CN107847928A - 用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 - Google Patents
用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 Download PDFInfo
- Publication number
- CN107847928A CN107847928A CN201480083656.2A CN201480083656A CN107847928A CN 107847928 A CN107847928 A CN 107847928A CN 201480083656 A CN201480083656 A CN 201480083656A CN 107847928 A CN107847928 A CN 107847928A
- Authority
- CN
- China
- Prior art keywords
- substrate
- flow cell
- adhesive tape
- tape layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/18—Layered products comprising a layer of metal comprising iron or steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/285—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyethers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/40—Layered products comprising a layer of synthetic resin comprising polyurethanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
- B32B3/04—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by at least one layer folded at the edge, e.g. over another layer ; characterised by at least one layer enveloping or enclosing a material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/263—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer having non-uniform thickness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/266—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/041—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
- B32B2255/205—Metallic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/546—Flexural strength; Flexion stiffness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/58—Cuttability
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/748—Releasability
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Clinical Laboratory Science (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Analytical Chemistry (AREA)
- Dispersion Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/498,003 US9795963B2 (en) | 2014-09-26 | 2014-09-26 | Method and apparatus for taped interlayer flow cell with masking and conductive traces |
| US14/498,003 | 2014-09-26 | ||
| PCT/US2014/068964 WO2016048398A1 (en) | 2014-09-26 | 2014-12-06 | Method and apparatus for taped interlayer flow cell with masking and conductive traces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107847928A true CN107847928A (zh) | 2018-03-27 |
Family
ID=55581707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480083656.2A Pending CN107847928A (zh) | 2014-09-26 | 2014-12-06 | 用于具有遮蔽件和导电迹线的胶带夹层式流动池的方法和设备 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9795963B2 (enExample) |
| EP (1) | EP3197601B1 (enExample) |
| JP (1) | JP6552611B2 (enExample) |
| CN (1) | CN107847928A (enExample) |
| WO (1) | WO2016048398A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113457758A (zh) * | 2021-07-14 | 2021-10-01 | 浙江理工大学 | 一种导纳式测量出汗率的微流控通道 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10285640B2 (en) * | 2015-10-21 | 2019-05-14 | Simon Fraser University | Process and method for fabricating wearable and flexible microfluidic devices and systems |
| US10955332B2 (en) * | 2016-12-22 | 2021-03-23 | Illumina, Inc. | Flow cell package and method for making the same |
| CN107715932B (zh) * | 2017-11-23 | 2023-06-16 | 昌微系统科技(上海)有限公司 | 一种微流体器件 |
| KR102122415B1 (ko) * | 2018-08-13 | 2020-06-12 | 한국과학기술원 | 유전자 포집용 미세유체 장치 및 이를 이용한 유전자 포집방법 |
| EP4549371A1 (en) * | 2022-06-30 | 2025-05-07 | NOK Corporation | Microfluidic device |
| TWI864743B (zh) * | 2023-05-09 | 2024-12-01 | 友達光電股份有限公司 | 液體監測觀察容器 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6672502B1 (en) * | 2000-11-28 | 2004-01-06 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Method for making devices having intermetallic structures and intermetallic devices made thereby |
| US20090114293A1 (en) * | 2005-10-25 | 2009-05-07 | Masaki Kanai | Flow cell and process for producing the same |
| US20110207328A1 (en) * | 2006-10-20 | 2011-08-25 | Stuart Philip Speakman | Methods and apparatus for the manufacture of microstructures |
| EP2368637A1 (de) * | 2010-03-16 | 2011-09-28 | SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH | Mikrofluidische Mehrfach-Messkammeranordnung |
| CN103703545A (zh) * | 2011-06-15 | 2014-04-02 | 应用材料公司 | 使用基板载具的混合激光与等离子体蚀刻晶圆切割 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5074932A (enExample) | 1973-11-02 | 1975-06-19 | ||
| JPS5852846A (ja) * | 1981-09-25 | 1983-03-29 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
| JPH0574932A (ja) * | 1991-09-17 | 1993-03-26 | Fujitsu Ltd | 半導体ウエハのダイシング方法 |
| US6425972B1 (en) * | 1997-06-18 | 2002-07-30 | Calipher Technologies Corp. | Methods of manufacturing microfabricated substrates |
| US6830934B1 (en) * | 1999-06-15 | 2004-12-14 | Lifescan, Inc. | Microdroplet dispensing for a medical diagnostic device |
| AU7854700A (en) * | 1999-10-04 | 2001-05-10 | Nanostream, Inc. | Modular microfluidic devices comprising sandwiched stencils |
| WO2003065355A2 (en) * | 2002-01-31 | 2003-08-07 | Burstein Technologies, Inc. | Bio-safety features for optical analysis disc and disc system including same |
| DE10234819A1 (de) * | 2002-07-31 | 2004-02-19 | Roche Diagnostics Gmbh | Testvorrichtung zur Untersuchung einer biologischen Probenflüssigkeit |
| US20050003521A1 (en) * | 2003-03-11 | 2005-01-06 | O'connor David | Addressable microarray device, methods of making, and uses thereof |
| JP2006030160A (ja) * | 2004-04-14 | 2006-02-02 | Hitachi Maxell Ltd | 反応容器 |
| US20050272142A1 (en) * | 2004-04-14 | 2005-12-08 | Hitachi Maxwell, Ltd. | Fluid vessel |
| US20090074615A1 (en) * | 2007-09-17 | 2009-03-19 | Ysi Incorporated | Microfluidic module including an adhesiveless self-bonding rebondable polyimide |
| EP2226622B1 (en) * | 2008-02-01 | 2013-01-23 | Nippon Telegraph and Telephone Corporation | Flow cell |
| US8173080B2 (en) * | 2008-02-14 | 2012-05-08 | Illumina, Inc. | Flow cells and manifolds having an electroosmotic pump |
| US20120052250A1 (en) * | 2010-08-27 | 2012-03-01 | Derosa Michael Edward | Flexible Microfluidic Device with Interconnected Porous Network |
| CN103282121B (zh) * | 2010-11-30 | 2015-11-25 | 康特姆斯集团有限公司 | 用于核酸提取和分级分离的微流体装置 |
| US8975193B2 (en) * | 2011-08-02 | 2015-03-10 | Teledyne Dalsa Semiconductor, Inc. | Method of making a microfluidic device |
| US9492990B2 (en) * | 2011-11-08 | 2016-11-15 | Picosys Incorporated | Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding |
| US10537889B2 (en) | 2013-12-31 | 2020-01-21 | Illumina, Inc. | Addressable flow cell using patterned electrodes |
| WO2015191684A1 (en) * | 2014-06-12 | 2015-12-17 | Wafergen, Inc. | Single cell capture with polymer capture films |
-
2014
- 2014-09-26 US US14/498,003 patent/US9795963B2/en not_active Expired - Fee Related
- 2014-12-06 JP JP2017516938A patent/JP6552611B2/ja not_active Expired - Fee Related
- 2014-12-06 WO PCT/US2014/068964 patent/WO2016048398A1/en not_active Ceased
- 2014-12-06 CN CN201480083656.2A patent/CN107847928A/zh active Pending
- 2014-12-06 EP EP14902533.0A patent/EP3197601B1/en active Active
-
2017
- 2017-09-07 US US15/697,771 patent/US10512909B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6672502B1 (en) * | 2000-11-28 | 2004-01-06 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Method for making devices having intermetallic structures and intermetallic devices made thereby |
| US20090114293A1 (en) * | 2005-10-25 | 2009-05-07 | Masaki Kanai | Flow cell and process for producing the same |
| US20110207328A1 (en) * | 2006-10-20 | 2011-08-25 | Stuart Philip Speakman | Methods and apparatus for the manufacture of microstructures |
| EP2368637A1 (de) * | 2010-03-16 | 2011-09-28 | SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH | Mikrofluidische Mehrfach-Messkammeranordnung |
| CN103703545A (zh) * | 2011-06-15 | 2014-04-02 | 应用材料公司 | 使用基板载具的混合激光与等离子体蚀刻晶圆切割 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113457758A (zh) * | 2021-07-14 | 2021-10-01 | 浙江理工大学 | 一种导纳式测量出汗率的微流控通道 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6552611B2 (ja) | 2019-07-31 |
| US10512909B2 (en) | 2019-12-24 |
| WO2016048398A1 (en) | 2016-03-31 |
| EP3197601A1 (en) | 2017-08-02 |
| US20160089671A1 (en) | 2016-03-31 |
| JP2017537797A (ja) | 2017-12-21 |
| US20170361320A1 (en) | 2017-12-21 |
| EP3197601B1 (en) | 2020-08-26 |
| EP3197601A4 (en) | 2018-07-25 |
| US9795963B2 (en) | 2017-10-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10512909B2 (en) | Method and apparatus for taped interlayer flow cell with masking | |
| US11198119B2 (en) | Fabrication of a microfluidic chip package or assembly with separable chips | |
| TWI797492B (zh) | 用於接合晶片之方法及裝置 | |
| US8900529B2 (en) | Microfluidic chamber device and fabrication | |
| CN104023897B (zh) | 室温下的玻璃到玻璃、玻璃到塑料以及玻璃到陶瓷/半导体的结合 | |
| US6777311B2 (en) | Thick wafer processing and resultant products | |
| EP1950569A1 (en) | Flow cell and process for producing the same | |
| US20140268321A1 (en) | Device for imaging electron microscope environmental sample supports in a microfluidic or electrochemical chamber with an optical microscope | |
| CN105895574A (zh) | 加工装置的卡盘台 | |
| CN105789127A (zh) | 脆化装置,拾取系统和拾取芯片的方法 | |
| US20190184480A1 (en) | Precise Alignment and Decal Bonding of a Pattern of Solder Preforms to a Surface | |
| US7256106B2 (en) | Method of dividing a substrate into a plurality of individual chip parts | |
| EP4579216A1 (en) | Biosensor comprising a sensor wafer with backside etched recesses complementary to the front side etched recesses of a microfluidic wafer | |
| JP5822768B2 (ja) | 半導体ウェーハ用治具の剥離装置及び半導体ウェーハ用治具の剥離方法 | |
| CN114302949B (zh) | 微芯片 | |
| JP2006329723A (ja) | 電子顕微鏡観察用試料の作製方法 | |
| JP2020188211A (ja) | 半導体装置の製造方法 | |
| JP4663450B2 (ja) | 光電集積回路装置の製造方法 | |
| Inac et al. | BiCMOS Embedded Microfluidic Technology Based on Wafer Bonding Techniques for Biosensor Applications | |
| JP2006114672A (ja) | 薄板同士の接着方法、icチップおよび非接触icカードの製造方法、ならびに接着装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180327 |