CN108226219B - 一种薄膜电阻产热均匀性的检测方法 - Google Patents
一种薄膜电阻产热均匀性的检测方法 Download PDFInfo
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- CN108226219B CN108226219B CN201711327964.7A CN201711327964A CN108226219B CN 108226219 B CN108226219 B CN 108226219B CN 201711327964 A CN201711327964 A CN 201711327964A CN 108226219 B CN108226219 B CN 108226219B
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- 230000020169 heat generation Effects 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 52
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 230000004907 flux Effects 0.000 claims description 31
- 238000005070 sampling Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 30
- 238000007747 plating Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
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CN108226219A CN108226219A (zh) | 2018-06-29 |
CN108226219B true CN108226219B (zh) | 2020-03-27 |
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Families Citing this family (4)
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CN109309067B (zh) * | 2018-08-24 | 2020-04-24 | 中国电子科技集团公司第二十九研究所 | 一种模拟热源芯片及其制作方法 |
CN109540971A (zh) * | 2018-12-29 | 2019-03-29 | 宁波石墨烯创新中心有限公司 | 导电膜均匀性检测装置、系统以及方法 |
CN110161077B (zh) * | 2019-06-10 | 2021-08-06 | 衢州学院 | 一种检测流道表面对流换热系数的方法 |
CN110954834B (zh) * | 2019-12-06 | 2022-01-25 | 上海理工大学 | 一种移动式动力电池热管理系统检测装置及方法 |
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CN101969083B (zh) * | 2010-04-20 | 2012-07-25 | 常州天合光能有限公司 | 一种改善太阳能电池扩散薄膜电阻片内均匀性的方法 |
CN101975794B (zh) * | 2010-09-09 | 2012-07-25 | 复旦大学 | 一种适用于金属薄膜材料的3omega热导测量方案 |
TWI409011B (zh) * | 2011-04-14 | 2013-09-11 | Polychem Uv Eb Internat Corp | Construction and Manufacturing Method of Transparent Conductive Line |
CN102521439B (zh) * | 2011-12-02 | 2014-02-12 | 哈尔滨工业大学 | 结合有限元法和反传热法计算淬火介质换热系数的方法 |
CN102621184A (zh) * | 2012-04-16 | 2012-08-01 | 中原工学院 | 消防服热防护性能检测用热流仪及其测试方法 |
CN106771611A (zh) * | 2016-11-18 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | 一种微波电路中薄膜电阻的调整装置及方法 |
CN106932121A (zh) * | 2017-02-14 | 2017-07-07 | 中国科学院力学研究所 | 一种铂薄膜电阻热流传感器标定装置 |
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