SG11201704838TA - Abrasive articles with removable abrasive member and methods of separating and replacing thereof - Google Patents

Abrasive articles with removable abrasive member and methods of separating and replacing thereof

Info

Publication number
SG11201704838TA
SG11201704838TA SG11201704838TA SG11201704838TA SG11201704838TA SG 11201704838T A SG11201704838T A SG 11201704838TA SG 11201704838T A SG11201704838T A SG 11201704838TA SG 11201704838T A SG11201704838T A SG 11201704838TA SG 11201704838T A SG11201704838T A SG 11201704838TA
Authority
SG
Singapore
Prior art keywords
abrasive
replacing
separating
methods
removable
Prior art date
Application number
SG11201704838TA
Inventor
Kelvin Sze Wei Ang
Kok Chian Loh
Jeffrey S Kollodge
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of SG11201704838TA publication Critical patent/SG11201704838TA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/007—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent between different parts of an abrasive tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/16—Bushings; Mountings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B24D9/085—Devices for mounting sheets on a backing plate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422—Carbon
    • C04B2235/427—Diamond
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
SG11201704838TA 2014-12-22 2015-12-15 Abrasive articles with removable abrasive member and methods of separating and replacing thereof SG11201704838TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462095090P 2014-12-22 2014-12-22
PCT/US2015/065772 WO2016106020A1 (en) 2014-12-22 2015-12-15 Abrasive articles with removable abrasive member and methods of separating and replacing thereof

Publications (1)

Publication Number Publication Date
SG11201704838TA true SG11201704838TA (en) 2017-07-28

Family

ID=55178322

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201704838TA SG11201704838TA (en) 2014-12-22 2015-12-15 Abrasive articles with removable abrasive member and methods of separating and replacing thereof

Country Status (8)

Country Link
US (1) US20180001441A1 (en)
EP (1) EP3237146A1 (en)
JP (1) JP2018501119A (en)
KR (1) KR20170096025A (en)
CN (1) CN107257721A (en)
SG (1) SG11201704838TA (en)
TW (1) TW201700218A (en)
WO (1) WO2016106020A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114714245A (en) * 2016-04-06 2022-07-08 M丘比德技术公司 Chemical-mechanical planarization pad conditioner
WO2019120211A1 (en) 2017-12-20 2019-06-27 3M Innovative Properties Company Abrasive articles including a saturant and an anti-loading size layer
KR20200093925A (en) * 2019-01-29 2020-08-06 삼성전자주식회사 Recycled polishing pad
US20220388116A1 (en) * 2021-06-04 2022-12-08 Applied Materials, Inc. Method of detecting chemical mechanical polishing conditioning disk orientation
US20230114941A1 (en) * 2021-09-29 2023-04-13 Entegris, Inc. Double-sided pad conditioner
WO2023158526A1 (en) * 2022-02-21 2023-08-24 Applied Materials, Inc. Pad carrier assembly for horizontal pre-clean module

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1058502A (en) 1965-05-06 1967-02-15 Merit Products Inc Mounting abrasive disks on a drive member
US4222204A (en) * 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
JPH0771788B2 (en) * 1986-07-29 1995-08-02 三菱マテリアル株式会社 Whetstone
BR9408041A (en) * 1993-11-12 1996-12-24 Minnesota Mining & Mfg Process for preparing abrasive grain based on alpha alumina crystalline ceramic abrasive grain and abrasive article
US6123612A (en) * 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6224474B1 (en) * 1999-01-06 2001-05-01 Buehler, Ltd. Magnetic disc system for grinding or polishing specimens
JP2001071273A (en) * 1999-09-01 2001-03-21 Hitachi Maxell Ltd Abrasive sheet
US7377836B1 (en) * 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US6815052B2 (en) * 2000-12-01 2004-11-09 P1 Diamond, Inc. Filled diamond foam material and method for forming same
JP2002254316A (en) * 2001-02-28 2002-09-10 Hitachi Maxell Ltd Polishing sheet
JP2006205316A (en) * 2005-01-28 2006-08-10 Hitachi Maxell Ltd Lapping tape for polishing magnetic layer
KR101279819B1 (en) * 2005-04-12 2013-06-28 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 Radial-biased polishing pad
JP5285609B2 (en) * 2006-08-30 2013-09-11 スリーエム イノベイティブ プロパティズ カンパニー Abrasive article and method with extended life
TW201350267A (en) * 2012-05-04 2013-12-16 Saint Gobain Abrasives Inc Tool for use with dual-sided chemical mechanical planarization pad conditioner

Also Published As

Publication number Publication date
KR20170096025A (en) 2017-08-23
WO2016106020A1 (en) 2016-06-30
US20180001441A1 (en) 2018-01-04
EP3237146A1 (en) 2017-11-01
CN107257721A (en) 2017-10-17
JP2018501119A (en) 2018-01-18
TW201700218A (en) 2017-01-01

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