CN1078314C - 具有低润滑敏感度的旋转式压缩机 - Google Patents

具有低润滑敏感度的旋转式压缩机 Download PDF

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CN1078314C
CN1078314C CN96191699A CN96191699A CN1078314C CN 1078314 C CN1078314 C CN 1078314C CN 96191699 A CN96191699 A CN 96191699A CN 96191699 A CN96191699 A CN 96191699A CN 1078314 C CN1078314 C CN 1078314C
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compressor
piston
cylinder apparatus
blade
coating
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CN1172521A (zh
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克拉克·V·科珀
帕尔·J·布什内尔
马丁·M·梅特尔
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/356—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member
    • F04C18/3562—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member the inner and outer member being in contact along one line or continuous surfaces substantially parallel to the axis of rotation
    • F04C18/3564—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member the inner and outer member being in contact along one line or continuous surfaces substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the working space, being surfaces of revolution
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F01C21/0809—Construction of vanes or vane holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/356—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/26—Refrigerants with particular properties, e.g. HFC-134a
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/08—Ceramics; Oxides
    • F05C2203/0804—Non-oxide ceramics
    • F05C2203/0808—Carbon, e.g. graphite
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/08—Ceramics; Oxides
    • F05C2203/0804—Non-oxide ceramics
    • F05C2203/0813—Carbides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/08—Crystalline
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12625—Free carbon containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
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  • Applications Or Details Of Rotary Compressors (AREA)
  • Lubricants (AREA)
  • Rotary Pumps (AREA)

Abstract

一种具有低润滑敏感度的旋转式压缩机，致冷压缩机中与使用合成润滑油、如多元醇酯(POE)油有关的润滑失效可通过在由于润滑失效受到磨损的零件上施加金刚石式碳涂层而缓解。具体地说，在旋转压缩机的叶片末端涂覆由碳化钨层和0.5至5.0微米厚度的光滑材料层所交替构成的金刚石式碳涂层。

Description

具有低润滑敏感度的旋转式压缩机
本发明涉及一种旋转式压缩机。
在固定叶片式或旋转柱塞式压缩机中，对叶片加偏压以与滚柱或活塞接触。滚柱或活塞由曲轴上的偏心装置所携带，并且沿着缸体以线接触的方式运动，这样活塞和缸体共同作用形成月牙形空间。该空间绕曲轴的轴线转动、并且由于叶片与活塞的共同作用被分隔成吸气腔和压缩腔。在立式高压压缩机中，吸油管伸入油槽中并且与曲轴一起转动，从而使待分配的油到达所需润滑的部位。在非氯氟碳化合物(CFC)或非氢氯氟碳化合物(HCFC)操作情况下，例如氢氟碳化合物(HFC)情况下，就可能润滑不充分。不充分润滑的敏感区是叶片和活塞之间的线接触部分，这可引起过度磨损。
与新致冷剂一起使用的合成润滑油，如由一种或多种象多元醇酯(POE)油的一元羧酸合成的多元酯油可比矿物油更快地释放出溶解致冷剂，因此在过渡工况下要维持足够的润滑油压力是较困难。多元醇酯(POE)润滑油的一个特点是由于它们是较极性的，所以它们不会“弄湿”较极性金属的表面，如铝或锡，就象矿物油一样。因此，较极性的金属必须以来自油泵的油流连续供应、也就是说泵必须用多元醇酯(POE)润滑油以很短的间隔再补充油膜。
因此，非常需要一种氢氟碳化合物(HFC)情况下适用的润滑油。对应于润滑油的流变作用，较低的孔隙度(PV)指数被认为是引起多元醇酯(POE)润滑油无效的主要原因。因此，当油膜破裂时，发生润滑能力的突然下降，并且产生目前的多元醇酯(POE)润滑油用在致冷压缩情况下时必然存在的问题。特别地，与采用传统润滑剂的装置相比，合成润滑油、如多元醇酯(POE)润滑油经常会缩短使用寿命并且加快磨损速度。
本发明的一个目的在于在边界润滑或其破裂的情况下使局部磨损最小或避免其磨损。
本发明的另一个目的在于通过使运动零件之间的摩擦系数减小而降低噪音和提高性能。这些目的以及其它目的在以下将变得很明显，可由本发明实现。大体上说，受到局部磨损、并且一般由诸如多元醇酯(POE)润滑油的合成润滑油润滑的一种氢氟碳化合物(HFC)致冷压缩机的一部分涂覆有DLC涂层，这样可减小由于润滑无效而引起的磨损和敏感度。
为实现上述目的，本发明提供了一种高压旋转式压缩机，它包括；具有第一端和第二端的罩壳装置；包含泵装置的缸体装置，所述泵装置包括与所述缸体装置共同作用的一叶片和一活塞，以形成吸入腔和压缩腔；所述缸体装置是固定地位于靠近所述第一端的所述罩壳装置内，并且与所述第一端形成具有油槽的第一腔；固定到所述缸体装置上的第一轴承，并且伸向所述油槽；固定到所述缸体装置上的第二轴承，并且伸向所述第二端；包括转子装置和定子装置的电动机装置；所述定子装置固定位于所述缸体装置和所述第二端之间的所述罩壳装置内并且与所述缸体装置和所述第二轴承装置轴向隔开；由所述第一和第二轴承装置支撑的偏心轴装置，并且包括可操作地连接到所述活塞上的偏心装置；所述转子装置固定到所述轴装置上，并形成一体，且位于所述定子中、与其形成环状间隙；用来将气体输到所述泵装置的吸入装置；与所述罩壳装置流体连通的排出装置；所述叶片具有与所述活塞共同作用的末端；其特征在于，所述末端上具有金刚石式碳涂层，从而减小所述末端和活塞之间的摩擦系数，并且减小所述末端的磨损。
润滑剂无效或失效的一个特征就是接触零件之间的磨损。本发明使不充分润滑或润滑失效所造成的后果降至最小程度。这可通过减少相关零件之间的摩擦系数以及通过增加一个或多个零件的磨损阻力而实现。在固定叶片或旋转柱塞式压缩机中，已经发现采用金刚石类碳(DLC)涂层可减少叶片和转子之间的摩擦系数，而显著地降低局部温度，从而提供趋向于兼顾磨损特性的较好状态。虽然本发明可以延迟危害润滑的灾难性影响，但磨损和失效仍可能发生，就象采用传统润滑剂的传统装置那样。根本上而言，本发明可具有与使用传统润滑剂相应的使用寿命，而不是与合成润滑剂有关的较短的寿命。特别地，低孔隙度(PV)指数仍允许适度的不平滑接触，因此磨损仍将发生，只是其速度非常缓慢。
虽然DLC涂层可减小有害润滑条件的磨损情况，但它的存在可在加工误差范围中改变高精度加工零件的尺寸。例如，旋转柱塞式压缩机的叶片位于吸入腔和压缩腔之间的槽中，从而产生了潜在的泄漏通道。当叶片处于密封状态下时，它与单个缸体装置中的电动机端部轴承和泵端轴承移动接触，与两个缸体装置中的轴承和分隔板移动接触。叶片末端与移动活塞密封接触。
附图的简述
为了充分地理解本发明，现结合附图对本发明作详细的描述，其中：
图1是本发明的压缩机的局部剖视图；
图2是沿图1中线2-2的剖视图；
图3是图1中叶片的放大水平剖视图；以及
图4是图1中叶片的放大垂直剖视图。
较佳实施例的描述
图1和2中，标号10总的表示一种立式的高压旋转柱塞式压缩机。标号12总的表示罩子或壳体。吸入管16密封到罩壳12上，并且使致冷系统中的吸入贮料器(未示)与吸入腔S流体连通。吸入腔S是由缸体20中的孔20-1、活塞22、泵端部轴承24、电动机端部轴承28以及叶片30构成的。
偏心轴40包括支撑地容纳在泵端部轴承24的孔24-1中的部分40-1、容纳在活塞22的孔22-1中的偏心装置40-2以及支撑地容纳在电动机端部轴承28的孔28-1中的部分40-3。吸油管34从部分40-1的孔伸入油槽36。定子42通过热压配合、焊接或其它任何适当的方式固定到罩壳12上。转子44为通过热压配合适当固定到轴40上，并且位于定子42的孔42-1中，并且与其共同作用以形成电动机。叶片30位于叶片槽20-2中，并且由弹簧31偏压与活塞22接触。如上所述的，压缩机10大致上是传统形式的。
本发明在在叶片30上加了DLC涂层，特别是在接触活塞22的叶片30的末端或鼻部。DLC涂层是通过称为DC磁控管溅射技术的物理蒸镀方法形成的，其中例如乙炔的含碳气体以辉光放电形式电离。该方法形成一系列碳和碳化钨(硬质合金)的毫微层，一系列交替的硬质层和润滑层，并且总的毫微薄涂层厚度在0.5至5.0微米范围中，标称厚度为2.0微米是较佳的。这一涂层虽然非常硬，但具有润滑性能，并且当施加到诸如叶片末端或鼻部的摩擦表面时，可使配合零件的磨损特征改进。DLC涂层的较佳实施例是其显微结构含有光滑相和硬质耐磨相的多重双层，光滑相的主要成份为非结晶碳，硬质耐磨相是碳与过渡金属的非结晶组合。可以使用多种过渡金属，包括钨(W)、钒(V)、锆(Zr)、铌(Nb)以及钼(Mo)，较佳实施例有钨(W)的成分。为了减少涂层中的固有或增加的应力值，合成调制的双层中的元素的厚度是重要的，可减少涂层系统的破裂倾向。双层厚度范围是1至20毫微米(nm)，且较佳地是5至10毫微米(nm)之间。图3和4是叶片30的剖视图，示出了叶片30末端的放大很多的DLC涂层100。将可注意到，涂层100有一重叠部分100-1在与末端相邻的叶片侧部上延伸一小段距离。当叶片30冲程部分完全缩入叶片槽20-2时，重叠部分100-1仅在此时将与叶片槽20-2发生作用。由于压缩腔C中的流体压力将叶片30向吸入腔S偏置，所以这种有限的潜在干扰可通过增加叶片槽20-2吸入侧上的倒角来处理。分别与电动机端部轴承28和泵端部轴承24接触的叶片30顶部和底部的重叠部分100-2都是最成问题的，但都可以使这些区域上的重叠部分最小而解决。另外，整体叶片30可以都被涂覆，但这存在两个问题，即它可改变高精度加工的零件尺寸以及成本显著增加。
在运作过程中，转子44和偏心轴40作为一个组件转动，偏心装置40-2使活塞22运动。来自油槽36的油经过吸油管34被吸入孔40-4，该孔可相对轴40的转动轴线歪斜，并且起到离心泵的作用。泵油作用取决于轴40的转动速度。最好如图2所示，送入孔40-4中的油能够流入部分40-1、偏心装置40-2和部分40-3中的一系列径向延伸通道，举例说明如偏心装置40-2中孔40-5，并且分别到达润滑轴承24、活塞22和轴承28。其它的油从孔40-4流出，并且向下流过转子44和定子42到达油槽36，在流到油槽36之前由转子44和定子42之间的环状间隙流出的气体携带、冲击和集聚在盖12-1的内侧。活塞22与叶片30以传统方式共同作用，这样经吸入管16吸入的气体到达吸入腔S。在吸入腔S中的气体被压缩，并且经过排出阀(未示)排入消音器32内部。压缩的气体穿过消音器32进入罩壳12的内部，并且经过转动的转子44和定子42之间的环状间隙以及经过排出管路60到达致冷系统(未示)。
前述的运行过程将仅通过致冷剂中所含的润滑剂润滑叶片30，即通过输送到偏心装置40-2等的润滑剂到达其返回通道中的孔20-1，并通过叶片30和叶片槽20-2之间的泄漏而实现润滑。这种缺陷通常是用已转让的美国专利申请No.498,339、申请日为1995年7月5日(它是现已放弃的美国专利申请No.052,971、申请日为1993年4月27日的继续申请)来解决，由于高压作用在油槽36上，在未被活塞22所覆盖时，可将油经过管路50注入压缩腔C中。这解决了需要多元醇酯(POE)油情况下的输送多元醇酯(POE)油的问题，但并没有解决当合成润滑如多元醇酯(POE)油在致冷压缩机中使用时所固有的失效问题，这些都由本发明解决了。
虽然已以一立式旋转柱塞式压缩机对本发明作了图示和说明，但对于本技术领域中的普通技术人员而言，还可有其它变化。例如，本发明可应用到卧式压缩机上以及其它由于润滑失效而发生局部磨损的压缩机中。同样地，电动机可以是一种变速电动机。因此，本发明的范围仅由所附权利要求书来确定。

Claims (9)

1.一种高压旋转式压缩机，它包括；
具有第一端和第二端的罩壳装置；
包含泵装置的缸体装置，所述泵装置包括与所述缸体装置共同作用的一叶片和一活塞，以形成吸入腔和压缩腔；
所述缸体装置是固定地位于靠近所述第一端的所述罩壳装置内，并且与所述第一端形成具有油槽的第一腔；
固定到所述缸体装置上的第一轴承，并且伸向所述油槽；
固定到所述缸体装置上的第二轴承，并且伸向所述第二端；
包括转子装置和定子装置的电动机装置；
所述定子装置固定位于所述缸体装置和所述第二端之间的所述罩壳装置内并且与所述缸体装置和所述第二轴承装置轴向隔开；
由所述第一和第二轴承装置支撑的偏心轴装置，并且包括可操作地连接到所述活塞上的偏心装置；
所述转子装置固定到所述轴装置上，并形成一体，且位于所述定子中、与其形成环状间隙；
用来将气体输到所述泵装置的吸入装置；
与所述罩壳装置流体连通的排出装置；
所述叶片具有与所述活塞共同作用的末端；其特征在于，
所述末端上具有金刚石式碳涂层，从而减小所述末端和活塞之间的摩擦系数，并且减小所述末端的磨损。
2.如权利要求1所述的压缩机，其特征在于，所述油槽装有合成润滑油。
3.如权利要求1所述的压缩机，其特征在于，所述涂层厚度为0.5至5.0微米。
4.如权利要求3所述的压缩机，其特征在于，所述涂层是由多重厚度为1至20毫微米(nm)的双层构成的。
5.如权利要求1所述的压缩机，其特征在于，所述涂层是由多重厚度为1至20毫微米(nm)的双层构成的。
6.如权利要求1所述的压缩机，其特征在于，所述金刚石形碳涂层是由硬质材料层和光滑材料层交替构成的。
7.如权利要求6所述的压缩机，其特征在于，所述光滑材料为非结晶碳。
8.如权利要求7所述的压缩机，其特征在于，所述硬质材料是碳和过渡金属的非结晶结合。
9.如权利要求6所述的压缩机，其特征在于，所述硬质材料是碳和过渡金属的非结晶结合。
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CN1172521A (zh) 1998-02-04
JPH10505650A (ja) 1998-06-02
US5947710A (en) 1999-09-07
DE69619503D1 (de) 2002-04-04
JP2904589B2 (ja) 1999-06-14
BR9607029A (pt) 1997-11-04
ES2171733T3 (es) 2002-09-16
TW384359B (en) 2000-03-11
WO1997021033A1 (en) 1997-06-12
MY112067A (en) 2001-03-31
EG21022A (en) 2000-09-30
DE69619503T2 (de) 2002-07-04
EP0808423B1 (en) 2002-02-27
KR19980702002A (ko) 1998-06-25

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