CN104535793A - Delay-measurement-based hot wind speed sensor structure and wind speed and direction measuring method - Google Patents

Abstract

The invention discloses a delay-measurement-based hot wind speed sensor structure and a wind speed and direction measuring method. The hot wind speed sensor structure comprises a substrate; if an XOY rectangular coordinate system is established on the upper surface of the substrate, a groove is formed in the position of an original point O, and the groove is internally provided with a pulsed heat source; and the positive and negative directions of an X-axis as well the positive and negative directions of a Y-axis are respectively provided with a group of temperature measuring points, wherein each group of temperature measuring points comprises two temperature measuring points which are respectively marked as a first temperature measuring point and a second temperature measuring point, the distances from the four first temperature measuring points to the original point O are equal, the distances from the four second temperature measuring points to the original point O are equal, and each temperature measuring point is provided with a temperature sensor. The wind speed and direction are measured through measuring the time difference of temperature signals received by the temperature sensor, so that the influences of the heat source and environmental temperature to measurement can be avoided; and the delay-measurement-based hot wind speed sensor structure has the advantages of high precision, strong anti-jamming capability, low power consumption, super-miniaturization and the like.

Description

Based on hot blast speed sensor construction and the wind speed and direction assay method of Time delay measurement

Technical field

The present invention relates to a kind of hot type wind speed wind direction sensor structure based on PULSE HEATING and Time delay measurement and wind speed and direction assay method, realize wind speed and direction by the time delay of measuring between two temperature sensor signals and measure.

Background technology

Wind speed, wind direction are the very important parameters of reaction environment weather information, and the detection of the wind speed and direction production to environmental monitoring, artificial atmosphere and industrial or agricultural has material impact, therefore quick and precisely measures wind speed and direction and has important practical significance.Such sensor generally has traditional vane and weathervane structure, ultrasonic air velocity transducer and hot blast speed sensor.Tradition vane and weathervane structural volume are comparatively large, general at several tens cm or more, and there are rotatable parts, easily wear and tear; Ultrasonic air velocity transducer obtains very large development in recent years, and it is high that this sensor has precision, and measurement range is large, and many outstanding advantages such as long service life.Its unfavorable factor is volume comparatively large (more than 10 centimetres), on the high side.It is little that miniature hot blast speed sensor based on MEMS process technology has volume, and price is low, the feature of good product consistency, is the focus studied in recent years.But, because this kind of sensor realizes measuring wind speed by the principle measuring thermal field or thermal loss, temperature drift effect and zero point drift larger, and sensor needs continuous heating, and power consumption is larger.

Summary of the invention

Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of hot type wind speed wind direction sensor structure based on PULSE HEATING and Time delay measurement and wind speed and direction assay method, the time difference measurements wind speed and direction of temperature signal is received by measuring tempeature sensor, thermal source, environment temperature can be avoided for the impact of measuring, have that degree of accuracy is high, antijamming capability is strong, low in energy consumption, can the advantage such as subminiaturization.

Technical scheme: for achieving the above object, the technical solution used in the present invention is:

Based on a hot blast speed sensor construction for Time delay measurement, comprise substrate, suppose to set up XOY rectangular coordinate system at the upper surface of substrate, then groove is set in initial point O position, pulse heat source is set in groove; X-axis forward, X-axis negative sense, Y-axis forward and Y-axis negative sense are respectively arranged with one group of temperature measuring point, often organize temperature measuring point and comprise two temperature measuring points, be designated as the first temperature measuring point and the second temperature measuring point respectively, distance between first temperature measuring point and the second temperature measuring point is L, the distance of four the first temperature measuring point distance initial point O is equal, the distance of four the second temperature measuring point distance initial point O is equal, and each temperature measuring point arranges a temperature sensor.

The above-mentioned speed of the hot blast based on Time delay measurement sensor construction, on substrate, centre position forms groove, arranges a pulse heat source in a groove; The four direction taking pulse heat source as symcenter is placed a group of two temperature sensor vertically respectively, and the spacing of two temperature sensors of each group is identical.The air of pulse heat source heated center: when calm, the mistiming (or claiming time delay) that these four groups of sensors receive pulse heat source temperature signal is identical; When there being wind to blow from certain horizontal direction, be positioned at the sensor group of wind direction under pulse heat source receive the time delay of heat source temperature signal can than little time calm, and this time delay is relevant with wind direction with wind speed size.By measuring this time delay and the information of wind speed and direction can being obtained through certain numerical evaluation.

Preferably, described pulse heat source upper surface is not higher than substrate top surface.

A wind speed and direction assay method for the hot blast speed sensor construction of Time delay measurement, comprises the steps:

(1) horizontal positioned substrate, starting impulse thermal source once, records the moment that eight temperature sensors detect jump in temperature signal respectively;

(2) detect that two groups of temperature sensors of jump in temperature signal are two groups of temperature sensors of wind direction under pulse heat source at first, to these two groups of temperature sensors, two temperature sensors calculated on same group of temperature measuring point detect the mistiming of jump in temperature signal, are designated as △ T respectively ₁₁with △ T ₁₂;

(3) according to following formula calculation of wind speed and wind direction:

$W=a\sqrt{{\left(\frac{L}{\mathrm{\Δ}{T}_{11}}\right)}^2+{\left(\frac{L}{\mathrm{\Δ}{T}_{12}}\right)}^2}$

$D=\arctan \frac{\frac{L}{\mathrm{\Δ}{T}_{12}}}{\frac{L}{\mathrm{\Δ}{T}_{11}}}=\arctan \frac{{\mathrm{\ΔT}}_{11}}{\mathrm{\Δ}{T}_{12}}$

Wherein, W represents wind speed, and D represents wind direction, and L represents the distance between the first temperature measuring point and the second temperature measuring point, and a represents coefficient, carries out timing signal determine at hot blast speed sensor construction.

Beneficial effect: the speed sensor construction of the hot blast based on Time delay measurement provided by the invention and wind speed and direction assay method, there is following advantage: 1, based on the hot wind speed wind direction sensor of Time delay measurement, the mistiming measuring wind wind direction of jump in temperature signal is received by survey sensor, do not relate to the analogue measurement of temperature value, effectively can avoid the temperature effect that power of heat source instability, variation of ambient temperature etc. cause, the degree of accuracy measured is high, and antijamming capability is strong; 2, adopt PULSE HEATING, effectively can reduce power consumption; 3, thermal source is placed in shallow slot, avoids thermal source to the direct radiation of temperature sensor, improves the antijamming capability of sensor; 4, each direction adopts one group of temperature sensor, by the signal difference between measuring tempeature sensor, instead of the time of directly measuring between heat source to temperature signal, effectively can avoid the uncertain factors such as heating delays, make mistiming signal only relevant with wind speed, improve measurement sensistivity; 5, structure of the present invention is simple, and volume is little, and manufacturing process is also uncomplicated, and can do smaller, portable needs can be met; 6, each parts of sensor can adopt micromachined or CMOS technology to complete, and are therefore easy to carry out single-chip integration with circuit.

Accompanying drawing explanation

Fig. 1 is plan structure schematic diagram of the present invention;

Fig. 2 be in Fig. 1 A-A to cut-open view.

Embodiment

Below in conjunction with accompanying drawing, the present invention is further described.

Be illustrated in figure 1 a kind of hot blast based on Time delay measurement speed sensor construction, comprise substrate 1, suppose to set up XOY rectangular coordinate system at the upper surface of substrate 1, then groove 4 is set in initial point O position, pulse heat source 3 is set in groove 4; X-axis forward, X-axis negative sense, Y-axis forward and Y-axis negative sense are respectively arranged with one group of temperature measuring point, often organize temperature measuring point and comprise two temperature measuring points, be designated as the first temperature measuring point and the second temperature measuring point respectively, distance between first temperature measuring point and the second temperature measuring point is L, the distance of four the first temperature measuring point distance initial point O is equal, the distance of four the second temperature measuring point distance initial point O is equal, and each temperature measuring point arranges a temperature sensor 2.As shown in Figure 2, described pulse heat source 3 upper surface is not higher than substrate 1 upper surface, and described temperature sensor 2 upper surface is higher than substrate 1 upper surface.

Time calm, it is identical that pulse heat source produces the speed that spread to surrounding of hot-air, so the mistiming that four groups of sensors receive temperature signal is identical, and all very greatly, and can by arranging this situation of threshold decision; When wind blows over whole sensor from certain horizontal direction (non-axis direction), wind direction under thermal source, the temperature signal mistiming that one group of temperature sensor receives is relevant to the size of wind speed component with the party, and much larger than thermal diffusion time.

A wind speed and direction assay method for the hot blast speed sensor construction of Time delay measurement, its spy is: comprise the steps:

(1) horizontal positioned substrate 1, starting impulse thermal source 3 once, records the moment that eight temperature sensors detect jump in temperature signal respectively;

(2) detect that two groups of temperature sensors of jump in temperature signal are two groups of temperature sensors of pulse heat source 3 times wind directions at first, to these two groups of temperature sensors, two temperature sensors calculated on same group of temperature measuring point detect the mistiming of jump in temperature signal, are designated as △ T respectively ₁₁with △ T ₁₂;

(3) according to following formula calculation of wind speed and wind direction:

$W=a\sqrt{{\left(\frac{L}{\mathrm{\Δ}{T}_{11}}\right)}^2+{\left(\frac{L}{\mathrm{\Δ}{T}_{12}}\right)}^2}$

$D=\arctan \frac{\frac{L}{\mathrm{\Δ}{T}_{12}}}{\frac{L}{\mathrm{\Δ}{T}_{11}}}=\arctan \frac{{\mathrm{\ΔT}}_{11}}{\mathrm{\Δ}{T}_{12}}$

Wherein, W represents wind speed, and D represents wind direction, and L represents the distance between the first temperature measuring point and the second temperature measuring point, and a represents coefficient, carries out timing signal determine at hot blast speed sensor construction.

A method for making for the hot blast speed sensor construction of Time delay measurement, comprises the steps:

(1) select a smooth silicon chip as substrate 1, grow one deck insulating layer of silicon oxide by thermal oxide at whole silicon chip surface;

(2) first by photoetching definition groove structure in the middle of substrate 1, then adopt the corrosion of HF buffer solution to expose the monox of groove structure, expose silicon face;

(3) adopt wet method silicon etch solution (as KOH solution or TMAH) to corrode the silicon face exposed after removing photoresist, obtain the shallow grooves 4 of 5 microns;

(4) whole silicon chip is again oxidized, then by lithographic definition pulse heat source and arrangement of temperature sensor;

(5) adopt magnetron sputtering technique deposit one deck platinum metal film at whole silicon chip surface, then adopt lift-off technology pulse heat source 3 and temperature sensor 2 to be discharged.

The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (3)

1. the speed of the hot blast based on a Time delay measurement sensor construction, it is characterized in that: comprise substrate (1), suppose to set up XOY rectangular coordinate system at the upper surface of substrate (1), then groove (4) is set in initial point O position, pulse heat source (3) is set in groove (4); X-axis forward, X-axis negative sense, Y-axis forward and Y-axis negative sense are respectively arranged with one group of temperature measuring point, often organize temperature measuring point and comprise two temperature measuring points, be designated as the first temperature measuring point and the second temperature measuring point respectively, distance between first temperature measuring point and the second temperature measuring point is L, the distance of four the first temperature measuring point distance initial point O is equal, the distance of four the second temperature measuring point distance initial point O is equal, and each temperature measuring point arranges a temperature sensor (2).

2. the speed of the hot blast based on Time delay measurement sensor construction according to claim 1, is characterized in that: described pulse heat source (3) upper surface is not higher than substrate (1) upper surface.

3. a wind speed and direction assay method for the hot blast speed sensor construction of Time delay measurement, is characterized in that: comprise the steps:

(1) horizontal positioned substrate (1), starting impulse thermal source (3) once, records the moment that eight temperature sensors detect jump in temperature signal respectively;

(2) detect that two groups of temperature sensors of jump in temperature signal are two groups of temperature sensors of wind direction under pulse heat source (3) at first, to these two groups of temperature sensors, two temperature sensors calculated on same group of temperature measuring point detect the mistiming of jump in temperature signal, are designated as Δ T respectively ₁₁with Δ T ₁₂;

(3) according to following formula calculation of wind speed and wind direction:

$W=a\sqrt{{\left(\frac{L}{{\mathrm{\ΔT}}_{11}}\right)}^2+{\left(\frac{L}{{\mathrm{\ΔT}}_{12}}\right)}^2}$

$D=\arctan \frac{\frac{L}{{\mathrm{\ΔT}}_{12}}}{\frac{L}{{\mathrm{\ΔT}}_{11}}}=\arctan \frac{{\mathrm{\ΔT}}_{11}}{{\mathrm{\ΔT}}_{12}}$

Wherein, W represents wind speed, and D represents wind direction, and L represents the distance between the first temperature measuring point and the second temperature measuring point, and a represents coefficient, carries out timing signal determine at hot blast speed sensor construction.