CN107250794B - 具有信号增强的薄膜体声波谐振器 - Google Patents

具有信号增强的薄膜体声波谐振器 Download PDF

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Publication number
CN107250794B
CN107250794B CN201580049756.8A CN201580049756A CN107250794B CN 107250794 B CN107250794 B CN 107250794B CN 201580049756 A CN201580049756 A CN 201580049756A CN 107250794 B CN107250794 B CN 107250794B
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component
amplification
tfbar
analyte
recognition component
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Chinese (zh)
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CN107250794A (zh
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M.萨尔瓦蒂
I.R.哈蒙
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Qorvo US Inc
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Qorvo US Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details

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  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Cell Biology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Microbiology (AREA)
  • Biotechnology (AREA)
  • Acoustics & Sound (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201580049756.8A 2014-09-15 2015-09-10 具有信号增强的薄膜体声波谐振器 Active CN107250794B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462050589P 2014-09-15 2014-09-15
US62/050589 2014-09-15
PCT/US2015/049387 WO2016044055A1 (en) 2014-09-15 2015-09-10 Thin film bulk acoustic resonator with signal enhancement

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CN107250794A CN107250794A (zh) 2017-10-13
CN107250794B true CN107250794B (zh) 2020-09-15

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EP (1) EP3194961B1 (enExample)
JP (1) JP6694434B2 (enExample)
CN (1) CN107250794B (enExample)
DK (1) DK3194961T3 (enExample)
ES (1) ES2863602T3 (enExample)
PL (1) PL3194961T3 (enExample)
WO (1) WO2016044055A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
PL2999959T3 (pl) 2013-05-23 2022-01-10 Qorvo Us, Inc. Dwuczęściowy zespół płynowy
EP3000133B1 (en) 2013-05-23 2021-01-20 Qorvo US, Inc. Piezoelectric sensor
WO2020010293A1 (en) * 2018-07-06 2020-01-09 Qorvo Us, Inc. Bulk acoustic wave resonator with increased dynamic range
JP7590715B2 (ja) * 2019-12-06 2024-11-27 国立大学法人九州大学 両親媒性物質を含むセンサの洗浄液

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
US5932953A (en) * 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
CN103403538A (zh) * 2010-10-20 2013-11-20 快速诊断技术公司 利用共振传感器测量结合动力的装置和方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4215717B2 (ja) 2002-07-19 2009-01-28 シーメンス アクチエンゲゼルシヤフト 物質を検出する装置および物質を検出する方法
CN100495008C (zh) * 2003-06-18 2009-06-03 中山市泰威技术开发有限公司 压电体声波传感器无源式阵列及其生物芯片
US20050148065A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20090282902A1 (en) * 2006-08-17 2009-11-19 Peter Warthoe Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
KR20090070886A (ko) * 2007-12-27 2009-07-01 삼성전자주식회사 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법
FR2943787B1 (fr) * 2009-03-26 2012-10-12 Commissariat Energie Atomique Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre
TW201411810A (zh) * 2012-07-16 2014-03-16 西拉納半導體私人有限公司 薄膜型塊體聲波共振器之cmos製作
CN105431734B (zh) 2013-03-15 2018-10-02 快速诊断技术公司 信号增强的薄膜体声波谐振器
WO2016044132A1 (en) * 2014-09-15 2016-03-24 Rapid Diagnostek, Inc. Mass detection through redox coupling

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
US5932953A (en) * 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
CN103403538A (zh) * 2010-10-20 2013-11-20 快速诊断技术公司 利用共振传感器测量结合动力的装置和方法

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WO2016044055A1 (en) 2016-03-24
JP6694434B2 (ja) 2020-05-13
ES2863602T3 (es) 2021-10-11
EP3194961B1 (en) 2021-01-06
EP3194961A4 (en) 2018-03-28
EP3194961A1 (en) 2017-07-26
PL3194961T3 (pl) 2021-08-02
WO2016044055A8 (en) 2016-05-26
CN107250794A (zh) 2017-10-13
DK3194961T3 (da) 2021-03-29
JP2017527831A (ja) 2017-09-21

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