CN107250794B - 具有信号增强的薄膜体声波谐振器 - Google Patents
具有信号增强的薄膜体声波谐振器 Download PDFInfo
- Publication number
- CN107250794B CN107250794B CN201580049756.8A CN201580049756A CN107250794B CN 107250794 B CN107250794 B CN 107250794B CN 201580049756 A CN201580049756 A CN 201580049756A CN 107250794 B CN107250794 B CN 107250794B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
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- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Hematology (AREA)
- General Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Urology & Nephrology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Cell Biology (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Microbiology (AREA)
- Biotechnology (AREA)
- Acoustics & Sound (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462050589P | 2014-09-15 | 2014-09-15 | |
| US62/050589 | 2014-09-15 | ||
| PCT/US2015/049387 WO2016044055A1 (en) | 2014-09-15 | 2015-09-10 | Thin film bulk acoustic resonator with signal enhancement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107250794A CN107250794A (zh) | 2017-10-13 |
| CN107250794B true CN107250794B (zh) | 2020-09-15 |
Family
ID=55533700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580049756.8A Active CN107250794B (zh) | 2014-09-15 | 2015-09-10 | 具有信号增强的薄膜体声波谐振器 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP3194961B1 (enExample) |
| JP (1) | JP6694434B2 (enExample) |
| CN (1) | CN107250794B (enExample) |
| DK (1) | DK3194961T3 (enExample) |
| ES (1) | ES2863602T3 (enExample) |
| PL (1) | PL3194961T3 (enExample) |
| WO (1) | WO2016044055A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10234425B2 (en) | 2013-03-15 | 2019-03-19 | Qorvo Us, Inc. | Thin film bulk acoustic resonator with signal enhancement |
| PL2999959T3 (pl) | 2013-05-23 | 2022-01-10 | Qorvo Us, Inc. | Dwuczęściowy zespół płynowy |
| EP3000133B1 (en) | 2013-05-23 | 2021-01-20 | Qorvo US, Inc. | Piezoelectric sensor |
| WO2020010293A1 (en) * | 2018-07-06 | 2020-01-09 | Qorvo Us, Inc. | Bulk acoustic wave resonator with increased dynamic range |
| JP7590715B2 (ja) * | 2019-12-06 | 2024-11-27 | 国立大学法人九州大学 | 両親媒性物質を含むセンサの洗浄液 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4999284A (en) * | 1988-04-06 | 1991-03-12 | E. I. Du Pont De Nemours And Company | Enzymatically amplified piezoelectric specific binding assay |
| US5932953A (en) * | 1997-06-30 | 1999-08-03 | Iowa State University Research Foundation, Inc. | Method and system for detecting material using piezoelectric resonators |
| CN103403538A (zh) * | 2010-10-20 | 2013-11-20 | 快速诊断技术公司 | 利用共振传感器测量结合动力的装置和方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4215717B2 (ja) | 2002-07-19 | 2009-01-28 | シーメンス アクチエンゲゼルシヤフト | 物質を検出する装置および物質を検出する方法 |
| CN100495008C (zh) * | 2003-06-18 | 2009-06-03 | 中山市泰威技术开发有限公司 | 压电体声波传感器无源式阵列及其生物芯片 |
| US20050148065A1 (en) * | 2003-12-30 | 2005-07-07 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
| US20090282902A1 (en) * | 2006-08-17 | 2009-11-19 | Peter Warthoe | Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte |
| KR20090070886A (ko) * | 2007-12-27 | 2009-07-01 | 삼성전자주식회사 | 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법 |
| FR2943787B1 (fr) * | 2009-03-26 | 2012-10-12 | Commissariat Energie Atomique | Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre |
| TW201411810A (zh) * | 2012-07-16 | 2014-03-16 | 西拉納半導體私人有限公司 | 薄膜型塊體聲波共振器之cmos製作 |
| CN105431734B (zh) | 2013-03-15 | 2018-10-02 | 快速诊断技术公司 | 信号增强的薄膜体声波谐振器 |
| WO2016044132A1 (en) * | 2014-09-15 | 2016-03-24 | Rapid Diagnostek, Inc. | Mass detection through redox coupling |
-
2015
- 2015-09-10 JP JP2017533712A patent/JP6694434B2/ja active Active
- 2015-09-10 CN CN201580049756.8A patent/CN107250794B/zh active Active
- 2015-09-10 DK DK15842191.7T patent/DK3194961T3/da active
- 2015-09-10 ES ES15842191T patent/ES2863602T3/es active Active
- 2015-09-10 EP EP15842191.7A patent/EP3194961B1/en active Active
- 2015-09-10 PL PL15842191T patent/PL3194961T3/pl unknown
- 2015-09-10 WO PCT/US2015/049387 patent/WO2016044055A1/en not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4999284A (en) * | 1988-04-06 | 1991-03-12 | E. I. Du Pont De Nemours And Company | Enzymatically amplified piezoelectric specific binding assay |
| US5932953A (en) * | 1997-06-30 | 1999-08-03 | Iowa State University Research Foundation, Inc. | Method and system for detecting material using piezoelectric resonators |
| CN103403538A (zh) * | 2010-10-20 | 2013-11-20 | 快速诊断技术公司 | 利用共振传感器测量结合动力的装置和方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016044055A1 (en) | 2016-03-24 |
| JP6694434B2 (ja) | 2020-05-13 |
| ES2863602T3 (es) | 2021-10-11 |
| EP3194961B1 (en) | 2021-01-06 |
| EP3194961A4 (en) | 2018-03-28 |
| EP3194961A1 (en) | 2017-07-26 |
| PL3194961T3 (pl) | 2021-08-02 |
| WO2016044055A8 (en) | 2016-05-26 |
| CN107250794A (zh) | 2017-10-13 |
| DK3194961T3 (da) | 2021-03-29 |
| JP2017527831A (ja) | 2017-09-21 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |