, platinode and the hot thermocouple node is known as thermocouple.
The thermocouple concatenates the semicircular arc film platinum resistor there are two different radii, the semi arch on platinode
The center of circle of shape film platinum resistor is located at the center of hot thermocouple node.
Golden pole and platinode in the thermocouple are connected by lead with signal processing circuit, realize film thermocouple heat
Potential measurement.
Two film platinum resistors in the thermocouple are connected by lead with signal processing circuit, realize film platinum electricity
Hinder four-line measurement.
Furtherly, the purity of the lead material of the golden pole in the thermocouple, platinode and film platinum resistor is 99.99%.
Furtherly, the insulating bottom layer uses aluminium oxide.
The utility model has the beneficial effect that the self-calibration film thermocouple of the utility model is integrated with a golden platinum
Two film platinum resistors of thin film thermoelectric even summation are calculated when demarcating film thermocouple according to the temperature combination temperature of film platinum resistor
Model can realize that film thermocouple hot junction temperature calculates.
Detailed description of the invention
Fig. 1 is the overall structure top view of self-calibration film thermocouple.
Fig. 2 is the temperature resistance value curve graph of film platinum resistor PRT1.
Fig. 3 is the temperature resistance value curve graph of film platinum resistor PRT2.
Fig. 4 is the pyroelecthc properties curve graph of film thermocouple.
Specific embodiment
The utility model is further described with reference to the accompanying drawing:
The utility model is once coated with golden pole and platinode on insulating bottom layer, and the node of two contact electrodes is thermocouple
Hot junction.Wherein golden pole, platinode and hot thermocouple node are known as thermocouple, and the thermocouple is printed on by electronic printing technique
On insulating ceramic base.The thermocouple devises the semicircular arc film platinum resistor of two different radiis on platinode.It is described
The golden pole of thermocouple and platinode are connected by lead with signal processing circuit, realize the measurement of film thermocouple thermoelectrical potential.It is described
Two film platinum resistors in thermocouple are connected by lead with signal processing circuit, realize that film platinum resistor four-wire system is surveyed
Amount.The lead of golden pole, platinode and film platinum resistor in the thermocouple is all made of gold, the platinum lead that purity is 99.99%, leads to
Welding procedure is crossed to be connected with pin.Two film platinum resistors in the thermocouple are carrying out static mark to film thermocouple
Timing realizes the reckoning of film thermocouple hot junction temperature for measuring the temperature at two different radiis.
Embodiment:
As shown in Figure 1, in the present embodiment self-calibration film thermocouple by golden platinum hot junction 1-1, platinode 1-2, gold pole 1-3,
Semicircular arc film platinum resistor PRT1 and PRT2(1-4,1-5), gold pole pin 1-6, platinode pin (1-7,1-8,1-9,1-10,
1-11) formed with alumina substrate 1-12.The basal diameter of self-calibration film thermocouple is 22mm, and substrate is using aluminium oxide
Ceramic material, thermal conductivity are 36W/m ﹒ K.The golden pole of film thermocouple and platinode are located at the upper surface of substrate, golden pole and platinode film
Thick 0.25mm, the extremely wide 0.3mm of golden platinum electrode (1-3 and 1-2).Golden pole and platinode intersection constitute golden platinum hot junction, golden platinum heat
Node is located at the center location of round ceramic substrate, and area is 0.3mm × 0.3mm.The concentric radius of circle of two film platinum resistors
Respectively 3.95mm and 6.35mm, film platinum resistor (1-4,1-5) and its extremely wide 0.1mm of lead.
Temperature value relatable such as Fig. 2 and Fig. 3 of two film platinum resistors PRT1 and PRT2 in self-calibration film thermocouple
Shown, the linearity is good.
Pyroelecthc properties curve that film thermocouple obtains is demarcated such as by static characteristic scaling method based on temperature extrapolation
It is good in the pyroelecthc properties of room temperature to film thermocouple in 200 degrees Celsius shown in Fig. 4.Wherein the static state based on temperature extrapolation is special
Property scaling method principle be: using laser heating film thermocouple hot junction provide steady temperature field as demarcate driving source, root
Realize that film thermocouple temperature calculates according to integrated thin-film platinum resistance combination temperature Extrapolating model in sensor, according to digital quadrature solution
Conditioning technology synchro measure film platinum resistor resistance value and film thermocouple thermoelectrical potential realize the calibration of film thermocouple static characteristic.
The self-calibration film thermocouple advantage of the utility model includes:
(1) the film thermocouple static characteristic calibration based on temperature extrapolation method can be achieved.It is devised on platinode two thin
Film platinum resistance can pass through film platinum resistor when static demarcating and realize that hot junction temperature calculates, accurate calibration film thermocouple is static
Characteristic improves its temperature measurement accuracy.
(2) room temperature (20 DEG C) is good to 200 DEG C of pyroelecthc properties.It can from film thermocouple pyroelecthc properties curve obtained by calibrating
Know, film thermocouple is good to 200 DEG C of pyroelecthc properties at room temperature (20 DEG C).
(3) film platinum resistor pyroelecthc properties are good.The pyroelecthc properties of film platinum resistor are good, help to improve reckoning film
The precision of electric thermo-couple temperature.
The utility model set forth a kind of self-calibration film thermocouple, and golden platinum film thermocouple is made of golden pole and platinode,
The semicircular arc film platinum resistor that two different radiis are devised on platinode can be realized by two film platinum resistors based on temperature
The film thermocouple static characteristic scaling method for pushing manipulation of being outside one's consideration, the pyroelecthc properties of accurate calibration film thermocouple.Outside based on temperature
The calibration result of pushing manipulation shows, the heat when room temperature (20 DEG C) is to 200 DEG C of the film thermocouple in self-calibration film temperature sensor
Electrical characteristics are good, and integrated film platinum resistor pyroelecthc properties are also good.
Claims (3)
1. a kind of self-calibration film thermocouple, which is characterized in that once plating is formed with golden pole and platinode, two electrodes on insulating bottom layer
The node being in contact is hot thermocouple node；
Golden pole, platinode and the hot thermocouple node is known as thermocouple；
The thermocouple concatenates the semicircular arc film platinum resistor there are two different radii on platinode, and the semicircular arc is thin
The center of circle of film platinum resistance is located at the center of hot thermocouple node；
Golden pole and platinode in the thermocouple are connected by lead with signal processing circuit, realize film thermocouple thermoelectrical potential
Measurement；
Two film platinum resistors in the thermocouple are connected by lead with signal processing circuit, realize film platinum resistor four
The measurement of line system.
2. a kind of self-calibration film thermocouple according to claim 1, which is characterized in that golden pole in the thermocouple,
The purity of the lead material of platinode and film platinum resistor is 99.99%.
3. a kind of self-calibration film thermocouple according to claim 1, which is characterized in that the insulating bottom layer uses oxygen
Change aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820884600.2U CN208206329U (en) | 2018-06-08 | 2018-06-08 | A kind of self-calibration film thermocouple |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820884600.2U CN208206329U (en) | 2018-06-08 | 2018-06-08 | A kind of self-calibration film thermocouple |
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| CN208206329U true CN208206329U (en) | 2018-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820884600.2U Active CN208206329U (en) | 2018-06-08 | 2018-06-08 | A kind of self-calibration film thermocouple |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109945993A (en) * | 2019-04-12 | 2019-06-28 | 中国计量大学 | A kind of self-calibration film thermocouple array with cathode common features |
| CN111128681A (en) * | 2019-12-24 | 2020-05-08 | 苏州晋宇达实业股份有限公司 | Manufacturing method of temperature measurement silicon wafer and temperature measurement silicon wafer |
-
2018
- 2018-06-08 CN CN201820884600.2U patent/CN208206329U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109945993A (en) * | 2019-04-12 | 2019-06-28 | 中国计量大学 | A kind of self-calibration film thermocouple array with cathode common features |
| CN109945993B (en) * | 2019-04-12 | 2021-04-30 | 中国计量大学 | Self-calibration thin film thermocouple array with negative electrode sharing characteristic |
| CN111128681A (en) * | 2019-12-24 | 2020-05-08 | 苏州晋宇达实业股份有限公司 | Manufacturing method of temperature measurement silicon wafer and temperature measurement silicon wafer |
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