CN107249873B - 阻气性膜 - Google Patents

阻气性膜 Download PDF

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Publication number
CN107249873B
CN107249873B CN201680011616.6A CN201680011616A CN107249873B CN 107249873 B CN107249873 B CN 107249873B CN 201680011616 A CN201680011616 A CN 201680011616A CN 107249873 B CN107249873 B CN 107249873B
Authority
CN
China
Prior art keywords
layer
gas barrier
silicon
barrier film
atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201680011616.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN107249873A (zh
Inventor
竹村千代子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Opto Inc
Original Assignee
Konica Minolta Opto Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Opto Inc filed Critical Konica Minolta Opto Inc
Publication of CN107249873A publication Critical patent/CN107249873A/zh
Application granted granted Critical
Publication of CN107249873B publication Critical patent/CN107249873B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/02Details
    • H05B33/04Sealing arrangements, e.g. against humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)
CN201680011616.6A 2015-02-25 2016-02-24 阻气性膜 Expired - Fee Related CN107249873B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015035040 2015-02-25
JP2015-035040 2015-02-25
PCT/JP2016/055527 WO2016136842A1 (fr) 2015-02-25 2016-02-24 Film barrière contre les gaz

Publications (2)

Publication Number Publication Date
CN107249873A CN107249873A (zh) 2017-10-13
CN107249873B true CN107249873B (zh) 2019-05-21

Family

ID=56789620

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680011616.6A Expired - Fee Related CN107249873B (zh) 2015-02-25 2016-02-24 阻气性膜

Country Status (3)

Country Link
JP (1) JPWO2016136842A1 (fr)
CN (1) CN107249873B (fr)
WO (1) WO2016136842A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019010736A (ja) * 2015-11-24 2019-01-24 コニカミノルタ株式会社 ガスバリアー性フィルム及びこれを備えた電子デバイス
JP2019010730A (ja) * 2015-11-24 2019-01-24 コニカミノルタ株式会社 ガスバリアー性フィルム及び電子デバイス
CN109477202A (zh) * 2016-07-28 2019-03-15 柯尼卡美能达株式会社 气体阻隔性膜、使用它的气体阻隔性膜材和使用它们的电子设备、以及气体阻隔性膜的制造方法
TW201823501A (zh) 2016-11-16 2018-07-01 美商陶氏全球科技有限責任公司 用於製造膜上之薄塗層之方法
JP2019177645A (ja) * 2018-03-30 2019-10-17 東洋製罐グループホールディングス株式会社 電子デバイス用バリアフィルム
KR102294027B1 (ko) * 2018-10-26 2021-08-27 주식회사 엘지화학 배리어 필름
KR102294031B1 (ko) * 2018-10-26 2021-08-27 주식회사 엘지화학 배리어 필름
CN111871152B (zh) * 2020-07-30 2021-10-08 浙江大学 一种功能化离子液体及其制备方法和应用

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4930140B2 (ja) * 2006-07-26 2012-05-16 住友ベークライト株式会社 透明積層体
JP5394867B2 (ja) * 2009-09-17 2014-01-22 富士フイルム株式会社 ガスバリア膜およびガスバリアフィルム
WO2014097997A1 (fr) * 2012-12-19 2014-06-26 コニカミノルタ株式会社 Dispositif électronique
JP5929775B2 (ja) * 2013-02-08 2016-06-08 コニカミノルタ株式会社 ガスバリア性フィルムおよびその製造方法、ならびに前記ガスバリア性フィルムを含む電子デバイス
JP2014201033A (ja) * 2013-04-08 2014-10-27 コニカミノルタ株式会社 ガスバリア性フィルムおよびその製造方法
JP2014201032A (ja) * 2013-04-08 2014-10-27 コニカミノルタ株式会社 ガスバリア性フィルムおよびその製造方法
JP2015003464A (ja) * 2013-06-21 2015-01-08 コニカミノルタ株式会社 ガスバリア性フィルム、その製造方法、およびこれを用いた電子デバイス

Also Published As

Publication number Publication date
CN107249873A (zh) 2017-10-13
JPWO2016136842A1 (ja) 2017-12-14
WO2016136842A1 (fr) 2016-09-01

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Granted publication date: 20190521

Termination date: 20210224