CN107452866A - 压电元件及压电元件的制造方法 - Google Patents

压电元件及压电元件的制造方法 Download PDF

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Publication number
CN107452866A
CN107452866A CN201710265529.XA CN201710265529A CN107452866A CN 107452866 A CN107452866 A CN 107452866A CN 201710265529 A CN201710265529 A CN 201710265529A CN 107452866 A CN107452866 A CN 107452866A
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CN
China
Prior art keywords
piezoelectrics
electrode layer
piezoelectric element
layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710265529.XA
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English (en)
Chinese (zh)
Inventor
增田隆哉
渡部嘉之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimano Inc
Original Assignee
Shimano Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimano Inc filed Critical Shimano Inc
Publication of CN107452866A publication Critical patent/CN107452866A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
CN201710265529.XA 2016-05-09 2017-04-21 压电元件及压电元件的制造方法 Pending CN107452866A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016093989A JP6659450B2 (ja) 2016-05-09 2016-05-09 圧電素子および圧電素子の製造方法
JP2016-093989 2016-05-09

Publications (1)

Publication Number Publication Date
CN107452866A true CN107452866A (zh) 2017-12-08

Family

ID=60119546

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710265529.XA Pending CN107452866A (zh) 2016-05-09 2017-04-21 压电元件及压电元件的制造方法

Country Status (3)

Country Link
JP (1) JP6659450B2 (https=)
CN (1) CN107452866A (https=)
DE (1) DE102017004430A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024138554A1 (zh) * 2022-12-29 2024-07-04 中国科学院光电技术研究所 压电陶瓷驱动阵列及面形调整方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3864388B1 (en) * 2018-10-10 2024-10-09 JOANNEUM RESEARCH Forschungsgesellschaft mbH Piezoelectric sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050162044A1 (en) * 2003-12-26 2005-07-28 Tdk Corporation Stack-type piezoelectric device
JP2007335664A (ja) * 2006-06-15 2007-12-27 Tdk Corp 積層型圧電素子及び圧電装置
CN105453288A (zh) * 2013-10-22 2016-03-30 株式会社村田制作所 层叠陶瓷结构体以及其制造方法、和压电致动器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62208680A (ja) * 1986-03-07 1987-09-12 Murata Mfg Co Ltd 積層バイモルフ
JP2004002069A (ja) * 2002-05-30 2004-01-08 Tdk Corp 圧電磁器の製造方法および圧電素子の製造方法
US7067965B2 (en) * 2002-09-18 2006-06-27 Tdk Corporation Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof
JP5043311B2 (ja) * 2005-05-19 2012-10-10 太陽誘電株式会社 圧電積層体及びその製造方法，圧電スピーカ，電子機器
WO2013031715A1 (ja) * 2011-09-01 2013-03-07 北陸電気工業株式会社 積層圧電体
JP2016093989A (ja) 2014-11-07 2016-05-26 三菱レイヨン株式会社 ロッドレンズアレイ及びロッドレンズアレイを備えた機器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050162044A1 (en) * 2003-12-26 2005-07-28 Tdk Corporation Stack-type piezoelectric device
JP2007335664A (ja) * 2006-06-15 2007-12-27 Tdk Corp 積層型圧電素子及び圧電装置
CN105453288A (zh) * 2013-10-22 2016-03-30 株式会社村田制作所 层叠陶瓷结构体以及其制造方法、和压电致动器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024138554A1 (zh) * 2022-12-29 2024-07-04 中国科学院光电技术研究所 压电陶瓷驱动阵列及面形调整方法

Also Published As

Publication number Publication date
DE102017004430A1 (de) 2017-11-09
JP6659450B2 (ja) 2020-03-04
JP2017204506A (ja) 2017-11-16

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Application publication date: 20171208

RJ01 Rejection of invention patent application after publication