CN108254385B - Nanoscale automatic optical detection system - Google Patents
Nanoscale automatic optical detection system Download PDFInfo
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- CN108254385B CN108254385B CN201611240704.1A CN201611240704A CN108254385B CN 108254385 B CN108254385 B CN 108254385B CN 201611240704 A CN201611240704 A CN 201611240704A CN 108254385 B CN108254385 B CN 108254385B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/021—Special mounting in general
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/04—Batch operation; multisample devices
- G01N2201/0407—Batch operation; multisample devices with multiple optical units, e.g. one per sample
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a nanoscale automatic optical detection system, which comprises: the first optical detection mechanism and the second optical detection mechanism adopt industrial cameras, and pixels of the second optical detection lens are larger than those of the first optical detection lens; a conveying mechanism is arranged beside the first optical detection mechanism and the second optical detection mechanism, a material receiving clamp is arranged beside the conveying mechanism, and the first optical detection mechanism, the second optical detection mechanism, the conveying mechanism and the material receiving clamp are arranged above the machine table; the detected product is moved between the first optical detection mechanism and the second optical detection mechanism and between the receiving clamps through a manipulator of the transfer mechanism. The invention adopts a two-stage automatic optical detection mechanism, the first optical detection mechanism firstly carries out preliminary detection, and after preliminarily qualified products are screened out, the second optical detection mechanism carries out further detection. Meanwhile, the detected product is moved among the first optical detection mechanism, the second optical detection mechanism and the material receiving clamp through a manipulator of the transfer mechanism, so that automatic operation is realized.
Description
The technical field is as follows:
the invention relates to the technical field of automatic detection equipment, in particular to a nanoscale automatic optical detection system.
Background art:
AOI (automated optical inspection) is generally called automatic optical inspection and is a device for inspecting common defects encountered in product production based on optical principles. AOI is a new emerging testing technology, but the development is rapid, and AOI testing equipment is released by many manufacturers. During automatic detection, the machine automatically scans the PCB through the camera, acquires images, compares the tested welding spots with qualified parameters in the database, inspects the defects on the PCB through image processing, and displays/marks the defects through a display or an automatic mark for repair personnel to repair.
The existing optical detection equipment has single function and low detection precision and efficiency, and therefore, the inventor provides the following technical scheme.
The invention content is as follows:
the technical problem to be solved by the invention is to overcome the defects of the prior art and provide a nanoscale automatic optical detection system.
In order to solve the technical problems, the invention adopts the following technical scheme: the nanoscale automated optical inspection system comprises: a first optical detection mechanism, the first optical detection mechanism comprising: the device comprises a first optical detection lens and a feeding track positioned below the first optical detection lens, wherein a feeding carrier capable of moving along the feeding track is arranged on the feeding track; a second optical detection mechanism, the second optical detection mechanism comprising: the detection device comprises a second optical detection lens and a detection track positioned below the second optical detection lens, wherein a detection carrier capable of moving along the detection track is arranged on the detection track; the first optical detection lens and the second optical detection lens adopt industrial cameras, and pixels of the second optical detection lens are larger than those of the first optical detection lens; a conveying mechanism is arranged beside the first optical detection mechanism and the second optical detection mechanism, a material receiving clamp is arranged beside the conveying mechanism, and the first optical detection mechanism, the second optical detection mechanism, the conveying mechanism and the material receiving clamp are arranged above the machine table; the transfer mechanism comprises a manipulator and a transfer rail, the manipulator is slidably mounted on the transfer rail, and a detected product is moved among the first optical detection mechanism, the second optical detection mechanism and the material receiving clamp through the manipulator of the transfer mechanism.
Further, in the above technical solution, the feeding carrier in the first optical detection mechanism is mounted on a feeding detection platform, and the feeding detection platform is matched with the feeding track and driven by the driving mechanism to move along the feeding track in the X-axis direction; and a feeding calibration pressing plate is also arranged on the side edge of the feeding detection platform and is driven by a feeding calibration driving mechanism to realize the operation on the Y/Z axis.
Further, in the above technical solution, the first optical detection lens is installed on a first lens mount, and the first lens mount is disposed on a first detection base on the machine platform through a first lens driving mechanism.
Further, in the above technical solution, the detection carrier of the second optical detection mechanism is mounted on a detection platform, and the detection track includes: the device comprises a transverse detection track and a longitudinal detection track, wherein the transverse detection track is matched with a detection platform, a base of the transverse detection track is matched with the longitudinal detection track, and the transverse detection track and the longitudinal detection track realize the operation of the detection platform in the X/Y axis direction under the driving of a driving mechanism; and a calibration pressing plate is arranged on the side edge of the detection platform and driven by a calibration driving mechanism to realize the operation on the Y/Z axis.
Further, in the above technical solution, the second optical detection lens is mounted on a second lens mount, and the second lens mount is disposed on a second detection base on the machine platform through a second lens driving mechanism.
Further, in the above aspect, the robot of the moving mechanism includes: clamping part, vertical connecting seat, swivelling joint seat and transverse connection seat, the clamping part be connected with vertical connecting seat through a vertical cylinder, vertical connecting seat be connected with the swivelling joint seat through vertical cylinder, the swivelling joint seat be connected with transverse connection seat through swivelling cylinder, this transverse connection seat is installed and is transferred on the track rather than the complex.
Further, in the above-described aspect, the clamping portion includes: the clamping device comprises a clamping seat, a clamping cylinder fixed on the clamping seat, and an upper clamping part and a lower clamping part which are linked with the clamping cylinder, wherein the clamping seat is linked with a piston rod of a vertical cylinder to realize the movement of the clamping part in the vertical direction of the Z axis; the longitudinal connecting seat is linked with a piston rod of the longitudinal air cylinder to realize the movement of the clamping part in the longitudinal direction of the Y axis; the rotary connecting seat is linked with the rotary air cylinder to realize the rotation of the clamping part in the horizontal direction; the transverse connecting seat is matched with the transferring track and is driven by the lead screw transmission mechanism to realize the movement of the clamping part along the transferring track in the X-axis transverse direction.
Further, in the above technical solution, the material receiving clip includes: the receiving box body, a receiving seat for bearing the receiving box body, a longitudinal translation mechanism of the receiving seat and a lifting mechanism of the receiving seat; the material receiving seat is installed on the machine table through the material receiving seat longitudinal translation mechanism and the material receiving seat lifting mechanism, and the material receiving seat can run in the Y/Z axis direction.
Further, in the above-described aspect, a terminal material station is provided at a terminal end of the transfer rail in the moving mechanism.
Further, in the above technical solution, the pixels of the first optical detection lens are at least ten thousand pixels; the pixels of the second optical detection lens are at least 2900 ten thousand pixels.
After adopting the technical scheme, compared with the prior art, the invention has the following beneficial effects: the invention adopts a secondary automatic optical detection mechanism, and the pixels of the second optical detection lens are larger than those of the first optical detection lens, the first optical detection mechanism firstly carries out preliminary detection, and after preliminarily qualified products are screened out, the second optical detection mechanism carries out further detection. Meanwhile, the detected product is moved among the first optical detection mechanism, the second optical detection mechanism and the material receiving clamp through a manipulator of the transfer mechanism, so that automatic operation is realized. In another aspect, the invention employs an industrial camera, which can realize nanoscale optical detection, further improving the detection precision.
Description of the drawings:
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a perspective view of another perspective of the present invention;
FIG. 3 is a perspective view of a first optical detection mechanism in the present invention;
FIG. 4 is a perspective view of the first optical inspection mechanism of the present invention from another perspective;
FIG. 5 is a perspective view of a second optical detection mechanism in accordance with the present invention;
FIG. 6 is a perspective view of the transfer mechanism and the material receiving clip of the present invention;
fig. 7 is a perspective view of fig. 6 from another perspective.
The specific implementation mode is as follows:
the invention is further illustrated below with reference to specific embodiments and the accompanying drawings.
Referring to fig. 1 and 2, the present invention is a nanoscale automatic optical inspection system, comprising: the device comprises a first optical detection mechanism 1, a second optical detection mechanism 2, a transfer mechanism 3, a material receiving clamp 4 and a machine table 6 for bearing the components.
As shown in fig. 3 and 4, the first optical detection mechanism 1 includes: the device comprises a first optical detection lens 11 and a feeding track 12 positioned below the first optical detection lens 11, wherein a feeding carrier 13 capable of moving along the feeding track 12 is arranged on the feeding track 12. Specifically, the feeding carrier 13 in the first optical detection mechanism 1 is installed on a feeding detection platform 14, and the feeding detection platform 14 is matched with the feeding track 12 and driven by a driving mechanism to run along the feeding track 12 in the X-axis direction; a feeding calibration pressing plate 17 is further arranged on the side edge of the detection platform 14, and the feeding calibration pressing plate 17 is driven by a feeding calibration driving mechanism 18 to realize the operation on the Y/Z axis. The first optical detection lens 11 is mounted on a first lens mount 110, and the first lens mount 110 is disposed on a first detection base 15 on the machine platform 6 through a first lens driving mechanism 16.
When the first optical detection and detection mechanism 1 works, firstly, the feeding detection platform 14 is located at the starting end (as shown in fig. 3) on the left side of the feeding track 12, and an operator firstly places a product to be detected into the feeding carrier 13. Then, the feeding calibration pressing plate 17 is driven by the feeding calibration driving mechanism 18 to realize the operation on the Y/Z axis, that is, the feeding calibration pressing plate 17 is driven by the feeding calibration driving mechanism 18 to move to the upper part of the feeding carrier 13. The input calibration platen 17 serves as a reference for subsequent optical inspection. Then, the driving mechanism in the feeding track 12 drives the feeding detection platform 14 to horizontally move along the X axis from left to right to the lower side of the first optical detection lens 11. Finally, the first lens mount 110 is driven by the first lens driving mechanism 16 to move up and down, the focal length of the first optical detection lens 11 is adjusted, and the detection of the product to be detected on the feeding carrier 13 is started.
The feeding calibration driving mechanism 18 is a cylinder driving mechanism, the driving mechanism in the feeding rail 12 can be a screw driving mechanism, and the first lens driving mechanism 16 is a cylinder driving mechanism.
As shown in fig. 5, the second optical detection mechanism 2 includes: a second optical detection lens 21 and a detection track 22 located below the second optical detection lens 21, wherein a detection carrier 23 capable of moving along the detection track 22 is disposed on the detection track 22. The detecting carrier 23 has the same structure as the feeding carrier 13, and is used as a fixture for carrying the products to be tested, and can be selected according to different products to be tested. Similarly, the inspection vehicle 23 of the second optical inspection mechanism 2 is mounted on an inspection platform 24, and the inspection rail 22 includes: the detection device comprises a transverse detection track 221 and a longitudinal detection track 222, wherein the transverse detection track 221 is matched with the detection platform 24, a base 220 of the transverse detection track 221 is matched with the longitudinal detection track 222, and the transverse detection track 221 and the longitudinal detection track 222 are driven by a driving mechanism to realize the operation of the detection platform 24 in the X/Y axis direction; and a calibration pressure plate 27 is arranged on the side of the detection platform 24, and the calibration pressure plate 27 is driven by a calibration driving mechanism 28 to realize the operation on the Y/Z axis.
When the second optical detection mechanism 2 works, firstly, the detection platform 24 is located at the starting end of the detection track 22, and the product detected by the first optical detection mechanism 1 is placed in the detection carrier 23 by the transfer mechanism 3. Then, the calibration platen 27 is driven by the calibration driving mechanism 28 to perform the operation on the Y/Z axis, that is, the calibration platen 27 is driven by the calibration driving mechanism 28 to operate above the inspection vehicle 23. Then, the transverse detection track 221 and the longitudinal detection track 222 in the detection track 12 are driven by respective driving mechanisms to realize the operation of the detection platform 24 in the X/Y axis direction until the detection platform 24 moves below the second optical lens 21. Finally, the second lens driving mechanism 26 drives the first lens mount 210 to move up and down, so as to adjust the focal length of the second optical detection lens 21 and start further fine detection of the product to be detected on the detection carrier 23.
The operation mechanism of the second optical detection mechanism 2 is similar to that of the first optical detection mechanism 1, except that the feeding track 12 in the first optical detection mechanism 1 can only drive the detection platform 14 to move in the X-axis horizontal direction. And the detection track 22 in the second optical detection mechanism 2 is a composite track which can realize the horizontal movement of the detection platform 24 in the X/Y axis direction. For the convenience of the movement of the products to be detected subsequently, the transverse detection track 221 of the feeding track 12 and the detection track 22 are in the same straight line.
In addition, the first and second optical detection lenses 11 and 21 are industrial cameras, and the pixels of the second optical detection lens 22 are larger than those of the first optical detection lens 11. Typically, the pixels of the first optical detection lens 11 are at least 1300 ten thousand pixels; the pixels of the second optical detection lens 21 are at least 2900 ten thousand pixels. By adopting the two-stage automatic optical detection mechanism, the pixels of the second optical detection lens 21 are larger than those of the first optical detection lens 11, the first optical detection mechanism 1 firstly carries out preliminary detection, and after preliminarily qualified products are screened out, the second optical detection mechanism 2 carries out further detection. Meanwhile, an industrial camera is adopted, so that nanoscale optical detection can be realized, and the detection precision is further improved.
The movement of the product to be tested between the first optical detection mechanism 1 and the second optical detection mechanism 2 is realized by the transfer mechanism 3. Referring to fig. 6 and 7, a transfer mechanism 3 is disposed beside the first and second optical detection mechanisms 1 and 2, and a material receiving clamp 4 is disposed beside the transfer mechanism 3. The transfer mechanism 3 comprises a manipulator 31 and a transfer rail 32, the manipulator 31 is slidably mounted on the transfer rail 32, and the detected product is moved among the first optical detection mechanism 1, the second optical detection mechanism 2 and the material receiving clamp 4 by the manipulator 31 of the transfer mechanism 3.
The transverse detection track 221 of the feeding track 12 and the detection track 22 is positioned on the same straight line, and the transfer track 32 is parallel to the feeding track 12 and the transverse detection track 221 which are positioned on the same straight line, so that the smooth transfer of the product to be detected is realized.
Specifically, the robot 31 of the transfer mechanism 3 includes: the clamping device comprises a clamping part 310, a longitudinal connecting seat 315, a rotary connecting seat 317 and a transverse connecting seat 319, wherein the clamping part 310 is connected with the longitudinal connecting seat 315 through a vertical air cylinder 316, the longitudinal connecting seat 315 is connected with the rotary connecting seat 317 through a longitudinal air cylinder, the rotary connecting seat 317 is connected with the transverse connecting seat 319 through a rotary air cylinder, and the transverse connecting seat 319 is arranged on a transfer track 32 matched with the transverse connecting seat 319.
The clamping portion 310 includes: the clamping device comprises a clamping seat 314, a clamping cylinder 313 fixed on the clamping seat 314, and an upper clamping part 311 and a lower clamping part 312 which are interlocked with the clamping cylinder 313, wherein the clamping seat 314 is interlocked with a piston rod of a vertical cylinder 316 to realize the movement of the clamping part 310 in the vertical direction of the Z axis; the longitudinal connecting base 315 is interlocked with a piston rod of the longitudinal cylinder to realize the movement of the clamping part 310 in the longitudinal direction of the Y axis; the rotary connecting base 317 is linked with the rotary cylinder to realize the rotation of the clamping part 310 in the horizontal direction; the transverse connecting base 319 is matched with the transfer rail 32 and driven by the lead screw transmission mechanism 3190, so that the clamping part 310 moves along the transfer rail 32 in the X-axis transverse direction.
When the transfer mechanism 3 is operated, the lateral link 319 is first moved to the left start end of the transfer rail 32 by the screw drive mechanism 3190, and at this time, the robot 31 is rotated by the rotary link 317, so that the robot 31 faces the first and second optical detection mechanisms 3. Then, the height and the extending depth of the clamping portion 310 are adjusted by the driving of the longitudinal cylinder and the vertical cylinder 316, so that the clamping portion 310 can be made to correspond to the product to be detected on the feeding carrier 13 of the first optical detection mechanism 1. Then, the clamping cylinder 313 drives the upper and lower clamping parts 311, 312 to clamp the product to be detected, and if the product to be detected needs to be subsequently detected, the transverse connecting seat 319 moves to the position of the second optical detection mechanism 2 on the right side of the transfer track 32 through the lead screw transmission mechanism 3190; if the product to be detected is determined as a defective product by the first optical detection mechanism 1, the robot hand 31 rotates 180 ° by rotating the connecting base 317, and places the defective product into the take-up jig 4.
The material receiving clamp 4 comprises: the receiving box body 41, a receiving seat 42 for bearing the receiving box body 41, a receiving seat longitudinal translation mechanism 43 and a receiving seat lifting mechanism 44; the material receiving seat 42 is installed on the machine table 6 through the material receiving seat longitudinal translation mechanism 43 and the material receiving seat lifting mechanism 44, and the material receiving seat 42 can run in the Y/Z axis direction. A transfer station 8 is arranged between the material receiving clamp 4 and the transfer mechanism 3, the transfer mechanism 3 places the detected defective products into the transfer station 8, and then the defective products are sent into the material receiving box 41 through the transfer station 8.
After the second optical inspection mechanism 2 finishes the inspection, the qualified product is placed on the end material station 7 arranged at the end of the transfer rail 32 in the transfer mechanism 3 by the transfer mechanism 3, and waits for the subsequent processing procedure. The unqualified product is still placed in the receiving box 41 by the transfer mechanism 3.
In this embodiment, the material receiving clamp 4 is provided with two material receiving boxes 41 to respectively load defective products of different grades. The height of the material receiving seat 42 is adjusted by the material receiving box 41 through the material receiving seat lifting mechanism 44, and as defective products in the material receiving box 41 are accumulated, the height of the material receiving seat 42 needs to be adjusted continuously in order to correspond to the height of the transfer station 8. Meanwhile, the receiving seat longitudinal translation mechanism 43 can realize the switching between the two receiving boxes 41.
It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the scope of the present invention, which is defined by the appended claims.
Claims (8)
1. A nanoscale automated optical inspection system comprising:
a first optical detection mechanism (1), the first optical detection mechanism (1) comprising: the device comprises a first optical detection lens (11) and a feeding track (12) positioned below the first optical detection lens (11), wherein a feeding carrier (13) capable of moving along the feeding track (12) is arranged on the feeding track (12);
a second optical detection mechanism (2), the second optical detection mechanism (2) comprising: the device comprises a second optical detection lens (21) and a detection track (22) positioned below the second optical detection lens (21), wherein a detection carrier (23) capable of moving along the detection track (22) is arranged on the detection track (22);
the method is characterized in that: the first optical detection lens (11) and the second optical detection lens (21) adopt industrial cameras, and the pixels of the second optical detection lens (21) are larger than those of the first optical detection lens (11);
a transfer mechanism (3) is arranged beside the first and second optical detection mechanisms (1, 2), a material receiving clamp (4) is arranged beside the transfer mechanism (3), and the first and second optical detection mechanisms (1, 2), the transfer mechanism (3) and the material receiving clamp (4) are arranged above the machine table (6);
the transfer mechanism (3) comprises a manipulator (31) and a transfer rail (32), the manipulator (31) is slidably mounted on the transfer rail (32), and a detected product is moved among the first optical detection mechanism (1), the second optical detection mechanism (2) and the receiving clamp (4) through the manipulator (31) of the transfer mechanism (3);
a feeding carrier (13) in the first optical detection mechanism (1) is arranged on a feeding detection platform (14), the feeding detection platform (14) is matched with the feeding track (12), and the feeding carrier is driven by a driving mechanism to run along the feeding track (12) in the X-axis direction; a feeding calibration pressing plate (17) is further arranged on the side edge of the feeding detection platform (14), and the feeding calibration pressing plate (17) is driven by a feeding calibration driving mechanism (18) to realize operation on a Y/Z axis;
the detection carrier (23) of the second optical detection mechanism (2) is arranged on a detection platform (24), and the detection track (22) comprises: the detection device comprises a transverse detection track (221) and a longitudinal detection track (222), wherein the transverse detection track (221) is matched with a detection platform (24), a base (220) of the transverse detection track (221) is matched with the longitudinal detection track (222), and the transverse detection track and the longitudinal detection track (221, 222) are driven by a driving mechanism to realize the operation of the detection platform (24) in the X/Y axis direction; and a calibration pressure plate (27) is arranged on the side edge of the detection platform (24), and the calibration pressure plate (27) is driven by a calibration driving mechanism (28) to realize the operation on the Y/Z axis.
2. The nanoscale automated optical inspection system of claim 1, wherein: the first optical detection lens (11) is arranged on a first lens seat (110), and the first lens seat (110) is arranged on a first detection base (15) on the machine table (6) through a first lens driving mechanism (16).
3. The nanoscale automated optical inspection system of claim 1, wherein: the second optical detection lens (21) is arranged on a second lens seat (210), and the second lens seat (210) is arranged on a second detection base (25) on the machine table (6) through a second lens driving mechanism (26).
4. The nanoscale automated optical inspection system according to any one of claims 1 to 3, characterized in that: the manipulator (31) of the transfer mechanism (3) comprises: clamping part (310), vertical connecting seat (315), swivelling joint seat (317) and horizontal connecting seat (319), clamping part (310) be connected with vertical connecting seat (315) through a vertical cylinder (316), vertical connecting seat (315) be connected with swivelling joint seat (317) through vertical cylinder, swivelling joint seat (317) be connected with horizontal connecting seat (319) through swivelling cylinder, this horizontal connecting seat (319) is installed on the track (32) are transferred with it complex.
5. The nanoscale automated optical inspection system of claim 4, wherein: the clamping part (310) comprises: the clamping device comprises a clamping seat (314), a clamping cylinder (313) fixed on the clamping seat (314), and upper and lower clamping parts (311, 312) linked with the clamping cylinder (313), wherein the clamping seat (314) is linked with a piston rod of a vertical cylinder (316) to realize the movement of the clamping part (310) in the vertical direction of the Z axis; the longitudinal connecting seat (315) is linked with a piston rod of the longitudinal air cylinder to realize the movement of the clamping part (310) in the longitudinal direction of the Y axis; the rotary connecting seat (317) is linked with the rotary cylinder to realize the rotation of the clamping part (310) in the horizontal direction; the transverse connecting seat (319) is matched with the transfer track (32) and driven by a lead screw transmission mechanism (3190), so that the clamping part (310) can move along the transfer track (32) in the X-axis transverse direction.
6. The nanoscale automated optical inspection system of claim 4, wherein: the receiving clamp (4) comprises: the receiving device comprises a receiving box body (41), a receiving seat (42) for bearing the receiving box body (41), a receiving seat longitudinal translation mechanism (43) and a receiving seat lifting mechanism (44); the receiving seat (42) is installed on the machine table (6) through the receiving seat longitudinal translation mechanism (43) and the receiving seat lifting mechanism (44), and the receiving seat (42) can run in the Y/Z axis direction.
7. The nanoscale automated optical inspection system of claim 1, wherein: an end material station (7) is arranged at the tail end of the transfer track (32) in the transfer mechanism (3).
8. The nanoscale automated optical inspection system of claim 1, wherein: the pixels of the first optical detection lens (11) are at least 1300 ten thousand pixels; the pixels of the second optical detection lens (21) are at least 2900 ten thousand pixels.
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| CN201611240704.1A CN108254385B (en) | 2016-12-29 | 2016-12-29 | Nanoscale automatic optical detection system |
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| CN201611240704.1A CN108254385B (en) | 2016-12-29 | 2016-12-29 | Nanoscale automatic optical detection system |
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| CN108254385B true CN108254385B (en) | 2021-04-30 |
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| CN109540920A (en) * | 2019-01-10 | 2019-03-29 | 东莞市吉洋自动化科技有限公司 | A kind of two-sided automatic optical detector of LED |
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| CN101799434A (en) * | 2010-03-15 | 2010-08-11 | 深圳市中钞科信金融科技有限公司 | Printing image defect detection method |
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| CN103487442A (en) * | 2013-09-25 | 2014-01-01 | 华南理工大学 | Novel device and method for detecting defects of flexible circuit boards |
| CN103630544A (en) * | 2013-11-07 | 2014-03-12 | 江苏大学 | Online visual detection system |
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