CN108508344A - Adjustable length arm and MEMS sensor equipment rotary test instruments - Google Patents
Adjustable length arm and MEMS sensor equipment rotary test instruments Download PDFInfo
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- CN108508344A CN108508344A CN201710110854.9A CN201710110854A CN108508344A CN 108508344 A CN108508344 A CN 108508344A CN 201710110854 A CN201710110854 A CN 201710110854A CN 108508344 A CN108508344 A CN 108508344A
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- material component
- imprinting
- feeding material
- feeding
- rotating device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- Manufacturing & Machinery (AREA)
- Radar, Positioning & Navigation (AREA)
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Abstract
The present invention provides a kind of adjustable length arm and MEMS sensor equipment rotary test instruments, its pars contractilis being equipped with by a rotating device one end and the first rotation body and the second rotation body are with the feeding position of efficient transformation first feeding material component, so that the feeding material component can be into row matrix feeding, the feeding style in annular feeding or other paths, and, workbench is equipped with an at least rotating part, the one side of the rotating part is equipped with multiple operation posts, so, the position of each operation post can be converted by the rotating part annular, the effect of more effectively to reach quick imprinting or test, in addition, the periphery of each operation post is equipped with a turning part, each operation post can be effectively overturn by the turning part, with the inertia component of a variety of different microelectromechanical-systems of validity test (MEMS).
Description
Technical field
The present invention relates to a kind of adjustable length arms and MEMS sensor equipment rotary test instruments, refer in particular to a kind of logical
Crossing pars contractilis, the first rotation body and the second rotation body or third rotation body and the 4th rotation body the first feeding material component of efficient transformation or second can send
The feeding position for expecting component, the position of each operation post can be arbitrarily converted by rotating part, in addition, can also be overturn by the turning part
Operation post, in favor of the test equipment of the inertia component of a variety of different microelectromechanical-systems (MEMS) of test.
Background technology
When the general action for carrying out IC imprintings, it need to usually first pass through feeding portion and send the IC of non-imprinting to after setting material portion, then
The feeding suction nozzle being equipped with by a rotating arm one end is moved in operation post with to be set the IC of non-imprinting in material portion and is carved
The feeding suction nozzle that record, and after the completion of the IC imprintings, one end of the rotating arm or the other end are equipped with can then be moved to the operation
On standing, the IC that imprinting is completed in operation post taking-ups are moved to feed zone, are recycled with this to complete the operation of IC imprintings.
However, the working path of the rotating arm is only acted by the route along an annular, in this way, its operation post is set
Seated position is also only capable of, on the circular path of the rotating arm, just can effectively carrying out the action of imprinting IC.
Also, the IC for the IC or non-imprinting that either imprinting is completed all is only capable of the feeding being equipped with by the rotating arm
Suction nozzle carries out the action sent, and if when thering are the IC imprintings farther out of a closer IC and one to complete simultaneously, the rotating arm is necessary
Another remote position is rotated again behind rotation to a closer position, is likely to complete the operation of feeding, in this way, such slower
Operating efficiency is also a kind of waste of time cost.
Therefore, the present inventor with inventing a kind of adjustable length arm with MEMS sensors in view of the above shortcomings, set
Standby rotary test instrument, so as to reach increase operating efficiency, save cost and can validity test microelectromechanical-systems (MEMS) phase
Component and other effects is closed, so as to the defect for existing product of forgoing, promotes its effect.
Invention content
For achieve the above purposes, the present invention provides a kind of adjustable length arm and MEMS sensor equipment rotary test instrument
Device includes mainly：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, which can carry out up and down
And the action of moving in rotation, after first feeding material component is moved to above the material placing area, first feeding material component can carry out to
The action of lower movement is to draw the IC of non-imprinting in the material placing area, and the action then moved up again is with its mobile non-imprinting
IC；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, and the one side of the operation post is equipped with an operation
Portion, after first feeding material component draws the non-imprinting IC in the material placing area, which then can be by first feeding material component
It is moved to the adjacent of the operation post, then adjusts the position of first feeding material component by the first rotation body and the second rotation body again
It sets and carries out imprinting so that the IC of its non-imprinting to be positioned in the homework department, pass through first feeding material component again after the completion of IC imprintings
The IC that imprinting is completed is moved to a discharging portion out of this homework department, acted with this repeatedly fed, imprinting or discharging
Work.
Rotating device as described above, wherein the rotating device one end is also further provided with one first rotation body, first rotation
The body other end is pivotally connected one end of one second rotation body, which connects first feeding material component, the rotating device with
Hollow motor combination hollow type speed reducer is as driving source.
Rotating device as described above, wherein the rotating device other end is equipped with a third and revolves body, and it is another which revolves body
One end of one the 4th rotation body of end pivot joint, the 4th rotation body other end are connected with one second feeding material component, second feeding material component
It can carry out up and down and the action of moving in rotation, when first feeding material component carries out the action of charging or feeding, this second
Feeding material component is also carried out at the same time the action of charging or discharging.
Rotating device as described above, wherein the periphery adjacent of the rotating device be also further provided with a garbage area with
Place can not imprinting IC or the IC that has damaged.
First feeding material component as described above, wherein first feeding material component is with second feeding material component with vacsorb
Mode draw IC.
Material placing area as described above, wherein the material placing area is further also provided with one and sets material component, this is set material component and is equipped with one
Acupuncture point, the acupuncture point correspond to it is accommodating be burned to or IC to be tested, be burned to or the posture of IC to be tested with correcting, and this sets material component
For rotating to the different feedstock direction of correspondence.
For achieve the above purposes, the present invention provides another adjustable length arm and MEMS sensor equipment rotary tests
Instrument includes mainly：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device are internally provided with one first pars contractilis, first pars contractilis and one first feeding material component phase
To control the front and back position of first feeding material component, which can carry out upper and lower and moving in rotation action for connection,
After first feeding material component is moved to above the material placing area, the action which can be moved down is to draw
The IC of non-imprinting in the material placing area, the action then moved up again is with the IC of its mobile non-imprinting；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, and the one side of the operation post is equipped with an operation
Portion, after first feeding material component draws the non-imprinting IC in the material placing area, which then can be by first feeding material component
It is moved to the adjacent of the operation post, then determines whether that the pars contractilis need to be driven again to adjust the position of first feeding material component
It sets, and then the IC of its non-imprinting is positioned in the homework department and carries out imprinting, and first sent by this again after the completion of the IC imprintings
Material component the IC that imprinting is completed is moved to a discharging portion out of this homework department, acted with this repeatedly fed, imprinting
Or the work of discharging.
Rotating device as described above, wherein the rotating device is internally provided with one second pars contractilis, second pars contractilis with
One second feeding material component is connected to control the front and back position of second feeding material component, second feeding material component can carry out up and down and
The action of moving in rotation, when first feeding material component carry out charging or feeding action when, second feeding material component also simultaneously into
The action of traveling material or discharging, the rotating device is using hollow motor combination hollow type speed reducer as driving source.
First feeding material component as described above, wherein first feeding material component is with second feeding material component with vacsorb
Mode draw IC.
First pars contractilis as described above, wherein first pars contractilis and second pars contractilis can be by belt driving, screw rods
Driving or the driving of frog arm.
Material placing area as described above, wherein the material placing area is further also provided with one and sets material component, this is set material component and is equipped with one
Acupuncture point, the acupuncture point correspond to it is accommodating be burned to or IC to be tested, be burned to or the posture of IC to be tested with correcting, and this sets material component
For rotating to the different feedstock direction of correspondence.
For achieve the above purposes, the present invention also provides another adjustable length arms and MEMS sensor equipment rotations to survey
Test instrument includes mainly：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, which can carry out up and down and revolve
The dynamic action of transfer, after first feeding material component is moved to above the material placing area, which can carry out to moving down
Dynamic action is to draw the IC of non-imprinting in the material placing area, and the action then moved up again is with its mobile non-imprinting
IC；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, which is set on a rotating part, the rotation
Transfer part can carry out rotation clockwise or counterclockwise, with the position for driving operation post transformation set, the one of the operation post
Face is equipped with a homework department, and after first feeding material component draws the non-imprinting IC in the material placing area, which can then incite somebody to action
First feeding material component is moved to the adjacent of the operation post, then determine whether need to drive the pars contractilis again with adjust this first
The position of feeding material component, and then the IC of its non-imprinting is positioned in the homework department and carries out imprinting, and after the completion of IC imprintings again
The IC that imprinting is completed is moved to a discharging portion out of this homework department by first feeding material component, with this act repeatedly into
Traveling material, imprinting or the work of discharging.
Rotating device as described above, wherein the rotating device other end connects one second feeding material component, second feeding
Component can carry out upper and lower and moving in rotation action, and when first feeding material component carries out the action of charging or feeding, this second
Feeding material component is also carried out at the same time the action of charging or discharging, and the rotating device is using hollow motor combination hollow type speed reducer as drive
Dynamic source.
First feeding material component as described above, wherein first feeding material component is with second feeding material component with vacsorb
Mode draw IC.
Rotating device as described above, wherein the rotating part is further for test MEMS inertial objects or non-inertial right
As.
Material placing area as described above, wherein the material placing area is further also provided with one and sets material component, this is set material component and is equipped with one
Acupuncture point, the acupuncture point correspond to it is accommodating be burned to or IC to be tested, be burned to or the posture of IC to be tested with correcting, and this sets material component
For rotating to the different feedstock direction of correspondence.
For achieve the above purposes, the present invention provides another adjustable length arm and MEMS sensor equipment rotary tests
Instrument includes mainly：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, which can carry out up and down and revolve
The dynamic action of transfer, after first feeding material component is moved to above the material placing area, which can carry out to moving down
Dynamic action is to draw the IC of non-imprinting in the material placing area, and the action then moved up again is with its mobile non-imprinting
IC；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, which is equipped with a turning part, should
Turning part can drive the action that the operation post is overturn, and the one side of the operation post is equipped with a homework department, when first feeding
After component draws the non-imprinting IC in the material placing area, which then can be moved to the operation post by first feeding material component
Adjacent then determines whether need to drive the pars contractilis to adjust the position of first feeding material component again, and then by its non-imprinting
IC be positioned in the homework department progress imprinting, and imprinting will be completed by first feeding material component again after the completion of IC imprintings
IC a discharging portion is moved to out of this homework department, acted with this repeatedly fed, the work of imprinting or discharging.
Rotating device as described above, wherein the rotating device other end connects one second feeding material component, second feeding
Component can carry out upper and lower and moving in rotation action, and when first feeding material component carries out the action of charging or feeding, this second
Feeding material component is also carried out at the same time the action of charging or discharging, and the rotating device is using hollow motor combination hollow type speed reducer as drive
Dynamic source.
First feeding material component as described above, wherein first feeding material component is with second feeding material component with vacsorb
Mode draw IC.
Rotating device as described above, wherein the center of the rotating device is also further provided with a test suite and puts
Device is set, the position set by the test suite apparatus for placing is higher or lower than the rotating device, the test suite apparatus for placing
One end be equipped with a placing modules, by the placing modules to connect a test suite.
Material placing area as described above, wherein the material placing area is further also provided with one and sets material component, this is set material component and is equipped with one
Acupuncture point, the acupuncture point correspond to it is accommodating be burned to or IC to be tested, be burned to or the posture of IC to be tested with correcting, and this sets material component
For rotating to the different feedstock direction of correspondence.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the rotating device action schematic diagram of the present invention.
Fig. 3 is the stretching structure action state schematic diagram of the present invention.
Fig. 4 is the rotating part action state schematic diagram of the present invention.
Fig. 5 is the turning part action state schematic diagram of the present invention.
Fig. 6 is that the test suite apparatus for placing of the present invention implements illustration.
Fig. 7 is the non-inertial module testing schematic diagram of the microelectromechanical-systems of the present invention.
Fig. 8 is that the first feeding material component of the present invention and the second feeding material component move left and right schematic diagram.
Fig. 9 is the first rotation body and the second rotation body structural schematic diagram of the present invention.
Figure 10 is the first rotation body and the second rotation body action state schematic diagram of the present invention.
Reference sign
1 feed zone
11 feeding assemblies
2 material placing areas
3 rotating devices
31 first pars contractilis
32 first feeding material components
33 second pars contractilis
34 second feeding material components
35 first rotation bodies
36 second rotation bodies
37 thirds revolve body
38 the 4th rotation bodies
4 operation posts
41 turning part
42 homework department
5 rotating parts
6 test suite apparatus for placing
61 placing modules
7 test suites.
Specific implementation mode
The effect of to make your auditor facilitate understanding present disclosure, and can reach, now coordinates attached drawing to enumerate tool
Body embodiment, detailed description are as follows：
It please refers to Fig.1 and Fig. 5, for the structural schematic diagram and turning part action state schematic diagram of the present invention, as shown, of the invention
Mainly it is included in a feeder 1, which is equipped with a feeding assembly 11 sending the IC of non-imprinting to a material placing area 2；
One rotating device 3, the rotating device 3 are internally provided with one first pars contractilis 31, first pars contractilis 31 and one first feeding
Component 32 is connected to control the front and back position of first feeding material component 32, first feeding material component 32 can carry out up and down and
The action of moving in rotation, after first feeding material component 32 is moved to 2 top of material placing area, which can carry out
The action moved down is to draw the IC of non-imprinting in the material placing area 2, and the action then moved up again is to move it not
The IC of imprinting；And
Multiple operation posts 4, the operation post 4 are set to the periphery adjacent of the rotating device 3, which is set to a rotating part 5
On, which can carry out rotation clockwise or counterclockwise, to drive the operation post 4 to convert set position, the rotation
Further for test MEMS inertial objects or non-inertial object, which is equipped with a turning part 41, the overturning for transfer part
Portion 41 can drive the action that the operation post 4 is overturn, and the one side of the operation post 4 is equipped with a homework department 42, when this first send
After expecting that component 32 draws the non-imprinting IC in the material placing area 2, which then can be moved to this by first feeding material component 32
The adjacent of operation post 4 then determines whether that the position of the first pars contractilis 31 to adjust first feeding material component 32 need to be driven again
Set, and then the IC of its non-imprinting be positioned in the homework department 42 and carries out imprinting, and after the completion of IC imprintings again by this first
The IC that imprinting is completed is moved to a discharging portion by feeding material component 32 out of this homework department 42, is acted repeatedly into traveling with this
Material, imprinting or the work of discharging.
Rotating device 3 as described above, wherein the rotating device 3 is internally provided with one second pars contractilis 33, this is second flexible
Portion 33 is connected with one second feeding material component 34 to control the front and back position of second feeding material component 34, second feeding material component 34
It can carry out up and down and the action of moving in rotation, when first feeding material component 32 carries out the action of charging or feeding, this
Two feeding material components 34 are also carried out at the same time the action of charging or discharging.
First pars contractilis 31 as described above, wherein first pars contractilis 31 and second pars contractilis 33 can be driven by belt
Dynamic, screw drive or the driving of frog arm.
Rotating device 3 as described above, wherein the periphery adjacent of the rotating device 3 is also further provided with a garbage area
With place can not imprinting IC or the IC that has damaged.
First feeding material component 32 as described above, wherein first feeding material component 32 is with second feeding material component 34 with true
The mode that suction takes draws IC.
Material placing area 2 as described above, wherein the material placing area 2 is further also provided with one and sets material component（Figure does not disclose）, this is set
Expect that component is equipped with an acupuncture point（It is not shown）, the acupuncture point correspond to it is accommodating be burned to or IC to be tested, be burned to or to be tested with correcting
The posture of IC, and this sets material component for rotating to the different feedstock direction of correspondence.
Please see Fig. 2 to Fig. 4, it is the rotating device action schematic diagram and stretching structure action state schematic diagram of the present invention,
As shown, the rotating device 3 can carry out spinning movement clockwise or counterclockwise, in this way, when first feeding material component 32 or
When second feeding material component 34 draws a non-imprinting IC from the material placing area 2, the rotating device 3 then by first feeding material component 32 or
Second feeding material component 34 rotation on the operation post 4 for not carrying out imprinting so that first feeding material component 32 or this second
Feeding material component 34 is moved down carries out imprinting so that the non-imprinting IC to be positioned within the operation post 4, however, to expand the operation
Stand 4 quantity with more effective and be rapidly achieved the effect of imprinting, by the operation post 4 by it is ring-like it is abducent in a manner of around to should
The periphery adjacent of rotating device 3, in this way, the operation post 4 of the either closer rotating device 3, also or further away from this
The operation post 4 of rotating device 3 all can effectively carry out the action of imprinting, and be to achieve the purpose that expand the operation post, in the rotation
Rotary device 3 is internally provided with first pars contractilis 31 and second pars contractilis 33, and first pars contractilis 31 and the first feeding group
Part 32 is connected, second pars contractilis 33 then with second feeding material component 34 be connected with each other, therefore, first feeding material component 32 or should
Second feeding material component 34 then can carry out flexible action by first pars contractilis 31 or second pars contractilis 33, therefore, when this
First feeding material component 32 or second feeding material component 34 are drawn out of this material placing area 2 after one non-imprinting IC of absorption, the rotating device 3
First first feeding material component 32 or the second feeding material component 34 can be rotated to the opposite position on the operation post 4 for not carrying out imprinting
Set, and if it does not carry out the position of the operation post 4 of imprinting farther out, pass through first pars contractilis 31 or second pars contractilis 33
It is stretched on first feeding material component 32 or second feeding material component 34 to the position of the operation post 4 for not carrying out imprinting with pushing away, with profit
First feeding material component 32 or second feeding material component 34 the non-imprinting IC is positioned over do not carry out in the operation post 4 of imprinting into
Row imprinting；If conversely, its do not carry out 4 position of operation post of imprinting it is closer when, also can by first pars contractilis 31 or this
Two pars contractilis 33 on pulling-down first feeding material component 32 or second feeding material component 34 to the operation post 4 for not carrying out imprinting,
The non-imprinting IC is positioned over to the operation post 4 for not carrying out imprinting with sharp first feeding material component 32 or second feeding material component 34
Interior carry out imprinting；In addition, when the action of imprinting is completed in the operation post 4, first feeding material component 32 or the second feeding group
Part 34 also can be moved to 4 top of the operation post by acting as described above, then by first feeding material component 32 or this second give
The action that material component 34 is moved down is sent imprinting IC to discharge zone with drawing imprinting IC.
Please refer to Fig. 4 to Fig. 5, for the present invention rotating part action state schematic diagram and turning part action state schematic diagram,
As shown, each operation post 4 is set on the rotating part 5, which can carry out action clockwise or counterclockwise, and
The rotating part 5 further for test MEMS inertial objects or non-inertial object, in this way, when first feeding material component 32 or this
When two feeding material components 34 draw non-imprinting IC, except through the rotating device 3 by first feeding material component 32 or second feeding
In the rotation to the operation post 4 for not carrying out imprinting of component 34, the operation post 4 of imprinting also will can not be carried out by the rotating part 5
Rotation is to first feeding material component 32 or the adjacent of second feeding material component 34, so that first feeding material component 32 or should
Non- imprinting IC can be quickly positioned in the operation post 4 for not carrying out imprinting by the second feeding material component 34, if conversely, the operation post 4
After the action of imprinting is completed, also can by the rotating part 5 by the operation post 4 rotate to first feeding material component 32 or this second
The adjacent position of feeding material component 34, quickly to send the taking-ups of imprinting IC to discharge zone.
In addition, present invention may also apply to test the inertia component of microelectromechanical-systems (MEMS)（Such as：Accelerograph (G-
) and gyroscope (Gyro) Sensor）, the inertia component is sent by first feeding material component 32 or second feeding material component 34
, can be by the rotating part 5 with each operation post 4 of movement after in the operation post 4, the rotating part 5 is further used for test MEMS
Sex object or non-inertial object, and then by the rotary speed of the rotating part 5 to test the inertia component；Also, the operation post 4
Periphery is equipped with the turning part 41, the action that can overturn the operation post 4 by the turning part 41, in this way, working as the inertia
After component is positioned within the homework department 42, also the operation post 4 can be overturn by the turning part 41, into pass through different angle
The effect of converting the inertia component for effectively reaching test microelectromechanical-systems (MEMS) whereby to test the inertia component.
Fig. 6 and Fig. 7 is please referred to, for test suite apparatus for placing implementation illustration and microelectromechanical-systems (MEMS) of the invention
Non-inertial module testing schematic diagram, as shown, the center of the rotating device 3 is also further provided with test suite placement
Device 6, the position set by the test suite apparatus for placing 6 are higher or lower than the rotating device 3, the test suite apparatus for placing
6 one end is equipped with a placing modules 61, by the placing modules 61 to connect a test suite 7, in this way, when that need to test micro machine
System (MEMS) non-inertial component (such as：Mini microphone or micro projector) when, it also needs through first feeding material component
32 or second feeding material component 34 the non-inertial component is sent to after in the operation post 4, then placed again by the test suite
Device 6 rotates the test suite 7 to 4 top of the operation post, you can is covered the test suite 7 by the placing modules 61
On the non-inertial component, to test pressure, humidity, temperature or the frequency modulation etc. of the non-inertial component by the test suite 7,
For example, when the test suite 7 is the telescopic test suite 7, which is covered in the non-inertial component
On to close the homework department 42 after, then by compressing the test suite 7 to generate different air pressures, into effectively to carry out
The pressure test of the non-inertial component, in addition, may also set up the fixed operation post 4 specially to test the non-inertial component,
The effect of so as to effectively reaching the non-inertial component for testing microelectromechanical-systems (MEMS).
Fig. 7 to Figure 10 is please referred to, schematic diagram, the are moved left and right for the first feeding material component of the present invention and the second feeding material component
One rotation body and the second rotation body structural schematic diagram and the first rotation body and the second rotation body action state schematic diagram, as shown, the rotation
3 one end of device connects first feeding material component 32, which then connects second feeding material component 34, by this
The action that first feeding material component 32 and second feeding material component 34 are moved left and right, you can the non-imprinting IC pendulum for being drawn it
Just to be effectively positioned on the operation post 4, in addition, 3 one end of rotating device can also be equipped with the first rotation body 35, the first rotation body
35 other ends are pivotally connected one end of the second rotation body 36, and the second rotation 36 other end of body connects first feeding material component 32, also,
The rotating device 3 also separately is provided with the third with end and revolves body 37, and third rotation 37 other end of body is pivotally connected one end of the 4th rotation body 38,
4th rotation 38 other end of body then connects second feeding material component 34, in this way, when each operation post 4 by the arrangement mode of rectangle or
When the arrangement mode of other irregular shapes is arranged on workbench, if only carrying out the clockwise or inverse time by the rotating device 3
First feeding material component 32 or second feeding material component 34 then can not be effectively moved on each operation post 4, such as by the rotation of needle
This, for the associated component of IC or microelectromechanical-systems (MEMS) are positioned on the operation post 4, also need by this first rotation body 35 and
The second rotation body 36 is with mobile first feeding material component 32, or by the third revolves body 37 and the 4th and revolve body 38 and move this and second send
Component 34 is expected, also as worked as phase of first feeding material component 32 from the non-imprinting IC of the material placing area 2 acquirement or microelectromechanical-systems (MEMS)
When closing component, first passes through the rotating device 3 and first feeding material component 32 is moved to the adjacent of the operation post 4 for not carrying out operation
Behind place, then first feeding material component 32 is moved to by 4 top of the operation post by the first rotation body 35, finally again by this second
The position that body 36 finely tunes first feeding material component 32 is revolved, so that first feeding material component 32 can be accurately by non-imprinting IC or micro-
The associated component of electric system (MEMS) is positioned in the homework department 42 to carry out relevant operation, in this way, no matter the operation post 4
Arrangement mode why, all can by this first rotation body 35 and this second rotation body 36 or third revolve body 37 and the 4th revolve body 38 with
First feeding material component 32 or second feeding material component 34 are effectively moved to the top of each operation post 4, into effectively to reach quarter
The effect of recording IC or testing the associated component of microelectromechanical-systems (MEMS).
But the above, only highly preferred embodiment of the present invention, cannot be limited the scope of implementation of the present invention with this；Therefore it is all
The simple equivalent changes and modifications done according to claims of the present invention and description should all still fall within the present invention's
Protection domain.
Claims (21)
1. a kind of adjustable length arm and MEMS sensor equipment rotary test instruments, which is characterized in that including：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, which can carry out bottom left
Right and moving in rotation action, after first feeding material component is moved to above the material placing area, which can carry out
To draw the IC of non-imprinting in the material placing area, the action then moved up again is not carved with mobile its for the action moved down
The IC of record；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, and the one side of the operation post is equipped with an operation
Portion, after first feeding material component draws the non-imprinting IC in the material placing area, which then can be by first feeding material component
It is moved to the adjacent of the operation post, then adjusts the position of first feeding material component by the first rotation body and the second rotation body again
It sets and carries out imprinting so that the IC of its non-imprinting to be positioned in the homework department, pass through first feeding material component again after the completion of IC imprintings
The IC that imprinting is completed is moved to a discharging portion out of this homework department, acted with this repeatedly fed, imprinting or discharging
Work.
2. adjustable length arm as described in claim 1 and MEMS sensor equipment rotary test instruments, which is characterized in that should
Rotating device one end is also further provided with one first rotation body, which is pivotally connected one end of one second rotation body, this
The two rotation body other ends connect first feeding material component, and the rotating device is using hollow motor combination hollow type speed reducer as driving
Source.
3. adjustable length arm as claimed in claim 2 and MEMS sensor equipment rotary test instruments, which is characterized in that should
The rotating device other end is equipped with a third and revolves body, which revolves one end that the body other end is pivotally connected one the 4th rotation body, the 4th rotation body
The other end is connected with one second feeding material component, which can carry out up and down and the action of moving in rotation,
When first feeding material component carries out the action of charging or feeding, which is also carried out at the same time the dynamic of charging or discharging
Make.
4. adjustable length arm as claimed in claim 3 and MEMS sensor equipment rotary test instruments, which is characterized in that should
The periphery adjacent of rotating device be also further provided with a garbage area with place can not imprinting IC or the IC that has damaged.
5. adjustable length arm as claimed in claim 3 and MEMS sensor equipment rotary test instruments, which is characterized in that should
First feeding material component draws IC with second feeding material component in a manner of vacsorb.
6. adjustable length arm as described in claim 1 and MEMS sensor equipment rotary test instruments, which is characterized in that should
Material placing area is further also provided with one and sets material component, this is set material component and is equipped with an acupuncture point, which corresponds to accommodating be burned to or to be measured
Try IC, be burned to or the posture of IC to be tested with correcting, and this set material component can be for rotating to the different charging side of correspondence
To.
7. a kind of adjustable length arm and MEMS sensor equipment rotary test instruments, which is characterized in that including：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device are internally provided with one first pars contractilis, first pars contractilis and one first feeding material component phase
To control the front and back position of first feeding material component, which can carry out upper and lower and moving in rotation dynamic for connection
Make, after first feeding material component is moved to above the material placing area, action which can be moved down with
The IC for drawing non-imprinting in the material placing area, the action then moved up again is with the IC of its mobile non-imprinting；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, and the one side of the operation post is equipped with an operation
Portion, after first feeding material component draws the non-imprinting IC in the material placing area, which then can be by first feeding material component
It is moved to the adjacent of the operation post, then determines whether that the pars contractilis need to be driven again to adjust the position of first feeding material component
It sets, and then the IC of its non-imprinting is positioned in the homework department and carries out imprinting, and first sent by this again after the completion of the IC imprintings
Expect component by a discharging portion is moved to out of this homework department with the IC for completing imprinting, acted with this repeatedly fed, imprinting
Or the work of discharging.
8. adjustable length arm as claimed in claim 7 and MEMS sensor equipment rotary test instruments, which is characterized in that should
Rotating device is internally provided with one second pars contractilis, which is connected with one second feeding material component second is sent with controlling this
Expect the front and back position of component, which can carry out upper and lower and moving in rotation action, when first feeding material component
Carry out charging or feeding action when, which is also carried out at the same time the action of charging or discharging, the rotating device with
Hollow motor combination hollow type speed reducer is as driving source.
9. adjustable length arm as claimed in claim 8 and MEMS sensor equipment rotary test instruments, which is characterized in that should
First feeding material component draws IC with second feeding material component in a manner of vacsorb, and second pars contractilis is by belt driving, spiral shell
Bar drives and the driving of frog arm.
10. adjustable length arm as claimed in claim 7 and MEMS sensor equipment rotary test instruments, which is characterized in that
First pars contractilis is driven by belt, screw drive and frog arm drive.
11. adjustable length arm as claimed in claim 7 and MEMS sensor equipment rotary test instruments, which is characterized in that
The material placing area is further also provided with one and sets material component, this is set material component and is equipped with an acupuncture point, which corresponds to house and be burned to or wait for
Test IC, be burned to or the posture of IC to be tested with correcting, and this set material component can be for rotating to the different charging of correspondence
Direction.
12. a kind of adjustable length arm and MEMS sensor equipment rotary test instruments, which is characterized in that including：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, first feeding material component can carry out up and down and
The action of moving in rotation, after first feeding material component is moved to above the material placing area, which can carry out downwards
Mobile action is to draw the IC of non-imprinting in the material placing area, and the action then moved up again is with its mobile non-imprinting
IC；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, which is set on a rotating part, the rotation
Transfer part can carry out rotation clockwise or counterclockwise, to drive the position set by operation post transformation, the operation post
It is equipped with a homework department on one side, after first feeding material component draws the non-imprinting IC in the material placing area, which then can
First feeding material component is moved to the adjacent of the operation post, then determine whether need to drive the pars contractilis again with adjust this
The position of one feeding material component, and then the IC of its non-imprinting is positioned in the homework department and carries out imprinting, and after the completion of IC imprintings
The IC that imprinting is completed is moved to by a discharging portion out of this homework department by first feeding material component again, is acted repeatedly with this
It is fed, the work of imprinting or discharging.
13. adjustable length arm as claimed in claim 12 and MEMS sensor equipment rotary test instruments, which is characterized in that
The rotating device other end connects one second feeding material component, which can carry out upper and lower and moving in rotation dynamic
Make, when first feeding material component carries out the action of charging or feeding, which is also carried out at the same time charging or discharging
Action.
14. adjustable length arm as claimed in claim 13 and MEMS sensor equipment rotary test instruments, which is characterized in that
First feeding material component draws IC with second feeding material component in a manner of vacsorb.
15. adjustable length arm as claimed in claim 12 and MEMS sensor equipment rotary test instruments, which is characterized in that
The rotating part is further able to for test MEMS inertial objects or non-inertial object.
16. adjustable length arm as claimed in claim 12 and MEMS sensor equipment rotary test instruments, which is characterized in that
The material placing area is further also provided with one and sets material component, this is set material component and is equipped with an acupuncture point, which corresponds to house and be burned to or wait for
Test IC, be burned to or the posture of IC to be tested with correcting, and this set material component can be for rotating to the different charging of correspondence
Direction.
17. a kind of adjustable length arm and MEMS sensor equipment rotary test instruments, which is characterized in that including：
One feeder, the feeder are equipped with a feeding assembly sending the IC of non-imprinting to a material placing area；
One rotating device, the rotating device one end connect one first feeding material component, first feeding material component can carry out up and down and
The action of moving in rotation, after first feeding material component is moved to above the material placing area, which can carry out downwards
Mobile action is to draw the IC of non-imprinting in the material placing area, and the action then moved up again is with its mobile non-imprinting
IC；And
Multiple operation posts, the operation post are set to the periphery adjacent of the rotating device, which is equipped with a turning part, should
Turning part can drive the action that the operation post is overturn, and the one side of the operation post is equipped with a homework department, when this first send
After material component draws the non-imprinting IC in the material placing area, which then can be moved to the operation post by first feeding material component
Adjacent, then determine whether that the pars contractilis need to be driven to adjust the position of first feeding material component again, and then it is not carved
The IC of record is positioned over progress imprinting in the homework department, and quarter will be completed by first feeding material component again after the completion of IC imprintings
The IC of record is moved to a discharging portion out of this homework department, acted with this repeatedly fed, the work of imprinting or discharging.
18. adjustable length arm as claimed in claim 17 and MEMS sensor equipment rotary test instruments, which is characterized in that
The rotating device other end connects one second feeding material component, which can carry out upper and lower and moving in rotation dynamic
Make, when first feeding material component carries out the action of charging or feeding, which is also carried out at the same time charging or discharging
Action, the rotating device is using hollow motor combination hollow type speed reducer as driving source.
19. adjustable length arm as claimed in claim 18 and MEMS sensor equipment rotary test instruments, which is characterized in that
First feeding material component draws IC with second feeding material component in a manner of vacsorb.
20. adjustable length arm as claimed in claim 18 and MEMS sensor equipment rotary test instruments, which is characterized in that
The center of the rotating device is also further provided with a test suite apparatus for placing, set by the test suite apparatus for placing
Position is higher or lower than the rotating device, and one end of the test suite apparatus for placing is equipped with a placing modules, passes through the placement group
Part is to connect a test suite.
21. adjustable length arm as claimed in claim 17 and MEMS sensor equipment rotary test instruments, which is characterized in that
The material placing area is further also provided with one and sets material component, this is set material component and is equipped with an acupuncture point, which corresponds to house and be burned to or wait for
Test IC, be burned to or the posture of IC to be tested with correcting, and this set material component can be for rotating to the different charging of correspondence
Direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710110854.9A CN108508344B (en) | 2017-02-28 | 2017-02-28 | Adjustable length arm and MEMS position sensor equipment rotation test instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710110854.9A CN108508344B (en) | 2017-02-28 | 2017-02-28 | Adjustable length arm and MEMS position sensor equipment rotation test instrument |
Publications (2)
| Publication Number | Publication Date |
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| CN108508344A true CN108508344A (en) | 2018-09-07 |
| CN108508344B CN108508344B (en) | 2020-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710110854.9A Active CN108508344B (en) | 2017-02-28 | 2017-02-28 | Adjustable length arm and MEMS position sensor equipment rotation test instrument |
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| US5198752A (en) * | 1987-09-02 | 1993-03-30 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
| US20060255822A1 (en) * | 1998-11-25 | 2006-11-16 | Noboru Saito | Cooling fin connected to a cooling unit and a pusher of the testing apparatus |
| CN200983265Y (en) * | 2006-10-25 | 2007-11-28 | 力浦电子实业股份有限公司 | Access device of improved IC burning device |
| CN201156533Y (en) * | 2007-12-26 | 2008-11-26 | 力浦电子实业股份有限公司 | Automatic identifying rotary taking and putting mechanism |
| CN201397811Y (en) * | 2009-03-03 | 2010-02-03 | 力浦电子实业股份有限公司 | Automatic feeding and receiving device |
| CN203512758U (en) * | 2013-07-31 | 2014-04-02 | Tcl通力电子（惠州）有限公司 | Feeding device and ic recorder |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5198752A (en) * | 1987-09-02 | 1993-03-30 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
| US20060255822A1 (en) * | 1998-11-25 | 2006-11-16 | Noboru Saito | Cooling fin connected to a cooling unit and a pusher of the testing apparatus |
| CN200983265Y (en) * | 2006-10-25 | 2007-11-28 | 力浦电子实业股份有限公司 | Access device of improved IC burning device |
| CN201156533Y (en) * | 2007-12-26 | 2008-11-26 | 力浦电子实业股份有限公司 | Automatic identifying rotary taking and putting mechanism |
| CN201397811Y (en) * | 2009-03-03 | 2010-02-03 | 力浦电子实业股份有限公司 | Automatic feeding and receiving device |
| CN203512758U (en) * | 2013-07-31 | 2014-04-02 | Tcl通力电子（惠州）有限公司 | Feeding device and ic recorder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108508344B (en) | 2020-06-16 |
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