CN108136568B - 使用增材制造工艺形成先进抛光垫的方法和设备 - Google Patents

使用增材制造工艺形成先进抛光垫的方法和设备 Download PDF

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Publication number
CN108136568B
CN108136568B CN201680060117.6A CN201680060117A CN108136568B CN 108136568 B CN108136568 B CN 108136568B CN 201680060117 A CN201680060117 A CN 201680060117A CN 108136568 B CN108136568 B CN 108136568B
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China
Prior art keywords
polishing
layer
pad
structural material
polishing pad
Prior art date
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Active
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CN201680060117.6A
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English (en)
Chinese (zh)
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CN108136568A (zh
Inventor
S·嘎纳帕西亚潘
傅博诣
A·乔卡林甘
D·莱德菲尔德
R·巴贾杰
M·C·奥里拉尔
H·T·黄
J·G·方
M·山村
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Applied Materials Inc
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Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/885,950 external-priority patent/US10384330B2/en
Priority claimed from US14/887,240 external-priority patent/US10821573B2/en
Priority claimed from US14/920,801 external-priority patent/US10875145B2/en
Priority claimed from US15/002,384 external-priority patent/US10875153B2/en
Priority to CN202010962949.5A priority Critical patent/CN112045556B/zh
Priority to CN202010961929.6A priority patent/CN112045555B/zh
Priority to CN202010963904.XA priority patent/CN112045557B/zh
Priority to CN202010961583.XA priority patent/CN112059937B/zh
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to CN202010963900.1A priority patent/CN112025544B/zh
Publication of CN108136568A publication Critical patent/CN108136568A/zh
Publication of CN108136568B publication Critical patent/CN108136568B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04—Zonally-graded surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/009—Tools not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
CN201680060117.6A 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备 Active CN108136568B (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN202010963900.1A CN112025544B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010962949.5A CN112045556B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961583.XA CN112059937B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961929.6A CN112045555B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963904.XA CN112045557B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备

Applications Claiming Priority (23)

Application Number Priority Date Filing Date Title
US14/885,950 US10384330B2 (en) 2014-10-17 2015-10-16 Polishing pads produced by an additive manufacturing process
US14/885,950 2015-10-16
US14/887,240 2015-10-19
US14/887,240 US10821573B2 (en) 2014-10-17 2015-10-19 Polishing pads produced by an additive manufacturing process
US14/920,801 US10875145B2 (en) 2014-10-17 2015-10-22 Polishing pads produced by an additive manufacturing process
US14/920,801 2015-10-22
US201662280537P 2016-01-19 2016-01-19
US62/280,537 2016-01-19
US15/002,384 US10875153B2 (en) 2014-10-17 2016-01-20 Advanced polishing pad materials and formulations
US15/002,384 2016-01-20
US201662304134P 2016-03-04 2016-03-04
US62/304,134 2016-03-04
US201662323599P 2016-04-15 2016-04-15
US62/323,599 2016-04-15
US201662331234P 2016-05-03 2016-05-03
US62/331,234 2016-05-03
US201662339807P 2016-05-21 2016-05-21
US62/339,807 2016-05-21
US201662380015P 2016-08-26 2016-08-26
US201662380334P 2016-08-26 2016-08-26
US62/380,334 2016-08-26
US62/380,015 2016-08-26
PCT/US2016/055793 WO2017066077A1 (en) 2015-10-16 2016-10-06 Method and apparatus for forming advanced polishing pads using an additive manufacturing process

Related Child Applications (5)

Application Number Title Priority Date Filing Date
CN202010962949.5A Division CN112045556B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961583.XA Division CN112059937B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963900.1A Division CN112025544B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963904.XA Division CN112045557B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961929.6A Division CN112045555B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备

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CN108136568A CN108136568A (zh) 2018-06-08
CN108136568B true CN108136568B (zh) 2020-10-09

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CN202010962949.5A Active CN112045556B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN201680060117.6A Active CN108136568B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961929.6A Active CN112045555B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963904.XA Active CN112045557B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961583.XA Active CN112059937B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963900.1A Active CN112025544B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备

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CN202010961929.6A Active CN112045555B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963904.XA Active CN112045557B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010961583.XA Active CN112059937B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备
CN202010963900.1A Active CN112025544B (zh) 2015-10-16 2016-10-06 使用增材制造工艺形成先进抛光垫的方法和设备

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Country Link
EP (1) EP3362224B1 (enExample)
JP (3) JP6685392B2 (enExample)
KR (2) KR20230145211A (enExample)
CN (6) CN112045556B (enExample)
SG (1) SG10202106436WA (enExample)
TW (4) TWI695752B (enExample)
WO (1) WO2017066077A1 (enExample)

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