KR20170096025A - 제거 가능한 연마 부재를 갖는 연마 용품 및 이들의 분리 및 교체 방법 - Google Patents

제거 가능한 연마 부재를 갖는 연마 용품 및 이들의 분리 및 교체 방법 Download PDF

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Publication number
KR20170096025A
KR20170096025A KR1020177019967A KR20177019967A KR20170096025A KR 20170096025 A KR20170096025 A KR 20170096025A KR 1020177019967 A KR1020177019967 A KR 1020177019967A KR 20177019967 A KR20177019967 A KR 20177019967A KR 20170096025 A KR20170096025 A KR 20170096025A
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KR
South Korea
Prior art keywords
abrasive
abrasive article
magnetic
major surface
magnetic element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020177019967A
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English (en)
Korean (ko)
Inventor
켈빈 스제 웨이 앙
콕 치안 로
제프리 에스 콜로지
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 쓰리엠 이노베이티브 프로퍼티즈 컴파니 filed Critical 쓰리엠 이노베이티브 프로퍼티즈 컴파니
Publication of KR20170096025A publication Critical patent/KR20170096025A/ko
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/007—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent between different parts of an abrasive tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/16—Bushings; Mountings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B24D9/085—Devices for mounting sheets on a backing plate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422—Carbon
    • C04B2235/427—Diamond
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
KR1020177019967A 2014-12-22 2015-12-15 제거 가능한 연마 부재를 갖는 연마 용품 및 이들의 분리 및 교체 방법 Withdrawn KR20170096025A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462095090P 2014-12-22 2014-12-22
US62/095,090 2014-12-22
PCT/US2015/065772 WO2016106020A1 (en) 2014-12-22 2015-12-15 Abrasive articles with removable abrasive member and methods of separating and replacing thereof

Publications (1)

Publication Number Publication Date
KR20170096025A true KR20170096025A (ko) 2017-08-23

Family

ID=55178322

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177019967A Withdrawn KR20170096025A (ko) 2014-12-22 2015-12-15 제거 가능한 연마 부재를 갖는 연마 용품 및 이들의 분리 및 교체 방법

Country Status (8)

Country Link
US (1) US20180001441A1 (https=)
EP (1) EP3237146A1 (https=)
JP (1) JP2018501119A (https=)
KR (1) KR20170096025A (https=)
CN (1) CN107257721A (https=)
SG (1) SG11201704838TA (https=)
TW (1) TW201700218A (https=)
WO (1) WO2016106020A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112017001938T5 (de) * 2016-04-06 2019-01-17 M Cubed Technologies, Inc. Diamantverbundwerkstoff-Konditionierer für ein CMP-Tuch
EP3727749B1 (en) 2017-12-20 2025-08-06 3M Innovative Properties Company Abrasive articles including a saturant and an anti-loading size layer
KR102674027B1 (ko) * 2019-01-29 2024-06-12 삼성전자주식회사 재생 연마패드
US20220388116A1 (en) * 2021-06-04 2022-12-08 Applied Materials, Inc. Method of detecting chemical mechanical polishing conditioning disk orientation
CN113618620A (zh) * 2021-09-07 2021-11-09 玉溪精工数控机床有限公司 一种数控车床主轴箱铲刮面研磨专用工装
JP2024535408A (ja) * 2021-09-29 2024-09-30 インテグリス・インコーポレーテッド ポリマーバッキングプレートを備えるパッドコンディショナー
JP2024535447A (ja) * 2021-09-29 2024-09-30 インテグリス・インコーポレーテッド 両面パッドコンディショナー
JP7805474B2 (ja) * 2022-02-21 2026-01-23 アプライド マテリアルズ インコーポレイテッド 水平前洗浄モジュール用パッドキャリアアセンブリ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1058502A (en) 1965-05-06 1967-02-15 Merit Products Inc Mounting abrasive disks on a drive member
US4222204A (en) 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
JPS5698554U (https=) * 1979-12-27 1981-08-04
JPS5815089Y2 (ja) * 1980-06-30 1983-03-26 東洋研磨材工業株式会社 研削といし
JPH0771788B2 (ja) * 1986-07-29 1995-08-02 三菱マテリアル株式会社 砥 石
JPH09505101A (ja) * 1993-11-12 1997-05-20 ミネソタ マイニング アンド マニュファクチャリング カンパニー 砥粒及びその製造方法
JPH0929633A (ja) * 1995-07-18 1997-02-04 Toshiba Mach Co Ltd ポリッシング研磨布用ドレッシング工具
JP3981199B2 (ja) * 1998-02-10 2007-09-26 八千代マイクロサイエンス株式会社 両面ラップ盤用回転定盤
US6123612A (en) * 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6224474B1 (en) * 1999-01-06 2001-05-01 Buehler, Ltd. Magnetic disc system for grinding or polishing specimens
JP2001071273A (ja) * 1999-09-01 2001-03-21 Hitachi Maxell Ltd 研磨シ―ト
US7377836B1 (en) * 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US6815052B2 (en) * 2000-12-01 2004-11-09 P1 Diamond, Inc. Filled diamond foam material and method for forming same
JP2002254316A (ja) * 2001-02-28 2002-09-10 Hitachi Maxell Ltd 研磨シ―ト
JP2006205316A (ja) * 2005-01-28 2006-08-10 Hitachi Maxell Ltd 磁性層研磨用ラッピングテープ
KR101279819B1 (ko) * 2005-04-12 2013-06-28 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 방사-편향 연마 패드
JP5285609B2 (ja) * 2006-08-30 2013-09-11 スリーエム イノベイティブ プロパティズ カンパニー 長寿命化された研磨物品及び方法
TW201350267A (zh) * 2012-05-04 2013-12-16 聖高拜磨料有限公司 用於同雙側化學機械平坦化墊修整器一起使用之工具
JP5919157B2 (ja) * 2012-10-01 2016-05-18 株式会社荏原製作所 ドレッサー

Also Published As

Publication number Publication date
JP2018501119A (ja) 2018-01-18
SG11201704838TA (en) 2017-07-28
EP3237146A1 (en) 2017-11-01
CN107257721A (zh) 2017-10-17
WO2016106020A1 (en) 2016-06-30
TW201700218A (zh) 2017-01-01
US20180001441A1 (en) 2018-01-04

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20170718

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination