DK3194961T3 - Akustisk tyndfilmsvolumenresonator med signalforstærkning - Google Patents

Akustisk tyndfilmsvolumenresonator med signalforstærkning Download PDF

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Publication number
DK3194961T3
DK3194961T3 DK15842191.7T DK15842191T DK3194961T3 DK 3194961 T3 DK3194961 T3 DK 3194961T3 DK 15842191 T DK15842191 T DK 15842191T DK 3194961 T3 DK3194961 T3 DK 3194961T3
Authority
DK
Denmark
Prior art keywords
thin film
signal amplification
film volume
volume resonator
acoustic thin
Prior art date
Application number
DK15842191.7T
Other languages
Danish (da)
English (en)
Inventor
Ian Robert Harmon
Michael Salvati
Original Assignee
Qorvo Us Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo Us Inc filed Critical Qorvo Us Inc
Application granted granted Critical
Publication of DK3194961T3 publication Critical patent/DK3194961T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details

Landscapes

  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Cell Biology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Microbiology (AREA)
  • Biotechnology (AREA)
  • Acoustics & Sound (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DK15842191.7T 2014-09-15 2015-09-10 Akustisk tyndfilmsvolumenresonator med signalforstærkning DK3194961T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462050589P 2014-09-15 2014-09-15
PCT/US2015/049387 WO2016044055A1 (en) 2014-09-15 2015-09-10 Thin film bulk acoustic resonator with signal enhancement

Publications (1)

Publication Number Publication Date
DK3194961T3 true DK3194961T3 (da) 2021-03-29

Family

ID=55533700

Family Applications (1)

Application Number Title Priority Date Filing Date
DK15842191.7T DK3194961T3 (da) 2014-09-15 2015-09-10 Akustisk tyndfilmsvolumenresonator med signalforstærkning

Country Status (7)

Country Link
EP (1) EP3194961B1 (enExample)
JP (1) JP6694434B2 (enExample)
CN (1) CN107250794B (enExample)
DK (1) DK3194961T3 (enExample)
ES (1) ES2863602T3 (enExample)
PL (1) PL3194961T3 (enExample)
WO (1) WO2016044055A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
PL2999959T3 (pl) 2013-05-23 2022-01-10 Qorvo Us, Inc. Dwuczęściowy zespół płynowy
EP3000133B1 (en) 2013-05-23 2021-01-20 Qorvo US, Inc. Piezoelectric sensor
WO2020010293A1 (en) * 2018-07-06 2020-01-09 Qorvo Us, Inc. Bulk acoustic wave resonator with increased dynamic range
JP7590715B2 (ja) * 2019-12-06 2024-11-27 国立大学法人九州大学 両親媒性物質を含むセンサの洗浄液

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
US5932953A (en) 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
JP4215717B2 (ja) 2002-07-19 2009-01-28 シーメンス アクチエンゲゼルシヤフト 物質を検出する装置および物質を検出する方法
CN100495008C (zh) * 2003-06-18 2009-06-03 中山市泰威技术开发有限公司 压电体声波传感器无源式阵列及其生物芯片
US20050148065A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20090282902A1 (en) * 2006-08-17 2009-11-19 Peter Warthoe Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
KR20090070886A (ko) * 2007-12-27 2009-07-01 삼성전자주식회사 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법
FR2943787B1 (fr) * 2009-03-26 2012-10-12 Commissariat Energie Atomique Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre
CN103403538B (zh) * 2010-10-20 2016-06-01 快速诊断技术公司 利用共振传感器测量结合动力的装置和方法
TW201411810A (zh) * 2012-07-16 2014-03-16 西拉納半導體私人有限公司 薄膜型塊體聲波共振器之ｃｍｏｓ製作
CN105431734B (zh) 2013-03-15 2018-10-02 快速诊断技术公司 信号增强的薄膜体声波谐振器
WO2016044132A1 (en) * 2014-09-15 2016-03-24 Rapid Diagnostek, Inc. Mass detection through redox coupling

Also Published As

Publication number Publication date
WO2016044055A1 (en) 2016-03-24
JP6694434B2 (ja) 2020-05-13
ES2863602T3 (es) 2021-10-11
EP3194961B1 (en) 2021-01-06
EP3194961A4 (en) 2018-03-28
EP3194961A1 (en) 2017-07-26
PL3194961T3 (pl) 2021-08-02
WO2016044055A8 (en) 2016-05-26
CN107250794A (zh) 2017-10-13
CN107250794B (zh) 2020-09-15
JP2017527831A (ja) 2017-09-21

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