CN107257721A - 具有可移除的磨料构件的磨料制品及其分离和更换方法 - Google Patents

具有可移除的磨料构件的磨料制品及其分离和更换方法 Download PDF

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Publication number
CN107257721A
CN107257721A CN201580070047.8A CN201580070047A CN107257721A CN 107257721 A CN107257721 A CN 107257721A CN 201580070047 A CN201580070047 A CN 201580070047A CN 107257721 A CN107257721 A CN 107257721A
Authority
CN
China
Prior art keywords
abrasive
abrasive article
magnetic
magnetic member
major surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201580070047.8A
Other languages
English (en)
Chinese (zh)
Inventor
洪思伟
罗国强
J·S·科罗德格
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN107257721A publication Critical patent/CN107257721A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/007—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent between different parts of an abrasive tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/16—Bushings; Mountings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B24D9/085—Devices for mounting sheets on a backing plate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422—Carbon
    • C04B2235/427—Diamond
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
CN201580070047.8A 2014-12-22 2015-12-15 具有可移除的磨料构件的磨料制品及其分离和更换方法 Pending CN107257721A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462095090P 2014-12-22 2014-12-22
US62/095,090 2014-12-22
PCT/US2015/065772 WO2016106020A1 (en) 2014-12-22 2015-12-15 Abrasive articles with removable abrasive member and methods of separating and replacing thereof

Publications (1)

Publication Number Publication Date
CN107257721A true CN107257721A (zh) 2017-10-17

Family

ID=55178322

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580070047.8A Pending CN107257721A (zh) 2014-12-22 2015-12-15 具有可移除的磨料构件的磨料制品及其分离和更换方法

Country Status (8)

Country Link
US (1) US20180001441A1 (https=)
EP (1) EP3237146A1 (https=)
JP (1) JP2018501119A (https=)
KR (1) KR20170096025A (https=)
CN (1) CN107257721A (https=)
SG (1) SG11201704838TA (https=)
TW (1) TW201700218A (https=)
WO (1) WO2016106020A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116619238A (zh) * 2022-02-21 2023-08-22 应用材料公司 用于水平预清洁模块的垫载体组件

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112017001938T5 (de) * 2016-04-06 2019-01-17 M Cubed Technologies, Inc. Diamantverbundwerkstoff-Konditionierer für ein CMP-Tuch
EP3727749B1 (en) 2017-12-20 2025-08-06 3M Innovative Properties Company Abrasive articles including a saturant and an anti-loading size layer
KR102674027B1 (ko) * 2019-01-29 2024-06-12 삼성전자주식회사 재생 연마패드
US20220388116A1 (en) * 2021-06-04 2022-12-08 Applied Materials, Inc. Method of detecting chemical mechanical polishing conditioning disk orientation
CN113618620A (zh) * 2021-09-07 2021-11-09 玉溪精工数控机床有限公司 一种数控车床主轴箱铲刮面研磨专用工装
JP2024535408A (ja) * 2021-09-29 2024-09-30 インテグリス・インコーポレーテッド ポリマーバッキングプレートを備えるパッドコンディショナー
JP2024535447A (ja) * 2021-09-29 2024-09-30 インテグリス・インコーポレーテッド 両面パッドコンディショナー

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4222204A (en) * 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
JPH0771788B2 (ja) * 1986-07-29 1995-08-02 三菱マテリアル株式会社 砥 石
CN1134692A (zh) * 1993-11-12 1996-10-30 美国3M公司 磨料颗粒及其制造方法
JP2001071273A (ja) * 1999-09-01 2001-03-21 Hitachi Maxell Ltd 研磨シ―ト
JP2002254316A (ja) * 2001-02-28 2002-09-10 Hitachi Maxell Ltd 研磨シ―ト
CN1846940A (zh) * 2005-04-12 2006-10-18 罗门哈斯电子材料Cmp控股股份有限公司 径向倾斜的抛光垫
CN101511542A (zh) * 2006-08-30 2009-08-19 3M创新有限公司 延长寿命的磨料制品及方法

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GB1058502A (en) 1965-05-06 1967-02-15 Merit Products Inc Mounting abrasive disks on a drive member
JPS5698554U (https=) * 1979-12-27 1981-08-04
JPS5815089Y2 (ja) * 1980-06-30 1983-03-26 東洋研磨材工業株式会社 研削といし
JPH0929633A (ja) * 1995-07-18 1997-02-04 Toshiba Mach Co Ltd ポリッシング研磨布用ドレッシング工具
JP3981199B2 (ja) * 1998-02-10 2007-09-26 八千代マイクロサイエンス株式会社 両面ラップ盤用回転定盤
US6123612A (en) * 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6224474B1 (en) * 1999-01-06 2001-05-01 Buehler, Ltd. Magnetic disc system for grinding or polishing specimens
US7377836B1 (en) * 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US6815052B2 (en) * 2000-12-01 2004-11-09 P1 Diamond, Inc. Filled diamond foam material and method for forming same
JP2006205316A (ja) * 2005-01-28 2006-08-10 Hitachi Maxell Ltd 磁性層研磨用ラッピングテープ
TW201350267A (zh) * 2012-05-04 2013-12-16 聖高拜磨料有限公司 用於同雙側化學機械平坦化墊修整器一起使用之工具
JP5919157B2 (ja) * 2012-10-01 2016-05-18 株式会社荏原製作所 ドレッサー

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US4222204A (en) * 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
JPH0771788B2 (ja) * 1986-07-29 1995-08-02 三菱マテリアル株式会社 砥 石
CN1134692A (zh) * 1993-11-12 1996-10-30 美国3M公司 磨料颗粒及其制造方法
JP2001071273A (ja) * 1999-09-01 2001-03-21 Hitachi Maxell Ltd 研磨シ―ト
JP2002254316A (ja) * 2001-02-28 2002-09-10 Hitachi Maxell Ltd 研磨シ―ト
CN1846940A (zh) * 2005-04-12 2006-10-18 罗门哈斯电子材料Cmp控股股份有限公司 径向倾斜的抛光垫
CN101511542A (zh) * 2006-08-30 2009-08-19 3M创新有限公司 延长寿命的磨料制品及方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116619238A (zh) * 2022-02-21 2023-08-22 应用材料公司 用于水平预清洁模块的垫载体组件
US12521841B2 (en) 2022-02-21 2026-01-13 Applied Materials, Inc. Pad carrier assembly for horizontal pre-clean module

Also Published As

Publication number Publication date
JP2018501119A (ja) 2018-01-18
SG11201704838TA (en) 2017-07-28
EP3237146A1 (en) 2017-11-01
KR20170096025A (ko) 2017-08-23
WO2016106020A1 (en) 2016-06-30
TW201700218A (zh) 2017-01-01
US20180001441A1 (en) 2018-01-04

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Legal Events

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PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20171017