CN100582784C - Micro-mechanical two-dimension wind speed and wind direction sensor and signal processing circuit thereof - Google Patents
Micro-mechanical two-dimension wind speed and wind direction sensor and signal processing circuit thereof Download PDFInfo
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- CN100582784C CN100582784C CN200810124428A CN200810124428A CN100582784C CN 100582784 C CN100582784 C CN 100582784C CN 200810124428 A CN200810124428 A CN 200810124428A CN 200810124428 A CN200810124428 A CN 200810124428A CN 100582784 C CN100582784 C CN 100582784C
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Abstract
The invention relates to a two-dimensional wind-speed wind-direction sensor and a signal processing circuit thereof, which relates to a two-dimensional wind-speed wind-direction sensor which is based on a micro-mechanical (MEMS) lift-off process and a constant temperature control and heat temperature difference detection circuit. A chip temperature measurement resistance Rs in the center of the sensor and a reference resistance are connected to be a Wheatstone bridge form, which are amplified in difference, and finally, a voltage/current transition element are utilized to drive a heating resistance Rh, and the constant temperature control of the sensor is achieved through utilizing optical and thermal negative feedback. Eight temperature-measuring resistances which are symmetrically arranged and the resistance values are same are divided into two groups to form a Wheatstone whole bridge circuit to measure wind speed in X and Y direction. The output of the Wheatstone bridge is conversed into digital quantity to enter MCU through a multiple selector Mux and an A/D convertor after being magnified, and the wind speed and the wind direction values can be got through calculation, and finally, LCD display and digital output can be achieved. The invention has the advantages of simple and reliable technique, high sensitivity, low power consumption, fast response time and the like.
Description
Technical field
The present invention relates to a kind of two-dimentional hotting mask wind speed wind direction sensor, constant difference control and metering circuit based on micromechanics (MEMS) stripping technology.
Background technology
Wind speed, wind direction are very important ingredients in the meteorologic survey.As everyone knows, though utilize also energy measurement wind speed and direction of the vane of machining and weathervane, these mechanical hook-ups are easy to wear because of having moving-member, and it is bigger to have volume simultaneously, costs an arm and a leg, and needs shortcomings such as often maintenance.It is little to have a volume based on the miniature current velocity sensor of MEMS process technology, and price is low, and the characteristics of good product consistency are the focuses of fluid sensor research in recent years.Van Putten (name) has proposed first hot-wire flow sensor based on silicon micromachining technology in 1974.For while measuring wind and wind direction information, Honeywell (exabyte) etc. has proposed the heat-flow sensor based on hot temperature difference principle.Huijsing people such as (names) has proposed the air velocity transducer of square fire-bar structure, and it adopts thermoelectric pile to measure the temperature difference, can measure the wind speed and direction of two dimension.
Summary of the invention
Technical matters: the objective of the invention is to propose a kind of micro-mechanical two-dimension wind speed wind transducer and signal processing circuit thereof, the sharp lower thermal conductivity that adopts of the present invention, the glass substrate of low heat capacity, just can finish the processing of sensor with twice metal lift-off material, processing step is simple and reliable, and improved sensitivity greatly, reduced power consumption and response time.
Technical scheme: micro-mechanical two-dimension wind speed wind transducer of the present invention comprises substrate, heating resistor, chip temperature measuring resistance, 8 hot differential temperature survey resistance, press welding block; Be positioned at the chip temperature measuring resistance and the heating resistor symmetry and the closely winding fully of sensor chip central authorities, be used for chip temperature and characterize; The resistance value of hot differential temperature survey resistance that is positioned at 8 symmetrical distributions around the sensor chip is in full accord, and press welding block is connected with heating resistor, chip temperature measuring resistance, 8 hot differential temperature survey resistance respectively.
Described 8 hot differential temperature survey resistance are divided into two groups: wherein the first hot differential temperature survey resistance, the second hot differential temperature survey resistance, the 3rd hot differential temperature survey resistance, the 4th hot differential temperature survey resistance are formed one group of full-bridge circuit, the wind speed of measured X direction; The 5th hot differential temperature survey resistance, the 6th hot differential temperature survey resistance, the 7th hot differential temperature survey resistance, the 8th hot differential temperature survey resistance are formed one group of full-bridge circuit, measure the wind speed of Y direction.Described press welding block is symmetrically distributed around sensor chip, and heating resistor, chip temperature measuring resistance and 8 hot differential temperature survey resistance are drawn respectively.
Described 8 hot differential temperature survey resistance make that by layout design its resistance value is in full accord.
Described substrate adopts the material of glass, pottery or other lower thermal conductivity.
Described heating resistor, chip temperature measuring resistance and 8 hot differential temperature survey resistance adopt the metallic resistance of platinum, nickel or other high-temperature coefficient of stripping technology making to make.
The signal processing circuit of micro-mechanical two-dimension wind speed wind transducer comprises: constant difference control circuit, signal deteching circuit,
The constant difference control circuit comprises heating resistor and the chip temperature measuring resistance that is positioned at sensor chip central authorities and is positioned at the Wheatstone bridge that the outer reference resistance of sensor chip connects into, be used to produce differential signal, and it is transferred to differential amplifier, differential amplifier is used for difference and amplifies, and the signal after will amplifying is transferred to the voltage/current conversion element, the voltage/current conversion element produces drive signal heating resistor is driven, and utilizes electricity and calorifics negative feedback to realize the constant difference of sensor is controlled;
Signal deteching circuit comprises that the hot differential temperature survey resistance that is positioned at sensor chip 8 symmetrical distributions all around is in full accord, and be divided into two groups of composition Hui Sitong full-bridge circuits and carry out the difference amplification, change into digital quantity by MUX AMux and A/D converter then and enter MCU, and, realize that LCD shows and numeral output by calculating the wind speed and direction value.
Beneficial effect:, need utilize the method for IC standard technology and MEMS aftertreatment to form thermal insulation film in order to improve the sensitivity of hot type air velocity transducer.Profit of the present invention has adopted lower thermal conductivity, and the glass substrate of low heat capacity just can be finished the processing of sensor with twice metal lift-off material, and processing step is simple and reliable, and has improved sensitivity greatly, has reduced power consumption and response time.In addition, the air velocity transducer structure height symmetry that this patent proposes has been avoided the asymmetric error that causes of structural design.
Compare with traditional hot wire anemometer's constant difference control circuit, the present invention is by temperature measurement module and separately design of heating module, proposition is twined with heating resistor Rh and the chip temperature detecting resistance Rs of symmetry fully mutually one of chip central design, thereby can reduce driving voltage and overall power.
Designed from the different two groups of hot differential temperature survey resistance of fire-bar distance in the present invention in the air velocity transducer of Ti Chuing and formed full-bridge circuit, this not only can be so that resistors match be better, and makes the sensitivity of sensor integral body and range obtain largest optimization.
Description of drawings
Fig. 1 is the air velocity transducer structural representation that the present invention proposes, have among the figure: heating resistor Rh, chip temperature measuring resistance Rs, first hot differential temperature survey resistance R 11, second hot differential temperature survey resistance R the 12, the 3rd hot differential temperature survey resistance R the 31, the 4th hot differential temperature survey resistance R the 32, the 5th hot differential temperature survey resistance R the 21, the 6th hot differential temperature survey resistance R the 22, the 7th hot differential temperature survey resistance R the 41, the 8th hot differential temperature survey resistance R 42.
Each pin and hot differential temperature survey resistance corresponding relation are:
Resistance between the pin 1 and 16 is Rs;
Resistance between the pin 6 and 11 is Rh;
Resistance between the pin 18 and 19 is R11;
Resistance between the pin 17 and 20 is R12;
Resistance between the pin 3 and 4 is R21;
Resistance between the pin 2 and 5 is R22;
Resistance between the pin 8 and 9 is R31;
Resistance between the pin 7 and 10 is R32;
Resistance between the pin 13 and 14 is R41;
Resistance between the pin 12 and 15 is R42;
Fig. 2 is the constant difference control circuit synoptic diagram that the present invention proposes, and has among the figure: heating resistor Rh, chip temperature measuring resistance Rs, reference resistance Rr, Wheatstone bridge resistance R 1 and R2, operational amplifier A 1, converter G.
When Fig. 3 is temperature detecting resistance and heating resistor variable in distance, the hot temperature difference of chip internal and the relation between the wind speed.Horizontal ordinate is a wind speed, and ordinate is the hot temperature difference of chip internal.
Fig. 4 is the full-bridge circuit that the hot differential temperature survey resistance of chip is formed, and amplifies and the MCU treatment circuit.Have among the figure: operational amplifier A 2 and A3, MUX AMUX, analog to digital converter ADC, single-chip microprocessor MCU and LCD show and digital output module.
Embodiment
The two-D wind speed wind direction sensor that the present invention proposes adopts the constant difference working method, utilizes hot temperature difference principle measuring wind and wind direction.In order to reduce the substrate heat conduction of hotting mask air velocity transducer, improve the sensitivity of sensor, chip adopts the glass substrate of lower thermal conductivity.Simultaneously, adopt the stable platinum of physical characteristics as heating and temperature element, it can be processed by stripping technology.For the ease of pressure welding and lead-in wire, at pad place deposit one deck gold.
Micro-mechanical two-dimension wind speed wind transducer of the present invention comprises heating resistor, chip temperature measuring resistance, 8 hot differential temperature survey resistance and press welding block; The chip temperature measuring resistance of chip central authorities and heating resistor be symmetry and closely winding fully, is used for chip temperature and characterizes; Around the heating resistor is the hot differential temperature survey resistance of 8 symmetrical distributions, can be so that its resistance is in full accord by layout design; These 8 hot differential temperature survey resistance are divided into two groups: wherein the first hot differential temperature survey resistance, the second hot differential temperature survey resistance, the 3rd hot differential temperature survey resistance, the 4th hot differential temperature survey resistance are one group of composition full-bridge circuit, the wind speed of measured X direction; The 5th hot differential temperature survey resistance, the 6th hot differential temperature survey resistance, the 7th hot differential temperature survey resistance, the 8th hot differential temperature survey resistance are one group and form full-bridge circuit, measures the wind speed of Y direction; 20 press welding blocks that are symmetrically distributed around sensor chip are drawn respectively heating resistor, chip temperature measuring resistance and 8 hot differential temperature survey resistance.
Connect into wheatstone bridge form at the heating resistor of chip central design and chip temperature measuring resistance and reference resistance, carrying out difference then amplifies, utilize the voltage/current conversion element that heating resistor is driven at last, utilize electricity and calorifics negative feedback to realize the constant difference control of sensor; 8 hot differential temperature survey resistance are symmetrically distributed, resistance is in full accord, and be divided into two groups and form the Hui Sitong full-bridge circuits wind speed of measured X and Y direction respectively, change into digital quantity by MUX AMux and A/D converter then and enter MCU, and, realize that LCD shows and numeral output by calculating the wind speed and direction value.
The two-D wind speed wind direction sensor that the present invention proposes comprises heating resistor, chip temperature measuring resistance, hot differential temperature survey resistance and press welding block (Fig. 1).The heating resistor Rh of chip central authorities and chip temperature measuring resistance Rs be symmetry and closely winding fully, and both temperature can be considered as consistent.The constant difference control circuit (Fig. 2) that the present invention proposes utilizes Rs measured chip temperature, and connecting into wheatstone bridge form then has operational amplifier A 1 to carry out the difference amplification, utilizes voltage/current conversion element G that heating resistor Rh is driven at last.When wind speed increases, chip temperature descends, consider that Pt resistance is positive temperature coefficient (PTC), voltage on the Rs can reduce, thereby makes amplifier output voltage increase, and changes by voltage/current, electric current on the Rh and heating power increase, thereby keep chip temperature to be higher than setting value of environment temperature, form whole electricity and calorifics feedback, promptly realize the constant difference control of sensor.
Around the chip is the temperature detecting resistance of 8 symmetrical distributions, can be so that its resistance is in full accord by layout design.These 8 temperature detecting resistances are divided into two groups: first hot differential temperature survey resistance R 11, second hot differential temperature survey resistance R the 12, the 3rd hot differential temperature survey resistance R the 31, the 4th hot differential temperature survey resistance R 32 is one group, the wind speed of measured X direction; The 5th hot differential temperature survey resistance R the 21, the 6th hot differential temperature survey resistance R the 22, the 7th hot differential temperature survey resistance R the 41, the 8th hot differential temperature survey resistance R 42 is one group of wind speed of measuring the Y direction.Simultaneously, because the distance of differential temperature survey resistive distance central authorities fire-bar is different, hot temperature difference principle measuring wind has different sensitivity and range (Fig. 3).When the fire-bar close together, can under little wind speed, obtain higher sensitivity; And when the fire-bar distance is far away, can obtain bigger range.For the hot temperature difference principle measuring wind of half-bridge circuit form, range and sensitivity are one group of implacable contradiction when optimal design.In the hot differential temperature survey circuit (Fig. 4) that the present invention proposes, hot differential temperature survey resistor group is become full-bridge circuit, both output can be superposeed, sensitivity can become original twice.In addition,, can avoid outer meeting resistance, thereby make the matching of bridge resistance, and temperature characterisitic better because sensitive resistance adopts full chip integrated.
20 press welding blocks that are symmetrically distributed around sensor chip, to heating resistor, chip temperature detecting resistance and 8 hot differential temperature survey resistance are drawn respectively.
The two-D wind speed wind direction sensor substrate that the present invention proposes adopts the material of glass, pottery or other lower thermal conductivity, and all heating resistors and temperature detecting resistance are the metallic resistance of the platinum, nickel or other high-temperature coefficient that utilize the stripping technology making.A concrete process example is: prepare the Pyrex7740 glass substrate; The platinum of the titanium of deposit 50nm and 200nm on the Pyrex7740 glass substrate utilizes metal lift-off material to form heating resistor, chip temperature measuring resistance and hot differential temperature survey resistance pattern; Utilize stripping technology to form the golden press welding block of 300nm.
The two-D wind speed wind direction sensor that the present invention proposes adopts the constant difference working method, utilizes hot temperature difference principle measuring wind and wind direction.In order to realize the constant difference control under low-work voltage and the low-power consumption situation, the present invention in the chip central design one with heating resistor Rh symmetry and the chip temperature measuring resistance Rs that closely twines fully, both temperature can be considered as unanimity.Corresponding to this sensor construction, the present invention proposes a kind of novel constant difference circuit.As shown in Figure 2, chip temperature measuring resistance Rs and reference resistance Rr are connected into wheatstone bridge form, carry out difference then and amplify, utilize the voltage/current conversion element that heating resistor Rh is driven at last.When wind speed increases, when chip temperature descends, consider that Pt resistance is positive temperature coefficient (PTC), voltage on the Rs can reduce, and makes amplifier output voltage increase, and changes by voltage/current, electric current on the Rh and heating power increase, thereby keep chip temperature to be higher than setting value of environment temperature, form whole electricity and calorifics feedback, promptly realize the constant difference control of sensor.
For fear of the matching problem that outer meeting resistance causes, the air velocity transducer that the present invention proposes has designed the temperature detecting resistance of 8 symmetrical distributions, and can be so that its resistance is in full accord by layout design.Because the distance of the central fire-bar of hot differential temperature survey resistive distance is different, hot temperature difference principle measuring wind has different sensitivity and range (Fig. 3).When the fire-bar close together, can under little wind speed, obtain higher sensitivity; And when the fire-bar distance is far away, can obtain bigger range.For the hot temperature difference principle measuring wind of half-bridge circuit form, range and sensitivity are one group of implacable contradiction when optimal design.In the metering circuit that this patent proposes, because hot differential temperature survey resistance becomes full-bridge circuit (Fig. 4), both output can be superposeed, sensitivity can become original twice, and range also can be optimized.Can change into digital quantity by MUX AMux and A/D converter and enter MCU by amplifying the output of later electric bridge, and can obtain the wind speed and direction value, realize that at last LCD shows and numeral output by calculating.
Claims (6)
1. micro-mechanical two-dimension wind speed wind transducer is characterized in that this sensor comprises substrate, heating resistor (Rh), chip temperature measuring resistance (Rs), 8 hot differential temperature survey resistance, press welding block (1-20); Be positioned at the chip temperature measuring resistance (Rs) and heating resistor (Rh) symmetry and the closely winding fully of sensor chip central authorities, be used for chip temperature and characterize; The resistance value of hot differential temperature survey resistance that is positioned at 8 symmetrical distributions around the sensor chip is in full accord, and press welding block (1-20) is connected with heating resistor (Rh), chip temperature measuring resistance (Rs), 8 hot differential temperature survey resistance respectively.
2. micro-mechanical two-dimension wind speed wind transducer as claimed in claim 1, it is characterized in that: described 8 hot differential temperature survey resistance are divided into two groups: wherein the first hot differential temperature survey resistance (R11), the second hot differential temperature survey resistance (R12), the 3rd hot differential temperature survey resistance (R31), the 4th hot differential temperature survey resistance (R32) are formed one group of full-bridge circuit, the wind speed of measured X direction; The 5th hot differential temperature survey resistance (R21), the 6th hot differential temperature survey resistance (R22), the 7th hot differential temperature survey resistance (R41), the 8th hot differential temperature survey resistance (R42) are formed one group of full-bridge circuit, measure the wind speed of Y direction; Described press welding block is symmetrically distributed around sensor chip, and heating resistor (Rh), chip temperature measuring resistance (Rs) and 8 hot differential temperature survey resistance are drawn respectively.
3. micro-mechanical two-dimension wind speed wind transducer as claimed in claim 2 is characterized in that: described 8 hot differential temperature survey resistance make that by layout design its resistance value is in full accord.
4. micro-mechanical two-dimension wind speed wind transducer as claimed in claim 1 is characterized in that: described substrate adopts glass or stupalith.
5. micro-mechanical two-dimension wind speed wind transducer as claimed in claim 1 is characterized in that: described heating resistor (Rh), chip temperature measuring resistance (Rs) and 8 hot differential temperature survey resistance adopt the platinum or the nickel metallic resistance of stripping technology making to make.
6. the signal processing circuit of a micro-mechanical two-dimension wind speed wind transducer as claimed in claim 1 is characterized in that this circuit comprises: constant difference control circuit, signal deteching circuit,
The constant difference control circuit comprises heating resistor (Rh) and the chip temperature measuring resistance (Rs) that is positioned at sensor chip central authorities and is positioned at the Wheatstone bridge that the outer reference resistance (Rr) of sensor chip connects into, be used to produce differential signal, and it is transferred to differential amplifier (A1), differential amplifier is used for difference and amplifies, and the signal after will amplifying is transferred to voltage/current conversion element (G), voltage/current conversion element (G) produces drive signal heating resistor (Rh) is driven, and utilizes electricity and calorifics negative feedback to realize the constant difference of sensor is controlled;
Signal deteching circuit comprises the hot differential temperature survey resistance that is positioned at sensor chip 8 symmetrical distributions all around, the resistance of the hot differential temperature survey resistance of described 8 symmetrical distributions is in full accord, and be divided into two groups of composition Hui Sitong full-bridge circuits and carry out the difference amplification, change into digital quantity by MUX AMux and A/D converter then and enter MCU, and, realize that LCD shows and numeral output by calculating the wind speed and direction value.
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| CN106443056A (en) * | 2016-09-21 | 2017-02-22 | 东南大学 | Wafer level packaging based MEMS wind speed and wind direction sensor structure and packaging method |
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