CN108226568A - Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof - Google Patents
Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof Download PDFInfo
- Publication number
- CN108226568A CN108226568A CN201711380351.XA CN201711380351A CN108226568A CN 108226568 A CN108226568 A CN 108226568A CN 201711380351 A CN201711380351 A CN 201711380351A CN 108226568 A CN108226568 A CN 108226568A
- Authority
- CN
- China
- Prior art keywords
- thermistor
- octagon
- thermal resistance
- adding thermal
- wind speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
Abstract
The invention discloses a kind of wind speed wind direction sensors based on octagon thermistor structure and preparation method thereof, wherein sensor includes silicon substrate, the insulating layer above silicon substrate and the adding thermal resistance on insulating layer and 8 thermistors, the shape of the adding thermal resistance is octagon, is correspondingly arranged that there are one the thermistors consistent with the side angle of inclination on the outside of each edge of octagon.Accuracy and sensitivity higher of the present invention.
Description
Technical field
The present invention relates to sensor more particularly to a kind of wind speed wind direction sensor based on octagon thermistor structure and
Preparation method.
Background technology
Wind speed and direction information and people’s lives are closely bound up, and are widely used in industrial construction, agricultural production, space flight boat
The fields such as sky, traffic for tourism, weather forecast and environmental protection.In the past, the measurement of wind speed and direction mainly used mechanical vane
Realize in the recent period, and the wind speed wind direction sensor based on ultrasonic principle and doppler principle occur with wind vane.But by
In bulky, of high cost, these wind speed wind direction sensors can not meet minimizing in technology of Internet of things, low cost etc. should
Use demand.Recently, traditional wind speed wind direction sensor has been overturned in the appearance of micro-electronic mechanical system technique so that minimizes, is low
The wind speed and direction detection micro-system of power consumption becomes a reality.
Patent application No. is 200510038840.8 discloses a kind of relevant parameter for being used to measure wind, temperature and pressure
Temperature, wind speed, the gentle pressure integration sensor of wind direction, by silicon chip, at least four polysilicon strips as heating element, center
Temperature sensor, at least four are arranged for the temperature sensor and pressure drag composition, polysilicon strip of wind direction measure by regular polygon
Row, center temperature sensor are located in the regular polygon of polysilicon strip composition, are located at for the temperature sensor that wind direction measures more
The similar figures that regular polygon is formed except crystal silicon item and according to polysilicon strip arrange, and the invention is small with the gross area, and cost is small,
But its accuracy and sensitivity is inadequate.
Invention content
Goal of the invention：In view of the problems of the existing technology the present invention, provides a kind of based on octagon thermistor structure
Wind speed wind direction sensor and preparation method thereof.
Technical solution：Wind speed wind direction sensor of the present invention based on octagon thermistor structure is served as a contrast including silicon
Bottom, the insulating layer above silicon substrate and the adding thermal resistance on insulating layer and 8 thermistors, the heating electricity
The shape of resistance is octagon, is correspondingly arranged that there are one the heat consistent with the side angle of inclination on the outside of each edge of octagon
Quick resistance.
Further, the adding thermal resistance is additionally provided with two conductive contact blocks, and the conductive contact block is located at thermistor
Outside, two conductive contact blocks connect the both sides of adding thermal resistance by lead respectively.Each thermistor is designed with two
Conductive contact block, each conductive contact block connect a line end of corresponding thermistor, and positioned at corresponding thermistor respectively
Outside.The insulating layer is specially silicon dioxide layer.
The preparation method of wind speed wind direction sensor of the present invention based on octagon thermistor structure, including following
Step：
(1) prepare silicon substrate；
(2) it aoxidizes, on a silicon substrate one layer insulating of side's growth；
(3) metal of adding thermal resistance, thermistor and conductive contact block is sputtered on the insulating layer；
(4) spin coating photoresist；
(5) it exposes, develops, the photoresist except adding thermal resistance, thermistor and conductive contact block region is removed in corrosion；
(6) it etches, removes the metal except adding thermal resistance, thermistor and contact block region；
(7) photoresist is removed.
Advantageous effect：Compared with prior art, the present invention its remarkable advantage is：The present invention is using two groups of 45 degree of intervals
Thermistor structure measure wind speed and direction information, using the average value measured twice as final wind speed and direction as a result,
Measurement error can be reduced, improve measurement accuracy.
Description of the drawings
Fig. 1 is the vertical view of the wind speed wind direction sensor provided by the invention based on octagon thermistor structure；
Fig. 2 is the A-A ' sectional views in Fig. 1.
Specific embodiment
A kind of wind speed wind direction sensor based on octagon thermistor structure is present embodiments provided, such as Fig. 1 and Fig. 2 institutes
Show, the insulating layer 2 including silicon substrate 1, above silicon substrate 1 and the adding thermal resistance 3 on insulating layer 2 and 8 heat
Quick resistance 4,5,6,7,8,9,10,11, the shape of adding thermal resistance 3 is octagon, and each edge outside correspondence of octagon is set
The thermistor consistent with the side angle of inclination there are one putting also forms a side unconnected octagon mutually.Heating electricity
Resistance 3 is additionally provided with two conductive contact blocks 12,13, and conductive contact block 12,13 is located on the outside of thermistor, conductive contact block 12,13
The both sides of adding thermal resistance 3 are connected by lead respectively.Wherein, each thermistor is designed with two conductive contact blocks, respectively
14th, 15,16,17,18,19,20,21,22,23,24,25,26,27,28,29, each conductive contact block connects corresponding heat respectively
One line end of quick resistance, and positioned at the outside of corresponding thermistor.Insulating layer 2 is specially silicon dioxide layer.
The preparation method of the wind speed wind direction sensor based on octagon thermistor structure of the present invention, including following step
Suddenly：
(1) prepare silicon substrate；
(2) it aoxidizes, on a silicon substrate one layer insulating of side's growth；
(3) metal of adding thermal resistance, thermistor and conductive contact block is sputtered on the insulating layer；
(4) spin coating photoresist；
(5) it exposes, develops, the photoresist except adding thermal resistance, thermistor and conductive contact block region is removed in corrosion；
(6) it etches, removes the metal except adding thermal resistance, thermistor and contact block region；
(7) photoresist is removed.
Operation principle of the present invention is：When by contact block 12 and 13, when applying electric signal in adding thermal resistance 3, heating is electric
Resistance 3 generates heat.When calm, the thermal field that adding thermal resistance 3 generates is symmetrical；When blowing air over, the heat quilt of upstream
It takes downstream to, upstream temperature is caused to decline, downstream temperature raising is read the temperature difference of two thermistors by circuit, finally may be used
To realize the measurement of wind speed and direction.Eight thermistors can realize that the accurate wind direction in more direction measures, in addition eight
Thermistor is divided into two groups, thermistor 4,6,8,10 and thermistor 5,7,9,11, is separated by 45 degree between them.It is assuming that hot
The wind speed that quick resistance 4,6,8,10 is measured be v1, wind direction be θ 1, the wind speed that thermistor 5,7,9,11 is measured be v2, wind
To for θ 2, by two wind speed and directions, results are averaged, is expressed as final wind speed and direction, i.e. and v=(v1+v2), θ=
Measuring accuracy so as to reduce measurement error, is improved in (θ 1+ θ 2)/2.
Above disclosed is only a kind of preferred embodiment of the present invention, it is impossible to the right model of the present invention is limited with this
It encloses, therefore equivalent variations made according to the claims of the present invention, is still within the scope of the present invention.
Claims (5)
1. a kind of wind speed wind direction sensor based on octagon thermistor structure, it is characterised in that：Including silicon substrate, positioned at silicon
Insulating layer above substrate and the adding thermal resistance on insulating layer and 8 thermistors, the shape of the adding thermal resistance are
Octagon, is correspondingly arranged that there are one the thermistors consistent with the side angle of inclination on the outside of each edge of octagon.
2. the wind speed wind direction sensor according to claim 1 based on octagon thermistor structure, it is characterised in that：Institute
It states adding thermal resistance and is additionally provided with two conductive contact blocks, the conductive contact block is located on the outside of thermistor, two conductive contact blocks
The both sides of adding thermal resistance are connected by lead respectively.
3. the wind speed wind direction sensor according to claim 1 based on octagon thermistor structure, it is characterised in that：Often
A thermistor is designed with two conductive contact blocks, and each conductive contact block connects a line of corresponding thermistor respectively
End, and positioned at the outside of corresponding thermistor.
4. the wind speed wind direction sensor according to claim 1 based on octagon thermistor structure, it is characterised in that：Institute
It is specially silicon dioxide layer to state insulating layer.
5. a kind of preparation method of the wind speed wind direction sensor described in claim 1 based on octagon thermistor structure,
It is characterized in that including the following steps：
(1) prepare silicon substrate；
(2) it aoxidizes, on a silicon substrate one layer insulating of side's growth；
(3) metal of adding thermal resistance, thermistor and conductive contact block is sputtered on the insulating layer；
(4) spin coating photoresist；
(5) it exposes, develops, the photoresist except adding thermal resistance, thermistor and conductive contact block region is removed in corrosion；
(6) it etches, removes the metal except adding thermal resistance, thermistor and contact block region；
(7) photoresist is removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711380351.XA CN108226568A (en) | 2017-12-20 | 2017-12-20 | Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711380351.XA CN108226568A (en) | 2017-12-20 | 2017-12-20 | Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108226568A true CN108226568A (en) | 2018-06-29 |
Family
ID=62652580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711380351.XA Pending CN108226568A (en) | 2017-12-20 | 2017-12-20 | Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108226568A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60166868A (en) * | 1984-02-09 | 1985-08-30 | Nippon Denso Co Ltd | Apparatus for measuring wind direction and velocity |
| CN1356555A (en) * | 2002-01-11 | 2002-07-03 | 东南大学 | Integrated anemometer using polysilicon temp diode and its preparing process |
| CN1670488A (en) * | 2005-04-13 | 2005-09-21 | 东南大学 | Temperature, wind speed, wind direction and air pressure integration sensor |
| CN101021571A (en) * | 2007-03-28 | 2007-08-22 | 哈尔滨理工大学 | Array type multi-parameter wind sensor chip substrate and producing method thereof |
| CN101059528A (en) * | 2007-05-11 | 2007-10-24 | 东南大学 | Cross structure two-D wind speed wind direction sensor and its preparation method |
| CN102998479A (en) * | 2012-12-31 | 2013-03-27 | 哈尔滨理工大学 | Two-dimensional wind speed and wind direction sensor of aluminum nitride based integrated array structure and manufacture method of sensor |
| TW201346264A (en) * | 2012-03-15 | 2013-11-16 | Sharp Kk | Anemometer |
| CN204359814U (en) * | 2014-12-17 | 2015-05-27 | 哈尔滨理工大学 | A kind of high precision wind speed and direction integrated sensor of nichrome film heating |
| CN106483327A (en) * | 2016-11-30 | 2017-03-08 | 国家海洋技术中心 | A kind of ultrasound wind system and method |
-
2017
- 2017-12-20 CN CN201711380351.XA patent/CN108226568A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60166868A (en) * | 1984-02-09 | 1985-08-30 | Nippon Denso Co Ltd | Apparatus for measuring wind direction and velocity |
| CN1356555A (en) * | 2002-01-11 | 2002-07-03 | 东南大学 | Integrated anemometer using polysilicon temp diode and its preparing process |
| CN1670488A (en) * | 2005-04-13 | 2005-09-21 | 东南大学 | Temperature, wind speed, wind direction and air pressure integration sensor |
| CN101021571A (en) * | 2007-03-28 | 2007-08-22 | 哈尔滨理工大学 | Array type multi-parameter wind sensor chip substrate and producing method thereof |
| CN101059528A (en) * | 2007-05-11 | 2007-10-24 | 东南大学 | Cross structure two-D wind speed wind direction sensor and its preparation method |
| TW201346264A (en) * | 2012-03-15 | 2013-11-16 | Sharp Kk | Anemometer |
| CN102998479A (en) * | 2012-12-31 | 2013-03-27 | 哈尔滨理工大学 | Two-dimensional wind speed and wind direction sensor of aluminum nitride based integrated array structure and manufacture method of sensor |
| CN204359814U (en) * | 2014-12-17 | 2015-05-27 | 哈尔滨理工大学 | A kind of high precision wind speed and direction integrated sensor of nichrome film heating |
| CN106483327A (en) * | 2016-11-30 | 2017-03-08 | 国家海洋技术中心 | A kind of ultrasound wind system and method |
Non-Patent Citations (2)
| Title |
|---|
| 沈广平: "《低热导率衬底的热风速风向传感器研究》", 《仪器仪表学报》 * |
| 陈媛婧: "《一种基于悬浮吸收层的双层结构的热电堆红外探测器》", 《传感技术学报》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100460875C (en) | Cross structure two-D wind speed wind direction sensor and its preparation method | |
| CN105928567B (en) | Silicon substrate gas sensitization chip of integrated Temperature Humidity Sensor and preparation method thereof | |
| CN100582784C (en) | Micro-mechanical two-dimension wind speed and wind direction sensor and signal processing circuit thereof | |
| CN1325879C (en) | Temperature, wind speed, wind direction and air pressure integration sensor | |
| CN105675916B (en) | Highly sensitive silicon two dimension hot type airspeedometer and preparation method thereof | |
| CN1851472A (en) | Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology | |
| CN109164270B (en) | Ultra-wide range anemometer and manufacturing method | |
| CN109188015B (en) | High-sensitivity silicon two-dimensional anemometer and manufacturing method thereof | |
| CN109001486A (en) | A kind of wide-range air velocity transducer and preparation method thereof | |
| CN107907707B (en) | A kind of wind speed wind direction sensor and detection method based on the double-deck thermopile structure | |
| CN108169509A (en) | Wind speed wind direction sensor based on octagon thermopile structure and preparation method thereof | |
| CN109116050A (en) | A kind of microminiature high sensitivity two-D wind speed meter and preparation method thereof | |
| CN105319387B (en) | A kind of exchange self-heating type wind speed wind direction sensor and its measurement method | |
| EP1124114A1 (en) | Flow velocity detector | |
| CN103278659A (en) | Wind speed sensor based on stress measurement | |
| CN108226568A (en) | Wind speed wind direction sensor based on octagon thermistor structure and preparation method thereof | |
| CN205785343U (en) | The silica-based gas sensitization chip of integrated Temperature Humidity Sensor | |
| CN106706167B (en) | A kind of high sensitivity quick response heat flow transducer | |
| CN104977425A (en) | Wind measurement sensor chip structure and method of manufacturing same | |
| CN105174200B (en) | The structure of a kind of New Resonance Type film thermoelectric converter and manufacture method | |
| CN104535793B (en) | The fast sensor construction of hot blast based on Time delay measurement and wind speed and direction assay method | |
| CN113933535B (en) | Two-dimensional dual-mode MEMS wind speed and direction sensor and preparation method thereof | |
| CN101782410A (en) | Thermal flow meter of micro electro mechanical system | |
| CN2750321Y (en) | Micromachining based air velocity transducer | |
| CN109384189B (en) | Thermal type wind speed and direction sensor based on bonding process and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180629 |