JP6694434B2 - 信号増幅を備えた圧電薄膜共振器 - Google Patents

信号増幅を備えた圧電薄膜共振器 Download PDF

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JP6694434B2
JP6694434B2 JP2017533712A JP2017533712A JP6694434B2 JP 6694434 B2 JP6694434 B2 JP 6694434B2 JP 2017533712 A JP2017533712 A JP 2017533712A JP 2017533712 A JP2017533712 A JP 2017533712A JP 6694434 B2 JP6694434 B2 JP 6694434B2
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JP2017527831A5 (enExample
JP2017527831A (ja
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サルバティ マイケル
サルバティ マイケル
ロバート ハーモン イアン
ロバート ハーモン イアン
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コーボ ユーエス,インコーポレイティド
コーボ ユーエス,インコーポレイティド
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details

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  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Cell Biology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Microbiology (AREA)
  • Biotechnology (AREA)
  • Acoustics & Sound (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2017533712A 2014-09-15 2015-09-10 信号増幅を備えた圧電薄膜共振器 Active JP6694434B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462050589P 2014-09-15 2014-09-15
US62/050,589 2014-09-15
PCT/US2015/049387 WO2016044055A1 (en) 2014-09-15 2015-09-10 Thin film bulk acoustic resonator with signal enhancement

Publications (3)

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JP2017527831A JP2017527831A (ja) 2017-09-21
JP2017527831A5 JP2017527831A5 (enExample) 2017-11-09
JP6694434B2 true JP6694434B2 (ja) 2020-05-13

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JP2017533712A Active JP6694434B2 (ja) 2014-09-15 2015-09-10 信号増幅を備えた圧電薄膜共振器

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EP (1) EP3194961B1 (enExample)
JP (1) JP6694434B2 (enExample)
CN (1) CN107250794B (enExample)
DK (1) DK3194961T3 (enExample)
ES (1) ES2863602T3 (enExample)
PL (1) PL3194961T3 (enExample)
WO (1) WO2016044055A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
PL2999959T3 (pl) 2013-05-23 2022-01-10 Qorvo Us, Inc. Dwuczęściowy zespół płynowy
EP3000133B1 (en) 2013-05-23 2021-01-20 Qorvo US, Inc. Piezoelectric sensor
WO2020010293A1 (en) * 2018-07-06 2020-01-09 Qorvo Us, Inc. Bulk acoustic wave resonator with increased dynamic range
JP7590715B2 (ja) * 2019-12-06 2024-11-27 国立大学法人九州大学 両親媒性物質を含むセンサの洗浄液

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
US5932953A (en) 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
JP4215717B2 (ja) 2002-07-19 2009-01-28 シーメンス アクチエンゲゼルシヤフト 物質を検出する装置および物質を検出する方法
CN100495008C (zh) * 2003-06-18 2009-06-03 中山市泰威技术开发有限公司 压电体声波传感器无源式阵列及其生物芯片
US20050148065A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20090282902A1 (en) * 2006-08-17 2009-11-19 Peter Warthoe Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
KR20090070886A (ko) * 2007-12-27 2009-07-01 삼성전자주식회사 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법
FR2943787B1 (fr) * 2009-03-26 2012-10-12 Commissariat Energie Atomique Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre
CN103403538B (zh) * 2010-10-20 2016-06-01 快速诊断技术公司 利用共振传感器测量结合动力的装置和方法
TW201411810A (zh) * 2012-07-16 2014-03-16 西拉納半導體私人有限公司 薄膜型塊體聲波共振器之cmos製作
CN105431734B (zh) 2013-03-15 2018-10-02 快速诊断技术公司 信号增强的薄膜体声波谐振器
WO2016044132A1 (en) * 2014-09-15 2016-03-24 Rapid Diagnostek, Inc. Mass detection through redox coupling

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Publication number Publication date
WO2016044055A1 (en) 2016-03-24
ES2863602T3 (es) 2021-10-11
EP3194961B1 (en) 2021-01-06
EP3194961A4 (en) 2018-03-28
EP3194961A1 (en) 2017-07-26
PL3194961T3 (pl) 2021-08-02
WO2016044055A8 (en) 2016-05-26
CN107250794A (zh) 2017-10-13
CN107250794B (zh) 2020-09-15
DK3194961T3 (da) 2021-03-29
JP2017527831A (ja) 2017-09-21

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