DE102017004430A1 - Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements - Google Patents
Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements Download PDFInfo
- Publication number
- DE102017004430A1 DE102017004430A1 DE102017004430.9A DE102017004430A DE102017004430A1 DE 102017004430 A1 DE102017004430 A1 DE 102017004430A1 DE 102017004430 A DE102017004430 A DE 102017004430A DE 102017004430 A1 DE102017004430 A1 DE 102017004430A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode layer
- piezoelectric body
- piezoelectric
- layer
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 claims description 27
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 10
- 238000005245 sintering Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 4
- 230000006854 communication Effects 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Fuel-Injection Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016093989A JP6659450B2 (ja) | 2016-05-09 | 2016-05-09 | 圧電素子および圧電素子の製造方法 |
| JP2016-093989 | 2016-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102017004430A1 true DE102017004430A1 (de) | 2017-11-09 |
Family
ID=60119546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102017004430.9A Pending DE102017004430A1 (de) | 2016-05-09 | 2017-05-08 | Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6659450B2 (https=) |
| CN (1) | CN107452866A (https=) |
| DE (1) | DE102017004430A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3864388B1 (en) * | 2018-10-10 | 2024-10-09 | JOANNEUM RESEARCH Forschungsgesellschaft mbH | Piezoelectric sensor |
| WO2024138554A1 (zh) * | 2022-12-29 | 2024-07-04 | 中国科学院光电技术研究所 | 压电陶瓷驱动阵列及面形调整方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191450A (ja) | 2003-12-26 | 2005-07-14 | Tdk Corp | 積層型圧電素子 |
| JP2016093989A (ja) | 2014-11-07 | 2016-05-26 | 三菱レイヨン株式会社 | ロッドレンズアレイ及びロッドレンズアレイを備えた機器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62208680A (ja) * | 1986-03-07 | 1987-09-12 | Murata Mfg Co Ltd | 積層バイモルフ |
| JP2004002069A (ja) * | 2002-05-30 | 2004-01-08 | Tdk Corp | 圧電磁器の製造方法および圧電素子の製造方法 |
| US7067965B2 (en) * | 2002-09-18 | 2006-06-27 | Tdk Corporation | Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof |
| JP5043311B2 (ja) * | 2005-05-19 | 2012-10-10 | 太陽誘電株式会社 | 圧電積層体及びその製造方法，圧電スピーカ，電子機器 |
| JP4725432B2 (ja) * | 2006-06-15 | 2011-07-13 | Ｔｄｋ株式会社 | 積層型圧電素子及び圧電装置 |
| WO2013031715A1 (ja) * | 2011-09-01 | 2013-03-07 | 北陸電気工業株式会社 | 積層圧電体 |
| CN105453288B (zh) * | 2013-10-22 | 2018-01-26 | 株式会社村田制作所 | 层叠陶瓷结构体及其制造方法、和压电致动器的制造方法 |
-
2016
- 2016-05-09 JP JP2016093989A patent/JP6659450B2/ja active Active
-
2017
- 2017-04-21 CN CN201710265529.XA patent/CN107452866A/zh active Pending
- 2017-05-08 DE DE102017004430.9A patent/DE102017004430A1/de active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191450A (ja) | 2003-12-26 | 2005-07-14 | Tdk Corp | 積層型圧電素子 |
| JP2016093989A (ja) | 2014-11-07 | 2016-05-26 | 三菱レイヨン株式会社 | ロッドレンズアレイ及びロッドレンズアレイを備えた機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107452866A (zh) | 2017-12-08 |
| JP6659450B2 (ja) | 2020-03-04 |
| JP2017204506A (ja) | 2017-11-16 |
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| R163 | Identified publications notified | ||
| R082 | Change of representative |
Representative=s name: SONNENBERG HARRISON PARTNERSCHAFT MBB, DE Representative=s name: SONNENBERG HARRISON PARTNERSCHAFT MBB PATENT- , DE |
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| R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0041083000 Ipc: H10N0030500000 |
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| R012 | Request for examination validly filed | ||
| R016 | Response to examination communication |