CN106971969A - 石英晶片去污装置和石英晶片去污方法 - Google Patents

石英晶片去污装置和石英晶片去污方法 Download PDF

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CN106971969A
CN106971969A CN201710327764.5A CN201710327764A CN106971969A CN 106971969 A CN106971969 A CN 106971969A CN 201710327764 A CN201710327764 A CN 201710327764A CN 106971969 A CN106971969 A CN 106971969A
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申红卫
李健
翟艳飞
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JIYUAN SHIJING OPTOELECTRONIC FREQUENCY TECHNOLOGY Co Ltd
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    • H01ELECTRIC ELEMENTS
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    • B08CLEANING
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
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    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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    • H01ELECTRIC ELEMENTS
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Abstract

本发明提供一种石英晶片去污方法,其步骤包括:将相同频率的石英晶片置于清洗筐中进行酸洗浸泡处理,得到酸洗石英晶片;采用热水对所述清洗筐连同置于其中的所述酸洗石英晶片进行淋洗处理,得到淋洗石英晶片;最后依次对所述淋洗石英晶片进行超声清洗、脱水干燥处理,得到洁净的石英晶片。该方法能有效消除石英晶片经腐蚀加工后产生的污染现象,避免了因石英晶片污染导致的激励功率依赖性偏高的现象。本发明还提供一种石英晶片去污装置,该装置方便了从酸洗液中取出石英晶片和后续对石英晶片进行热水淋洗和超声波清洗,减少了去污清洗过程中石英晶片的二次污染,且该装置还具有结构简单,使用方便快捷等优点。

Description

石英晶片去污装置和石英晶片去污方法
技术领域
本发明涉及石英晶片加工技术领域,具体的说,涉及了一种石英晶片去污装置和石英晶片去污方法。
背景技术
石英晶片是电子元器件中最为重要的元件,石英晶片在生产流程中需要经过多道处理工序,而制取的石英晶片在加工过程中有一项参数指标非常重要,即激励功率依赖性,具体是指谐振器在不同激励功率下,晶片石英晶片的频率和电阻所表现的不同变化量,而谐振器产生激励功率依赖性的主要原因是晶片受到污染所致,而现有的石英晶片去污方法普遍存在清洁不充分现象。
为了解决以上存在的问题,人们一直在寻求一种理想的技术解决方案。
发明内容
本发明的目的是针对现有技术的不足,从而提供一种实用性强、操作简单、去污效果好的石英晶片去污装置和石英晶片去污方法。
为了实现上述目的,本发明所采用的技术方案是:一种石英晶片去污方法,其步骤包括:
石英晶片分装:提供一种清洗筐,将具有相同频率的石英晶片置于所述清洗筐中;
酸洗:首先采用水浴槽将酸洗液加热至40℃~100℃,然后将所述清洗筐连同置于其中的所述石英晶片一起浸入所述酸洗液中进行恒温酸洗浸泡处理,得到酸洗石英晶片;
热水淋洗:采用40℃~90℃的热水对所述清洗筐连同置于其中的所述酸洗石英晶片进行淋洗处理,得到淋洗石英晶片;
清洗干燥:将所述淋洗石英晶片从所述清洗筐中取出,然后依次对所述淋洗石英晶片进行超声清洗、脱水干燥处理,得到洁净的石英晶片。
本发明还提供一种石英晶片去污装置,它包括水浴槽、清洗容器和清洗筐,所述水浴槽上固定设置有容器固定孔,所述清洗容器可拆卸设置于所述容器固定孔内,所述清洗筐可拆卸设置于所述清洗容器中,所述清洗筐上开设有多个透液孔。
基于上述,所述清洗筐的高度小于所述清洗容器的高度。
基于上述,所述清洗容器的顶部上还设置有密封盖。
基于上述,所述清洗筐为桶状结构,所述清洗筐包括筐底和环绕所述筐底四周设置的筐壁,所述筐底和筐壁上分别设置有多个所述透液孔。
基于上述,位于所述清洗筐的筐底上的多个所述透液孔呈多个同心圆形式排布。
基于上述,位于所述清洗筐的筐壁上的多个所述透液孔以多个间隔设置的矩阵形式排布。
基于上述,所述清洗筐为聚四氟乙烯清洗筐。
基于上述,所述清洗容器为烧杯。
本发明相对现有技术具有突出的实质性特点和显著的进步,具体的说,本发明所提供的石英晶片去污方法中,首先采用内部设置清洗筐结构的石英晶片去污装置对经过腐蚀加工后的石英晶片进行酸洗,然后对酸洗后的石英晶片依次进行热水淋洗处理、超声清洗和脱水干燥处理,有效避免了石英晶片的二次污染,从而保证了石英晶片的洁净度,该方法能有效消除石英晶片经腐蚀加工后产生的污染现象,避免了因石英晶片污染导致的激励功率依赖性偏高的现象。本发明所提供的石英晶片去污装置,该装置方便了从酸洗液中取出石英晶片和后续对石英晶片进行热水淋洗和超声波清洗,实现了一个装置可对石英晶片进行多个工艺处理,减少了拿取石英晶片过程对石英晶片的污染,且该装置还具有结构简单,使用方便快捷等优点。
附图说明
图1是本发明提供的石英晶片去污装置处于聚四氟乙烯清洗筐未完全放入烧杯内部的装配状态结构示意图。
图2是本发明提供的石英晶片去污装置的水浴槽的结构示意图。
图3是本发明提供的石英晶片去污装置中聚四氟乙烯清洗筐的结构示意图。
图4是本发明提供的石英晶片去污装置中的烧杯结构示意图。
图5是本发明提供的石英晶片去污方法流程图。
图中:1、水浴槽; 12、烧杯固定孔;2、烧杯;21、密封盖; 3、聚四氟乙烯清洗筐;31、透液孔;32、筐壁;33、筐底。
具体实施方式
下面通过具体实施方式,对本发明的技术方案做进一步的详细描述。
实施例1
本实施例首先提供一种石英晶片去污装置,如图1和图2所示,它包括水浴槽1、十五个烧杯2和十五个聚四氟乙烯清洗筐3。所述水浴槽1上部设置十五个烧杯固定孔12,各所述烧杯2可拆卸设置在所述烧杯固定孔12内,各所述聚四氟乙烯清洗筐3可拆洗设置在所述烧杯2中,所述聚四氟乙烯清洗筐3上开设有透液孔31。其中,所述烧杯2中加入酸洗液。
具体地,如图3所示,所述聚四氟乙烯清洗筐3形状为桶状结构,包括筐底33和环绕所述筐底33四周设置的筐壁32,所述筐底33和筐壁32上分别设置有多个所述透液孔31。其中,位于所述清洗筐的筐底33上的多个所述透液孔31呈多个同心圆形式排布。位于所述清洗筐的筐壁32上的多个所述透液孔31以多个间隔设置的矩阵形式排布。
为了能将所述聚四氟乙烯清洗筐3完全置于所述烧杯2中,所述聚四氟乙烯清洗筐3的高度小于所述烧杯2的高度,所述聚四氟乙烯清洗筐3的内径小于所述烧杯2的内径。如图4所示,为了能对石英晶片进行密封酸洗,所述烧杯2顶部还设置有密封盖21。
本实施例还提供一种利用上述石英晶片去污装置进行石英晶片去污的方法,如图5所示,其步骤包括:
石英晶片分装:首先采用石英晶片频率自动分选机对石英晶片进行筛分处理,然后将筛分后的相同频率的石英晶片置于所述聚四氟乙烯清洗筐3中;
酸洗:将所述烧杯2置于所述烧杯固定孔12中,并向所述烧杯2中加入酸洗液并用所述烧杯密封盖21进行密封;并向所述水浴槽1中加入水,开启所述水浴槽1对酸洗液进行加热至80℃;然后把待清洗的石英晶片放入所述聚四氟乙烯清洗筐3中,然后将所述聚四氟乙烯清洗筐3连同置于其中的所述待清洗的石英晶片一起浸入所述酸洗液中进行恒温酸洗浸泡处理,得到酸洗石英晶片;
热水淋洗:将所述酸洗石英晶片连同所述聚四氟乙烯清洗筐3一起从所述酸洗液中取出,采用70℃的热水对所述聚四氟乙烯清洗筐3连同置于其中的所述酸洗石英晶片进行淋洗处理,得到淋洗石英晶片;
清洗干燥:将热水淋洗处理后的酸洗石英晶片从所述聚四氟乙烯清洗筐3中取出,然后依次对所述热水淋洗处理后的酸洗石英晶片进行超声清洗、脱水干燥处理,并经洁净度检测后进行封装处理,从而得到洁净石英晶片。
最后应当说明的是:以上实施例仅用以说明本发明的技术方案而非对其限制;尽管参照较佳实施例对本发明进行了详细的说明,所属领域的普通技术人员应当理解:依然可以对本发明的具体实施方式进行修改或者对部分技术特征进行等同替换;而不脱离本发明技术方案的精神,其均应涵盖在本发明请求保护的技术方案范围当中。

Claims (9)

1.一种石英晶片去污方法,其步骤包括:
石英晶片分装:提供一种清洗筐,将具有相同频率的石英晶片置于所述清洗筐中;
酸洗:首先采用水浴槽将酸洗液加热至40℃~100℃,然后将所述清洗筐连同置于其中的所述石英晶片一起浸入所述酸洗液中进行恒温酸洗浸泡处理,得到酸洗石英晶片;
热水淋洗:采用40℃~90℃的热水对所述清洗筐连同置于其中的所述酸洗石英晶片进行淋洗处理,得到淋洗石英晶片;
清洗干燥:将所述淋洗石英晶片从所述清洗筐中取出,然后依次对所述淋洗石英晶片进行超声清洗、脱水干燥处理,得到洁净的石英晶片。
2.一种石英晶片去污装置,其特征在于:它包括水浴槽、清洗容器和清洗筐,所述水浴槽上固定设置有容器固定孔,所述清洗容器可拆卸设置于所述容器固定孔内,所述清洗筐可拆卸设置于所述清洗容器中,所述清洗筐上开设有多个透液孔。
3.根据权利要求2所述的石英晶片去污装置,其特征在于:所述清洗筐的高度小于所述清洗容器的高度。
4.根据权利要求3所述的石英晶片去污装置,其特征在于:所述清洗容器的顶部上还设置有密封盖。
5.根据权利要求2~4任一项所述的石英晶片去污装置,其特征在于:所述清洗筐为桶状结构,所述清洗筐包括筐底和环绕所述筐底四周设置的筐壁,所述筐底上和筐壁上分别设置有多个所述透液孔。
6.根据权利要求5所述的石英晶片去污装置,其特征在于:位于所述清洗筐筐底上的多个所述透液孔呈多个同心圆形式排布。
7.根据权利要求6所述的石英晶片去污装置,其特征在于:位于所述清洗筐筐壁上的多个所述透液孔呈多个间隔设置的矩阵形式排布。
8.根据权利要求7所述的石英晶片去污装置,其特征在于:所述清洗筐为聚四氟乙烯清洗筐。
9.根据权利要求8所述的石英晶片去污装置,其特征在于:所述清洗容器为烧杯。
CN201710327764.5A 2017-05-11 2017-05-11 石英晶片去污装置和石英晶片去污方法 Pending CN106971969A (zh)

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN111420924A (zh) * 2020-04-08 2020-07-17 四川富乐德科技发展有限公司 一种电子信息行业石英材质部件表面附着物的处理方法
CN115213163A (zh) * 2022-06-07 2022-10-21 中环领先半导体材料有限公司 一种外延零部件清洗设备清洗石英备件的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1882714A (zh) * 2003-07-24 2006-12-20 晶粒精密清理仪器有限公司 硅酸盐材料的洁净工艺及其设备
CN101219429A (zh) * 2007-01-10 2008-07-16 北京北方微电子基地设备工艺研究中心有限责任公司 一种多晶刻蚀腔室中石英零件表面的清洗方法
CN101905222A (zh) * 2010-06-11 2010-12-08 中国科学院上海技术物理研究所 碲隔汞晶片溶剂溶液的自动化动态清洗装置及方法
CN103701423A (zh) * 2013-11-29 2014-04-02 铜陵日科电子有限责任公司 石英晶体频率片清洗工艺
CN205613769U (zh) * 2016-05-06 2016-10-05 紫光国芯股份有限公司 石英晶片硝酸清洗装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1882714A (zh) * 2003-07-24 2006-12-20 晶粒精密清理仪器有限公司 硅酸盐材料的洁净工艺及其设备
CN101219429A (zh) * 2007-01-10 2008-07-16 北京北方微电子基地设备工艺研究中心有限责任公司 一种多晶刻蚀腔室中石英零件表面的清洗方法
CN101905222A (zh) * 2010-06-11 2010-12-08 中国科学院上海技术物理研究所 碲隔汞晶片溶剂溶液的自动化动态清洗装置及方法
CN103701423A (zh) * 2013-11-29 2014-04-02 铜陵日科电子有限责任公司 石英晶体频率片清洗工艺
CN205613769U (zh) * 2016-05-06 2016-10-05 紫光国芯股份有限公司 石英晶片硝酸清洗装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111420924A (zh) * 2020-04-08 2020-07-17 四川富乐德科技发展有限公司 一种电子信息行业石英材质部件表面附着物的处理方法
CN115213163A (zh) * 2022-06-07 2022-10-21 中环领先半导体材料有限公司 一种外延零部件清洗设备清洗石英备件的方法

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