CN1851472A - Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology - Google Patents
Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology Download PDFInfo
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- CN1851472A CN1851472A CN 200610040701 CN200610040701A CN1851472A CN 1851472 A CN1851472 A CN 1851472A CN 200610040701 CN200610040701 CN 200610040701 CN 200610040701 A CN200610040701 A CN 200610040701A CN 1851472 A CN1851472 A CN 1851472A
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Abstract
Said Transducer utilizes piezoresistive doped quadrature supporting beam to proceed detection. Said transducer consists of upright post, quadrature supporting beam, and SOI silicon substrate, wherein said SOI silicon substrate being a hollow rectangle, quadrature supporting beam set on upper part of SOI silicon substrate, upright post set at intermediate crossing part of quadrature supporting beam, said upright post made from SU -8 glue. Said transducer has advantages of two dimension wind direction mensurability, small power consumption, fast responding, small temperature drift and fine reliability.
Description
Technical field
The present invention relates to a kind of micromechanics Athermal flow speed-direction sensor, the pressure resistance type flow speed and direction sensor that especially a kind of quadrature brace summer that utilizes the doping pressure drag detects.
Background technology
Fluid measurement all has important use in departments such as industrial and agricultural production, meteorology, environmental protection, national defence, scientific research, aviations, and wherein flow rate and direction is measured as ingredient important in the fluid measurement, has developed a lot of years.Measuring methods such as vane and weathervane measurement, pitot tube measurement, float measurement, mechanical meaurement, acoustic measurement, optical measurement, thermal conduction study measurement, electromagnetic measurement have successively appearred.It is little to have a volume based on the miniature current velocity flow direction sensor of MEMS process technology, and price is low, and the characteristics of good product consistency are the focuses of fluid sensor research in recent years.Van Putten (name) proposed first flow sensor based on silicon micromachining technology in 1974, the principle of work of this sensor is based on thermal conduction study, promptly changes and comes measurement flow rate to flow to information by measuring the flow thermal field that causes of fluid.Through the development in surplus 30 years, the hot type microfluid sensor became main flow now, particularly in the wind gage field.But the hot type microfluid sensor also has its intrinsic shortcoming.For example power consumption heat conduction big, substrate causes measuring error, zero point with environment temperature drift, response time length etc.In addition, because want convection cell heating, so just limited the application of hot type microfluid sensor aspect biological.Non-hot type microfluid sensor then can overcome above-mentioned shortcoming.Method, Oosterbroek (name) that Kersjes (name) has proposed measurement pressure reduction have proposed to measure the method for pressure drop, the method that Svedin (name) proposed to measure lift, the method that Ng (name) proposed to measure viscous force.At present, be exactly the little and energy measurement two dimension wind direction not of range based on the common shortcoming of the flow speed and direction sensor of non-hot type principle.
Technology contents
Technical matters: the purpose of this invention is to provide a kind of pressure-resistance athermal flow speed-direction sensor based on micro mechanical technology, have can measure two-dimentional wind direction, power consumption is little, response is fast, temperature is floated little and advantage such as good reliability.
Technical scheme: the present invention is used to measure rate of flow of fluid and the pressure resistance type flow speed and direction sensor that flows to signal, is made of the quadrature brace summer of four pressure drags that mixed, the column and the lead-in wire that are positioned at the beam top.This sensor is made up of column, quadrature brace summer, SOI silicon substrate, and the SOI silicon substrate is the rectangle of a hollow, is provided with the quadrature brace summer on the top of SOI silicon substrate hollow space, is provided with column at the intermediate interdigitated place of quadrature brace summer.
When sensor was in the fluid, the fluid column that flows produced pressure, the direction of pressure with flow to identically, the size of pressure depends on flow velocity.Column transfers the pressure on the quadrature brace summer, and brace summer generation strain produces stress, and the size of this stress depends on the flow direction and flow velocity.By the pressure drag that on beam, mixes, measure the stress on the beam, thereby obtain flow velocity and flow to information, be about to two-dimensional flow to the information pressure drag that is converted into the quadrature brace summer of doping pressure drag change output.
Beneficial effect: the present invention can adopt the manufacturing of MEMS process technology, and method for making and structure are all very simple, good reliability.Traditional heat type fluid sensor is by heater block is set, and allows the fluid heater block of flowing through again, measures the variation of thermal field or the temperature variation of heater block and obtains flow velocity and flow to information.Owing to want the convection cell heating, power consumption is big, temperature effect is obvious.The present invention adopts mechanics principle to measure, and obtains flow velocity and flows to information by the acting force of measuring the fluid column.Thereby avoided this defective.Traditional non-heat type fluid sensor utilizes the bernoulli principle to measure pressure reduction or pressure drop mostly, can not obtain two-dimensional directional information.The present invention is provided with the quadrature brace summer and solves this problem, by detecting the STRESS VARIATION of mutually orthogonal brace summer, can obtain the directional information of two dimension.Column adopts the manufacturing of SU-8 glue, and SU-8 glue is a kind of negative photoresist, and density is half of silicon.The mode of utilizing SU-8 glue to develop forms column, can effectively alleviate the weight of column when guaranteeing lifting surface area.SU-8 glue is manufactured annular, can further alleviate the weight of column.SOI (silicon-on-insulator) silicon chip that utilizes bonding to form is used as structured material, discharges the movable cavity that forms under the brace summer by back side corrosion and sacrifice layer.And generally adopt first deposit LTO (low temperature silicon dioxide) or PSG (silicon dioxide of phosphorus doping) in the traditional handicraft as sacrifice layer, releasing sacrificial layer forms cavity then, this tends to cause structure and the cavity bottom adhesion that is released for the bigger cavity of area, make component failure, the present invention adopts the soi wafer technology will overcome this defective, has strengthened the reliability of sensor greatly.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 for A-A among Fig. 1 of the present invention to sectional view.
Among the above figure column 1, quadrature brace summer 2, SOI silicon substrate 3 are arranged.
Embodiment
The present invention is a kind of fluid sensor that is used for the flow rate and direction sensing, by SU-8 glue column 1, and the quadrature brace summer 2 of doping pressure drag, SOI silicon substrate 3 constitutes.SOI silicon substrate 3 is the rectangle of a hollow, is provided with quadrature brace summer 2 on the top of SOI silicon substrate 3 hollow spaces, is provided with column 1 at the intermediate interdigitated place of quadrature brace summer 2.Brace summer is by back side isotropic etch, the moulding of positive ICP etching.In the present embodiment, substrate is that the monocrystalline silicon piece bonding by two surface oxidations forms, and the effect of oxide layer is that anisotropic wet corrosion as the back side is from stopping.The quadrature brace summer is to be obtained by ICP etching single crystal silicon, and spreads pressure drag and splash-proofing sputtering metal lead-in wire thereon.SU-8 glue column is to obtain by spin coating and development.When extraneous fluid acted on column 1, column 1 can be subjected to and flow to identical acting force, thereby drive brace summer 2 bends and reverses, and produces different STRESS VARIATION on each beam, and this change in resistance that changes by pressure drag on the beam reflects.Substrate 3 is fixed, for quadrature beam 2 provides single-ended solid.So, by measuring the information that pressure drag change in resistance on each quadrature brace summer just can obtain the flow velocity and the flow direction.
The manufacturing process of this ratio sensor is: monocrystalline silicon piece 1# and 2# prepare; With 1# and 2# oxidation and bonding formation SOI substrate 3; Oneself stops back side anisotropic etch 2# to oxide layer; CMP (chemically mechanical polishing) abrasive disc 1# makes the silicon layer thickness on the oxide layer satisfy the needs of brace summer; Positive ICP etching 1# forms quadrature brace summer 2; Silicon dioxide sacrificial layer discharges; Doping pressure drag and lead-in wire on brace summer 2; The spin coating and the SU-8 glue that develops form column 1.
Claims (2)
1. pressure-resistance athermal flow speed-direction sensor based on micro mechanical technology, it is characterized in that this sensor is made up of column (1), quadrature brace summer (2), SOI silicon substrate (3), SOI silicon substrate (3) is the rectangle of a hollow, top at SOI silicon substrate (3) hollow space is provided with quadrature brace summer (2), is provided with column (1) at the intermediate interdigitated place of quadrature brace summer (2).
2. the pressure-resistance athermal flow speed-direction sensor based on micro mechanical technology according to claim 1 is characterized in that column adopts the manufacturing of SU-8 glue.
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| CN 200610040701 CN1851472A (en) | 2006-05-29 | 2006-05-29 | Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology |
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| CN 200610040701 CN1851472A (en) | 2006-05-29 | 2006-05-29 | Pressure-resistance athermal flow speed-direction sensor based micro mechanical technology |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101294977B (en) * | 2007-04-25 | 2010-06-23 | 中国科学院电子学研究所 | Silicon piezoresistance type wind velocity and wind direction sensor based on micro-electromechanical technology |
| CN101271164B (en) * | 2007-03-21 | 2011-07-06 | 中国科学院电子学研究所 | Guiding type wind direction and wind velocity sensor |
| CN101738250B (en) * | 2009-12-30 | 2011-09-07 | 中北大学 | T-shaped sensitive body of vector hydrophone |
| CN102792169A (en) * | 2010-03-18 | 2012-11-21 | 罗伯特·博世有限公司 | Piezoresistive micromechanical sensor component and corresponding measuring method |
| CN105372448A (en) * | 2015-11-11 | 2016-03-02 | 中国人民解放军理工大学 | Strain-type wind direction sensor |
| CN105675916A (en) * | 2016-01-19 | 2016-06-15 | 东南大学 | High-sensitivity 2D thermal type anemometer and preparation method thereof |
| CN108802421A (en) * | 2018-07-27 | 2018-11-13 | 北京航空航天大学 | A kind of bionical flow sensor |
| CN110763865A (en) * | 2018-07-25 | 2020-02-07 | 五邑大学 | Liquid flow velocity sensor |
| CN110907660A (en) * | 2018-09-14 | 2020-03-24 | 睿道通讯国际有限公司 | Apparatus for sensing movement of an object relative to a fluid |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111474381A (en) * | 2020-04-27 | 2020-07-31 | 吉林大学 | Air flow velocity sensing device containing bionic cross beam sensor and preparation method thereof |
| CN112258958A (en) * | 2020-10-29 | 2021-01-22 | 扬州大学 | Mosquito auditory solid model based on symmetrical liquid core organic piezoelectric material sphere |
| CN112258956A (en) * | 2020-10-29 | 2021-01-22 | 扬州大学 | Human otolith organ solid model based on liquid core bionic cells |
| CN112396935A (en) * | 2020-10-29 | 2021-02-23 | 扬州大学 | Mosquito auditory solid model based on annular liquid core organic piezoelectric material tube |
| CN112419858A (en) * | 2020-10-29 | 2021-02-26 | 扬州大学 | Mosquito auditory solid model based on cable-stayed double-layer liquid core organic piezoelectric material rod |
| CN112419859A (en) * | 2020-10-29 | 2021-02-26 | 扬州大学 | Mosquito auditory solid model based on surface symmetrical electrode piezoelectric material column |
| CN112509440A (en) * | 2020-10-29 | 2021-03-16 | 扬州大学 | Human otolith organ solid model based on liquid core piezoelectric material rod |
| CN113532520A (en) * | 2021-07-06 | 2021-10-22 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
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2006
- 2006-05-29 CN CN 200610040701 patent/CN1851472A/en active Pending
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101271164B (en) * | 2007-03-21 | 2011-07-06 | 中国科学院电子学研究所 | Guiding type wind direction and wind velocity sensor |
| CN101294977B (en) * | 2007-04-25 | 2010-06-23 | 中国科学院电子学研究所 | Silicon piezoresistance type wind velocity and wind direction sensor based on micro-electromechanical technology |
| CN101738250B (en) * | 2009-12-30 | 2011-09-07 | 中北大学 | T-shaped sensitive body of vector hydrophone |
| CN102792169A (en) * | 2010-03-18 | 2012-11-21 | 罗伯特·博世有限公司 | Piezoresistive micromechanical sensor component and corresponding measuring method |
| US9110090B2 (en) | 2010-03-18 | 2015-08-18 | Robert Bosch Gmbh | Piezoresistive micromechanical sensor component and corresponding measuring method |
| CN105372448A (en) * | 2015-11-11 | 2016-03-02 | 中国人民解放军理工大学 | Strain-type wind direction sensor |
| CN105675916A (en) * | 2016-01-19 | 2016-06-15 | 东南大学 | High-sensitivity 2D thermal type anemometer and preparation method thereof |
| CN105675916B (en) * | 2016-01-19 | 2018-11-16 | 东南大学 | Highly sensitive silicon two dimension hot type airspeedometer and preparation method thereof |
| CN110763865A (en) * | 2018-07-25 | 2020-02-07 | 五邑大学 | Liquid flow velocity sensor |
| CN110763865B (en) * | 2018-07-25 | 2022-02-11 | 五邑大学 | Liquid flow velocity sensor |
| CN108802421A (en) * | 2018-07-27 | 2018-11-13 | 北京航空航天大学 | A kind of bionical flow sensor |
| CN110907660A (en) * | 2018-09-14 | 2020-03-24 | 睿道通讯国际有限公司 | Apparatus for sensing movement of an object relative to a fluid |
| EP3623819B1 (en) * | 2018-09-14 | 2023-09-13 | RIEDEL Communications International GmbH | Apparatus for sensing a movement of an object relative to a fluid |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111474381A (en) * | 2020-04-27 | 2020-07-31 | 吉林大学 | Air flow velocity sensing device containing bionic cross beam sensor and preparation method thereof |
| CN112258958A (en) * | 2020-10-29 | 2021-01-22 | 扬州大学 | Mosquito auditory solid model based on symmetrical liquid core organic piezoelectric material sphere |
| CN112258956A (en) * | 2020-10-29 | 2021-01-22 | 扬州大学 | Human otolith organ solid model based on liquid core bionic cells |
| CN112396935A (en) * | 2020-10-29 | 2021-02-23 | 扬州大学 | Mosquito auditory solid model based on annular liquid core organic piezoelectric material tube |
| CN112419858A (en) * | 2020-10-29 | 2021-02-26 | 扬州大学 | Mosquito auditory solid model based on cable-stayed double-layer liquid core organic piezoelectric material rod |
| CN112419859A (en) * | 2020-10-29 | 2021-02-26 | 扬州大学 | Mosquito auditory solid model based on surface symmetrical electrode piezoelectric material column |
| CN112509440A (en) * | 2020-10-29 | 2021-03-16 | 扬州大学 | Human otolith organ solid model based on liquid core piezoelectric material rod |
| CN113532520A (en) * | 2021-07-06 | 2021-10-22 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| CN113532520B (en) * | 2021-07-06 | 2022-07-12 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
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