CN107675214A - A kind of method that new electromolding alloy technique makes OLED evaporation covers FMM - Google Patents
A kind of method that new electromolding alloy technique makes OLED evaporation covers FMM Download PDFInfo
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- CN107675214A CN107675214A CN201710825270.XA CN201710825270A CN107675214A CN 107675214 A CN107675214 A CN 107675214A CN 201710825270 A CN201710825270 A CN 201710825270A CN 107675214 A CN107675214 A CN 107675214A
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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Abstract
The invention discloses a kind of method that new electromolding alloy technique makes OLED evaporation covers FMM, the nanometer nickel-cobalt alloying metal thin slice with OLED figure perforates is made with reference to dry film wet process and nickel cobalt (alloy) electroforming process, its feature is that this method mainly includes the following steps that：Substrate is ground, pad pasting, exposure, development, micro- electroforming, the demoulding, ultrasonic wave cleans, laser welding, laser cutting, nano vacuum evaporation, detection assembling, the OLED electroforming nickel cobalt Nanoalloy half tones made by the method have excellent smooth perforate, when oled panel is deposited in evaporator, can ensure precisely to align.
Description
Technical field
The present invention relates to a kind of new electromolding alloy technique to make OLED evaporation covers FMM（High-precision metal mask plate）Side
Method, belong to OLED manufacturing process technology fields.
Background technology
At present, as the fast development trend of oled panel demand, oled panel surface evaporation pigment propose more to FMM
High technical requirements.Even if traditional OLED etchings invar alloy, OLED laser cut metal pieces constantly improve manufacturing process, still
The accurate evaporation for the various close pitch electronic elements that can not so meet largely to occur in OLED evaporation process requires.
Industry needs the defects of one kind can overcome current both sheet metals evaporation intrinsic badly, realizes that all kinds of precision elements are accurate
Evaporation, the integral product acceptance rate of OLED precision manufactureings is lifted, solve the fine evaporation process problem in OLED manufactures.
The content of the invention
Purpose：In order to overcome the deficiencies in the prior art, the present invention provides a kind of new electromolding alloy technique and made
OLED evaporation covers FMM method.
Technical scheme：In order to solve the above technical problems, the technical solution adopted by the present invention is：
A kind of method that new electromolding alloy technique makes OLED evaporation covers FMM, comprises the following steps:
Step 1: substrate is ground：
Planar metal base plate is chosen, substrate surface is cleaned and ground, surface impurity, cut and sags and crests are removed, after cleaning grinding
Place and toasted in baking oven, baking temperature is 40-100 DEG C；
Step 2: pad pasting：
Using full-automatic or Semi-automatic film sticking machine, by the photosensitive dry film material with uv photocuring reactions, successively hot pressing upper substrate,
The smooth no wrinkle of attachment film surface and bubble；
Step 3: exposure：
By the negative film film or light shield with OLED figures, dry film surface is close in the form of vacuumizing, then using half directional light,
Directional light or spot light exposure machine, fluorescent tube are exposed using uv fluorescent tubes, and uv light is irradiated on dry film from the clear area at figure, accordingly
Photocuring reaction occurs for the dry film of position, makes to show the corresponding figure on the film or light shield on photosensitive material, completes exposure operation；
Step 4: development：
Using developing machine, development operation is carried out to the substrate exposed, regulation photographic parameter is during development：
O.3-3.0% sodium carbonate percentage by weight is；Speed is 22.Omm/s；Pressure is 22.Okg/cm2；The pH value of weak caustic solution
For 7.5-14.0；Temperature is 22.0-40.0 DEG C；
After development, it is not rinsed on substrate by the photosensitive material dissolution of photocuring after weak caustic solution, photocuring is anti-
The dry film material answered is rested on substrate, and the figure of formation and the OLED figures on the film or light shield are completely the same, dry film figure
Block thickness is O.05-O.2mm, the substrate after development will stagnate more than 10 minutes or be toasted 10 minutes in 30-50 DEG C of baking oven
More than；
Step 5: micro- electroforming：
Micro- electroforming apparatus is set by electrotyping bath, anode and cathode, high-frequency direct-current or the pulse power, electroforming solution, temperature control instrument, circulating filtration
Standby and rocking equipment composition, the electroforming solution are the nickel sulfamic acid solution mixed solution of addition sodium hypophosphite, operate step
Suddenly it is that the substrate to have developed is fixed on tough cathode fixture, is put into electrotyping bath, ensures that it is high to exceed substrate for solution height in groove
Degree, power line is connected, start rocking equipment or so or teeter, according to the thickness for the OLED nickel cobalt (alloy) thin slices to be made
Come size of current corresponding to setting and electroforming time, after electroforming thickness range to be achieved, that is, electroforming operation is automatically stopped, completes electricity
Casting；
Step 6: the demoulding, ultrasonic wave cleaning：
Substrate after completion electroforming is put into stripping chute, taken out substrate after the completion of the demoulding, the nanometer nickel-cobalt taken the photograph on substrate
Alloy sheet, be put into ultrasonic bath and clean, by the eliminating impurities on nanometer nickel-cobalt alloy sheet in perforate it is clean after, by nanometer
Nickel cobalt (alloy) thin slice is placed on supporting plate, after washing is dried, that is, completes to make OLED nickel cobalt (alloy) electroforming metal piece processes；
Step 7: detection assembling：
Nanometer nickel-cobalt alloying metal thin slice after cleaning, drying is examined in, checks relative dimensions precision, the figure of OLED figures
The shape degree of accuracy, perforate side wall smoothness, sheet metal thickness, detection meets after requiring, sheet metal is fixed into aluminium frame or casting
On chase, cast aluminium frame, with nylon yarn or stainless steel cloth connection frame and sheet metal on frame, sheet metal is set to keep smooth, band
The half tone for having OLED figure nickel cobalt (alloy) sheet metals completes.
Preferably：The step 1 midplane metal substrate uses the stainless steel substrate of 304 plates or 202 plates or covered
Sheet metal, thickness is between O.3-2.Omm, and surface roughness is from 2B to BA or between 16K.
Preferably：The step 2 pad pasting is in 100 ± 10 DEG C of temperature, speed 1.0-1.2m/min, pressure 4-
Carried out under conditions of 6kg/cm2；Individual layer thickness of dry film is 10 μm -100 μm, and the thickness after pad pasting is 25 μm -200 μm.
Preferably：Acc power is exposed in the step 3 and uses 2KW-10KW, light exposure is arranged to 10C-250C.
Preferably：The step 5 medium-high frequency electric power output voltage 2200V, export DC current or alternating current
1.0200A, for temperature control instrument controlling solution temperature in the range of 30-600 DEG C, rocking equipment keeps 5-20 including negative electrode in electroforming
Beat/min left and right or teeter, circulation filter keep below 10um filtering accuracy.
Preferably：The main component of nickel sulfamic acid electroforming solution and content parameter are as follows in the step 5：
Nickel sulfamic acid：250650g/1；Nickel content：20-200g/1；Nickel oxide：5.45g/l；Boric acid：20-50g/1；Brightener PA：
5-25ml/l；Sodium hypophosphite：O.01-2.0g/l；PH：3.5-6.0.
Preferably：Nanometer nickel-cobalt alloy sheet phosphorus content is 0.01-O.5% in the step 6；The stripping chute
Middle solution be weight percentage 110% sodium hydroxide solution, PH：8.0-14.0, temperature are from 35-60 DEG C, ultrasonic frequency
200-1000HZ。
Beneficial effect：The method that a kind of new electromolding alloy technique provided by the invention makes OLED evaporation covers FMM, is used
By traditional dry film wet process and the method for nanometer nickel-cobalt alloy electroformation process combination, creatively produce with complex figure hole
Nanometer nickel-cobalt alloy sheet, the OLED sheet metals of evaporation precision welding can be done, without few tin, bridge joint, gravestone or drawing occurs
The bad phenomenons such as point, the yields of all kinds of ultraprecise OLED evaporations is substantially improved.
Brief description of the drawings
Fig. 1 is the process chart that the present invention makes nickel cobalt (alloy) thin slice；
Fig. 2 is the schematic flow sheet that the present invention makes OLED nickel versions；
Fig. 3 is the screen structure schematic diagram with OLED figure nickel cobalt (alloy) sheet metals.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
As shown in Figure 1-2, the method for covering FMM is deposited the invention discloses a kind of new electromolding alloy technique making OLED,
Nanometer nickel-cobalt alloying metal with OLED figure perforates is made using dry film wet process and nanometer nickel-cobalt alloy electroformation technique
Thin slice, specific implementation step of the present invention and process detail are as follows:
Step 1: substrate is ground：
Choose the smooth metal plate material in surface and do planar metal base plate, baseplate material can use 304 plates or 202 plates etc.
Stainless steel substrate covers sheet metal, and thickness is between O.3-2.Omm, and surface roughness is from 2B to BA or 16K, by substrate table
Grinding is cleaned in face, and removal surface impurity, dirty, cut, sags and crests etc. is bad, when toasting one section in placement baking oven after cleaning grinding
Between, baking temperature is 40-100 DEG C.
Step 2: pad pasting：
Using full-automatic or Semi-automatic film sticking machine, by the photosensitive dry film material with UV photocuring reactions, in temperature 100 ± 10
DEG C, under the Parameter Conditions such as speed 1.0-1.2m/min, pressure 4-6kg/cm2, successively hot pressing upper substrate, dry film material can use
All types of dry films, individual layer thickness of dry film are 10 μm -100 μm, and the thickness after pad pasting is 25 μm -200 μm, pad pasting requirement
Surfacing, no wrinkle bubble etc. are bad.
Step 3: exposure：
Using half directional light, directional light or spot light exposure machine, lamp type shows the UV lamps such as lamp using metal halid lamp or high pressure
Pipe, by the negative film film or light shield with OLED figures, is close to dry film surface, according to dry film species and thickness in the form of vacuumizing
Degree, sets corresponding light exposure 40-100C and is exposed operation, UV light is irradiated on dry film from the clear area at figure, accordingly
Photocuring reaction occurs for the dry film of position, and the corresponding figure on the film or light shield is shown on photosensitive material, completes exposure operation.Expose
Ray machine power is from 2KW-10KW, light exposure 10C-250C.
Step 4: development：
Using horizontal or vertical developing machine, development operation is carried out to the substrate exposed, O.3-3.0% concentration is during development
The sodium carbonate liquor of (percentage by weight), speed are set to 22mm/s, O.22kg pressure is set to, and the pH value of weak caustic solution is 7.5-
14.0, temperature is 22.0-40.O DEG C, does not have the photosensitive material dissolution of photocuring after weak caustic solution after development, on substrate
It is rinsed, the dry film material of photocuring reaction is rested on substrate, figure and the OLED figures on the film or light shield of formation
Completely the same, dry film graph block thickness is stagnated more than 10 minutes or in 30-50 DEG C of baking oven for the substrate after O.05-O.2mm developing
Baking more than 10 minutes.
Dry film wet process overall process is completed from step 1 to step 4, this technical process turns digitized OLED figures
Move on on the film or light shield, then by dry film material, figure is formed into dry film graph block on substrate, and photosensitive dry film graph block
For insulating materials, so as to complete the substrate preparation of the band OLED figures required for micro- electroforming.
Step 5: micro- electroforming：
Micro- electroforming is containing electrotyping bath, anode and cathode, high-frequency direct-current or the pulse power, electroforming solution nickel sulfamic acid mixed solution, temperature control
Instrument, circulating filtration equipment, rocking equipment etc. form.Electrotyping bath is made using insulating materials, such as plastics, PP materials, size
Specification can be according to production requirement.Length is from O.5m-10m, and highly from O.5m-2.0m, groove width is from O.2m-2.0m；；Anode can
Designed using titanium basket or other metal frameworks, for containing the nickel bead of sulphur containing S, pancake or other thin materials, its dimensions coordinates
Electrotyping bath makes；Negative electrode is using design of material such as copper bars, for fixed substrate；High frequency electric source output voltage 2200V, output are straight
Electric current or alternating current 1.0200A are flowed, for temperature control instrument controlling solution temperature in the range of 30-600 DEG C, rocking equipment includes negative electrode
5-20 beats/min of left and right is kept in electroforming or is teetered, circulation filter keeps below 10um filtering accuracy, ammonia
The main component and content parameter of base nickel sulphonic acid electroforming solution are as follows：
Nickel sulfamic acid：250650g/1；Nickel content：20-200g/1；Nickel oxide：5.45g/l；Boric acid：20-50g/1；Brightener
PA：5-25ml/l；Sodium hypophosphite：O.01-2.0g/l；PH：3.5-6.0；Operating procedure is to be fixed on the substrate to have developed
On tough cathode fixture, it is put into electrotyping bath, ensures that solution height exceedes substrate height in groove, connects power line, startup is waved
Equipment, set according to the thickness for the OLED nickel cobalt (alloy) thin slices to be made corresponding to size of current and electroforming time, it is to be achieved
After electroforming thickness range, that is, electroforming operation is automatically stopped, completes electroforming.
Step 6: the demoulding, ultrasonic wave cleaning：
The substrate after electroforming is completed, is put into stripping chute, after the completion of the demoulding, substrate is taken out, substrate has gently been taken the photograph with small blade
On foil, be put into ultrasonic bath and clean, the eliminating impurities on foil in perforate are clean, after by foil
It is placed on supporting plate, after washing is dried, that is, completes to make the overall process of OLED nickel cobalt (alloy) electroforming metal pieces.The nano nickel
Cobalt alloy thin slice phosphorus content is 0.01-O.5%.Solution is 110% in stripping chute（Percentage by weight）Sodium hydroxide solution, PH：
8.0-14.0, temperature is from 35-60 DEG C, ultrasonic frequency 200-1000HZ.
Step 7: assembling：
As shown in figure 3, the nanometer nickel-cobalt alloying metal thin slice after cleaning, drying is examined in, the related chi of OLED figures is checked
Very little precision, the figure degree of accuracy, perforate side wall smoothness, sheet thicknesses, after detection meets client's quality requirements, by sheet metal
It is laser-welded on the aluminium frame or cast iron frame, cast aluminium frame 1 of certain specification, sheet metal 2 is kept smooth, there is certain elasticity, it is full
The requirement of sufficient OLED pigments evaporation, so, the half tone with OLED figure nickel cobalt (alloy) sheet metals all completes.
Step 8: laser welding：
Laser welding be by the use of high-energy-density laser beam as thermal source a kind of high-efficiency and precision welding method；Power density is big
In 105-107 W/cm2；Metal surface is recessed into " hole " by heat effect, forms deep penetration welding, makes metal framework and nickel alloy steel
Piece welds together.
Step 9: laser cutting mark：
Laser marking is to carry out local irradiation to workpiece using the laser of high-energy-density, skin-material is vaporized or occur color
The chemical reaction of change, so as to leave a kind of marking method of permanent marker.Laser marking can get various words, symbol
With pattern etc., character boundary can be from millimeter to micron dimension, and this has special meaning to the false proof of product.
Step 10: plasma cleaning：
The FMM finished products that will be assembled, are put into plasma machine and are cleaned, and remove all debris residuals on OLED MASK.
Its principle is using plasma, the process for showing to be activated to metal caused by intermediate frequency or radio frequency, is made follow-up
Nano material is easier to be vaporized on metal shows, adhesive force of the nano material in metal surface is significantly greatly increased.
The various active particles such as a large amount of ions, excited state molecule, free radical in plasma, are applied to solid sample table
Face, the original pollutant in surface and impurity are not only removed, and corrasion can be produced, sample surfaces are roughening, formed
Many fine hollows, increase the ratio surface of sample.Improve the wettability of the surface of solids.
Step 11: high-temperature resistant nano is deposited：
After FMM finished products complete plasma cleaning, within 24 hours, FMM is put into nanometer evaporator, steamed on FMM surfaces
One layer of high-temperature nano material is plated, thickness is between 0.5-1um.
The nano material can be subjected to 300 degree of temperature of FMM working environments, protect sheet metal not expanded by heating, make FMM
Good form is maintained to keep FMM dimensional accuracy without deforming.
Operation principle is by heating evaporation nano material, it is deposited on the surface of solids, referred to as nanometer evaporation coating.
Step 12: finished product detection：
Nickel alloy steel plate thickness is measured using marble platform probe-type calibrator, and with 2D measuring instrument measurement pattern dimensional accuracies
It is whether qualified；All parts are assembled into a whole set of evaporation coating device after the assay was approved.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (7)
1. a kind of method that new electromolding alloy technique makes OLED evaporation covers FMM, it is characterised in that：Comprise the following steps：
Step 1: substrate is ground：
Planar metal base plate is chosen, substrate surface is cleaned and ground, surface impurity, cut and sags and crests are removed, after cleaning grinding
Place and toasted in baking oven, baking temperature is 40-100 DEG C；
Step 2: pad pasting：
Using full-automatic or Semi-automatic film sticking machine, by the photosensitive dry film material with uv photocuring reactions, successively hot pressing upper substrate,
The smooth no wrinkle of attachment film surface and bubble；
Step 3: exposure：
By the negative film film or light shield with OLED figures, dry film surface is close in the form of vacuumizing, then using half directional light,
Directional light or spot light exposure machine, fluorescent tube are exposed using uv fluorescent tubes, and uv light is irradiated on dry film from the clear area at figure, accordingly
Photocuring reaction occurs for the dry film of position, makes to show the corresponding figure on the film or light shield on photosensitive material, completes exposure operation；
Step 4: development：
Using developing machine, development operation is carried out to the substrate exposed, regulation photographic parameter is during development：
O.3-3.0% sodium carbonate percentage by weight is；Speed is 22.Omm/s；Pressure is 22.Okg/cm2；The pH value of weak caustic solution
For 7.5-14.0；Temperature is 22.0-40.0 DEG C；
After development, it is not rinsed on substrate by the photosensitive material dissolution of photocuring after weak caustic solution, photocuring is anti-
The dry film material answered is rested on substrate, and the figure of formation and the OLED figures on the film or light shield are completely the same, dry film figure
Block thickness is O.05-O.2mm, the substrate after development will stagnate more than 10 minutes or be toasted 10 minutes in 30-50 DEG C of baking oven
More than；
Step 5: micro- electroforming：
Micro- electroforming apparatus is set by electrotyping bath, anode and cathode, high-frequency direct-current or the pulse power, electroforming solution, temperature control instrument, circulating filtration
Standby and rocking equipment composition, the electroforming solution are the nickel sulfamic acid solution mixed solution of addition sodium hypophosphite, operate step
Suddenly it is that the substrate to have developed is fixed on tough cathode fixture, is put into electrotyping bath, ensures that it is high to exceed substrate for solution height in groove
Degree, power line is connected, start rocking equipment or so or teeter, according to the thickness for the OLED nickel cobalt (alloy) thin slices to be made
Come size of current corresponding to setting and electroforming time, after electroforming thickness range to be achieved, that is, electroforming operation is automatically stopped, completes electricity
Casting；
Step 6: the demoulding, ultrasonic wave cleaning：
Substrate after completion electroforming is put into stripping chute, taken out substrate after the completion of the demoulding, the nanometer nickel-cobalt taken the photograph on substrate
Alloy sheet, be put into ultrasonic bath and clean, by the eliminating impurities on nanometer nickel-cobalt alloy sheet in perforate it is clean after, by nanometer
Nickel cobalt (alloy) thin slice is placed on supporting plate, after washing is dried, that is, completes to make OLED nickel cobalt (alloy) electroforming metal piece processes；
Step 7: detection assembling：
Nanometer nickel-cobalt alloying metal thin slice after cleaning, drying is examined in, checks relative dimensions precision, the figure of OLED figures
The shape degree of accuracy, perforate side wall smoothness, sheet metal thickness, detection meets after requiring, sheet metal is fixed into aluminium frame or casting
On chase, cast aluminium frame, with nylon yarn or stainless steel cloth connection frame and sheet metal on frame, sheet metal is set to keep smooth, band
The half tone for having OLED figure nickel cobalt (alloy) sheet metals completes.
2. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：The step 1 midplane metal substrate uses the stainless steel substrate of 304 plates or 202 plates or covers sheet metal, and thickness is O.3-
Between 2.Omm, surface roughness is from 2B to BA or between 16K.
3. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：The step 2 pad pasting is carried out under conditions of 100 ± 10 DEG C of temperature, speed 1.0-1.2m/min, pressure 4-6kg/cm2；
Individual layer thickness of dry film is 10 μm -100 μm, and the thickness after pad pasting is 25 μm -200 μm.
4. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：Acc power is exposed in the step 3 and uses 2KW-10KW, light exposure is arranged to 10C-250C.
5. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：The step 5 medium-high frequency electric power output voltage 2200V, export DC current or alternating current 1.0200A, temperature control instrument control
For solution temperature processed in the range of 30-600 DEG C, rocking equipment includes the left right or up that negative electrode keeps 5-20 beats/min in electroforming
Under wave, circulation filter keep below 10um filtering accuracy.
6. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：The main component of nickel sulfamic acid electroforming solution and content parameter are as follows in the step 5：Nickel sulfamic acid：250650g/
1；Nickel content：20-200g/1；Nickel oxide：5.45g/l；Boric acid：20-50g/1；Brightener PA：5-25ml/l；Sodium hypophosphite：
O.01-2.0g/l；PH：3.5-6.0.
7. the method that a kind of new electromolding alloy technique according to claim 1 makes OLED evaporation covers FMM, its feature exist
In：Nanometer nickel-cobalt alloy sheet phosphorus content is 0.01-O.5% in the step 6；Solution is weight percentage in the stripping chute
110% sodium hydroxide solution, PH：8.0-14.0, temperature is from 35-60 DEG C, ultrasonic frequency 200-1000HZ.
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| CN109680306A (en) * | 2019-02-20 | 2019-04-26 | 合肥永淇智材科技有限公司 | FMM electroforming motherboard production method based on mechanical punching |
| CN109930182A (en) * | 2018-12-27 | 2019-06-25 | 上海铂庚科技有限公司 | A kind of method of wet process production nickel alloy precision parts |
| CN110158025A (en) * | 2018-05-31 | 2019-08-23 | 京东方科技集团股份有限公司 | The production method and mask plate of mask plate |
| CN113714745A (en) * | 2021-09-13 | 2021-11-30 | 苏州欧方电子科技有限公司 | Local electroforming steel mesh processing technology based on micro-welding technology |
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| CN110158025A (en) * | 2018-05-31 | 2019-08-23 | 京东方科技集团股份有限公司 | The production method and mask plate of mask plate |
| CN108796440A (en) * | 2018-07-26 | 2018-11-13 | 京东方科技集团股份有限公司 | A kind of preparation method of mask plate, mask plate, evaporated device |
| CN109930182A (en) * | 2018-12-27 | 2019-06-25 | 上海铂庚科技有限公司 | A kind of method of wet process production nickel alloy precision parts |
| CN109680306A (en) * | 2019-02-20 | 2019-04-26 | 合肥永淇智材科技有限公司 | FMM electroforming motherboard production method based on mechanical punching |
| CN113714745A (en) * | 2021-09-13 | 2021-11-30 | 苏州欧方电子科技有限公司 | Local electroforming steel mesh processing technology based on micro-welding technology |
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