CN107847928A - 用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 - Google Patents

用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 Download PDF

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Publication number
CN107847928A
CN107847928A CN201480083656.2A CN201480083656A CN107847928A CN 107847928 A CN107847928 A CN 107847928A CN 201480083656 A CN201480083656 A CN 201480083656A CN 107847928 A CN107847928 A CN 107847928A
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China
Prior art keywords
substrate
flow cell
adhesive tape
tape layer
layer
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CN201480083656.2A
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English (en)
Chinese (zh)
Inventor
R·M·卡兰
G·卢索斯
A·T·科伯特
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Corning Inc
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Corning Inc
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    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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    • CCHEMISTRY; METALLURGY
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laser Beam Processing (AREA)
CN201480083656.2A 2014-09-26 2014-12-06 用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 Pending CN107847928A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/498,003 US9795963B2 (en) 2014-09-26 2014-09-26 Method and apparatus for taped interlayer flow cell with masking and conductive traces
US14/498,003 2014-09-26
PCT/US2014/068964 WO2016048398A1 (en) 2014-09-26 2014-12-06 Method and apparatus for taped interlayer flow cell with masking and conductive traces

Publications (1)

Publication Number Publication Date
CN107847928A true CN107847928A (zh) 2018-03-27

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Application Number Title Priority Date Filing Date
CN201480083656.2A Pending CN107847928A (zh) 2014-09-26 2014-12-06 用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备

Country Status (5)

Country Link
US (2) US9795963B2 (enExample)
EP (1) EP3197601B1 (enExample)
JP (1) JP6552611B2 (enExample)
CN (1) CN107847928A (enExample)
WO (1) WO2016048398A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113457758A (zh) * 2021-07-14 2021-10-01 浙江理工大学 一种导纳式测量出汗率的微流控通道

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10285640B2 (en) * 2015-10-21 2019-05-14 Simon Fraser University Process and method for fabricating wearable and flexible microfluidic devices and systems
US10955332B2 (en) * 2016-12-22 2021-03-23 Illumina, Inc. Flow cell package and method for making the same
CN107715932B (zh) * 2017-11-23 2023-06-16 昌微系统科技(上海)有限公司 一种微流体器件
KR102122415B1 (ko) * 2018-08-13 2020-06-12 한국과학기술원 유전자 포집용 미세유체 장치 및 이를 이용한 유전자 포집방법
EP4549371A1 (en) * 2022-06-30 2025-05-07 NOK Corporation Microfluidic device
TWI864743B (zh) * 2023-05-09 2024-12-01 友達光電股份有限公司 液體監測觀察容器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6672502B1 (en) * 2000-11-28 2004-01-06 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method for making devices having intermetallic structures and intermetallic devices made thereby
US20090114293A1 (en) * 2005-10-25 2009-05-07 Masaki Kanai Flow cell and process for producing the same
US20110207328A1 (en) * 2006-10-20 2011-08-25 Stuart Philip Speakman Methods and apparatus for the manufacture of microstructures
EP2368637A1 (de) * 2010-03-16 2011-09-28 SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH Mikrofluidische Mehrfach-Messkammeranordnung
CN103703545A (zh) * 2011-06-15 2014-04-02 应用材料公司 使用基板载具的混合激光与等离子体蚀刻晶圆切割

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074932A (enExample) 1973-11-02 1975-06-19
JPS5852846A (ja) * 1981-09-25 1983-03-29 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPH0574932A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd 半導体ウエハのダイシング方法
US6425972B1 (en) * 1997-06-18 2002-07-30 Calipher Technologies Corp. Methods of manufacturing microfabricated substrates
US6830934B1 (en) * 1999-06-15 2004-12-14 Lifescan, Inc. Microdroplet dispensing for a medical diagnostic device
AU7854700A (en) * 1999-10-04 2001-05-10 Nanostream, Inc. Modular microfluidic devices comprising sandwiched stencils
WO2003065355A2 (en) * 2002-01-31 2003-08-07 Burstein Technologies, Inc. Bio-safety features for optical analysis disc and disc system including same
DE10234819A1 (de) * 2002-07-31 2004-02-19 Roche Diagnostics Gmbh Testvorrichtung zur Untersuchung einer biologischen Probenflüssigkeit
US20050003521A1 (en) * 2003-03-11 2005-01-06 O'connor David Addressable microarray device, methods of making, and uses thereof
JP2006030160A (ja) * 2004-04-14 2006-02-02 Hitachi Maxell Ltd 反応容器
US20050272142A1 (en) * 2004-04-14 2005-12-08 Hitachi Maxwell, Ltd. Fluid vessel
US20090074615A1 (en) * 2007-09-17 2009-03-19 Ysi Incorporated Microfluidic module including an adhesiveless self-bonding rebondable polyimide
EP2226622B1 (en) * 2008-02-01 2013-01-23 Nippon Telegraph and Telephone Corporation Flow cell
US8173080B2 (en) * 2008-02-14 2012-05-08 Illumina, Inc. Flow cells and manifolds having an electroosmotic pump
US20120052250A1 (en) * 2010-08-27 2012-03-01 Derosa Michael Edward Flexible Microfluidic Device with Interconnected Porous Network
CN103282121B (zh) * 2010-11-30 2015-11-25 康特姆斯集团有限公司 用于核酸提取和分级分离的微流体装置
US8975193B2 (en) * 2011-08-02 2015-03-10 Teledyne Dalsa Semiconductor, Inc. Method of making a microfluidic device
US9492990B2 (en) * 2011-11-08 2016-11-15 Picosys Incorporated Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding
US10537889B2 (en) 2013-12-31 2020-01-21 Illumina, Inc. Addressable flow cell using patterned electrodes
WO2015191684A1 (en) * 2014-06-12 2015-12-17 Wafergen, Inc. Single cell capture with polymer capture films

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6672502B1 (en) * 2000-11-28 2004-01-06 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method for making devices having intermetallic structures and intermetallic devices made thereby
US20090114293A1 (en) * 2005-10-25 2009-05-07 Masaki Kanai Flow cell and process for producing the same
US20110207328A1 (en) * 2006-10-20 2011-08-25 Stuart Philip Speakman Methods and apparatus for the manufacture of microstructures
EP2368637A1 (de) * 2010-03-16 2011-09-28 SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH Mikrofluidische Mehrfach-Messkammeranordnung
CN103703545A (zh) * 2011-06-15 2014-04-02 应用材料公司 使用基板载具的混合激光与等离子体蚀刻晶圆切割

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113457758A (zh) * 2021-07-14 2021-10-01 浙江理工大学 一种导纳式测量出汗率的微流控通道

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US20160089671A1 (en) 2016-03-31
JP2017537797A (ja) 2017-12-21
US20170361320A1 (en) 2017-12-21
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US9795963B2 (en) 2017-10-24

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