CN108172617A - A kind of circle large scale igbt chip crimping encapsulating structure and manufacturing method - Google Patents
A kind of circle large scale igbt chip crimping encapsulating structure and manufacturing method Download PDFInfo
- Publication number
- CN108172617A CN108172617A CN201711410556.8A CN201711410556A CN108172617A CN 108172617 A CN108172617 A CN 108172617A CN 201711410556 A CN201711410556 A CN 201711410556A CN 108172617 A CN108172617 A CN 108172617A
- Authority
- CN
- China
- Prior art keywords
- emitter
- metal
- igbt chip
- molybdenum sheet
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
- H10D12/441—Vertical IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/20—Arrangements for cooling
- H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/01—Manufacture or treatment
- H10W76/05—Providing fillings in containers, e.g. gas filling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
- H10W76/12—Containers or parts thereof characterised by their shape
- H10W76/161—Containers comprising no base
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
- H10W76/42—Fillings
- H10W76/43—Gaseous fillings
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Die Bonding (AREA)
Abstract
发明公布了一种圆形大尺寸IGBT芯片压接封装结构及制造方法,其包括自上而下依次设置的发射极端盖、发射极钼片、栅极弹簧针组件、栅极金属、发射极钼片定位架、柔软导电金属薄片、发射极金属、IGBT芯片、集电极金属、集电极带定位孔钼片、集电极端盖等。采用此压接封装结构,故障扇区隔离方法简单,只需更换故障区扇形导电钼片为绝缘片,并将芯片表面栅极金属特定连接处切断;器件通过集电极端盖和发射极端盖进行双面散热;无金属键合线及焊接界面,消除传统器件键合点和焊接层疲劳失效的瓶颈,对热机械疲劳的抵抗力较强;器件内部采用对称结构设计,降低内部各扇形分区杂散电感,使杂散电感分布趋于一致,减小模块的寄生参数,提高器件的电气性能。
The invention discloses a circular large-size IGBT chip crimping package structure and manufacturing method, which includes an emitter terminal cover, an emitter molybdenum sheet, a grid pogo pin assembly, a grid metal, and an emitter molybdenum arranged in sequence from top to bottom. Chip positioning frame, soft conductive metal sheet, emitter metal, IGBT chip, collector metal, collector molybdenum sheet with positioning hole, collector end cover, etc. With this crimping package structure, the fault sector isolation method is simple, only need to replace the sector-shaped conductive molybdenum sheet in the fault area as an insulating sheet, and cut off the specific connection of the gate metal on the chip surface; the device is isolated through the collector end cover and emitter end cover. Double-sided heat dissipation; no metal bonding wires and soldering interfaces, eliminating the bottleneck of fatigue failure of traditional device bonding points and soldering layers, and strong resistance to thermomechanical fatigue; the device adopts a symmetrical structure design inside the device to reduce stray noise in each internal sector Inductance, so that the distribution of stray inductance tends to be consistent, reduce the parasitic parameters of the module, and improve the electrical performance of the device.
Description
技术领域technical field
本发明涉及半导体制造领域,尤其涉及一种圆形大尺寸IGBT芯片压接封装结构及其制造方法。The invention relates to the field of semiconductor manufacturing, in particular to a circular large-size IGBT chip crimping package structure and a manufacturing method thereof.
背景技术Background technique
绝缘栅双极型晶体管(Insulated Gate Bipolar Transistor,简称IGBT)是一种结合了金属-氧化物-半导体场效应晶体管(MOSFET)和双极结型晶体管优点的电力电子器件,IGBT以其优异的性能得到了广泛的应用,极大地提升了电力电子装置和系统的性能。Insulated Gate Bipolar Transistor (IGBT) is a power electronic device that combines the advantages of metal-oxide-semiconductor field-effect transistors (MOSFET) and bipolar junction transistors. IGBT is known for its excellent performance It has been widely used and greatly improved the performance of power electronic devices and systems.
随着应用领域的不断扩展,对IGBT器件的性能要求也越来越高,且现有技术存在以下缺陷:1、一方面要求器件功率等级提高,以大功率电力机车牵引、电力输变电系统、新能源、国防重工等领域为代表,随着系统设计容量的提高,传统IGBT器件不能满足要求或者需要多只串并联应用,造成系统成本的增加并带来低可靠性等风险;2、另一方面鉴于系统运行安全性以及设计、维护成本的考虑,迫切需求IGBT器件可靠性寿命的提升。With the continuous expansion of the application field, the performance requirements for IGBT devices are getting higher and higher, and the existing technology has the following defects: 1. On the one hand, it is required to increase the power level of the device, and the traction of high-power electric locomotives, power transmission and transformation systems , new energy, national defense heavy industry and other fields as representatives, with the increase of system design capacity, traditional IGBT devices cannot meet the requirements or require multiple series-parallel applications, resulting in increased system costs and low reliability risks; 2. Another On the one hand, in view of the safety of system operation and the consideration of design and maintenance costs, there is an urgent need to improve the reliability and life of IGBT devices.
传统焊接灌封式IGBT器件由于散热、应力等设计因素以及焊接、引线键合等工艺条件的限制,功率等级不能大幅度提升;同时,存在引线脱落、焊层退化等由热-机械应力引起的失效瓶颈,逐渐不能满足柔性直流输电、大型海上风力发电等高功率密度等级、高可靠性应用的需求。大功率压接式IGBT器件无引线、无焊接层且具备双面散热的能力,单个器件的功率容量、可靠性大幅提升,目前已经有取代传统焊接灌封型IGBT器件的趋势,成为高端应用领域的首选器件之一。Due to design factors such as heat dissipation and stress and the limitations of welding and wire bonding process conditions, the power level of traditional solder potting IGBT devices cannot be greatly improved; at the same time, there are problems caused by thermal-mechanical stress such as lead off and solder layer degradation The failure bottleneck gradually fails to meet the needs of high power density and high reliability applications such as flexible direct current transmission and large offshore wind power generation. High-power crimp-type IGBT devices have no leads, no solder layers, and have the ability to dissipate heat on both sides. The power capacity and reliability of a single device have been greatly improved. At present, it has a tendency to replace traditional soldered potting IGBT devices and has become a high-end application field. One of the preferred devices.
目前,商业化的压接式IGBT器件均采用多芯片压接型封装结构,具体可分为凸台式和弹簧式两种结构类型。前者以东芝、IXYS及中车(收购的Dynex)为代表,后者以ABB为代表。At present, the commercialized crimp-type IGBT devices all adopt a multi-chip crimp-type packaging structure, which can be divided into two types of structures: boss type and spring type. The former is represented by Toshiba, IXYS and CRRC (acquired by Dynex), while the latter is represented by ABB.
东芝、IXYS和中车(收购的Dynex)等均采用凸台式多芯片封装结构形式,三者技术路线类似。其中,东芝公司生产的注入增强型绝缘栅晶体管(IEGT)器件,提供多芯片压接封装(PPI封装),器件内部所有的电气连接都通过压力实现;IXYS公司旗下的英国子公司Westcode采用的多芯片压接型IGBT模块(SPT+Press-Pack),是在压接型晶闸管和GTO的基础上发展而来的,IGBT模块内部并联多个IGBT芯片和FRD芯片;中车公司(收购的Dynex)采用的多芯片压接封装结构形式与上述公司基本相同。此种压接型封装结构的模块内部多个IGBT芯片以阵列形式排列于同一平面上,内部设置多个芯片定位装置,通过上下两侧钼板将IGBT芯片从两侧均匀地压接。每个IGBT芯片的集电极和发射极在机械压力的作用下,通过钼板与压接型外壳相应铜电极接触。此种压接型封装结构对其内部并联的各芯片所受压力的一致性要求较高,压力的大小会直接影响各接触面之间的接触电阻和接触热阻。为保证所有芯片的压力一致,需要严格控制各子模块中的所有组装零件的厚度一致,由此带来的模块封装成本提高并降低了IGBT器件可靠性,一定程度上限制了传统多芯片压接型封装模块的使用。Toshiba, IXYS, and CRRC (acquired by Dynex) all adopt convex multi-chip packaging structures, and the technical routes of the three are similar. Among them, the injection-enhanced insulated-gate transistor (IEGT) device produced by Toshiba provides a multi-chip press-fit package (PPI package), and all electrical connections inside the device are realized through pressure; Westcode, a British subsidiary of IXYS, uses multiple The chip press type IGBT module (SPT+Press-Pack) is developed on the basis of the press type thyristor and GTO, and multiple IGBT chips and FRD chips are connected in parallel in the IGBT module; CRRC (acquired by Dynex) The multi-chip crimp package structure used is basically the same as that of the above companies. Multiple IGBT chips are arranged in arrays on the same plane inside the module of this crimping type packaging structure, and multiple chip positioning devices are installed inside, and the IGBT chips are evenly crimped from both sides through the molybdenum plates on the upper and lower sides. Under the action of mechanical pressure, the collector and emitter of each IGBT chip are in contact with the corresponding copper electrodes of the crimp-type housing through the molybdenum plate. This crimp-type packaging structure has high requirements on the consistency of the pressure on the internal parallel-connected chips, and the magnitude of the pressure will directly affect the contact resistance and contact thermal resistance between the contact surfaces. In order to ensure the consistent pressure of all chips, it is necessary to strictly control the thickness of all assembly parts in each sub-module to be consistent, which increases the cost of module packaging and reduces the reliability of IGBT devices, which limits the traditional multi-chip crimping to a certain extent. Type packaged modules are used.
ABB公司采用弹簧式封装技术(StakPak技术)。StakPak技术中各子模块芯片有各自独立的接触探针和接触弹簧,利用弹簧来平衡器件的压力,内部每个芯片有独立的弹簧接触,使每个芯片表面的压力保持均匀。但是此封装形式容易出现弹簧疲劳、弹簧应力松弛、磨损和压力不均等,弹簧松弛会导致栅极探针和栅极表面接触不良,进而增加了接触电阻,提升了结温,加速器件失效,降低了IGBT器件可靠性。ABB uses spring-loaded packaging technology (StakPak technology). In the StakPak technology, each sub-module chip has its own independent contact probe and contact spring. The spring is used to balance the pressure of the device. Each chip has an independent spring contact to keep the pressure on the surface of each chip even. However, this package form is prone to spring fatigue, spring stress relaxation, wear and uneven pressure, etc. The spring relaxation will lead to poor contact between the gate probe and the gate surface, which will increase the contact resistance, increase the junction temperature, and accelerate device failure. IGBT device reliability.
发明内容Contents of the invention
本发明的目的是针对以上问题,提供一种圆形大尺寸IGBT芯片压接封装结构及制造方法,解决现有的IGBT压接封装结构需要对整个晶圆上的芯片进行切分,并检测挑选后单独注胶再进行封装,操作复杂,装配要求高,杂散参数影响明显的问题,有利于扩大单个器件功率等级。The object of the present invention is to address the above problems, to provide a circular large-size IGBT chip crimping package structure and manufacturing method, to solve the existing IGBT crimping package structure needs to cut the chips on the entire wafer, and detect and select Afterwards, separate glue injection and then packaging, the operation is complicated, the assembly requirements are high, and the stray parameters are obviously affected, which is conducive to expanding the power level of a single device.
为实现以上目的,本发明采用的技术方案是:一种圆形大尺寸IGBT芯片压接封装结构,封装结构包括自上而下依次设置的发射极端盖(1)、发射极钼片(2)、栅极弹簧针组件(3)、栅极金属(9)、发射极钼片定位架(4)、柔软导电金属薄片(10)、发射极金属(11)、IGBT芯片(12)、集电极金属(14)、集电极带定位孔钼片(13)、定位销(7)、集电极端盖(14)、胶圈(5)、金属裙边(8)和陶瓷管壳(6);其中IGBT芯片(12)的顶面设置有发射极金属层和栅极金属层,底面设置有集电极金属层;IGBT芯片(12)顶面表层的发射极金属(11)与栅极金属(9)采用特殊的多点与面相连接的方式连接,且发射极金属(11)依次与柔软导电金属薄片(10)、发射极钼片(2)和发射极端盖(1)相连接,通过发射极钼片定位架(4)上的扇形通孔固定;栅极金属(9)和栅极弹簧针组件(3)相连,栅极弹簧针组件(3)穿过发射极钼片定位架(4)和陶瓷管壳(6);IGBT芯片(12)底面表层的集电极金属(15)依次与集电极带定位孔钼片(13)和集电极端盖(14)相连接;IGBT芯片(12)、发射极钼片(2)、集电极带定位孔钼片(13)、栅极弹簧针组件(3)以及其上的连接的金属端盖等直接压力接触互联;器件内部采用对称结构设计,且整个模块通过冷压焊进行压接密封封装,并填充惰性气体。In order to achieve the above objectives, the technical solution adopted by the present invention is: a circular large-size IGBT chip crimping packaging structure, the packaging structure includes emitter terminal cover (1), emitter molybdenum sheet (2) arranged in sequence from top to bottom , grid pogo pin assembly (3), grid metal (9), emitter molybdenum sheet positioning frame (4), soft conductive metal sheet (10), emitter metal (11), IGBT chip (12), collector Metal (14), collector molybdenum sheet with positioning hole (13), positioning pin (7), collector end cap (14), rubber ring (5), metal skirt (8) and ceramic shell (6); The top surface of the IGBT chip (12) is provided with an emitter metal layer and a gate metal layer, and the bottom surface is provided with a collector metal layer; the emitter metal (11) and the gate metal (9) on the top surface of the IGBT chip (12) are ) is connected in a special multi-point-to-surface connection, and the emitter metal (11) is connected with the soft conductive metal sheet (10), the emitter molybdenum sheet (2) and the emitter terminal cover (1) in sequence, and the emitter The fan-shaped through hole on the molybdenum sheet positioning frame (4) is fixed; the grid metal (9) is connected to the grid pogo pin assembly (3), and the grid pogo pin assembly (3) passes through the emitter molybdenum sheet positioning frame (4) and the ceramic case (6); the collector metal (15) on the bottom surface of the IGBT chip (12) is sequentially connected to the molybdenum sheet with positioning holes for the collector (13) and the collector end cap (14); the IGBT chip (12) , the emitter molybdenum sheet (2), the collector molybdenum sheet with positioning holes (13), the grid pogo pin assembly (3) and the connected metal end caps on it are directly pressure-contacted and interconnected; the device adopts a symmetrical structure design inside, And the whole module is crimped and sealed by cold pressure welding, and filled with inert gas.
进一步的,所述IGBT芯片(12)为圆形大尺寸芯片,且表面刻有扇形分区。Further, the IGBT chip (12) is a circular large-size chip with sector-shaped partitions engraved on the surface.
进一步的,所述结构内部填充的惰性气体为氮气。Further, the inert gas filled inside the structure is nitrogen.
进一步的,所述特殊的多点与面相连接的方式为:连接IGBT芯片(12)顶面表层的发射极金属(11)为均布的多个隔断的扇形结构并与多个条状结构的栅极金属(9)采用多点与面相连接的方式连接。Further, the special way of connecting multiple points to surfaces is as follows: the emitter metal (11) connected to the surface layer of the top surface of the IGBT chip (12) is a uniformly distributed fan-shaped structure with multiple partitions and is connected with multiple strip structures. The gate metal (9) is connected in a manner of connecting multiple points to surfaces.
进一步的,所述发射极钼片(2)为多个独立的扇形钼片组成,发射极钼片(2)与发射极端盖(1)上的扇形突起等面积接触。Further, the emitter molybdenum sheet (2) is composed of a plurality of independent fan-shaped molybdenum sheets, and the emitter molybdenum sheet (2) is in equal-area contact with the fan-shaped protrusion on the emitter terminal cover (1).
进一步的,发射极钼片定位架(4)上预留有用于固定放置发射极钼片(2)和柔软导电金属薄片(10)的扇形通孔,且通过扇形通孔将发射极端盖(1)固定。Further, fan-shaped through holes for fixedly placing the emitter molybdenum sheet (2) and the soft conductive metal sheet (10) are reserved on the emitter molybdenum sheet positioning frame (4), and the emitter terminal cover (1 )fixed.
进一步的,所述柔软导电金属薄片(10)为多个独立的扇形柔软导电金属薄片,并与发射极钼片和发射极金属等面积接触。Further, the flexible conductive metal sheet (10) is a plurality of independent fan-shaped flexible conductive metal sheets, and is in contact with the emitter molybdenum sheet and the emitter metal in an equal area.
本发明采用的制造方法:一种圆形大尺寸IGBT芯片压接封装结构的制造方法,采用上述压接封装结构,其制作方式为:The manufacturing method adopted in the present invention: a manufacturing method of a circular large-size IGBT chip crimping packaging structure, adopting the above-mentioned crimping packaging structure, and its manufacturing method is:
第一步,制作封装所需的各部分零部件;The first step is to make all parts required for packaging;
第二步,按结构特征要求进行叠放并封装:整个模块通过冷压焊进行压接密封封装,并填充氮气惰性气体;The second step is to stack and package according to the structural characteristics: the whole module is crimped and sealed by cold pressure welding, and filled with nitrogen inert gas;
第三步,形成最终产品并封装。The third step is to form the final product and package it.
进一步的,如果某一扇区经检测被判定为故障扇区,通过更换发射极钼片(2)上某个故障区扇形导电钼片为绝缘片实现故障扇区的隔离。Further, if a certain sector is determined to be a faulty sector after detection, the isolation of the faulty sector is realized by replacing a sector-shaped conductive molybdenum sheet in a faulty area on the emitter molybdenum sheet (2) with an insulating sheet.
进一步的,在实现故障扇区的隔离时,需要将IGBT芯片(12)的表面栅极金属(9)与发射极金属(11)的连接处切断。Further, when realizing the isolation of the faulty sector, it is necessary to cut off the junction between the gate metal (9) and the emitter metal (11) on the surface of the IGBT chip (12).
本发明的有益效果:本发明提供了一种圆形大尺寸IGBT芯片压接封装结构及制造方法,解决现有的IGBT压接封装结构需要对整个晶圆上的芯片进行切分,并检测挑选后单独注胶再进行封装,操作复杂,装配要求高,杂散参数影响明显的问题,有利于扩大单个器件功率等级。Beneficial effects of the present invention: the present invention provides a circular large-size IGBT chip crimping package structure and manufacturing method, which solves the need for the existing IGBT crimping package structure to divide the chips on the entire wafer and detect and select them Afterwards, separate glue injection and then packaging, the operation is complicated, the assembly requirements are high, and the stray parameters are obviously affected, which is conducive to expanding the power level of a single device.
1、采用本发明圆形大尺寸IGBT芯片压接封装结构,故障扇区隔离方法操作简单,只需更换相应故障区导电钼片为绝缘片,并将IGBT芯片表面栅极金属和发射极金属特定连接处切断。1. Adopting the circular large-size IGBT chip crimping package structure of the present invention, the fault sector isolation method is simple to operate, only need to replace the conductive molybdenum sheet in the corresponding fault area as an insulating sheet, and specify the gate metal and emitter metal on the surface of the IGBT chip The connection is severed.
2、大功率压接封装器件内部采用对称结构设计,与其他压接封装器件相比,此设计结构降低内部各扇形分区杂散电感分布,使杂散电感分布趋于一致,减小模块的寄生参数。2. The interior of the high-power crimping packaging device adopts a symmetrical structure design. Compared with other crimping packaging devices, this design structure reduces the distribution of stray inductance in each internal sector, makes the stray inductance distribution tend to be consistent, and reduces the parasitic of the module parameter.
3、大功率压接封装器件的集电极金属和发射极金属通过对应的各极钼片与相应金属端盖连接;既实现了电气连接又实现双面散热,拥有远优于常规焊接灌封器件的传热能力。3. The collector metal and emitter metal of the high-power crimping packaged device are connected to the corresponding metal end cap through the corresponding molybdenum sheet; it realizes both electrical connection and double-sided heat dissipation, which is far superior to conventional welding potting devices heat transfer capacity.
4、由于器件内部各组件通过压力直接连接,无引线键合和焊接层,消除了传统器件键合点和焊接层因疲劳失效的瓶颈,对热机械疲劳的抵抗力较强,大大提高了模块在苛刻应用环境下的长期可靠性。4. Since the components inside the device are directly connected by pressure, there is no wire bonding and welding layer, which eliminates the bottleneck of traditional device bonding points and welding layers due to fatigue failure, and has strong resistance to thermomechanical fatigue, greatly improving the module in Long-term reliability in harsh application environments.
附图说明Description of drawings
图1为本发明一种圆形大尺寸IGBT芯片压接封装结构半剖俯视图。Fig. 1 is a half-sectional top view of a circular large-size IGBT chip crimping package structure according to the present invention.
图2为本发明一种圆形大尺寸IGBT芯片压接封装结构半剖仰视图。Fig. 2 is a half-section bottom view of a circular large-size IGBT chip crimp package structure according to the present invention.
图3为本发明发射极金属和栅极金属连接形式全景图。Fig. 3 is a panoramic view of the connection form of the emitter metal and the gate metal in the present invention.
图4为本发明发射极金属和栅极金属连接形式局部图。Fig. 4 is a partial diagram of the connection form of the emitter metal and the gate metal in the present invention.
图5为本发明发射极端盖与发射极钼片连接示意图。Fig. 5 is a schematic diagram of the connection between the emitter terminal cover and the emitter molybdenum sheet according to the present invention.
图6为本发明发射极端盖、发射极钼片、发射极钼片定位架、柔软导电金属和IGBT芯片连接示意图。Fig. 6 is a schematic diagram of the connection between the emitter terminal cover, the emitter molybdenum sheet, the emitter molybdenum sheet positioning frame, the soft conductive metal and the IGBT chip of the present invention.
图7为本发明栅极弹簧针组件、栅极金属、IGBT芯片和陶瓷管壳连接示意图。Fig. 7 is a schematic diagram of the connection of the gate pogo pin assembly, the gate metal, the IGBT chip and the ceramic case of the present invention.
图8为本发明IGBT芯片、集电极钼片和集电极端盖连接示意图。Fig. 8 is a schematic diagram of the connection of the IGBT chip, the collector molybdenum sheet and the collector end cap of the present invention.
图中所述文字标注表示为:1、发射极端盖;2、发射极钼片;3、栅极弹簧针组件;4、发射极钼片定位架;5、胶圈;6、陶瓷管壳;7、定位销;8、金属裙边;9、栅极金属;10、柔软导电金属薄片;11、发射极金属;12、IGBT芯片;13、集电极带定位孔钼片;14、集电极端盖;15、集电极金属。The text marked in the figure is expressed as: 1. Emitter terminal cover; 2. Emitter molybdenum sheet; 3. Grid spring pin assembly; 4. Emitter molybdenum sheet positioning frame; 5. Apron; 6. Ceramic shell; 7. Positioning pin; 8. Metal skirt; 9. Gate metal; 10. Soft conductive metal sheet; 11. Emitter metal; 12. IGBT chip; 13. Molybdenum sheet with positioning hole for collector; 14. Collector terminal Cover; 15, collector metal.
具体实施方式Detailed ways
为了使本领域技术人员更好地理解本发明的技术方案,下面结合附图对本发明进行详细描述,本部分的描述仅是示范性和解释性,不应对本发明的保护范围有任何的限制作用。In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings. The description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present invention. .
如图1和图2所示,本实施例提供的一种圆形大尺寸IGBT芯片压接封装结构,其包括自上而下依次设置的发射极端盖1、发射极钼片2、栅极弹簧针组件3、栅极金属9、发射极钼片定位架4、柔软导电金属薄片10、发射极金属11、IGBT芯片12、集电极金属14、集电极带定位孔钼片13、定位销7、集电极端盖14、胶圈5、金属裙边8和陶瓷管壳6。As shown in Figure 1 and Figure 2, a circular large-size IGBT chip crimping package structure provided by this embodiment includes an emitter terminal cover 1, an emitter molybdenum sheet 2, and a gate spring arranged in sequence from top to bottom. Needle assembly 3, grid metal 9, emitter molybdenum sheet positioning frame 4, soft conductive metal sheet 10, emitter metal 11, IGBT chip 12, collector metal 14, collector molybdenum sheet with positioning hole 13, positioning pin 7, Collector end cover 14, rubber ring 5, metal skirt 8 and ceramic shell 6.
其中IGBT芯片12的顶面设置有发射极金属层和栅极金属层,底面设置有集电极金属层;IGBT芯片12顶面表层的发射极金属11与栅极金属9采用特殊的多点与面相连接的方式连接,且发射极金属11依次与柔软导电金属薄片10、发射极钼片2和发射极端盖1相连接,通过发射极钼片定位架4上的扇形通孔固定;栅极金属9和栅极弹簧针组件3相连,栅极弹簧针组件3穿过发射极钼片定位架4和陶瓷管壳6;IGBT芯片12底面表层的集电极金属15依次与集电极带定位孔钼片13和集电极端盖14相连接;IGBT芯片12、发射极钼片2、集电极带定位孔钼片13、栅极弹簧针组件3以及其上的连接的金属端盖等直接压力接触互联;器件内部采用对称结构设计,且整个模块通过冷压焊进行压接密封封装,并填充惰性气体。The top surface of the IGBT chip 12 is provided with an emitter metal layer and a gate metal layer, and the bottom surface is provided with a collector metal layer; the emitter metal 11 and the gate metal 9 on the top surface of the IGBT chip 12 adopt a special multi-point and surface phase The connection mode is connected, and the emitter metal 11 is sequentially connected with the soft conductive metal sheet 10, the emitter molybdenum sheet 2 and the emitter terminal cover 1, and is fixed through the fan-shaped through hole on the emitter molybdenum sheet positioning frame 4; the grid metal 9 It is connected with the grid pogo pin assembly 3, and the grid pogo pin assembly 3 passes through the emitter molybdenum sheet positioning frame 4 and the ceramic shell 6; the collector metal 15 on the bottom surface of the IGBT chip 12 is sequentially connected with the collector molybdenum sheet 13 with positioning holes It is connected with the collector end cap 14; the IGBT chip 12, the emitter molybdenum sheet 2, the collector molybdenum sheet with positioning holes 13, the grid pogo pin assembly 3 and the metal end cap connected thereon are directly pressure-contacted and interconnected; the device The interior adopts a symmetrical structure design, and the entire module is crimped and sealed by cold pressure welding, and filled with inert gas.
优选的,所述IGBT芯片12为圆形大尺寸芯片,且表面刻有扇形分区。Preferably, the IGBT chip 12 is a circular large-size chip with sector-shaped partitions engraved on the surface.
优选的,所述结构内部填充的惰性气体为氮气。Preferably, the inert gas filled inside the structure is nitrogen.
优选的,所述特殊的多点与面相连接的方式为:连接IGBT芯片12顶面表层的发射极金属11为均布的多个隔断的扇形结构并与多个条状结构的栅极金属9采用多点与面相连接的方式连接。Preferably, the special way of connecting multiple points to surfaces is as follows: the emitter metal 11 connected to the surface layer of the top surface of the IGBT chip 12 is uniformly distributed in a plurality of partitioned fan-shaped structures and is connected with a plurality of strip-shaped gate metals 9 Use the way of multi-point and surface connection.
优选的,发射极钼片定位架4上预留有用于固定放置发射极钼片2和柔软导电金属薄片10的扇形通孔,且通过扇形通孔将发射极端盖1固定。Preferably, the emitter molybdenum sheet positioning frame 4 is reserved with fan-shaped through holes for fixedly placing the emitter molybdenum sheet 2 and the soft conductive metal sheet 10, and the emitter terminal cover 1 is fixed through the fan-shaped through holes.
优选的,所述柔软导电金属薄片10为多个独立的扇形柔软导电金属薄片,并与发射极扇形钼片2和发射极金属11等面积接触。且柔软导电金属片较佳情况下为银箔。Preferably, the flexible conductive metal sheet 10 is a plurality of independent fan-shaped flexible conductive metal sheets, and is in equal area contact with the emitter fan-shaped molybdenum sheet 2 and the emitter metal 11 . And the flexible conductive metal sheet is preferably silver foil.
如图5所示,发射极扇形钼片2为多个独立的扇形钼片组成,发射极端盖1上有与发射极钼片2等面积的扇形突起,以避免在压力作用下因产生的剪切力对发射极端盖1造成损伤;并通过发射极钼片定位架4上的扇形通孔固定扇形结构的发射极钼片2和发射极端盖1,以防止相连接部分相对位移。As shown in Figure 5, the emitter fan-shaped molybdenum sheet 2 is composed of a plurality of independent fan-shaped molybdenum sheets, and the emitter terminal cover 1 has a fan-shaped protrusion with an area equal to that of the emitter molybdenum sheet 2, so as to avoid the shear caused by the pressure. The shear force causes damage to the emitter terminal cover 1; and fix the fan-shaped emitter molybdenum sheet 2 and the emitter terminal cover 1 through the fan-shaped through hole on the emitter molybdenum sheet positioning frame 4 to prevent the relative displacement of the connected parts.
并且,如果某一扇区经检测被判定为故障扇区,通过更换发射极钼片2上某个故障区扇形导电钼片为绝缘片实现故障扇区的隔离。Moreover, if a certain sector is determined to be a faulty sector after detection, the isolation of the faulty sector is realized by replacing a sector-shaped conductive molybdenum sheet in a faulty area on the emitter molybdenum sheet 2 with an insulating sheet.
如图3和图4所示,IGBT芯片12顶面设置有发射极金属层和栅极金属层,发射极金属11和栅极金属9采用特殊连接形式。其中,如图6所示,发射极金属11依次与柔软导电金属薄片10、发射极钼片2和发射极端盖1相连接,并通过发射极钼片定位架4的扇形通孔将各部分固定,发射极金属11和发射极钼片2之间的柔软导电金属薄片10起到缓冲压力和导电作用。As shown in FIG. 3 and FIG. 4 , the top surface of the IGBT chip 12 is provided with an emitter metal layer and a gate metal layer, and the emitter metal 11 and the gate metal 9 adopt a special connection form. Among them, as shown in Figure 6, the emitter metal 11 is sequentially connected with the soft conductive metal sheet 10, the emitter molybdenum sheet 2 and the emitter terminal cover 1, and each part is fixed through the fan-shaped through hole of the emitter molybdenum sheet positioning frame 4 , The soft conductive metal sheet 10 between the emitter metal 11 and the emitter molybdenum sheet 2 plays the role of buffering pressure and conducting electricity.
如图7所示,栅极金属9和栅极弹簧针组件3相连,栅极弹簧针组件3穿过发射极钼片定位架4和陶瓷管壳6,引线穿过陶瓷管壳6时采用密封设计,栅极弹簧针组件3与栅极金属9通过直接压力接触互联;当IGBT芯片12某一扇区经检测被判定为故障扇区,还可以将芯片表面栅极金属9和发射极金属11特定连接处切断。As shown in Figure 7, the grid metal 9 is connected to the grid pogo pin assembly 3, the grid pogo pin assembly 3 passes through the emitter molybdenum sheet positioning frame 4 and the ceramic shell 6, and the lead wire is sealed when passing through the ceramic shell 6. design, the gate pogo pin assembly 3 and the gate metal 9 are interconnected through direct pressure contact; when a certain sector of the IGBT chip 12 is detected as a faulty sector, the gate metal 9 and the emitter metal 11 on the surface of the chip can also be connected Cut off at a specific connection.
如图8所示,IGBT芯片12底面设置有集电极金属层,集电极金属15与集电极带定位孔钼片13通过直接压力接触互联,集电极带定位孔钼片13底部有一定位孔,通过定位销7与集电极端盖14相连接,防止集电极钼片相对位移。As shown in Figure 8, the bottom surface of the IGBT chip 12 is provided with a collector metal layer, the collector metal 15 and the collector molybdenum sheet 13 with positioning holes are interconnected through direct pressure contact, and there is a positioning hole at the bottom of the collector molybdenum sheet 13 with positioning holes. The positioning pin 7 is connected with the collector end cover 14 to prevent relative displacement of the molybdenum sheet of the collector.
封装结构内部的IGBT芯片、钼片、金属端盖以及栅极弹簧针等直接压力接触互联,这就要求器件内部各组件厚度均匀,各接触面光滑,严格控制接触面平整度、粗糙度和平行度,压接封装时每个接触面充分接触和均匀受力。The IGBT chips, molybdenum sheets, metal end caps, and gate pogo pins inside the package structure are directly pressure-contacted and interconnected, which requires that the thickness of each component inside the device is uniform, and the contact surfaces are smooth, and the flatness, roughness and parallelism of the contact surfaces are strictly controlled. When crimping the package, each contact surface is fully contacted and evenly stressed.
顶部发射极端盖1、底部集电极端盖14均设置有安装通孔,两者的安装通孔垂直对准,便于压接封装IGBT模块的固定和散热装置的安装。顶部发射极端盖1和底部集电极端盖14具有足够的厚度和机械强度,满足顶部金属板上表面和底部金属板下表面作为模块机械安装面的需求。同时两个机械安装面又作为模块的导热界面,可以通过集电极端盖14和发射极端盖1进行双面散热。Both the top emitter terminal cover 1 and the bottom collector terminal cover 14 are provided with installation through holes, and the installation through holes of the two are vertically aligned, which is convenient for fixing the crimp-packaged IGBT module and installing the heat sink. The top emitter end cap 1 and the bottom collector end cap 14 have sufficient thickness and mechanical strength to meet the requirements of the upper surface of the top metal plate and the lower surface of the bottom metal plate as the mechanical mounting surface of the module. At the same time, the two mechanical installation surfaces serve as the heat conduction interface of the module, which can conduct double-sided heat dissipation through the collector end cover 14 and the emitter end cover 1 .
器件内部采用对称结构设计,且整个模块通过冷压焊进行压接密封封装,并填充氮气等惰性气体保护管壳内部器件,保证内部电气绝缘性能。The interior of the device adopts a symmetrical structure design, and the whole module is crimped and sealed by cold pressure welding, and is filled with inert gas such as nitrogen to protect the internal device of the tube shell to ensure the internal electrical insulation performance.
一种圆形大尺寸IGBT芯片压接封装结构的制造方法,采用上述压接封装结构,其制作方式为:A method for manufacturing a circular large-size IGBT chip crimping package structure, using the above-mentioned crimping package structure, the manufacturing method is:
第一步,制作封装所需的各部分零部件;The first step is to make all parts required for packaging;
第二步,按结构特征要求进行叠放并封装:整个模块通过冷压焊进行压接密封封装,并填充氮气惰性气体;The second step is to stack and package according to the structural characteristics: the whole module is crimped and sealed by cold pressure welding, and filled with nitrogen inert gas;
第三步,形成最终产品并封装。The third step is to form the final product and package it.
优选的,如果某一扇区经检测被判定为故障扇区,通过更换发射极钼片2上某个故障区扇形导电钼片为绝缘片实现故障扇区的隔离。Preferably, if a certain sector is determined to be a faulty sector after detection, the isolation of the faulty sector is realized by replacing a sector-shaped conductive molybdenum sheet in a faulty area on the emitter molybdenum sheet 2 with an insulating sheet.
优选的,在实现故障扇区的隔离时,需要将IGBT芯片12的表面栅极金属9与发射极金属11的连接处切断。Preferably, when realizing the isolation of the faulty sector, it is necessary to cut off the junction between the gate metal 9 and the emitter metal 11 on the surface of the IGBT chip 12 .
采用此压接封装结构,故障扇区隔离方法简单,只需更换相应故障区导电钼片为绝缘片,并将芯片表面栅极金属特定连接处切断;器件通过集电极端盖14和发射极端盖1进行双面散热;无金属键合线及其焊接界面,消除了传统器件键合点和焊接层疲劳失效的瓶颈,对热机械疲劳的抵抗力较强;器件内部采用对称结构设计,降低内部各扇形分区杂散电感分布,使杂散电感分布趋于一致,减小模块的寄生参数,提高器件的电气性能。With this crimping package structure, the faulty sector isolation method is simple, just replace the conductive molybdenum sheet in the corresponding faulty area with an insulating sheet, and cut off the specific connection of the gate metal on the chip surface; the device passes through the collector end cover 14 and the emitter end cover 1. Double-sided heat dissipation; no metal bonding wire and its welding interface, eliminating the bottleneck of fatigue failure of traditional device bonding points and soldering layers, and strong resistance to thermomechanical fatigue; the internal design of the device adopts a symmetrical structure to reduce internal components. The distribution of stray inductance in fan-shaped partitions makes the distribution of stray inductance tend to be consistent, reduces the parasitic parameters of the module, and improves the electrical performance of the device.
需要说明的是,在本文中,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。It should be noted that, in this document, the terms "comprising", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, It also includes other elements not expressly listed, or elements inherent in the process, method, article, or apparatus.
在本发明的描述中,还需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的普通技术人员而言,可视具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be interpreted in a broad sense, for example, it can be a fixed connection or a flexible connection. Detachable connection, or integral connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.
本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实例的说明只是用于帮助理解本发明的方法及其核心思想。以上所述仅是本发明的优选实施方式,应当指出,由于文字表达的有限性,而客观上存在无限的具体结构,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进、润饰或变化,也可以将上述技术特征以适当的方式进行组合;这些改进润饰、变化或组合,或未经改进将发明的构思和技术方案直接应用于其它场合的,均应视为本发明的保护范围。In this paper, specific examples are used to illustrate the principle and implementation of the present invention. The description of the above examples is only used to help understand the method and core idea of the present invention. The above is only a preferred embodiment of the present invention. It should be pointed out that due to the limitation of literal expression, there are objectively unlimited specific structures. Under these circumstances, several improvements, modifications or changes can also be made, and the above-mentioned technical features can also be combined in an appropriate manner; these improvements, modifications, or combinations, or the idea and technical solution of the invention can be directly applied to other occasions without improvement should be regarded as the protection scope of the present invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711410556.8A CN108172617B (en) | 2017-12-23 | 2017-12-23 | Circular large-size IGBT chip crimping packaging structure and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711410556.8A CN108172617B (en) | 2017-12-23 | 2017-12-23 | Circular large-size IGBT chip crimping packaging structure and manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108172617A true CN108172617A (en) | 2018-06-15 |
| CN108172617B CN108172617B (en) | 2020-04-17 |
Family
ID=62523832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711410556.8A Active CN108172617B (en) | 2017-12-23 | 2017-12-23 | Circular large-size IGBT chip crimping packaging structure and manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108172617B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109671686A (en) * | 2019-01-29 | 2019-04-23 | 华北电力大学 | A kind of encapsulating structure of crimp type IGBT |
| CN110676176A (en) * | 2019-09-29 | 2020-01-10 | 全球能源互联网研究院有限公司 | Preparation process of power semiconductor device packaging structure |
| CN111081642A (en) * | 2019-11-04 | 2020-04-28 | 全球能源互联网研究院有限公司 | Compression joint type power device packaging structure and packaging method |
| CN111128931A (en) * | 2018-10-30 | 2020-05-08 | 株洲中车时代电气股份有限公司 | A rectifier tube shell |
| CN111524862A (en) * | 2020-04-30 | 2020-08-11 | 全球能源互联网研究院有限公司 | A chip packaging electrode and its preparation method and chip packaging structure |
| CN112466868A (en) * | 2020-11-27 | 2021-03-09 | 北京新能源汽车技术创新中心有限公司 | Chip packaging structure and vehicle |
| WO2021056603A1 (en) * | 2019-09-29 | 2021-04-01 | 全球能源互联网研究院有限公司 | Power type semiconductor device packaging structure |
| CN112597678A (en) * | 2020-12-15 | 2021-04-02 | 重庆大学 | Numerical simulation method for fretting wear failure evolution of crimping type IGBT device |
| CN112635404A (en) * | 2020-11-27 | 2021-04-09 | 株洲中车时代半导体有限公司 | Power sub-module, manufacturing method thereof and rotary die crimping type power module |
| CN112908955A (en) * | 2021-03-22 | 2021-06-04 | 中冶赛迪工程技术股份有限公司 | Crimping type IGBT power module based on gradient function composite material encapsulation |
| CN114068501A (en) * | 2021-11-25 | 2022-02-18 | 南瑞联研半导体有限责任公司 | Internal structure of crimping type power device and manufacturing method thereof |
| CN115206949A (en) * | 2022-07-13 | 2022-10-18 | 西安电子科技大学 | Vertical conductive type power semiconductor device double-sided compression joint packaging structure |
| CN116093142A (en) * | 2023-04-07 | 2023-05-09 | 江苏岂丞智能科技有限公司 | Crimping type insulated gate bipolar transistor for flexible power transmission |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102270640A (en) * | 2011-06-20 | 2011-12-07 | 湖南大学 | Heavy-current whole-wafer total-pressure-contact flat-plate encapsulated IGBT (Insulated Gate Bipolar Transistor) and manufacturing method thereof |
| CN202120918U (en) * | 2011-07-04 | 2012-01-18 | 润奥电子(扬州)制造有限公司 | Crimp-connection IGBT (Insulated Gate Bipolar Transistor) device |
| CN105047653A (en) * | 2015-07-10 | 2015-11-11 | 株洲南车时代电气股份有限公司 | IGBT (Insulated Gate Bipolar Translator) sub-module unit and packaging module thereof |
| US20160197054A1 (en) * | 2013-08-01 | 2016-07-07 | Zhuzhou Csr Times Electric Co., Ltd. | Igbt device and method for packaging whole-wafer igbt chip |
-
2017
- 2017-12-23 CN CN201711410556.8A patent/CN108172617B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102270640A (en) * | 2011-06-20 | 2011-12-07 | 湖南大学 | Heavy-current whole-wafer total-pressure-contact flat-plate encapsulated IGBT (Insulated Gate Bipolar Transistor) and manufacturing method thereof |
| CN202120918U (en) * | 2011-07-04 | 2012-01-18 | 润奥电子(扬州)制造有限公司 | Crimp-connection IGBT (Insulated Gate Bipolar Transistor) device |
| US20160197054A1 (en) * | 2013-08-01 | 2016-07-07 | Zhuzhou Csr Times Electric Co., Ltd. | Igbt device and method for packaging whole-wafer igbt chip |
| CN105047653A (en) * | 2015-07-10 | 2015-11-11 | 株洲南车时代电气股份有限公司 | IGBT (Insulated Gate Bipolar Translator) sub-module unit and packaging module thereof |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111128931B (en) * | 2018-10-30 | 2021-08-20 | 株洲中车时代半导体有限公司 | A rectifier tube shell |
| CN111128931A (en) * | 2018-10-30 | 2020-05-08 | 株洲中车时代电气股份有限公司 | A rectifier tube shell |
| CN109671686A (en) * | 2019-01-29 | 2019-04-23 | 华北电力大学 | A kind of encapsulating structure of crimp type IGBT |
| CN109671686B (en) * | 2019-01-29 | 2024-05-10 | 华北电力大学 | Packaging structure of crimping IGBT |
| CN110676176A (en) * | 2019-09-29 | 2020-01-10 | 全球能源互联网研究院有限公司 | Preparation process of power semiconductor device packaging structure |
| WO2021056604A1 (en) * | 2019-09-29 | 2021-04-01 | 全球能源互联网研究院有限公司 | Preparation process of power type semiconductor device package structure |
| WO2021056603A1 (en) * | 2019-09-29 | 2021-04-01 | 全球能源互联网研究院有限公司 | Power type semiconductor device packaging structure |
| CN110676176B (en) * | 2019-09-29 | 2021-04-13 | 全球能源互联网研究院有限公司 | Preparation process of power type semiconductor device packaging structure |
| CN111081642A (en) * | 2019-11-04 | 2020-04-28 | 全球能源互联网研究院有限公司 | Compression joint type power device packaging structure and packaging method |
| CN111524862A (en) * | 2020-04-30 | 2020-08-11 | 全球能源互联网研究院有限公司 | A chip packaging electrode and its preparation method and chip packaging structure |
| CN111524862B (en) * | 2020-04-30 | 2021-09-21 | 全球能源互联网研究院有限公司 | Chip packaging electrode, preparation method thereof and chip packaging structure |
| CN112466868A (en) * | 2020-11-27 | 2021-03-09 | 北京新能源汽车技术创新中心有限公司 | Chip packaging structure and vehicle |
| CN112635404A (en) * | 2020-11-27 | 2021-04-09 | 株洲中车时代半导体有限公司 | Power sub-module, manufacturing method thereof and rotary die crimping type power module |
| CN112635404B (en) * | 2020-11-27 | 2024-04-19 | 株洲中车时代半导体有限公司 | Power sub-module, manufacturing method thereof and rotary die press-connection type power module |
| CN112597678A (en) * | 2020-12-15 | 2021-04-02 | 重庆大学 | Numerical simulation method for fretting wear failure evolution of crimping type IGBT device |
| CN112908955A (en) * | 2021-03-22 | 2021-06-04 | 中冶赛迪工程技术股份有限公司 | Crimping type IGBT power module based on gradient function composite material encapsulation |
| CN114068501A (en) * | 2021-11-25 | 2022-02-18 | 南瑞联研半导体有限责任公司 | Internal structure of crimping type power device and manufacturing method thereof |
| CN115206949A (en) * | 2022-07-13 | 2022-10-18 | 西安电子科技大学 | Vertical conductive type power semiconductor device double-sided compression joint packaging structure |
| CN115206949B (en) * | 2022-07-13 | 2023-09-29 | 西安电子科技大学 | A vertical conductive power semiconductor device double-sided press-fit packaging structure |
| CN116093142A (en) * | 2023-04-07 | 2023-05-09 | 江苏岂丞智能科技有限公司 | Crimping type insulated gate bipolar transistor for flexible power transmission |
| CN116093142B (en) * | 2023-04-07 | 2023-08-29 | 国网湖北省电力有限公司荆州供电公司 | Crimping type insulated gate bipolar transistor for flexible power transmission |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108172617B (en) | 2020-04-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108172617B (en) | Circular large-size IGBT chip crimping packaging structure and manufacturing method | |
| CN102881589B (en) | Crimping IGBT (insulated gate bipolar transistor) module and method for manufacturing same | |
| EP2722879B1 (en) | Semiconductor unit and semiconductor device using the same | |
| CN102244066B (en) | Power semiconductor module | |
| CN112928090B (en) | Power semiconductor chip packaging structure, packaging method and packaging module | |
| US10217690B2 (en) | Semiconductor module that have multiple paths for heat dissipation | |
| US10672677B2 (en) | Semiconductor package structure | |
| US11211373B1 (en) | Double-sided chip stack assembly | |
| CN112018049A (en) | A chip packaging structure and an electronic device | |
| CN108281406B (en) | Power device packaging structure and manufacturing method thereof | |
| CN112086420A (en) | Elastic component for internal connection of power device | |
| CN110265385B (en) | A package structure of a power device and a manufacturing method thereof | |
| CN113380879A (en) | SiC MOSFET sub-module unit and crimping type package thereof | |
| CN116565007A (en) | A high-voltage and high-power crimping device packaging structure | |
| CN104362141B (en) | A kind of high-power crimp type IGBT module | |
| CN116072660A (en) | A SiC MOSFET multi-chip parallel sub-unit crimp package structure | |
| CN114141744B (en) | A SiC MOSFET sub-module unit press-fit package | |
| CN210467819U (en) | Chip packaging part | |
| CN102842548A (en) | Square flat-type power metal oxide semi-conductor (MOS) chip packaging structure | |
| CN114220774A (en) | Submodule structure and crimping formula power module | |
| CN209045529U (en) | A kind of encapsulating structure of power semiconductor part | |
| CN116544197A (en) | Power device packaging structure and packaging method | |
| CN114628375A (en) | Crimping type semiconductor sub-module and module | |
| CN112447650B (en) | Chip package | |
| CN118099115A (en) | A high voltage power semiconductor single chip packaging module and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |