CN108350556A - 微粒子发生装置及包括该装置的涂覆系统 - Google Patents

微粒子发生装置及包括该装置的涂覆系统 Download PDF

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CN108350556A
CN108350556A CN201680063698.9A CN201680063698A CN108350556A CN 108350556 A CN108350556 A CN 108350556A CN 201680063698 A CN201680063698 A CN 201680063698A CN 108350556 A CN108350556 A CN 108350556A
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coating solution
fine particle
generating apparatus
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heat
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金正国
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Posco Holdings Inc
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0207Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/20Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising
    • B05B15/25Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising using moving elements, e.g. rotating blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/002Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour incorporating means for heating or cooling, e.g. the material to be sprayed
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06Metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06Metallic material
    • C23C4/08Metallic material containing only metal elements
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/123Spraying molten metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/14Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying for coating elongate material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/044Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/166Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed the material to be sprayed being heated in a container

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  • Chemical Kinetics & Catalysis (AREA)
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  • Mechanical Engineering (AREA)
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  • Physics & Mathematics (AREA)
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  • Coating Apparatus (AREA)
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Abstract

本发明涉及一种能够用少量的热量产生均匀的微粒子的微粒子发生装置及包括该装置的涂覆系统,该微粒子发生装置包括:储存容器,储存有涂覆溶液;及加热装置,其浸渍在所述储存容器的涂覆溶液中,对涂覆溶液进行局部加热,以产生沉积到涂覆对象物的微粒子。通过这样的结构,能够对熔融金属进行局部加热并产生均匀的微粒子,减少热量消耗,从而节约能源。

Description

微粒子发生装置及包括该装置的涂覆系统
技术领域
本发明涉及一种微粒子发生装置及包括该装置的涂覆系统,更详细地,涉及一种能够用少量的热量产生均匀的微粒子的微粒子发生装置及包括该装置的涂覆系统。
背景技术
作为对连续移动的钢板进行涂覆的一种方法,可通过在真空氛围下将熔融金属转换为微粒子形态后向连续移动的钢板喷射,由此将作为金属蒸汽的微粒子沉积到钢板以进行涂覆。
图1和图2示出了使用上述方法对钢板进行涂覆的现有的涂覆系统。
参照图1和图2,在现有的涂覆系统中,加热部20被配置成包覆储存有涂覆溶液的储存容器10,所述加热部20对整个所述储存容器10进行加热,以对储存在所述储存容器10中的涂覆溶液进行加热,产生作为金属蒸汽的微粒子。这样产生的微粒子通过微粒子供应管30被供应到喷射喷嘴40,从所述喷射喷嘴40喷射微粒子以对钢板进行涂覆。
在上述的现有的涂覆系统中,通过对整个储存容器10进行加热以产生作为金属蒸汽的微粒子,但是,这需要供应过多的热量以用于对整个所述储存容器10进行加热,由于整个熔融金属一时间沸腾,在熔融金属表面形成急剧的暖流流动,因此不仅生成微粒子,并且如图2的放大图所示,还会生成不均匀的粒子,从而引起涂覆缺陷。
发明内容
(一)要解决的技术问题
本发明是为了解决如上所述的问题而提出的,其目的在于提供一种微粒子发生装置及包括该装置的涂覆系统,所述微粒子发生装置能够对熔融金属进行局部加热,用少量的热量产生均匀的微粒子。
(二)技术方案
为了实现上述目的,本发明的优选实施例的微粒子发生装置包括:储存容器,储存有涂覆溶液;及加热装置,其浸渍在所述储存容器的涂覆溶液中,并对涂覆溶液进行局部加热,以产生沉积到涂覆对象物的微粒子。
所述加热装置可以包括:传热管,其浸渍在涂覆溶液中;及传热线,其配置在所述传热管的内部,从外部接收电力以产生热。
并且,所述传热管可被设置成多个管连接以形成网格形状,且所述传热管以与涂覆溶液的表面平行的方式浸渍在涂覆溶液的上层部。
本发明的微粒子发生装置还可以包括搅拌装置,在所述加热装置浸渍在涂覆溶液的状态下,所述搅拌装置移动所述加热装置,以搅拌涂覆溶液。
更加具体地,所述搅拌装置可以包括:连接部件,其一侧端与所述传热管紧固,另一侧端向所述储存容器的外侧突出;旋转部件,其具有偏心形成的突出部,所述连接部件的另一侧端插入到所述突出部;及驱动部,其使所述旋转部件旋转。
并且,所述搅拌装置可以设置有多个,并配置在所述传热管的前后,与所述驱动部的操作对应地进行旋转运动。
进一步地,所述搅拌装置还可以包括搅拌部件,其以向所述传热管的下侧面突出的方式与所述传热管紧固,并浸渍在涂覆溶液中,以在所述传热管移动时搅拌涂覆溶液。
并且,混合杆可以以与所述搅拌部件垂直的方式紧固在所述搅拌部件的端部。
此时,所述搅拌部件可以设置有多个,并以相邻的混合杆彼此朝向不同方向的方式紧固于所述传热管。
本发明的实施例的微粒子发生装置还可以包括涂覆溶液供应装置,其与所述储存容器连接,并熔融被供应的固相涂覆介质后供应到所述储存容器。
更加具体地,所述涂覆溶液供应装置可以包括:熔融容器,其邻近所述储存容器配置,并形成有与所述储存容器连接的连通孔,以在熔融的涂覆溶液达到预定水位以上时,使所述涂覆溶液向所述储存容器流动;及加热部,其以包覆所述熔融容器的方式配置,并加热供应到所述熔融容器的固相涂覆介质以使其熔融。
并且,本发明的微粒子发生装置还可以包括原料粒子供应装置,其与所述熔融容器连接,向所述熔融容器供应固相涂覆介质。
并且,发明的微粒子发生装置还可以包括:水位感测传感器,其测量储存在所述储存容器中的涂覆溶液的水位;及控制部,从所述水位感测传感器接收数据,并控制所述原料粒子供应装置,以与涂覆溶液的水位对应地,选择性地供应固相涂覆介质或者切断供应固相涂覆介质。
为了实现上述目的,本发明的优选实施例的涂覆系统可以包括:如上所述的微粒子发生装置;真空腔室,其被设置成包围整个或者部分所述微粒子发生装置,并使涂覆对象物在真空状态下通过;喷射喷嘴,其向涂覆对象物喷射微粒子,以对涂覆对象物进行涂覆;及微粒子供应管,其连接所述微粒子发生装置与所述喷射喷嘴,并将所述微粒子发生装置生成的微粒子供应到所述喷射喷嘴。
并且,喷射喷嘴所述微粒子供应管可以具有与所述喷射喷嘴的宽度相同的宽度,以使供应到所述喷射喷嘴的微粒子的流动截面积变化最小化。
(三)有益效果
根据本发明的微粒子发生装置及包括该装置的涂覆系统,能够对熔融金属进行局部加热以产生均匀的微粒子,减少热量消耗,从而节约能源。
并且,根据本发明,将微粒子供应管的宽幅设置成与喷射喷嘴的宽度相同,使得被供应的微粒子的流动截面积的变化最小化,从而能够均匀地喷射通过喷射喷嘴喷射的微粒子。
附图说明
图1是示意性地示出现有的涂覆系统的立体图。
图2是示意性地示出现有的涂覆系统的截面图。
图3是示意性地示出本发明实施例的微粒子发生装置的立体图。
图4是示意性地示出本发明实施例的微粒子发生装置中的加热装置和搅拌装置的立体图。
图5是示意性地示出本发明实施例的微粒子发生装置的操作状态的图。
图6是示意性地示出本发明实施例的微粒子发生装置中的供应熔融的涂覆溶液的结构的图。
图7是示意性地示出本发明实施例的涂覆系统的立体图。
图8是示意性地示出本发明实施例的涂覆系统中的微粒子的移动路径的立体图。
优选实施方式
为了帮助理解本发明的特征,下面,将对与本发明实施例相关的微粒子发生装置及包括该装置的涂覆系统进行更加详细的说明。
为了帮助理解以下说明的实施例,在对各附图的组件赋予附图标记时,即使在不同的附图中,相同的组件也尽可能使用相同的附图标记。并且,在说明本发明时,认为相关的公知结构或者功能的具体说明会混淆本发明的要旨时,省略对其的详细说明。
下面,参照附图对本发明的具体实施例进行说明。
图3是示意性地示出本发明实施例的微粒子发生装置的立体图,图4是示意性地示出所述微粒子发生装置中的加热装置和搅拌装置的立体图,图5是示意性地示出所述微粒子发生装置的操作状态的图。并且,图6是示意性地示出所述微粒子发生装置中的供应熔融的涂覆溶液的结构的图。
参照图3至图6,本发明的实施例的微粒子发生装置100包括:储存容器200,储存有涂覆溶液;及加热装置300,其浸渍在所述储存容器200的涂覆溶液中,并对涂覆溶液进行局部加热,以产生沉积在涂覆对象物上的微粒子。
即,所述加热装置300并不直接对所述储存容器200进行加热,而是浸渍在储存在所述储存容器300的涂覆溶液中,对作为涂覆溶液的上层部的表面进行局部加热以产生作为金属蒸汽的微粒子。
所述加热装置300包括:传热管310,其浸渍在涂覆溶液中;及传热线320,其配置在所述传热管310的内部,从外部接收电力以产生热。
并且,所述传热管310被设置成多个管连接以形成网格形状,并且优选被制作成尺寸小于所述储存容器200,以使其在浸渍在涂覆溶液中的状态下,具有能够向左右方向移动的间隙。如此设置的所述传热管310以与涂覆溶液的表面平行的方式浸渍在涂覆溶液的上层部,对涂覆溶液进行局部加热。
本发明实施例的微粒子发生装置100还包括搅拌装置400,在所述加热装置300浸渍在涂覆溶液中的状态下,所述搅拌装置400移动所述加热装置300以搅拌涂覆溶液。即,在所述加热装置300浸渍在涂覆溶液中的状态下,所述搅拌装置400向前后左右方向移动所述加热装置300并搅拌涂覆溶液,以使涂覆溶液的上层部被均匀地加热。
为此,所述搅拌装置400包括:连接部件410,其一侧端与所述传热管310紧固,另一侧端向所述储存容器200的外侧突出;旋转部件420,其具有偏心形成的突出部421,所述连接部件410的另一侧端插入到所述突出部421;及驱动部430,其使所述旋转部件420旋转。
并且,所述搅拌装置400设置有多个,并配置在所述传热管310的前后,与所述驱动部430的操作对应地进行旋转运动,以搅拌涂覆溶液。
所述搅拌装置400还包括搅拌部件440,所述搅拌部件440以向所述传热管310的下侧面突出的方式与所述传热管310紧固,并浸渍在涂覆溶液中,以在所述传热管310移动时搅拌涂覆溶液。并且,混合杆450以与所述搅拌部件440垂直的方式紧固在所述搅拌部件440的端部。即,所述搅拌部件440和所述混合杆450被设置成‘┴’形态,并紧固在所述传热管310上。
并且,所述搅拌部件440可以设置有多个,且以相邻的混合杆彼此朝向不同方向的方式紧固在所述传热管310上。即,如图4所示,所述搅拌部件440以混合杆450彼此向不同的方向配置的方式紧固在所述传热管310上,因此,在所述传热管310旋转时,各混合杆450与所述传热管310的移动方向对应地与涂覆溶液发生摩擦,从而能够更加有效地搅拌涂覆溶液。另外,所述搅拌部件440的形态并不限定于此,可以被配置成对涂覆溶液进行加热时能够搅拌涂覆溶液的任何装置。
并且,本发明实施例的微粒子发生装置100还可以包括涂覆溶液供应装置500、原料粒子供应装置600、水位感测传感器700及控制部800。
所述涂覆溶液供应装置500与所述储存容器200连接,熔融供应的固相涂覆介质后供应到所述储存容器200。
更加具体地,所述涂覆溶液供应装置500包括:熔融容器510,所述熔融容器510邻近所述储存容器200配置,并形成有与所述储存容器200连接的连通孔h,以在熔融的涂覆溶液达到预定水位以上时,使所述涂覆溶液向所述储存容器200流动;及加热部520,所述加热部520以包覆所述熔融容器510的方式配置,并加热供应到所述熔融容器510的固相涂覆介质以使其熔融。其中,所述加热部520和所述熔融容器510配置在所述储存容器200的两侧面,因此,还起到使储存容器200保持预定温度以上的保温作用。
所述原料粒子供应装置600与所述熔融容器510连接,并向所述熔融容器510供应固相涂覆介质。
所述水位感测传感器700配置在所述储存容器200上,测量储存在所述储存容器200中的涂覆溶液的水位,所述控制部800从所述水位感测传感器700接收数据并控制所述原料粒子供应装置600,以与涂覆溶液的水位对应地,选择性地供应固相涂覆介质或者切断供应固相涂覆介质。其中,所述水位感测传感器700可以使用公知的任一种传感器,例如,利用浮力部件测量涂覆溶液的水位的接触式传感器或者利用激光测量涂覆溶液的水位的非接触式传感器等。
即,通过所述水位感测传感器700测量储存在所述储存容器200中的涂覆溶液的水位,当测量的涂覆溶液的水位达到特定值以下时,所述控制部800运行所述原料粒子供应装置600以向所述熔融容器510供应固相涂覆介质。此时,通过供应到所述熔融容器510的固相涂覆介质,熔融容器510中的熔融的涂覆溶液上升,并通过连通所述储存容器200与所述熔融容器510之间的连通孔h流入到所述储存容器200中,从而在所述储存容器200中填充涂覆溶液。并且,在所述储存容器200中填充涂覆溶液时,当达到预定高度时,所述水位感测传感器700感测上述情况并将数据传送到所述控制部800,所述控制部800停止所述原料粒子供应装置600,以使涂覆溶液不再被供应到所述储存容器200。
通过这种结构,能够使所述储存容器200中总是自动储存有预定高度的涂覆溶液。
图7是示意性地示出本发明的实施例的涂覆系统的立体图,图8是示意性地示出所述涂覆系统中的微粒子的移动路径的立体图。
参照图7和图8,本发明实施例的涂覆系统包括:上述的本发明实施例的微粒子发生装置100;真空腔室910,其被设置成包围整个或者部分所述微粒子发生装置100,并使涂覆对象物M在真空状态下通过;喷射喷嘴930,其向涂覆对象物M喷射微粒子,以对涂覆对象物M进行涂覆;及微粒子供应管920,其连接所述微粒子发生装置100与所述喷射喷嘴930,并将由所述微粒子发生装置100生成的微粒子供应到所述喷射喷嘴930。
即,连续移动的涂覆对象物M通过真空腔室910,在所述真空腔室910内部,通过喷射喷嘴930向所述涂覆对象物M喷射作为金属蒸汽的微粒子,而微粒子由微粒子发生装置100生成。上述沉积到所述涂覆对象物M上的微粒子可以是锌(Zn)蒸汽或者作为合金成分的锌(Zn)-镁(Mg)蒸汽等。因此,所述涂覆对象物M连续通过所述真空腔室910,微粒子沉积到所述涂覆对象物M上,从而实现连续涂覆。
并且,所述微粒子供应管920被设置成具有与所述喷射喷嘴930的宽度相同的宽度,以使供应到所述喷嘴930的微粒子的流动截面积变化最小化。
即,在现有技术中,如图1所示,微粒子供应管被设置成具有圆筒形并向喷射喷嘴供应微粒子,因此,微粒子通过具有窄的流动截面积的微粒子供应管被供应到流动截面积瞬间扩大的喷射喷嘴时,在喷射喷嘴内部会发生微粒子的流动不均匀,从而引发宽度方向的镀覆薄膜的厚度偏差。
因此,为了解决这种问题,本发明中将所述微粒子供应管920设置成具有与所述喷射喷嘴930的宽度相同的宽度,以消除供应到所述喷射喷嘴930的微粒子的流动截面积的变化,从而能够在宽度方向上均匀地喷射通过喷射喷嘴930喷射的微粒子。
如上所述,通过有限的实施例和附图说明了本发明,但是本发明并不限定于此,本领域技术人员能够在本发明的技术思想和权利要求书的等同范围内进行各种修改及变形。

Claims (15)

1.一种微粒子发生装置,其包括:
储存容器,储存有涂覆溶液;及
加热装置,其浸渍在所述储存容器的涂覆溶液中,对涂覆溶液进行局部加热,以产生沉积到涂覆对象物的微粒子。
2.根据权利要求1所述的微粒子发生装置,其特征在于,
所述加热装置包括:
传热管,其浸渍在涂覆溶液中;及
传热线,其配置在所述传热管的内部,从外部接收电力以产生热。
3.根据权利要求2所述的微粒子发生装置,其特征在于,
所述传热管被设置成多个管连接以形成网格形状,且所述传热管以与涂覆溶液的表面平行的方式浸渍在涂覆溶液的上层部。
4.根据权利要求2所述的微粒子发生装置,其特征在于,还包括:
搅拌装置,在所述加热装置浸渍在涂覆溶液的状态下,所述搅拌装置移动所述加热装置以搅拌涂覆溶液。
5.根据权利要求4所述的微粒子发生装置,其特征在于,
所述搅拌装置包括:
连接部件,其一侧端与所述传热管紧固,另一侧端向所述储存容器的外侧突出;
旋转部件,其具有偏心形成的突出部,所述连接部件的另一侧端插入到所述突出部;及
驱动部,其使所述旋转部件旋转。
6.根据权利要求5所述的微粒子发生装置,其特征在于,
所述搅拌装置设置有多个,并配置在所述传热管的前后,与所述驱动部的操作对应地进行旋转运动。
7.根据权利要求4所述的微粒子发生装置,其特征在于,
所述搅拌装置还包括搅拌部件,所述搅拌部件以向所述传热管的下侧面突出的方式与所述传热管紧固,并浸渍在涂覆溶液中,以在所述传热管移动时搅拌涂覆溶液。
8.根据权利要求7所述的微粒子发生装置,其特征在于,
混合杆以与所述搅拌部件垂直的方式紧固在所述搅拌部件的端部。
9.根据权利要求8所述的微粒子发生装置,其特征在于,
所述搅拌部件设置有多个,并以相邻的混合杆彼此朝向不同方向的方式紧固于所述传热管。
10.根据权利要求1所述的微粒子发生装置,其特征在于,还包括:
涂覆溶液供应装置,其与所述储存容器连接,并熔融被供应的固相涂覆介质后供应到所述储存容器中。
11.根据权利要求10所述的微粒子发生装置,其特征在于,
所述涂覆溶液供应装置包括:
熔融容器,其邻近所述储存容器配置,并形成有与所述储存容器连接的连通孔,以在熔融的涂覆溶液达到预定水位以上时,使所述涂覆溶液向所述储存容器流动;及
加热部,以包覆所述熔融容器的方式配置,并加热供应到所述熔融容器的固相涂覆介质以使其熔融。
12.根据权利要求11所述的微粒子发生装置,其特征在于,还包括:
原料粒子供应装置,其与所述熔融容器连接,向所述熔融容器供应固相涂覆介质。
13.根据权利要求12所述的微粒子发生装置,其特征在于,还包括:
水位感测传感器,其测量储存在所述储存容器中的涂覆溶液的水位;及
控制部,其从所述水位感测传感器接收数据,并控制所述原料粒子供应装置,以与涂覆溶液的水位对应地,选择性地供应固相涂覆介质或者切断供应固相涂覆介质。
14.一种涂覆系统,其包括:
权利要求1至13中的任意一项所述的微粒子发生装置;
真空腔室,其被配置成包围整个或者部分所述微粒子发生装置,并使涂覆对象物在真空状态下通过;
喷射喷嘴,其向涂覆对象物喷射微粒子,以对涂覆对象物进行涂覆;及
微粒子供应管,其连接所述微粒子发生装置与所述喷射喷嘴,并将由所述微粒子发生装置生成的微粒子供应到所述喷射喷嘴。
15.根据权利要求14所述的涂覆系统,其特征在于,
喷射喷嘴所述微粒子供应管具有与所述喷射喷嘴的宽度相同的宽度,以使供应到所述喷射喷嘴的微粒子的流动截面积的变化最小化。
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Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09137268A (ja) * 1995-11-08 1997-05-27 Nisshin Steel Co Ltd Mg蒸発方法
JP2004296201A (ja) * 2003-03-26 2004-10-21 Tohoku Pioneer Corp 蒸着源、蒸着装置、有機el素子、有機el素子の製造方法
CN204522340U (zh) * 2015-03-19 2015-08-05 江西盛伟实业有限公司 一种新型蒸馏釜
CN104846338A (zh) * 2015-06-03 2015-08-19 京东方科技集团股份有限公司 蒸发源装置及蒸镀装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4167437A (en) * 1972-07-31 1979-09-11 Cook Electric Company Boiling water evaporator with shrouded heating tube bundle
KR100513773B1 (ko) 1999-05-24 2005-09-09 주식회사 포스코 강판의 연속도금방법 및 이에 사용되는 도금장치
JP4439894B2 (ja) * 2003-12-01 2010-03-24 株式会社半導体エネルギー研究所 蒸着用るつぼ及び蒸着装置
KR20080078803A (ko) * 2005-10-17 2008-08-28 내셔날 리서치 카운실 오브 캐나다 코팅 및 분말의 반응성 분무 형성
KR101103508B1 (ko) * 2009-02-10 2012-01-06 한국생산기술연구원 선형 유기물 증착 장치
KR101639813B1 (ko) * 2009-10-08 2016-07-15 주식회사 포스코 연속 코팅 장치
KR101146982B1 (ko) * 2009-11-20 2012-05-22 삼성모바일디스플레이주식회사 박막 증착 장치 및 유기 발광 디스플레이 장치 제조 방법
KR101328589B1 (ko) * 2011-10-31 2013-11-12 한국과학기술원 다중 증발원 및 이를 이용한 박막 형성 장치
WO2013094680A1 (ja) * 2011-12-20 2013-06-27 株式会社日立国際電気 基板処理装置、半導体装置の製造方法および気化装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09137268A (ja) * 1995-11-08 1997-05-27 Nisshin Steel Co Ltd Mg蒸発方法
JP2004296201A (ja) * 2003-03-26 2004-10-21 Tohoku Pioneer Corp 蒸着源、蒸着装置、有機el素子、有機el素子の製造方法
CN204522340U (zh) * 2015-03-19 2015-08-05 江西盛伟实业有限公司 一种新型蒸馏釜
CN104846338A (zh) * 2015-06-03 2015-08-19 京东方科技集团股份有限公司 蒸发源装置及蒸镀装置

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