CN107102253A - Test equipment and its to electric tool - Google Patents
Test equipment and its to electric tool Download PDFInfo
- Publication number
- CN107102253A CN107102253A CN201710325163.0A CN201710325163A CN107102253A CN 107102253 A CN107102253 A CN 107102253A CN 201710325163 A CN201710325163 A CN 201710325163A CN 107102253 A CN107102253 A CN 107102253A
- Authority
- CN
- China
- Prior art keywords
- probe
- electric tool
- probe base
- multiple elastic
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The embodiments of the invention provide one kind to electric tool, high current is injected when not being electrically isolated naked BAR tests for noise spectra of semiconductor lasers, include probe clamp and multiple elastic probes to electric tool, probe clamp grips multiple elastic probes, and needle point one end of multiple elastic probes is in same plane.The embodiment of the present invention further relates to a kind of test equipment.The elastic probe needle point to electric tool of the embodiment of the present invention is in same plane, by test equipment, is contacted well with not being electrically isolated naked BAR, is conducive to not being electrically isolated naked BAR tests.
Description
Technical field
The present invention relates to semiconductor laser chip technical field of measurement and test, more particularly to a kind of test equipment and its to electricity
Tool.
Background technology
With semiconductor laser (LD, Laser Diode) application field such as LD light-pumped solid state lasers (DPL, Diode-
Pumped Solid-State Laser), the pumping source of all kinds of optical fiber lasers, laser cutting, welding, medical treatment and laser it is military
Using etc. increasingly widen, noise spectra of semiconductor lasers power output, reliability requirement it is also increasing.Semiconductor laser core
Piece is semiconductor laser core, the title with semiconductor laser " CPU ".
Full bar are a kind of high power semiconductor lasers chips not being electrically isolated, and the high-power half not being electrically isolated is led
The naked BAR of body laser performance parameter (such as LIV characteristics, spectral characteristic) is tested and sign is profound understanding laser core
Piece characteristic, the design of optimization chip structure and the key for improving chip production process, while being also to judge chip of laser quality
Important evidence.Though therefore the high power semiconductor lasers chip that is not electrically isolated is carried out non-destructive testing for R＆D institution,
Production firm, using client all have particularly important meaning.
BAR naked to the high power semiconductor lasers that are not electrically isolated carries out non-destructive testing, need to ensure when test is to electricity to
Electric tool and naked BAR give electric tool to need stabilization, be uniformly injected into larger electric current with the reliable contacts of certain pressure, therefore right
It is required during naked BAR test to propose higher requirement to electric tool.
Referring to Fig. 1, Fig. 1 is principle schematic in the prior art to electric tool.It is existing be not electrically isolated it is high-power
The naked BAR10 tests of semiconductor laser are used as to electric tool frequently with shell fragment sheet metal 20, and the defect being primarily present is：Though it
Can be with certain elastic and naked BAR10 reliable contacts, but be difficult to overall fit with naked BAR10 to electric tool and contact, it is more difficult to ensure
Electric current is uniformly injected on naked BAR10.
The content of the invention
The present invention provides one kind to electric tool, can solve the problem that being difficult to laminating with naked BAR to electric tool in the prior art contacts
Technical problem.
In order to solve the above technical problems, one aspect of the present invention is：There is provided a kind of to electric tool, for pair
Semiconductor laser injects high current when not being electrically isolated naked BAR tests, includes probe clamp and multiple elastic probes to electric tool,
Probe clamp grips multiple elastic probes, and needle point one end of multiple elastic probes is in same plane.
Wherein, probe clamp includes probe base and probe fixture, and probe base is provided with accommodation space, and multiple elastic probes are set
In in accommodation space, probe fixture is used to fix multiple elastic probes.
Wherein, probe base includes probe base body and the lug extended from probe base body side, and accommodation space is formed at
The middle part of probe base body, lug is used to pre-fix exports electric wire to power supply.
Wherein, the first groove, the width of the first groove penetration probe seat body are formed with the middle part of probe base body
Set, provided with accommodating block in the first groove, accommodation space is formed at accommodating block, and accommodation space is the second groove.
Wherein, the top surface that block top surface is less than probe base body is housed, the width for housing block is less than the width of probe base body,
The space of accommodating block is closed in first groove to be used to place solder.
Wherein, probe fixture includes fixed plate and the boss extended from fixed plate bottom surface, and boss and the first groove coordinate
Connection is fixedly connected with fixed multiple elastic probes, probe base with fixed plate by screw.
Wherein, multiple elastic probes are overlapped in multirow.
Wherein, multiple elastic probes are set in two rows, and often row has 25 elastic probes, and the external diameter of each elastic probe is
0.35mm, probe base and probe fixture are processed using red copper and are carried out nickel plating surface processing.
Wherein, multiple elastic probes cause needle point one end of multiple elastic probes is in same flat by plane making fixture
Face, plane, which makes fixture, to be included being formed with the 3rd groove that section is in w types in jig main body, jig main body, and the 3rd groove includes
Probe base bottom surface placed side, probe base side placed side, probe interface and the probe bearing surface being sequentially connected, probe base lead to
Probe base bottom surface placed side and the positioning of probe base side placed side are crossed, multiple elastic probes are arranged on probe base, and needle point
One end is extended to above probe interface, until being connected to probe bearing surface.
It is provided in an embodiment of the present invention to give electric tool by setting needle point to be in conplane multiple elastic probes, it is ensured that
Contacted well to electric tool with not being electrically isolated naked BAR, be conducive to not being electrically isolated naked BAR tests.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, makes required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing, wherein：
Fig. 1 is principle schematic in the prior art to electric tool；
Fig. 2 is dimensional structure diagram of the present invention to electric tool；
Fig. 3 is the configuration schematic diagram to electric tool shown in Fig. 2；
Fig. 4 is the assembling structure schematic diagram for making fixture with plane to electric tool shown in Fig. 2.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 2 and Fig. 3 are referred to, Fig. 2 is dimensional structure diagram of the present invention to electric tool, and Fig. 3 is to electricity shown in Fig. 2
The configuration schematic diagram of tool.In the present embodiment, naked BAR tests are not electrically isolated for noise spectra of semiconductor lasers to electric tool
When inject high current, wherein, naked BAR refers to the unencapsulated BAR bars not being electrically isolated, includes probe clamp and multiple to electric tool
Elastic probe 101, probe clamp grips multiple elastic probes 101, and needle point one end of multiple elastic probes 101 is in same
Plane.Due to the shell fragment sheet metal of prior art is replaced as into multiple elastic probes 101, and the needle point of multiple elastic probes 101
One end makes it possible to the naked BAR that fits well in same plane, so as to ensure that electric current is uniformly injected into.In the present embodiment, visit
Pin fixture includes probe base 201 and probe fixture 301.
Probe base 201 is provided with accommodation space, and multiple elastic probes 101 are in accommodation space.Specifically, probe base
201 include probe base body 202 and the lug 203 extended from the side of probe base body 202, and accommodation space is formed at probe base sheet
The middle part of body 202, lug 203 is used to pre-fix exports electric wire to power supply, it is preferable that probe base body 202 and lug 203 1
It is body formed.Further, the middle part of probe base body 202 is formed with the first groove 204, and the penetration probe of the first groove 204 seat is originally
The width of body 202 is set, provided with accommodating block 205 in the first groove 204, and accommodation space is formed at accommodating block 205, houses sky
Between be the second groove 206.Wherein, the top surface that the top surface of block 205 is less than probe base body 202 is housed, the width of accommodating block 205 is less than
The space of accommodating block 205 is closed in the width of probe base body 202, the first groove 204 to be used to place solder.Wherein, sky is housed
Between can also be formed at the positions such as the sidepiece of probe base body 202.House the top surface that the top surface of block 205 also can be with probe base body 202
Concordantly, the height for housing block 205 is determined by the height of elastic probe 101.It is noted that the two of probe base body 202
End further respectively has mounting hole 207, for that will give electric tool integral installation to test equipment.
Probe fixture 301 includes fixed plate 302 and the boss 303 extended from the bottom surface of fixed plate 302, boss 303 and the
One groove 204 is connected, and probe base 201 is fixedly connected with fixed plate 302 by screw 40, and probe base body 202 closes on
The both sides of one groove 204 are respectively equipped with two screws, and the corresponding position of fixed plate 302 is also respectively equipped with two screws, the He of probe base 201
Fixed plate 302 is fixedly connected by 4 screws 40.In the present embodiment, boss 303 is preferably that transition is matched somebody with somebody with the first groove 204
Close or gap coordinates, as long as the needle point of elastic probe 101 can be remained fixed at into same plane, to boss 303 and the
The fit system of one groove 204 is not construed as limiting.In other embodiments, also can be without boss 303.Wherein, fixed plate 302 and boss
303 are preferably formed in one.
Multiple elastic probes 101 are overlapped in multirow.Preferably, in the present embodiment, multiple elastic probes 101 are in two rows
Set, often row has 25 elastic probes 101, and the external diameter of each elastic probe 101 is 0.35mm, often capable elastic probe 101
It is closely coupled.Certainly, in other embodiments, the elastic probe such as 3 rows or 4 rows 101 is may also set up, or other external diameters are set
Elastic probe 101, the present invention is not construed as limiting to the line number and external diameter of elastic probe 101.
Wherein, probe base 201 and probe fixture 301 are preferred to use red copper and process and carry out at nickel plating surface
Reason, enables to probe base 201 and probe fixture 301 to be easy to welding by this way.
Wherein, split type probe clamp, i.e. probe clamp are used in the present embodiment including probe base 201 and are visited
Pin fixture 301, can also use integrated probe fixture, this is not limited by the present invention in other embodiments.
Referring to Fig. 4, Fig. 4 is the assembling structure schematic diagram for making fixture 50 with plane to electric tool shown in Fig. 2.More than
The needle point one end that refer to multiple elastic probes 101 is in same plane, in the present embodiment, and making fixture 50 by plane makes
The needle point one end for obtaining multiple elastic probes 101 is in same plane, and plane, which makes fixture 50, includes jig main body 506, fixture master
The 3rd groove 501 that section is in w types is formed with body 506, the bottom surface of probe base 201 that the 3rd groove 501 includes being sequentially connected is put
Face 502, the side placed side 503 of probe base 201, probe interface 504 and probe bearing surface 505 are put, probe base 201 is by visiting
The bottom surface placed side 502 of needle stand 201 and the side placed side 503 of probe base 201 are positioned, and multiple elastic probes 101 are arranged at probe base
On 201, and needle point one end extends to the top of probe interface 504, until being connected to probe bearing surface 505.Wherein, at other
Also directly it can cause needle point one end of multiple elastic probes 101 is in same flat using the fixture of a square in embodiment
The horizontal plane of fixture is fixed in face, such as probe base 201, and needle point one end of elastic probe 101 abuts vertical plane so as to obtain multiple
Needle point one end of elastic probe 101 is in same plane.
The structure to electric tool is described above, the assembling process of electric tool is introduced in citing below to：
1. being fixed on plane to electric tool to make on fixture 50,50 external diameter 0.35mm elastic probes 101 one by one put by array
On being placed in the accommodation space of probe base body 202, the array format of elastic probe 101 is 2x25；
2. probe fixture 301 is fixed on probe base body 202 by 4 M2 screws；
3. the space that accommodating block 205 is closed in solder to the first groove 204 is added, by the array of elastic probe 101, probe base
201 and probe fixture 301 connect integral；
Removed 4. finally locking probe fixture 301 and being made from plane on fixture 50 to electric tool.
The present invention also provides a kind of test equipment, and the test equipment gives electricity tool, test equipment including above example
It is capable of the characteristics such as the naked BAR of integration testing luminous power, electric and wavelength, swashs to develop and producing high performance high power semi-conductor
Light device provides strong ensure.
It is provided in an embodiment of the present invention to give electric tool by setting needle point to be in conplane multiple elastic probes, it is ensured that
Contacted well to electric tool with not being electrically isolated naked BAR, be conducive to not being electrically isolated naked BAR tests.Further, nothing can be carried out
Damage, be up to 200A test with carrying pulse current.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair
Equivalent structure or equivalent flow conversion that bright specification and accompanying drawing content are made, or directly or indirectly it is used in other related skills
Art field, is included within the scope of the present invention.
Claims (10)
1. one kind is to electric tool, high current is injected when not being electrically isolated naked BAR tests for noise spectra of semiconductor lasers, its feature exists
In described to include probe clamp and multiple elastic probes to electric tool, the probe clamp grips the multiple elasticity and visited
Pin, needle point one end of the multiple elastic probe is in same plane.
2. it is according to claim 1 to electric tool, it is characterised in that the probe clamp includes probe base and probe is fixed
Part, the probe base is provided with accommodation space, and the multiple elastic probe is in the accommodation space, and the probe fixture is used
In fixed the multiple elastic probe.
3. according to claim 2 to electric tool, it is characterised in that the probe base includes probe base body and from described
The lug of probe base body side extension, the accommodation space is formed at the middle part of the probe base body, and the lug is used for
Pre-fix and export electric wire to power supply.
4. it is according to claim 3 to electric tool, it is characterised in that to be formed with first in the middle part of the probe base body recessed
Groove, first groove is set through the width of the probe base body, and accommodation space, institute are provided with first groove
State accommodation space and be formed at the accommodating block, the accommodation space is the second groove.
5. it is according to claim 4 to electric tool, it is characterised in that the accommodating block top surface is less than the probe base body
Top surface, the width of the accommodating block, which is less than in the width of the probe base body, first groove, closes on the accommodating block
Space be used for place solder.
6. according to claim 5 to electric tool, it is characterised in that the probe fixture includes fixed plate and from described
The boss of fixed plate bottom surface extension, the boss is connected with fixed the multiple elastic probe, institute with first groove
Probe base is stated to be fixedly connected by screw with the fixed plate.
7. it is according to claim 2 to electric tool, it is characterised in that the multiple elastic probe is overlapped in multirow.
8. it is according to claim 7 to electric tool, it is characterised in that the multiple elastic probe is set in two rows, is often gone
With 25 elastic probes, the external diameter of each elastic probe is 0.35mm, and the probe base and the probe fixture are equal
Processed using red copper and carry out nickel plating surface processing.
9. it is according to claim 2 to electric tool, it is characterised in that the multiple elastic probe makes fixture by plane
So that needle point one end of the multiple elastic probe is in same plane, the plane, which makes fixture, includes jig main body, described
The 3rd groove that section is in w types is formed with jig main body, the probe base bottom surface that the 3rd groove includes being sequentially connected is placed
Face, probe base side placed side, probe interface and probe bearing surface, the probe base are placed by the probe base bottom surface
Face and the positioning of probe base side placed side, the multiple elastic probe is arranged on the probe base, and needle point one end
Extend to above probe interface, until being connected to the probe bearing surface.
10. a kind of test equipment, it is characterised in that the test equipment as described in claim any one of 1-9 including giving electricity
Tool.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710325163.0A CN107102253B (en) | 2017-05-10 | 2017-05-10 | Test equipment and power supply jig thereof |
| PCT/CN2018/086234 WO2018205960A1 (en) | 2017-05-10 | 2018-05-10 | Test device and power supply fixture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710325163.0A CN107102253B (en) | 2017-05-10 | 2017-05-10 | Test equipment and power supply jig thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107102253A true CN107102253A (en) | 2017-08-29 |
| CN107102253B CN107102253B (en) | 2020-05-08 |
Family
ID=59669725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710325163.0A Active CN107102253B (en) | 2017-05-10 | 2017-05-10 | Test equipment and power supply jig thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107102253B (en) |
| WO (1) | WO2018205960A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018205960A1 (en) * | 2017-05-10 | 2018-11-15 | 深圳瑞波光电子有限公司 | Test device and power supply fixture thereof |
| CN110017971A (en) * | 2019-05-21 | 2019-07-16 | 深圳市杰普特光电股份有限公司 | Laser bar photoelectric detection system |
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| US20140002123A1 (en) * | 2011-03-14 | 2014-01-02 | Chae-Yoon Lee | Inspection apparatus for semiconductor device |
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| CN206930747U (en) * | 2017-05-10 | 2018-01-26 | 深圳瑞波光电子有限公司 | Test equipment and its to electric tool |
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| JP2003185701A (en) * | 2001-12-20 | 2003-07-03 | Nec Kansai Ltd | Device and method for measuring electrical characteristics of semiconductor chip |
| CN204287405U (en) * | 2014-10-17 | 2015-04-22 | 深圳瑞波光电子有限公司 | The proving installation of semiconductor laser chip assembly |
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| CN107102253B (en) * | 2017-05-10 | 2020-05-08 | 深圳瑞波光电子有限公司 | Test equipment and power supply jig thereof |
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2017
- 2017-05-10 CN CN201710325163.0A patent/CN107102253B/en active Active
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2018
- 2018-05-10 WO PCT/CN2018/086234 patent/WO2018205960A1/en active Application Filing
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|---|---|---|---|---|
| CN101256216A (en) * | 2007-02-28 | 2008-09-03 | 新科实业有限公司 | Jig for checking characteristic of semiconductor element, characteristic checking device and method |
| US20140002123A1 (en) * | 2011-03-14 | 2014-01-02 | Chae-Yoon Lee | Inspection apparatus for semiconductor device |
| CN104638510A (en) * | 2013-11-14 | 2015-05-20 | 山东浪潮华光光电子股份有限公司 | Device and method for testing and aging small stack cell of semiconductor laser |
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| CN205720553U (en) * | 2016-04-07 | 2016-11-23 | 深圳清华大学研究院 | Multistation chip of laser assembly loading platform |
| CN205720305U (en) * | 2016-04-14 | 2016-11-23 | 深圳清华大学研究院 | The test device of semiconductor laser chip assembly |
| CN106597263A (en) * | 2017-01-20 | 2017-04-26 | 深圳清华大学研究院 | Test system of semiconductor laser chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018205960A1 (en) * | 2017-05-10 | 2018-11-15 | 深圳瑞波光电子有限公司 | Test device and power supply fixture thereof |
| CN110017971A (en) * | 2019-05-21 | 2019-07-16 | 深圳市杰普特光电股份有限公司 | Laser bar photoelectric detection system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107102253B (en) | 2020-05-08 |
| WO2018205960A1 (en) | 2018-11-15 |
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