CN104535793B - The fast sensor construction of hot blast based on Time delay measurement and wind speed and direction assay method - Google Patents
The fast sensor construction of hot blast based on Time delay measurement and wind speed and direction assay method Download PDFInfo
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- CN104535793B CN104535793B CN201510024244.8A CN201510024244A CN104535793B CN 104535793 B CN104535793 B CN 104535793B CN 201510024244 A CN201510024244 A CN 201510024244A CN 104535793 B CN104535793 B CN 104535793B
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Abstract
The invention discloses a kind of fast sensor construction of hot blast based on Time delay measurement and wind speed and direction assay method, hot blast speed sensor construction includes substrate, assuming that setting up XOY rectangular coordinate systems in the upper surface of substrate, then groove is set in origin O positions, pulse heat source is set in groove；One group of temperature measuring point is respectively arranged with X-axis forward direction, X-axis negative sense, Y-axis forward direction and Y-axis negative sense, every group of temperature measuring point includes two temperature measuring points, the first temperature measuring point and second temperature measurement point are designated as respectively, four the first temperature measuring points are equal apart from origin O distance, four second temperature measurement points are equal apart from origin O distance, and a temperature sensor is set on each temperature measuring point.The time difference measurements wind speed and direction of temperature signal is received by measurement temperature sensor, thermal source, environment temperature can be avoided for the influence of measurement, have the advantages that accuracy height, strong antijamming capability, it is low in energy consumption, can subminaturization.
Description
Technical field
The present invention relates to a kind of hot type wind speed wind direction sensor structure and wind speed and wind based on PULSE HEATING and Time delay measurement
To assay method, realize that wind speed and direction is measured by measuring the delay between two temperature sensor signals.
Background technology
Wind speed, wind direction are the very important parameters of reaction environment weather information, and the detection of wind speed and direction is supervised to environment
Surveying, the production of air adjustment and industrial or agricultural has a major impact, therefore quick and precisely measure wind speed and direction has important reality
Border meaning.Such sensor typically has traditional vane and wind vane structure, ultrasonic air velocity transducer and hot air velocity transducer etc..
Traditional vane and wind vane structural volume is larger, general in several tens cm or more, and there are rotatable parts, easily abrasion；It is super
Sound air velocity transducer obtains very big development in recent years, and the sensor has precision high, and measurement range is big, and service life length etc.
Many outstanding advantages.Its unfavorable factor is that volume is larger (more than 10 centimetres), on the high side.Based on the miniature of MEMS process technologies
Hot air velocity transducer has small volume, and price is low, the characteristics of good product consistency, is the focus studied in recent years.But, by
Measuring wind speed is realized by measuring the principle of thermal field or heat loss in this kind of sensor, temperature drift effect and null offset ratio are larger,
And sensor needs continuous heating, power consumption is larger.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the present invention provides one kind based on PULSE HEATING and prolonged
When the hot type wind speed wind direction sensor structure that measures and wind speed and direction assay method, temperature is received by measurement temperature sensor
The time difference measurements wind speed and direction of signal, can avoid thermal source, environment temperature for the influence of measurement, high, anti-with accuracy
Interference performance is strong, low in energy consumption, can subminaturization the advantages of.
Technical scheme：To achieve the above object, the technical solution adopted by the present invention is：
A kind of fast sensor construction of the hot blast based on Time delay measurement, including substrate, it is assumed that set up XOY in the upper surface of substrate
Rectangular coordinate system, then set groove in origin O positions, pulse heat source set in groove；In X-axis forward direction, X-axis negative sense, Y-axis just
To be respectively arranged with one group of temperature measuring point on Y-axis negative sense, every group of temperature measuring point includes two temperature measuring points, remembers respectively
For the first temperature measuring point and second temperature measurement point, the distance between the first temperature measuring point and second temperature measurement point are L,
Four the first temperature measuring points are equal apart from origin O distance, and four second temperature measurement points are equal apart from origin O distance,
One temperature sensor is set on each temperature measuring point.
The above-mentioned fast sensor construction of the hot blast based on Time delay measurement, centre position forms groove on substrate, in a groove
One pulse heat source is set；Place one group of two temperature respectively vertically on using pulse heat source as the four direction of symmetrical centre
Distance is identical between sensor, and two temperature sensors of each group.The air of pulse heat source heated center：When calm, this
The time difference (or delay) that four groups of sensors receive pulse heat source temperature signal is identical；Blown when there is wind from some horizontal direction
When coming, under pulse heat source the sensor group of wind direction receive heat source temperature signal delay can than it is calm when it is small, and this prolongs
When it is relevant with wind speed size and wind direction.Wind speed and direction can be obtained by being delayed and passing through certain numerical computations by measuring this
Information.
It is preferred that, the pulse heat source upper surface is not higher than substrate top surface.
A kind of wind speed and direction assay method of the fast sensor construction of the hot blast of Time delay measurement, comprises the following steps：
(1) horizontal positioned substrate, once, eight temperature sensors of record detect jump in temperature to starting impulse thermal source respectively
At the time of signal；
(2) two groups of temperature sensors for detecting jump in temperature signal at first are two groups of temperature biography of wind direction under pulse heat source
Sensor, to two groups of temperature sensors, two temperature sensors calculated on same group of temperature measuring point detect jump in temperature
The time difference of signal, △ T are designated as respectively11With △ T12；
(3) according to following formula calculation of wind speed and wind direction：
Wherein, W represents wind speed, and D represents wind direction, L represent between the first temperature measuring point and second temperature measurement point away from
From a represents coefficient, and mark timing determination is carried out in the fast sensor construction of hot blast.
Beneficial effect：The fast sensor construction of the hot blast based on Time delay measurement and wind speed and direction measure side that the present invention is provided
Method, with following advantage：1st, the hot wind speed wind direction sensor based on Time delay measurement, jump in temperature is received by measurement sensor
The time difference of signal measures wind speed and direction, and the analogue measurement of temperature value is not related to, it is possible to prevente effectively from power of heat source it is unstable,
Temperature effect caused by variation of ambient temperature etc., the accuracy of measurement is high, strong antijamming capability；2nd, using PULSE HEATING, can have
Effect reduction power consumption；3rd, thermal source is placed in shallow slot, it is to avoid direct radiation of the thermal source to temperature sensor, improves the anti-of sensor
Interference performance；4th, each direction is using one group of temperature sensor, by the signal difference between measurement temperature sensor, rather than directly
The time that measurement thermal source is heated between temperature signal is connect, it is possible to prevente effectively from the uncertain factor such as heating delays, makes the time difference
Signal is only relevant with wind speed, improves measurement sensitivity；5th, the present invention is simple in construction, and small volume, manufacturing process is also uncomplicated, and
What can be done is smaller, can meet portable needs；6th, each part of sensor can be completed using micromachined or CMOS technology,
Therefore it is easy to carry out single-chip integration with circuit.
Brief description of the drawings
Fig. 1 is overlooking the structure diagram of the invention；
Fig. 2 be in Fig. 1 A-A to sectional view.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
It is as shown in Figure 1 a kind of fast sensor construction of hot blast based on Time delay measurement, including substrate 1, it is assumed that in substrate 1
XOY rectangular coordinate systems are set up in upper surface, then set groove 4 in origin O positions, and pulse heat source 3 is set in groove 4；In X-axis just
To, X-axis negative sense, Y-axis be positive and Y-axis negative sense on be respectively arranged with one group of temperature measuring point, every group of temperature measuring point includes two
Temperature measuring point, is designated as the first temperature measuring point and second temperature measurement point respectively, and the first temperature measuring point is surveyed with second temperature
The distance between amount point is L, and four the first temperature measuring points are equal apart from origin O distance, four second temperature measurement points away from
It is equal from a distance from origin O, a temperature sensor 2 is set on each temperature measuring point.As shown in Fig. 2 the pulse heat
The upper surface of source 3 is not higher than the upper surface of substrate 1, and the upper surface of temperature sensor 2 is higher than the upper surface of substrate 1.
When calm, the speed that pulse heat source generation hot-air spreads to surrounding is identical, so four groups of sensors receive temperature
The time difference for spending signal is identical, and all very big, can be by setting threshold decision such case；When wind is from some horizontal direction
When (non-axis direction) blows over whole sensor, the wind direction under thermal source, the temperature signal time that one group of temperature sensor is received
Difference is relevant with the size of direction wind speed component, and much larger than thermal diffusion time.
A kind of wind speed and direction assay method of the fast sensor construction of the hot blast of Time delay measurement, its spy is：Including following step
Suddenly：
(1) horizontal positioned substrate 1, once, eight temperature sensors of record detect temperature jump to starting impulse thermal source 3 respectively
At the time of varying signal；
(2) two groups of temperature sensors for detecting jump in temperature signal at first are two groups of temperature of 3 times wind directions of pulse heat source
Sensor, to two groups of temperature sensors, calculates two temperature sensors on same group of temperature measuring point and detects temperature jump
The time difference of varying signal, △ T are designated as respectively11With △ T12；
(3) according to following formula calculation of wind speed and wind direction：
Wherein, W represents wind speed, and D represents wind direction, L represent between the first temperature measuring point and second temperature measurement point away from
From a represents coefficient, and mark timing determination is carried out in the fast sensor construction of hot blast.
A kind of preparation method of the fast sensor construction of the hot blast of Time delay measurement, comprises the following steps：
(1) select a smooth silicon chip as substrate 1, one layer of silicon oxide insulation is grown in whole silicon chip surface by thermal oxide
Layer；
(2) groove structure is defined in the middle of substrate 1 by photoetching first, then exposes recessed using the corrosion of HF cushioning liquid
The silica of slot structure, exposes silicon face；
(3) corrode the silicon face exposed after removing photoresist using wet method silicon etch solution (such as KOH solution or TMAH), obtain 5 micro-
The shallow grooves 4 of rice or so；
(4) reoxidized whole silicon chip, then passes through lithographic definition pulse heat source and arrangement of temperature sensor；
(5) one layer of platinum metal film is deposited using magnetron sputtering technique in whole silicon chip surface, then using lift-off technology
Pulse heat source 3 and temperature sensor 2 are discharged.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (3)
1. a kind of fast sensor construction of the hot blast based on Time delay measurement, it is characterised in that：Including substrate (1), it is assumed that in substrate (1)
Upper surface set up XOY rectangular coordinate systems, then groove (4) is set in origin O positions, pulse heat source is set in the groove (4)
(3)；One group of temperature measuring point, every group of temperature survey are respectively arranged with X-axis forward direction, X-axis negative sense, Y-axis forward direction and Y-axis negative sense
Point includes two temperature measuring points, is designated as the first temperature measuring point and second temperature measurement point respectively, the first temperature measuring point and
The distance between second temperature measurement point is L, and four the first temperature measuring points are equal apart from origin O distance, four second temperature
Spend measurement point equal apart from origin O distance, a temperature sensor (2) is set on each temperature measuring point.
2. the fast sensor construction of the hot blast based on Time delay measurement according to claim 1, it is characterised in that：The pulse heat
Source (3) upper surface is not higher than substrate (1) upper surface.
3. a kind of wind speed and direction of the fast sensor construction of the hot blast based on Time delay measurement described in utilization claim 1 or 2 is determined
Method, it is characterised in that：Comprise the following steps：
(1) horizontal positioned substrate (1), once, eight temperature sensors of record detect temperature jump to starting impulse thermal source (3) respectively
At the time of varying signal；
(2) two groups of temperature sensors for detecting jump in temperature signal at first are two groups of temperature biography of wind direction under pulse heat source (3)
Sensor, to two groups of temperature sensors, two temperature sensors calculated on same group of temperature measuring point detect jump in temperature
The time difference of signal, Δ T is designated as respectively11With Δ T12；
(3) according to following formula calculation of wind speed and wind direction：
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Wherein, W represents wind speed, and D represents wind direction, and L represents the distance between the first temperature measuring point and second temperature measurement point, a
Coefficient is represented, mark timing determination is carried out in the fast sensor construction of hot blast.
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105527454B (en) * | 2016-01-19 | 2018-11-16 | 东南大学 | A kind of highly sensitive hot type air velocity transducer and its packaging method |
| CN110031650B (en) * | 2019-05-15 | 2020-12-11 | 南京信息工程大学 | Thermal temperature difference type wind speed and direction measuring device and method |
| CN110609150A (en) * | 2019-10-28 | 2019-12-24 | 广州极飞科技有限公司 | Wind speed and direction measuring device and outdoor detection station |
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